JPH04161208A - Filter for high temperature gas - Google Patents
Filter for high temperature gasInfo
- Publication number
- JPH04161208A JPH04161208A JP28663590A JP28663590A JPH04161208A JP H04161208 A JPH04161208 A JP H04161208A JP 28663590 A JP28663590 A JP 28663590A JP 28663590 A JP28663590 A JP 28663590A JP H04161208 A JPH04161208 A JP H04161208A
- Authority
- JP
- Japan
- Prior art keywords
- electret
- filter
- porous film
- particles
- charge density
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000835 fiber Substances 0.000 claims abstract description 20
- 238000010030 laminating Methods 0.000 claims abstract 2
- 239000002245 particle Substances 0.000 abstract description 44
- -1 polytetrafluoroethylene Polymers 0.000 abstract description 14
- 239000004744 fabric Substances 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 6
- 239000000463 material Substances 0.000 abstract description 5
- 229920001343 polytetrafluoroethylene Polymers 0.000 abstract description 5
- 239000004810 polytetrafluoroethylene Substances 0.000 abstract description 5
- 238000010410 dusting Methods 0.000 abstract description 4
- 239000002033 PVDF binder Substances 0.000 abstract description 3
- 239000004743 Polypropylene Substances 0.000 abstract description 3
- 239000004745 nonwoven fabric Substances 0.000 abstract description 3
- 229920000515 polycarbonate Polymers 0.000 abstract description 3
- 239000004417 polycarbonate Substances 0.000 abstract description 3
- 229920000139 polyethylene terephthalate Polymers 0.000 abstract description 3
- 239000005020 polyethylene terephthalate Substances 0.000 abstract description 3
- 229920001155 polypropylene Polymers 0.000 abstract description 3
- 229920002981 polyvinylidene fluoride Polymers 0.000 abstract description 3
- YHQXBTXEYZIYOV-UHFFFAOYSA-N 3-methylbut-1-ene Chemical compound CC(C)C=C YHQXBTXEYZIYOV-UHFFFAOYSA-N 0.000 abstract description 2
- 239000004751 flashspun nonwoven Substances 0.000 abstract description 2
- 239000010408 film Substances 0.000 abstract 4
- WSSSPWUEQFSQQG-UHFFFAOYSA-N 4-methyl-1-pentene Chemical compound CC(C)CC=C WSSSPWUEQFSQQG-UHFFFAOYSA-N 0.000 abstract 2
- 230000005686 electrostatic field Effects 0.000 abstract 1
- 239000000155 melt Substances 0.000 abstract 1
- 239000007789 gas Substances 0.000 description 9
- 239000003365 glass fiber Substances 0.000 description 7
- 238000001914 filtration Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 5
- 229910052751 metal Inorganic materials 0.000 description 5
- 239000003990 capacitor Substances 0.000 description 4
- 230000003749 cleanliness Effects 0.000 description 4
- 239000000428 dust Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000011144 upstream manufacturing Methods 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004049 embossing Methods 0.000 description 2
- 230000004927 fusion Effects 0.000 description 2
- 238000007602 hot air drying Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000004750 melt-blown nonwoven Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000005411 Van der Waals force Methods 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 239000012784 inorganic fiber Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
- 239000012209 synthetic fiber Substances 0.000 description 1
- 229910021642 ultra pure water Inorganic materials 0.000 description 1
- 239000012498 ultrapure water Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 239000002759 woven fabric Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は高温気体の濾過において、濾材から粒子や繊維
の自己発塵の起らない高温気体用フィルターに関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a filter for high-temperature gas that does not cause self-generation of particles or fibers from a filter medium in the filtration of high-temperature gas.
（従来技術）
近年、半導体工業においてはフロン規制の動きからウェ
ーハの洗浄液をフロンから超純水へと切り換える傾向が
あり、この時、ウェーハの熱風乾燥工程が新たに必要と
なってきている。昨今、この熱風乾燥工程においてはク
リーンな乾燥用熱風をつくるのにガラス繊維ＨＥＰＡフ
ィルターやテフロン多孔質フィルムとガラス繊維との複
合濾材からなるフィルターが用いられていた。(Prior Art) In recent years, there has been a trend in the semiconductor industry to switch from fluorocarbons to ultrapure water as the cleaning solution for wafers due to the movement toward regulations on fluorocarbons, and at this time, a hot air drying process for wafers has become necessary. Recently, in this hot air drying process, a glass fiber HEPA filter or a filter made of a composite filter material of Teflon porous film and glass fiber has been used to generate clean hot air for drying.
（発明が解決しようとする問題点）
従来のこうしたフィルターは常温で用いる限りにおいて
はクリーンな空気が得られるものの、１００〜２００’
Ｃの高温気体を濾過する場合にはそれらフィルターから
粒子や繊維の再飛散による自己発塵が生じると言う問題
があり、たとえば、ガラス繊維ＨＥＰＡフィルターを通
した熱風の清浄度はクラス１０００ （０，５μｍ直径
の粒子が１立方フイート中に１０００個浮遊している状
態）程度までしか低下できず、ウェーハの歩留りが悪い
と言う状況にあった。(Problems to be Solved by the Invention) Although conventional filters like this can provide clean air as long as they are used at room temperature,
When filtering high-temperature gases of C, there is a problem that self-dusting occurs due to the re-scattering of particles and fibers from these filters.For example, the cleanliness of hot air passing through a glass fiber HEPA filter is class 1000 (0, The yield of wafers could only be reduced to a state in which 1,000 particles with a diameter of 5 μm were suspended in 1 cubic foot, resulting in poor wafer yield.
（問題点を解決するための手段）
本発明はかかる高温気体の濾過において、フィルターか
ら自己発塵をなくすために鋭意検討した結果、本発明に
到達したものであり、１００°Ｃにおける表面電荷密度
が少くともＱ、ｌｎｃ／ｃｉｆｉであるエレクトレフト
多孔質フィルムと繊維シートとを貼合せたことを特徴と
する高温気体用フィルターに関する。(Means for Solving the Problems) The present invention was developed as a result of intensive studies to eliminate self-dust generation from the filter in the filtration of high-temperature gases. The present invention relates to a filter for high-temperature gas, characterized in that an electroleft porous film having at least Q, lnc/cifi and a fiber sheet are laminated together.
本発明において、従来のガラス繊１ｉＨＥＰＡフィルタ
ーがなぜ高温気体を濾過した時に粒子や繊維が再飛散し
自己発塵するかについて調査した結果、常温では濾材の
製造工程、フィルター製造工程やフィルター取付工事時
にフィルターに付着した大気中の粒子やそれらの作業中
に折れたガラス繊維はガラス繊維自身とファンデアワー
ルス力で付着している訳であるが、１００〜２００°Ｃ
の高温気体にさらされ、風を通すと付着力が大幅に低下
することによって自己発塵現象が生しるものと推測され
、予期しない効果としてエレクトレット多孔質フィルム
の表面電荷密度を少くとも０．１ｎｃ／ｃｍにすると、
−旦エレクトレノト多孔質フィルムに付着した粒子は１
００〜２００°Ｃの高温気体の通風下においては再飛散
しないことをみい出し本発明を二到達したものである。In the present invention, as a result of investigating why conventional glass fiber 1i HEPA filters cause particles and fibers to re-disperse and self-generate dust when filtering high-temperature gas, we found that at room temperature, during the filter media manufacturing process, filter manufacturing process, and filter installation work. Particles in the air that adhere to the filter and glass fibers that break during the process are attached to the glass fibers themselves due to van der Waals forces, but the temperature is 100 to 200°C.
It is presumed that the self-dust generation phenomenon occurs due to a significant decrease in adhesion force when exposed to high-temperature gas and air is passed through.As an unexpected effect, the surface charge density of the porous electret film is reduced to at least 0. When set to 1 nc/cm,
-The number of particles attached to the electroporous film is 1
The present invention was achieved by discovering that it does not scatter again under the ventilation of high-temperature gas at 00 to 200°C.
本発明において、エレクトレット多孔質フィルムとは、
フィルムの過延伸によりフィブリル化した多孔質フィル
ムや高エネルギー放射線等で微孔をあけた多孔質フィル
ムを熱エレクトレット化したエレクトレット多孔質ソー
トである。In the present invention, the electret porous film is
This is an electret porous sort made by thermoelectreting a porous film that has been fibrillated by overstretching the film or a porous film that has micropores made with high-energy radiation.
本発明における熱エレクトレットとは加熱下でラジオエ
レクトレット、エレクトロエレクトレット化したエレク
トレットを指し、通常のエレクトレ・７ト法で作成され
るエレクトレットより高温での電荷安定性が優れている
ものである。The thermal electret in the present invention refers to an electret that has been converted into a radioelectret or an electroelectret under heating, and has better charge stability at high temperatures than an electret produced by the usual electret method.
本発明におけるエレクトレット化の加熱温度は好ましく
は８０〜１８０°Ｃ１より好ましくは１００〜１５０°
Ｃである。The heating temperature for electretization in the present invention is preferably 80 to 180°C, more preferably 100 to 150°C.
It is C.
本発明の１００°Ｃにおける表面電荷密度とは次の測定
法によって求められる値である。第１図は表面電荷密度
を測定するための測定装置の概略図であり、図において
、１は測定試料、２および３は金属板、４はコンデンサ
ー、５は電位計、６は加熱オーブンである。図に示すよ
うに加熱オーブン６をあらかしめ１００°Ｃに加熱して
おき、次に試料１をアースし金属板２の上に置き、次に
もう一つの金属板３を上方から接近させて試料に接触さ
せ、試料表面に存在する電荷を静電誘導によって金属板
３に生しせしめ、この電荷をコンデンサー４にためて、
電位計５によって測定し、下式にしたがって試料表面の
表面電荷密度を算出する。The surface charge density at 100°C in the present invention is a value determined by the following measurement method. FIG. 1 is a schematic diagram of a measuring device for measuring surface charge density, in which 1 is a measurement sample, 2 and 3 are metal plates, 4 is a capacitor, 5 is an electrometer, and 6 is a heating oven. . As shown in the figure, the heating oven 6 is preheated to 100°C, then the sample 1 is grounded and placed on the metal plate 2, and then the other metal plate 3 is approached from above and placed on the sample. The sample surface is brought into contact with the metal plate 3 by electrostatic induction, and this charge is stored in the capacitor 4.
Measurement is performed using an electrometer 5, and the surface charge density of the sample surface is calculated according to the following formula.
表面電荷密度（ｎｃ／ｃｄ） ＝ ｃ Ｘ ｖ ／ Ａ
、ここでｎｃ−＝ナノクーロン、Ｃ＝コンデンサーの容
量（ファラッド）、■＝電位（ボルト）、Ａ＝試料面積
（−）である。Surface charge density (nc/cd) = c x v / A
, where nc-=nanocoulomb, C=capacitance of the capacitor (farad), ■=potential (volt), and A=sample area (-).
本発明におけるエレクトレット多孔質フィルムの１００
°Ｃにおける表面電荷密度は少くとも０．１ｎｃ／ｃｉ
ｉであることが重要である。100 of the electret porous film in the present invention
Surface charge density at °C is at least 0.1 nc/ci
It is important that i.
本発明のエレクトレット多孔質フィルムの表面電荷密度
がＯ，］ｎｃ／ｃｄに満たないとエレクトレット多孔質
フィルムにすでに付着している粒子は再飛散し易く、自
己発塵の原因となるのである。If the surface charge density of the porous electret film of the present invention is less than O, ] nc/cd, particles already attached to the porous electret film are likely to scatter again, causing self-dusting.
本発明におけるエレクトレット多孔質フィルムのＮａｃ
ｌ Ｏ，１μ粒子に対する粒子除去効率は９０〜９９．
９９％を有している。Nac of the electret porous film in the present invention
Particle removal efficiency for l O, 1μ particles is 90-99.
It has 99%.
本発明におけるエレクトレット多孔質フィルムの素材に
はポリ４弗化エチレン、ポリ弗化ビニリデン、ポリ３弗
化塩化エチレン、ポリプロピレン、ポリ４メチル１ペン
テン、ポリ３メチル１ブテン、ボリカーポ７−ト、ポリ
エチレンテレフタレートなどが挙げられる。The materials for the electret porous film in the present invention include polytetrafluoroethylene, polyvinylidene fluoride, polytrifluorochloroethylene, polypropylene, poly4methyl-1pentene, poly3methyl-1butene, polycarbonate, and polyethylene terephthalate. Examples include.
本発明において、エレクトレット多孔質フィルムと貼合
される繊維シートとはメルトブロー不織布、フラッシュ
紡糸の不織布、静電場紡糸の不織布やスパンボンド、ネ
ット織布などが挙げられ、これらは非エレクトレットで
もエレクトレットでもいずれでもよい。これらの繊維ソ
ートはエレクトレット多孔質フィルムを補強し、かつ粒
子除去効率を向上させる効果を有する。In the present invention, the fiber sheet to be laminated with the electret porous film includes melt-blown nonwoven fabrics, flash-spun nonwoven fabrics, electrostatic field-spun nonwoven fabrics, spunbond fabrics, net woven fabrics, etc., and these may be either non-electret or electret. But that's fine. These fiber sorts have the effect of reinforcing the electret porous film and improving particle removal efficiency.
本発明において、エレクトレット多孔質フィルムと貼合
される繊維シートの素材はポリ４弗化エチレン、ポリ弗
化ビニリデン、ポリ３弗化塩化エチレン、ポリプロピレ
ン、ポリ４メチルｌペンテン、ポリ３メチル１ブテン、
ボリカーボイート、ポリエチレンテレフタレートの合成
繊維や、ガラス繊維、金属繊維、無機繊維が挙げられる
、本発明において、エレクトレット多孔質フィルムと繊
維ソートとは自己融着あるいは接着剤にょる接着貼合で
一体化することが好ましい。この−体化はエレクトレッ
ト化前でも、エレクトレ・７ト化後でもいずれでもよい
。In the present invention, the materials of the fiber sheet to be laminated with the electret porous film are polytetrafluoroethylene, polyvinylidene fluoride, polytrifluorochloroethylene, polypropylene, poly4methyl-1-pentene, poly3-methyl-1-butene,
Synthetic fibers such as polycarbonate, polyethylene terephthalate, glass fibers, metal fibers, and inorganic fibers can be mentioned.In the present invention, the electret porous film and the fiber sort are integrated by self-fusion or bonding with an adhesive. It is preferable to do so. This conversion may be performed either before conversion to electret or after conversion to electret.
第２図に本発明のフィルターの断面図を示す。FIG. 2 shows a sectional view of the filter of the present invention.
１はエレクトレット多孔質フィルム、２は繊維ノート、
３は自己融着による接着部を示す。1 is an electret porous film, 2 is a fiber notebook,
3 shows a bonded portion by self-fusion.
（作用と効果）
本発明におけるフィルターは１００〜２００°Ｃの高温
気体を濾過する時、濾材の製造工程、フィルターの製造
工程やフィルター取付工事時に付着した大気中の粒子を
フィルター自身の静電気力で強固に把持し、自己発塵を
生しないというこれまでにない新規なフィルターであり
、従来、クラス１０００の清浄度の熱風をクラス１の清
浄度に向上することができる。(Functions and Effects) When filtering high-temperature gas of 100 to 200°C, the filter of the present invention uses its own electrostatic force to remove particles in the atmosphere that are attached during the filter media manufacturing process, filter manufacturing process, or filter installation work. This is an unprecedented new filter that has a strong grip and does not generate self-dust, and can improve the cleanliness of hot air, which previously had a class 1000 cleanliness, to a class 1 cleanliness.
以下に実施例で詳細に説明する。This will be explained in detail in Examples below.
実施例１
ポリ４弗化エチレンの多孔質フィルム（目付２０ｇ／ｃ
ｄ、厚さ０．１画）を１５０°Ｃの熱板電極と針電極間
に置き、この電極間に２０ＫＶの直流電圧を１０分間印
加し、印加電圧をそのままの状態で温度を常温まで冷却
し、エレクトレット多孔質フィルムを得た。このエレク
トレット多孔質フィルムを図１の装置で１００°Ｃにお
ける表面電荷密度を測定したところ０．３ｎｃ／ｃｊＯ
値を得た。次に平均繊維径２μ艶のポリ３メチル１ブテ
ンのメルトブロー不織布（目付３０ｇ／ ｃｄ、厚さ０
．３ｍ）を前記多孔質フィルムと同一条件でエレクトレ
ット化した。これらエレクトレットを１４０°Ｃに加熱
したエンボスロールで部分熱融着させて貼合せた。Example 1 Porous film of polytetrafluoroethylene (fabric weight 20 g/c
d, thickness 0.1 stroke) was placed between a hot plate electrode at 150°C and a needle electrode, a DC voltage of 20 KV was applied between the electrodes for 10 minutes, and the temperature was cooled to room temperature while the applied voltage remained unchanged. An electret porous film was obtained. When the surface charge density of this electret porous film was measured at 100°C using the apparatus shown in Figure 1, it was 0.3 nc/cjO.
Got the value. Next, a melt-blown nonwoven fabric of poly-3-methyl-1-butene with an average fiber diameter of 2 μm (fabric weight: 30 g/cd, thickness: 0
．． 3m) was made into an electret under the same conditions as the porous film. These electrets were partially heat-sealed and bonded using an embossing roll heated to 140°C.
得られた濾材をブリツー加工して０．８ヒ折り込んでア
ルミニウム製枠に組込み、４周をシリコン樹脂で固定し
た。フィルターの大きさはＭ１５０ｔｎ、横１５０ｍｍ
、奥行７５閣であった。このフィルターを熱風オーブン
の吹出口に設置し、１００°Ｃの熱風を毎分１が、オー
ブン中で循環させフィルターからの粒子再飛散を試験し
た。レーザパーティクルカウンター（リオンＫＣ−１４
）で毎分３００ｃｃのオーブン内の熱風をフィルター下
流側でサンプリングして、粒子濃度（初期濃度は２Ｘ１
０’個／立方フィート）の経時変化を測定した結果、試
験開始３０分後に０．１μ−以上の粒子のカウント数は
０個／立方フィートとなり、その後１００時間連続運転
中も粒子のカウント数は０個／立方フィートであった。The obtained filter medium was subjected to a burritsu process, folded by 0.8 mm, assembled into an aluminum frame, and the four circumferences were fixed with silicone resin. Filter size is M150tn, width 150mm
It was 75 temples deep. This filter was installed at the outlet of a hot air oven, and 100°C hot air was circulated in the oven at a rate of 1 minute per minute to test particle re-entrainment from the filter. Laser particle counter (Rion KC-14
) The hot air in the oven at 300 cc per minute was sampled downstream of the filter, and the particle concentration (initial concentration was 2X1
As a result of measuring the change in particle count over time (0' particles/cubic foot), 30 minutes after the start of the test, the number of counts of particles larger than 0.1μ was 0 particles/cubic foot, and the number of particles remained unchanged even after 100 hours of continuous operation. 0 per cubic foot.
なおこのフィルターの１００°Ｃでの０．１μ蒙粒子に
対する除去効率は９９．９９％であり、試験開始３０分
以後のフィルター上流側の粒子カウント数は０個／立方
フィートであった。The removal efficiency of this filter for 0.1 μm particles at 100° C. was 99.99%, and the number of particles counted on the upstream side of the filter after 30 minutes from the start of the test was 0 particles/cubic foot.
実施例２
実施例１と同し多孔質フィルムを１３０°Ｃの熱板電極
と針電極間に置き、この電極間に１５ＫＶの直流電圧を
１０分間印加し、印加電圧をそのままの状態で温度を常
温まで冷却し、エレクトレット多孔質フィルムを得た。Example 2 The same porous film as in Example 1 was placed between a hot plate electrode at 130°C and a needle electrode, a DC voltage of 15 KV was applied between the electrodes for 10 minutes, and the temperature was increased while the applied voltage remained unchanged. It was cooled to room temperature to obtain a porous electret film.
このエレクトレット多孔質フィルムを図１の装置で１０
０°Ｃにおける表面電荷密度を測定したところ、０．１
５ｎｃ／ｃｉａの値を得た。次に、このエレクトレット
多孔質フィルムに実施例１と同し繊維シートを同一条件
で貼合せた。得られた濾材は実施例１と同一条件でフィ
ルターを作成し、粒子再飛散試験をした。その結果、試
験開始３０分後に０．１μｍ以上の粒子のカウント数は
０個／立方フィートとなり、その後１００時間連続運転
中も粒子のカウント数は０個／立方フィートであった。This electret porous film was processed using the apparatus shown in Figure 1 for 10 minutes.
When the surface charge density was measured at 0°C, it was 0.1
A value of 5 nc/cia was obtained. Next, the same fiber sheet as in Example 1 was laminated to this porous electret film under the same conditions. A filter was prepared using the obtained filter medium under the same conditions as in Example 1, and a particle re-entrainment test was conducted. As a result, 30 minutes after the start of the test, the number of particles with a diameter of 0.1 μm or more was 0/cubic foot, and the number of particles counted was 0/cubic foot even during continuous operation for 100 hours thereafter.
なお、このフィルターの１００°Ｃでの０．１μｍ粒子
に対する除去効率は９９．９１％であった。The removal efficiency of this filter for 0.1 μm particles at 100° C. was 99.91%.
比較例１
実施例１と同しポリ４弗化エチレンの多孔質フィルムを
エレクトレット化せずに、実施例１のエレクトレット繊
維シートとエンボスローラで部分融着により貼合せた。Comparative Example 1 The same porous film of polytetrafluoroethylene as in Example 1 was bonded to the electret fiber sheet of Example 1 by partial fusion using an embossing roller without converting it into electret.
次いで、実施例１と同一条件でフィルターを作成し同様
の試験を実施した結果、３０分後の粒子カウント数は５
個／立方フィートであり、その後の２４時間運転中にカ
ウントされた平均粒子数は３個／立方フィートであった
。試験開始１０分後のフィルター上流側の粒子濃度は２
５０個／立方フィート、下流側の粒子濃度は１個／立方
フィートであり、したがってフィルターの粒子除去効率
は９９．６％であった。Next, a filter was made under the same conditions as in Example 1, and the same test was conducted. As a result, the number of particles counted after 30 minutes was 5.
particles per cubic foot, and the average number of particles counted during the subsequent 24 hour run was 3 particles per cubic foot. 10 minutes after the start of the test, the particle concentration on the upstream side of the filter was 2.
The downstream particle concentration was 1 particle/cubic foot, so the particle removal efficiency of the filter was 99.6%.
３０分以後のフィルター上流側濃度は平均７個／立方フ
ィートのため前記２４時間運転中にカウントされた平均
粒子数は上流側粒子の素抜けではなかった。Since the average particle concentration on the upstream side of the filter after 30 minutes was 7 particles/cubic foot, the average number of particles counted during the 24-hour operation was not a complete omission of particles on the upstream side.
比較例２
実施例１と同し多孔質フィルムを常温で板電極と針電極
間に置き、この電極間に２０ＫＶの直流電圧を】Ｏ分゛
間印加し、エレクトレット多孔質フィルムを得た。この
エレクトレット多孔質フィルムを図１の装置で１００°
Ｃにおける表面電荷密度を測定したところ、０．０５ｎ
ｃ／ｃｉＩｌＯ値を得た。次に、このエレクトレット多
孔質フィルムに実施例１と同し繊維ソートを同一条件で
貼合せた。得られた濾材は実施例１と同一条件でフィル
ターを作成し、粒子再飛散試験をした。Comparative Example 2 The same porous film as in Example 1 was placed between a plate electrode and a needle electrode at room temperature, and a DC voltage of 20 KV was applied between the electrodes for 10 minutes to obtain an electret porous film. This electret porous film was heated at 100° using the apparatus shown in Figure 1.
When the surface charge density of C was measured, it was found to be 0.05n
c/ciIIO values were obtained. Next, the same fiber sort as in Example 1 was laminated to this electret porous film under the same conditions. A filter was prepared using the obtained filter medium under the same conditions as in Example 1, and a particle re-entrainment test was conducted.
その結果、試験開始３０分後に０．１μ噺以上の粒子の
カウント数は平均２個／立方フィートとなり、その後１
００時間連続運転中も粒子のカウント数は平均２個／立
方フィートで零になることはなかった。As a result, 30 minutes after the start of the test, the average count of particles larger than 0.1 μm was 2 per cubic foot, and after that, 1
Even during continuous operation for 00 hours, the particle count averaged 2 particles/cubic foot and never reached zero.
第１図は表面電荷密度を測定するための装置の概略図第
２図は本発明のフィルターの断面図を示す。
図における数字か示す部分は以下のよってある。
第１図 １ 試料
２３ 電極
４、コンデンサー
５、電位計
６、加熱オーブン
第２図月 エレクトレット多孔質フィルム２、繊維フィ
ルム
３ エンホス融着による接着部
特許出願人 東洋紡績株式会社FIG. 1 shows a schematic diagram of an apparatus for measuring surface charge density, and FIG. 2 shows a cross-sectional view of a filter according to the invention. The parts indicated by numbers in the figure are as follows. Figure 1 1 Sample 23 Electrode 4, Capacitor 5, Electrometer 6, Heating oven Figure 2 Electret porous film 2, fiber film 3 Adhesive part by Enphos fusion Patent applicant Toyobo Co., Ltd.
Claims (1)
ｃｍ＾２であるエレクトレット多孔質フィルムと繊維シ
ートとを貼合せたことを特徴とする高温気体用フィルタ
ーThe surface charge density at 100°C is at least 0.1 nc/
A high-temperature gas filter characterized by laminating an electret porous film with a diameter of cm^2 and a fiber sheet.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28663590A JPH04161208A (en) | 1990-10-23 | 1990-10-23 | Filter for high temperature gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP28663590A JPH04161208A (en) | 1990-10-23 | 1990-10-23 | Filter for high temperature gas |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04161208A true JPH04161208A (en) | 1992-06-04 |
Family
ID=17706968
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP28663590A Pending JPH04161208A (en) | 1990-10-23 | 1990-10-23 | Filter for high temperature gas |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04161208A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7160365B2 (en) * | 2003-03-10 | 2007-01-09 | Sharp Kabushiki Kaisha | Ion generating apparatus, air conditioning apparatus, and charging apparatus |
| CN105682770A (en) * | 2013-10-15 | 2016-06-15 | 优泊公司 | Filter |
| CN105894728A (en) * | 2016-05-05 | 2016-08-24 | 广东欧珀移动通信有限公司 | Danger alarm method and mobile equipment |
| CN113440951A (en) * | 2020-03-27 | 2021-09-28 | 中昊晨光化工研究院有限公司 | Polytetrafluoroethylene composite filtering material |
-
1990
- 1990-10-23 JP JP28663590A patent/JPH04161208A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7160365B2 (en) * | 2003-03-10 | 2007-01-09 | Sharp Kabushiki Kaisha | Ion generating apparatus, air conditioning apparatus, and charging apparatus |
| CN105682770A (en) * | 2013-10-15 | 2016-06-15 | 优泊公司 | Filter |
| US10010892B2 (en) | 2013-10-15 | 2018-07-03 | Yupo Corporation | Filter |
| CN105894728A (en) * | 2016-05-05 | 2016-08-24 | 广东欧珀移动通信有限公司 | Danger alarm method and mobile equipment |
| CN113440951A (en) * | 2020-03-27 | 2021-09-28 | 中昊晨光化工研究院有限公司 | Polytetrafluoroethylene composite filtering material |
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