JPH04154635A - Optical element forming mold - Google Patents

Optical element forming mold

Info

Publication number
JPH04154635A
JPH04154635A JP27781890A JP27781890A JPH04154635A JP H04154635 A JPH04154635 A JP H04154635A JP 27781890 A JP27781890 A JP 27781890A JP 27781890 A JP27781890 A JP 27781890A JP H04154635 A JPH04154635 A JP H04154635A
Authority
JP
Japan
Prior art keywords
mold
molding
diamond
optical element
glass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27781890A
Other languages
Japanese (ja)
Inventor
Yasushi Taniguchi
靖 谷口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP27781890A priority Critical patent/JPH04154635A/en
Publication of JPH04154635A publication Critical patent/JPH04154635A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06—Construction of plunger or mould
    • C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
    • C03B11/06—Construction of plunger or mould
    • C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
    • C03B11/084—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor
    • C03B11/086—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor of coated dies
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/02—Press-mould materials
    • C03B2215/08—Coated press-mould dies
    • C03B2215/10—Die base materials
    • C03B2215/12—Ceramics or cermets, e.g. cemented WC, Al2O3 or TiC
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/02—Press-mould materials
    • C03B2215/08—Coated press-mould dies
    • C03B2215/14—Die top coat materials, e.g. materials for the glass-contacting layers
    • C03B2215/24—Carbon, e.g. diamond, graphite, amorphous carbon
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B2215/00—Press-moulding glass
    • C03B2215/02—Press-mould materials
    • C03B2215/08—Coated press-mould dies
    • C03B2215/30—Intermediate layers, e.g. graded zone of base/top material
    • C03B2215/32—Intermediate layers, e.g. graded zone of base/top material of metallic or silicon material

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To improve hardness, mold releasability, moldability and endurance of the title mold by fabricating natural or artificial diamond crystal. CONSTITUTION:A mold preform 11 consisting of natural or artificial diamond crystal is put on a sample stage 12 and the stage 12 is rotatably moved in the directions of X, Y, Z axes axes and theta and simultaneously laser beam from a laser beam source 11 is scanned through lens, a X scan mirror 8, Y scan mirror 9 and a light-collecting optical system 10 and the mold preform is subjected to spherical fabrication with recessed form to provide the mold 13 for optical element formation. Then the mold 13 is brazed onto a support of WC-Co based alloy, SiC, etc., with an alloy such as Ag-Cu, Ti-Cu and the mold 13 is brought into contact with a skife dish 14 having desired curved form and the dish 14 is rotated while feeding abrasive grains to carry out mirror face polishing of the mold.

Description

【発明の詳細な説明】 ［産業上の利用分野］ 本発明は、レンズ、プリズム等のガラスよりなる光学素
子を、ガラス素材のプレス成形により製造するのに使用
される型に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a mold used for manufacturing optical elements made of glass, such as lenses and prisms, by press molding a glass material.

［従来の技術］ 研摩工程を必要としないでガラス素材のプレス成形によ
ってレンズを製造する技術は従来のレンズの製造におい
て必要とされた複雑な工程をなくし、簡単且つ安価にレ
ンズを製造することを可能とし、近来、レンズのみなら
ずプリズムその他のガラスよりなる光学素子の製造に使
用されるようになってきた。[Prior Art] The technology of manufacturing lenses by press-molding glass materials without requiring a polishing process eliminates the complicated processes required in conventional lens manufacturing, making it possible to manufacture lenses simply and at low cost. In recent years, it has come to be used to manufacture not only lenses but also prisms and other optical elements made of glass.

このようなガラスの光学素子のプレス成形に使用される
型材に要求される性質としては、硬さ、耐熱性、離型性
、鏡面加工性等に優れている事が挙げられる。従来、こ
の種の型材として、金属、セラミックス及びそれらをコ
ーティングした材料等、数多（の提案がされている。い
くつかの例を挙げるならば、特開昭４９−５１１１２に
は１３ｃｒマルテンサイト鋼が、特開昭５２−４５６１
３にはＳＬＣ及び５ｉｓＮ４が、特開昭６０−２４６２
３０には超硬合金に貴金属をコーティングした材料が、
又、特開昭６１−１８３１３４゜特開昭６１−２４２９
２２．特開平１−３０１１！６４にはダイヤモンド薄膜
又はダイヤモンド状炭素膜をコーティングした材料が、
実開昭６３−８９９３５にはダイヤモンドを主成分とす
る型材が提案されている。Properties required of the mold material used for press molding of such glass optical elements include excellent hardness, heat resistance, mold releasability, mirror workability, and the like. In the past, many proposals have been made for this type of mold material, including metals, ceramics, and materials coated with these materials. However, JP-A-52-4561
3 has SLC and 5isN4, JP-A-60-2462
30 is a material made of cemented carbide coated with precious metals,
Also, JP-A-61-183134゜ JP-A-61-2429
22. JP-A-1-3011!64 discloses a material coated with a diamond thin film or a diamond-like carbon film.
Japanese Utility Model Application No. 63-89935 proposes a mold material whose main component is diamond.

［発明が解決しようとする課−］ しかし、１３Ｃｒマルテンサイト鋼は酸化しやすく、さ
らに高温でＦｅが硝子中に拡散して硝子が着色する欠点
をもつ、又、ＳｉＣ、５ＬｌＮ４は一般的に酸化されに
くいとされているが、高温ではやはり酸化がおこり表面
に５ｉｎｓの膜が形成される為硝子と融着を起こし、さ
らに高硬度の為型自体の加工性が極めて悪いという欠点
を持つ、貴金属をコーティングした材料は融着は起こし
にくいが、極めて軟かい為、傷がつきやす（又変形しや
すい欠点をもつ。[Problem to be solved by the invention] However, 13Cr martensitic steel is easily oxidized, and has the disadvantage that Fe diffuses into the glass at high temperatures, causing the glass to become colored.Also, SiC and 5LlN4 are generally oxidized. Although it is said that it is difficult to be oxidized at high temperatures, a 5-inch film is formed on the surface, which causes fusion with glass. Furthermore, due to its high hardness, the workability of the mold itself is extremely poor. Coated materials are less prone to fusion, but because they are extremely soft, they have the disadvantage of being easily scratched (and easily deformed).

また、ダイヤモンド薄膜をコートした材料は表面の平滑
さに欠けるため、鏡面加工を行なわないと光学素子成形
用型としては使用できない、更に研磨やエツチングによ
り鏡面加工を行なった型は膜が多結晶膜であるため結晶
粒界を有している。In addition, materials coated with a diamond thin film lack surface smoothness, so they cannot be used as molds for molding optical elements unless they are mirror-finished.Furthermore, molds that have been mirror-finished by polishing or etching have a polycrystalline film. Therefore, it has grain boundaries.

この結晶粒界にはボイドやグラファイトあるいはアモル
ファス・カーボン等のアモルファス成分が存在する。ボ
イドは型の表面粗さを悪くする要因となり、アモルファ
ス成分の存在は成形回数が増えるに従い酸化して表面形
状を劣化させたり、ガラス含有成分の反応析出物を生じ
たり、ガラスの融着な発生するという問題を内在してい
る。In these grain boundaries, voids and amorphous components such as graphite or amorphous carbon are present. Voids are a factor that worsens the surface roughness of the mold, and the presence of amorphous components oxidizes as the number of molding increases, causing deterioration of the surface shape, the formation of reaction precipitates of glass-containing components, and the occurrence of glass fusion. There is an inherent problem in doing so.

ダイヤモンド状炭素膜は平滑で高硬度であり、離型性も
良いが、高温での熱安定性が必ずしも良好とはいえず、
融点の高い硝材には適さないという問題がある。またダ
イヤモンドを主成分とする型すなわち焼結体は曲面形状
を得ることが難しく、焼結に使用される助剤によっては
ガラス含有成分の反応析出物を生じるという問題がある
。Diamond-like carbon films are smooth, highly hard, and have good mold releasability, but their thermal stability at high temperatures is not necessarily good.
There is a problem in that it is not suitable for glass materials with a high melting point. Furthermore, it is difficult to obtain a curved shape with a mold or sintered body mainly composed of diamond, and depending on the auxiliary agent used for sintering, there is a problem in that reaction precipitates of glass-containing components are generated.

従って、本発明の目的は、型とガラス成形品の離型性が
極めて良好で、表面粗さ、面精度、透過率、形状精度の
良好な成形品が得られ、しかも耐久性が極めて高い光学
素子成形用型を提供することにある。Therefore, the object of the present invention is to provide an optical system that has extremely good mold releasability between the mold and the glass molded product, provides a molded product with good surface roughness, surface precision, transmittance, and shape accuracy, and has extremely high durability. The object of the present invention is to provide a mold for molding an element.

［課題を解決するための手段］ すなわち、本発明は、ガラスよりなる光学素子のプレス
成形に用いる光学素子成形用型において、型母材が天然
または人工のダイヤモンド結晶であることを特徴とする
光学素子成形用型、並びに、型母材上にダイヤモンド膜
またはダイヤモンド状炭素膜が気相合成法により形成さ
れ、かつ非球面形状を有することを特徴とする前記光学
素子成形用型である。[Means for Solving the Problems] That is, the present invention provides an optical element molding die used for press molding an optical element made of glass, characterized in that the mold base material is a natural or artificial diamond crystal. The present invention relates to a mold for molding an optical element, and the mold for molding an optical element, wherein a diamond film or a diamond-like carbon film is formed on the mold base material by a vapor phase synthesis method, and has an aspherical shape.

以下、本発明の詳細な説明する。The present invention will be explained in detail below.

ダイヤモンドは光学素子成形用型の材料として■高硬度
である、■加工は大変であるが超平面が得られる、■離
型性が良い、■光学ガラスとほとんど反応しない、■熱
伝導率が高い等の理由により成形性、耐久性に最も優れ
ている。Diamond is used as a material for molds for molding optical elements; ■It has high hardness; ■It is difficult to process, but a super flat surface can be obtained; ■It has good mold releasability; ■It hardly reacts with optical glass; ■It has high thermal conductivity. For these reasons, it has the best moldability and durability.

このダイヤモンド結晶は天然に産するものや高温高圧下
で人工的に合成されたものがある。現在、人工的に得ら
れるものは最大で１０＋ａｍＸ１０■ｍ程度と必ずしも
大きくないが、コンパクト・ディスクのピックアップ光
学系に使用されるレンズの成形には十分の大きさを有し
ている。These diamond crystals can be naturally occurring or artificially synthesized under high temperature and pressure. At present, the maximum size that can be obtained artificially is about 10+am x 10 .mu.m, which is not necessarily large, but is large enough to be used to mold lenses used in compact disc pickup optical systems.

本発明において用いられるダイヤモンド結晶は前述の天
然に産するものまたは人工的に合成された単結晶ダイヤ
モンドである。The diamond crystal used in the present invention is the aforementioned naturally occurring or artificially synthesized single crystal diamond.

単結晶ダイヤモンドをブルーチング、放電加工、レーザ
加工、イオンビーム加工、電解研削等の方法によって型
形状に粗加工する。この状態では光学的に良好な面精度
、表面粗さを持つ成形用型とすることができない。そこ
で、研磨によって光学的に使用可能な形状に仕上げ加工
する。Single-crystal diamond is rough-processed into a mold shape by methods such as bruting, electrical discharge machining, laser machining, ion beam machining, and electrolytic grinding. In this state, a mold with optically good surface precision and surface roughness cannot be obtained. Therefore, it is finished by polishing into a shape that can be used optically.

研磨方法としては、従来円盤状のスカイフ板と呼ばれる
ものを用いるのが一般的であるが、このスカイフ板を型
と嵌合する形状とし、レンズ研磨と同様の方法によって
鏡面研磨する。あるいは熱化学反応を用いて型と嵌合す
る形状の純鉄、鋼、鋳鉄、Ｎｉ、　Ｃｏをダイヤモンド
型と高温で水素ラジカルの存在下で摺動させることによ
り鏡面研磨する。このときダイヤモンドはＷＣ−Ｇｏ系
合金、　ＳｉＣ。As a polishing method, it is common to use what is called a disk-shaped scaife plate, and this scaife plate is shaped to fit into a mold, and mirror-polished by the same method as lens polishing. Alternatively, using a thermochemical reaction, pure iron, steel, cast iron, Ni, or Co in a shape that fits the mold is mirror-polished by sliding it against a diamond mold at high temperature in the presence of hydrogen radicals. At this time, the diamond is a WC-Go alloy, SiC.

５ｉＪ４．　　Ｗ、　Ｍｏ、　Ｔａ、サーメット、サイ
アロン。5iJ4. W, Mo, Ta, cermet, sialon.

ムライト等からなる支持体に、ダイヤモンドと反応性の
高い金属例えば周期律表の４Ａ、５Ａ、６Ａ族の金属、
Ｆｅ、　Ｃｏ、　Ｒｈ、　Ｎｉ、　Ｐｔ、　Ｃｕ、　Ａ
ｇ、　ＡｕあるいはＡｇ−Ｃｕ、　Ｔｉ−Ａｇ、　Ｔｉ
−Ｃｕ、　Ｔｉ−Ｃｏ、　Ｔｉ−Ｎｉ。A support made of mullite or the like is coated with metals that are highly reactive with diamond, such as metals from groups 4A, 5A, and 6A of the periodic table.
Fe, Co, Rh, Ni, Pt, Cu, A
g, Au or Ag-Cu, Ti-Ag, Ti
-Cu, Ti-Co, Ti-Ni.

Ａｕ−Ｎｂ、　Ａｕ−Ｔａ等の合金をろう材として固定
する。An alloy such as Au-Nb or Au-Ta is fixed as a brazing material.

型形状が非球面の場合には、粗形状を出したうえで、前
述の研磨方法を用いローカルポリシングを行なう。ロー
カルボリジングはコンピューターにより被研磨物の形状
誤差を計測しローカルに研磨条件を求め、位置と研磨時
間を制御して行なう。あるいは、球面形状または所望の
非球面形状に近い形状まで研磨し１次いで研磨した面上
に、所望の非球面形状になるようにダイヤモンド膜また
はダイヤモンド状炭素膜を形成する。ダイヤモンド膜は
マイクロ波プラズマＣＶＤ法、熱フイラメントＣＶＤ法
、電子サイクロトロン共鳴プラズマＣＶＤ法（ＥＣＲ−
ＰＣＶＤ法）、プラズマジェット法等、ダイヤモンド状
炭素膜はイオンビーム蒸着法、プラズマＣＶＤ法、イオ
ンビームスパッタ法、プラズマスパッタ法等により形成
される。If the shape of the mold is aspherical, a rough shape is created and then local polishing is performed using the polishing method described above. Local boring is performed by measuring the shape error of the object to be polished using a computer, determining polishing conditions locally, and controlling the position and polishing time. Alternatively, the diamond film or diamond-like carbon film is first polished to a spherical shape or a shape close to a desired aspherical shape, and then a diamond film or a diamond-like carbon film is formed on the polished surface so as to have the desired aspherical shape. Diamond films can be produced using microwave plasma CVD, thermal filament CVD, or electron cyclotron resonance plasma CVD (ECR-CVD).
The diamond-like carbon film is formed by an ion beam evaporation method, a plasma CVD method, an ion beam sputtering method, a plasma sputtering method, etc.

非球面形状にする方法は、成膜な行なうダイヤモンド型
に近接してマスクを配置することにより、所望の非球面
量に対応する膜厚分布を意図的に設けて行なう。膜の形
成に用いるガスとしては含炭素ガスであるメタン、エタ
ン、プロパン、エチレン、ベンゼン、アセチレン等の炭
化水素：塩化メチレン、四塩化炭素、クロロホルム、ト
リクロルエタン等のハロゲン化炭化水素；メチルアルコ
ール、エチルアルコール等のアルコール類、（ＣＨｓ）
＊ＣＯ，（Ｃ−Ｈｓ）ｔｃＯ等のケトン類、　Ｃｏ、　
ＣＯ２等のガス、およびこれらのガスにＮ、、　Ｈ，、
０□、　Ｈａｄ。The method for forming an aspherical surface is to intentionally provide a film thickness distribution corresponding to a desired amount of aspherical surface by arranging a mask close to the diamond shape in which the film is to be formed. Gases used to form the film include carbon-containing hydrocarbons such as methane, ethane, propane, ethylene, benzene, and acetylene; halogenated hydrocarbons such as methylene chloride, carbon tetrachloride, chloroform, and trichloroethane; methyl alcohol; Alcohols such as ethyl alcohol, (CHs)
*Ketones such as CO, (C-Hs)tcO, Co,
Gases such as CO2, and these gases with N,, H,,
0□, Had.

Ａｒ等のガスを混合したものなどが挙げられる。Examples include those mixed with a gas such as Ar.

［実施例］ 以下、図面を参照しながら本発明の具体的実施例を説明
する。[Example] Hereinafter, specific examples of the present invention will be described with reference to the drawings.

見立ヨユ 第１図及び第２図は本発明に係る光学素子成形用型の１
つの実施態様を示すものである。第１図は光学素子のプ
レス成形前の状態を示し、第２図は光学素子成形後の状
態を示す。第１図中、１はガラス素材を成形する成形面
を有する単結晶ダイヤモンドからなる型、２は単結晶ダ
イヤモンドを型支持体に固定するろう材、３はダイヤモ
ンド結晶が固定される支持体、４はガラス素材であり、
第２図中５は光学素子である。第１図に示すように型の
間に置かれた硝子素材４をプレス成形することによって
、第２図に示すようにレンズ等の光学素子５が成形され
る。Figures 1 and 2 show a mold for molding an optical element according to the present invention.
2 shows two embodiments. FIG. 1 shows the optical element before press molding, and FIG. 2 shows the optical element after molding. In Fig. 1, 1 is a mold made of single crystal diamond having a molding surface for molding a glass material, 2 is a brazing material for fixing the single crystal diamond to the mold support, 3 is a support to which the diamond crystal is fixed, and 4 is a glass material,
5 in FIG. 2 is an optical element. By press-molding a glass material 4 placed between molds as shown in FIG. 1, an optical element 5 such as a lens is molded as shown in FIG. 2.

次に、本発明の光学素子成形用型について詳細に説明す
る。Next, the optical element molding mold of the present invention will be explained in detail.

天然または人工のダイヤモンド結晶をレーザにより所望
の形状に加工した。A natural or artificial diamond crystal was processed into a desired shape using a laser.

第３図にレーザ加工機の概略図を示す。第３図中、６は
レーザ光源、７はレンズ、８はＸ走査ミラー、９はＹ走
査ミラー　１０は集光光学系、１１は型、１２は試料ス
テージである。レーザ光源としてはＹＡＧレーザを用い
る。レーザ加工の第１の方法は走査ミラーにより型上で
レーザを走査することにより行なう。第２の方法は集光
光学系１０および試料ステージはｘ、ｙ、ｚ軸及びθ方
向に移動・回転できるようになっており、不図示の光学
的測距機構により加工形状を１０ｎｍの精度で測定、制
御することにより行なう。FIG. 3 shows a schematic diagram of the laser processing machine. In FIG. 3, 6 is a laser light source, 7 is a lens, 8 is an X scanning mirror, 9 is a Y scanning mirror, 10 is a condensing optical system, 11 is a mold, and 12 is a sample stage. A YAG laser is used as a laser light source. A first method of laser processing is performed by scanning a laser beam over a mold using a scanning mirror. In the second method, the condensing optical system 10 and the sample stage can be moved and rotated in the x, y, z axes and θ directions, and the processed shape can be determined with an accuracy of 10 nm using an optical distance measuring mechanism (not shown). This is done through measurement and control.

最適な加工条件はＹＡＧレーザの照射エネルギー、焦点
はずし量、照射パルス数、ビーム径をパラメータとして
決定する。具体的にはパルス幅１ｍｓのＹＡＧレーザを
用い、照射エネルギー０．ＩＪ、焦点はずし量０．５ｍ
ｍ　　（ダイヤモンド表面から０．５ｍｍ中に入った位
置に焦点を結ぶ）、ビーム径をダイヤモンド表面で５μ
ｍとして凹形状の球面加工を行なった。The optimal processing conditions are determined using YAG laser irradiation energy, defocus amount, irradiation pulse number, and beam diameter as parameters. Specifically, a YAG laser with a pulse width of 1 ms was used, and the irradiation energy was 0. IJ, defocus amount 0.5m
m (focus at a position within 0.5 mm from the diamond surface), beam diameter 5μ at the diamond surface.
A concave spherical surface was machined as m.

次に、第４図に示す研磨装置により仕上げ研磨を行なっ
た。第４図中、１３はＳｉＣ焼結体にＴｉ−Ａｇ合金で
ろう付けした単結晶ダイヤモンド型である。１４は所望
の曲面形状を有するスカイフ皿である。この皿をダイヤ
モンド微粉末（砥粒）を供給しなから２．　ＯＯＯｒｐ
ｍで回転させるとともに、ダイヤモンド結晶からなる型
を接触させて研磨した。レーザ加工された部分の表面は
炭化や酸化により変質層が形成され粗れているが、研磨
するうえでは逆に研磨しやすいという利点がある。こう
して得られた単結晶ダイヤモンド型は表面粗さがＲｍａ
ｘ　０．０２ｕｍ　、面精度はλ／１０であった。Next, final polishing was performed using a polishing apparatus shown in FIG. In FIG. 4, numeral 13 is a single-crystal diamond shape made of a SiC sintered body and brazed with a Ti-Ag alloy. 14 is a skiff plate having a desired curved surface shape. 2. Do not supply this dish with fine diamond powder (abrasive grains). OOOrp
While rotating at m, a mold made of diamond crystal was brought into contact and polished. Although the surface of the laser-processed part is roughened by the formation of an altered layer due to carbonization and oxidation, it has the advantage of being easier to polish. The single crystal diamond shape thus obtained has a surface roughness of Rma
x 0.02 um, and the surface accuracy was λ/10.

次に、本発明による光学素子成形用型によって硝子レン
ズのプレス成形を行なった例を示す。Next, an example in which a glass lens was press-molded using the mold for molding an optical element according to the present invention will be shown.

第５図中、５１は真空槽本体、５２はそのフ夕、５３は
光学素子を成形する為の上型、５４はその下型、５５は
上型をおさえるための上型おさえ、５６は調型、５７は
型ホルダ−，５８はヒータ、５９は下型をつき上げるつ
き上げ棒、６０は該つき上げ棒を作動するエアシリンダ
、６１は油回転ポンプ、６２，６３．６４はバルブ、６
５は不活性ガス流入バイブ、６６はバルブ、６７はリー
クパイプ、６８はバルブ、６９は温度センサ、７０は水
冷パイプ、７１は真空槽を支持する台を示す。In FIG. 5, 51 is the main body of the vacuum chamber, 52 is its fuse, 53 is an upper mold for molding optical elements, 54 is a lower mold, 55 is an upper mold holder for holding down the upper mold, and 56 is a mold holder for controlling the upper mold. A mold, 57 a mold holder, 58 a heater, 59 a lifting rod for lifting up the lower mold, 60 an air cylinder for operating the lifting rod, 61 an oil rotary pump, 62, 63, and 64 valves, 6
5 is an inert gas inflow vibe, 66 is a valve, 67 is a leak pipe, 68 is a valve, 69 is a temperature sensor, 70 is a water cooling pipe, and 71 is a stand that supports the vacuum chamber.

レンズを製作する工程を次に述べる。The process of manufacturing the lens will be described next.

フリント光学硝子（ＳＦ１４）を所定の量に調整し、球
状にした硝子素材を型のキャビティー内に置き、これを
装置内に設置する。Flint optical glass (SF14) is adjusted to a predetermined amount, and the spherical glass material is placed in the cavity of the mold, and this is installed in the apparatus.

ガラス素材を投入した型を装置内に設置してから真空槽
５１のフタ５２を閉じ、水冷バイブ７０に水を流し、ヒ
ータ５８に電流を通す、この時窒素ガス用バルブ６６及
び６８は閉じ、排気系バルブ６２，６３．６４も閉じて
いる。尚油回転ポンプ６１は常に回転している。After placing the mold containing the glass material in the apparatus, the lid 52 of the vacuum chamber 51 is closed, water is run through the water-cooled vibrator 70, and current is passed through the heater 58. At this time, the nitrogen gas valves 66 and 68 are closed. Exhaust system valves 62, 63, and 64 are also closed. Note that the oil rotary pump 61 is constantly rotating.

バルブ６２を開は排気をはじめ１０−”Ｔｏｒｒ以下に
なったらバルブ６２を閉じ、バルブ６６を開いて窒素ガ
スをボンベより真空槽内に導入する。所定温度になった
らエアシリンダ６０を作動させて２００　ｋｇ／ｃｍ”
の圧力で１分間加圧する。圧力を除去した後、冷却速度
を一り℃／ｉ＋ｉｎで転移点以下になるまで冷却し、そ
の後は一り０℃／ｗｉｎ以上の速度で冷却を行ない、２
００℃以下に下がったらバルブ６６を閉じ、リークバル
ブ６３を開いて真空槽５１内に空気を導入する。それか
らフタ５２を開は上型おさえをはずして成形物を取り出
す。The valve 62 is opened to begin exhaustion, and when the temperature drops below 10-'' Torr, the valve 62 is closed, and the valve 66 is opened to introduce nitrogen gas from the cylinder into the vacuum chamber. When the temperature reaches a predetermined temperature, the air cylinder 60 is activated. 200 kg/cm”
Apply pressure for 1 minute. After removing the pressure, cool at a cooling rate of 1°C/i+in until it becomes below the transition point, then cool at a rate of 0°C/win or more,
When the temperature drops to 00° C. or lower, the valve 66 is closed and the leak valve 63 is opened to introduce air into the vacuum chamber 51. Then, the lid 52 is opened, the upper mold holder is removed, and the molded product is taken out.

上記のようにして、フリント系光学硝子５Ｆ１４（軟化
点５ｐ＝５８６℃、ガラス転移点Ｔｇ＝４８５℃）を使
用して、第２図に示すレンズ５を成形した。As described above, the lens 5 shown in FIG. 2 was molded using the flint optical glass 5F14 (softening point 5p=586° C., glass transition point Tg=485° C.).

この時の成形条件すなわち時間−温度関係図を第６図に
示す。FIG. 6 shows the molding conditions at this time, that is, a time-temperature relationship diagram.

前記型を用いて２００回成形を行なった。Molding was performed 200 times using the mold.

２００回成形後の型では、傷やワレといった欠陥やガラ
ス中に含まれるＰｂＯの還元析出物であるｐｂやガラス
の融着が光学顕微鏡、走査電子顕微鏡（ＳＥＭ）によっ
て観察されなかった。また、成形品についても表面粗さ
、面精度、透過率、形状精度とも良好で、ｐｂの析出や
成形時のガス残りといった問題もなかった。In the mold after 200 moldings, defects such as scratches and cracks, PB, which is a reduced precipitate of PbO contained in glass, and fusion of glass were not observed using an optical microscope or a scanning electron microscope (SEM). Furthermore, the molded product had good surface roughness, surface accuracy, transmittance, and shape accuracy, and there were no problems such as PB precipitation or gas residue during molding.

次に、この型を用いて第７図に示す成形装置により硝子
成形を行なった。Next, using this mold, glass molding was performed using a molding apparatus shown in FIG.

第７図において、１０２は成形装置、１０４は取入れ用
置換室であり、１０６は成形室であり、１０８は蒸着室
であり、１１０は取出し用置換室である。１１２，１１
４，１１６はゲートバルブであり、１１８はレールであ
り、１２０は該レール上を矢印Ａ方向に搬送せしめられ
るパレットである。１２４，１３８，１４０，１５０は
シリンダであり、１２６，１５２はバルブである。In FIG. 7, 102 is a molding device, 104 is a replacement chamber for taking in, 106 is a molding chamber, 108 is a vapor deposition chamber, and 110 is a replacement chamber for taking out. 112, 11
4, 116 is a gate valve, 118 is a rail, and 120 is a pallet that is conveyed in the direction of arrow A on the rail. 124, 138, 140, 150 are cylinders, and 126, 152 are valves.

１２８は成形室１０６内においてレール１１８に沿って
配列されているヒータである。128 is a heater arranged along the rail 118 in the molding chamber 106.

成形室１０６内はパレット搬送方向に沿って順に加熱ゾ
ーン１０６−１、プレスゾーン１０６−２および徐冷ゾ
ーン１０６−３とされている。ブレスゾーン１０６−２
において、上記シリンダ１３８のロッド１３４の下端に
は成形用上型部材１３０が固定されており、上記シリン
ダ１４０のロッド１３６の上端には成形用下型部材１３
２が固定されている。これら上型部材１３０及び下型部
材１３２は本発明による型部材である。Inside the molding chamber 106, a heating zone 106-1, a press zone 106-2, and a slow cooling zone 106-3 are arranged in order along the pallet transport direction. Breath zone 106-2
An upper mold member 130 for molding is fixed to the lower end of the rod 134 of the cylinder 138, and a lower mold member 13 for molding is fixed to the upper end of the rod 136 of the cylinder 140.
2 is fixed. These upper mold member 130 and lower mold member 132 are mold members according to the present invention.

蒸着室１０８内においては、蒸着物質１４６を収容した
容器１４２及び該容器を加熱するためのヒータ１４４が
配置されている。Inside the vapor deposition chamber 108, a container 142 containing a vapor deposition substance 146 and a heater 144 for heating the container are arranged.

クラウン系光学ガラス５Ｋ１２（軟化点５ｐ＝６７２℃
、ガラス転移点Ｔｇ・５５０℃）を所定の形状及び寸法
に粗加工して、成形のためのブランクを得た。Crown type optical glass 5K12 (softening point 5p = 672℃
, glass transition point Tg・550° C.) was roughly processed into a predetermined shape and size to obtain a blank for molding.

ガラスブランクをパレット１２０に装置し、゛取入れ置
換室１０４内の１２０−１の位置へ入れ、該位置のパレ
ットをシリンダ１２４のロッド１２２によりＡ方向に押
してゲートバルブ１１２を越えて成形室１０６内の１２
０−２の位！へと搬送し、以下同様に所定のタイミング
で順次新たに取入れ置換室１０４内にパレットを入れ、
このたびにパレットを成形室１０６内で１２０−２−・
・・−１２０−８の位置へと順次搬送した。この間に、
加熱ゾーン１０６−１ではガラスブランクをヒータ１２
８により徐々に加熱し１２０．−４の位置で軟化点以上
とした上で、プレスゾーン１０６−２へと搬送し、ここ
でシリンダ１３８，１４０を作動させて上型部材１３０
及び下型部材１３２により２００　ｋｇ／ｃｍ”の圧力
、プレス温度６２０℃で１分間プレスし、その後加圧力
を解除しガラス転移点以下まで冷却し、その後シリンダ
１３８゜１４０を作動させて上型部材１３０及び下型部
材１３２をガラス成形品から離型した。該プレスに際し
ては上記パレットが成形周胴型部材として利用された。A glass blank is placed on a pallet 120, placed in a position 120-1 in the intake/displacement chamber 104, and the pallet at that position is pushed in the direction A by the rod 122 of the cylinder 124, passing over the gate valve 112 and into the molding chamber 106. 12
0-2 place! Then, in the same manner, new pallets are sequentially placed into the intake/replacement chamber 104 at predetermined timing.
This time, the pallets were placed in the molding room 106 at 120-2-.
...It was sequentially transported to the position of -120-8. During this time,
In the heating zone 106-1, the glass blank is heated to the heater 12.
8. Gradually heat at 120. -4 position, the temperature is set to above the softening point, and then conveyed to the press zone 106-2, where the cylinders 138 and 140 are operated to remove the upper mold member 130.
The lower die member 132 is pressed for 1 minute at a pressure of 200 kg/cm'' and a press temperature of 620°C, and then the pressure is released and the material is cooled to below the glass transition point.Then, the cylinders 138 and 140 are operated to press the upper die member. 130 and the lower mold member 132 were released from the glass molded product. During the pressing, the above-mentioned pallet was used as a molding peripheral mold member.

しかる後に、徐冷ゾーン１０６−３ではガラス成形品を
徐々に冷却した。尚、成形室１０６内には不活性ガスを
充満させた。Thereafter, the glass molded product was gradually cooled in the slow cooling zone 106-3. Note that the molding chamber 106 was filled with inert gas.

成形室１０６内において１２０−８の位置に到達したパ
レットを、次の搬送ではゲートバルブ１１４　ヲ越エテ
ｉｔｘ　１０　Ｂ内（Ｄ　Ｉ　２０−９（Ｄ位置へと搬
送した。通常、ここで真空蒸着を行なうのであるが、本
実施例では該蒸着を行なわながった。そして、次の搬送
ではゲートバルブ１１６を越えて取出し置換室１１０内
の１２０−１０の位置へと搬送した。そして、次の搬送
時にはシリンダ１５０を作動させてロッド１４８により
ガラス成形品を成形装置１０２外へと取出した。The pallet that has reached the position 120-8 in the molding chamber 106 is then transported to the gate valve 114 (D I 20-9 (D position). Usually, vacuum deposition is performed here. However, in this example, the vapor deposition was not performed.Then, in the next transfer, the evaporation was carried out beyond the gate valve 116 and transferred to the position 120-10 in the extraction and replacement chamber 110. During transportation, the cylinder 150 was operated and the glass molded product was taken out of the molding device 102 by the rod 148.

以上のようなプレス工程により３，０００回成形した後
の型部材の成形面の表面粗さ及び成形された光学素子の
表面粗さ、並びに成形された光学素子と型部材との離型
性は良好であった。The surface roughness of the molding surface of the mold member, the surface roughness of the molded optical element, and the releasability between the molded optical element and the mold member after molding 3,000 times in the above pressing process are as follows: It was good.

特に型の成形面について光学顕微鏡、走査電子顕微鏡（
ＳＥＭ）で観察しても、傷やクラック等の欠陥やｐｂの
析出、ガラスの付着は見られなかった。In particular, the molding surface of the mold is examined using an optical microscope, scanning electron microscope (
Even when observed using a SEM, no defects such as scratches or cracks, precipitation of PB, or adhesion of glass were observed.

叉１１硼呈 実施例１と同様にレーザ加工機により単結晶ダイヤモン
ドを凸形状の曲面に粗加工した。次に、第８図に示す研
磨装置により仕上げ研磨した。第８図中、１６０は単結
晶ダイヤモンド型、１６１は空気軸受、１６２はスカイ
フ皿、１６３はベアリング、１６４は空気軸受、１６５
はスプリング、１６６はモータである。スカイフ皿１６
２を２、　ＯＯＯｒｐｍで回転させながら、常に加工面
の法線方向に一致させるよう相対位置を決め、部分的に
研磨しながら非球面形状に研磨した。EXAMPLE 11 Similar to Example 1, a single crystal diamond was rough-processed into a convex curved surface using a laser processing machine. Next, final polishing was performed using a polishing apparatus shown in FIG. In Fig. 8, 160 is a single crystal diamond type, 161 is an air bearing, 162 is a skiff plate, 163 is a bearing, 164 is an air bearing, 165
is a spring, and 166 is a motor. Skaif plate 16
2 was rotated at OO rpm, the relative position was determined so as to always match the normal direction of the machined surface, and the part was polished into an aspherical shape while partially polished.

この型を用いて実施例１と同様の成形テストを行ない、
実施例１と同様の結果を得た。Using this mold, a molding test similar to that in Example 1 was conducted,
The same results as in Example 1 were obtained.

夫五土１ 実施例１と同様の方法により球面形状に仕上げ研磨した
単結晶ダイヤモンドを、第９図に示す成膜装置に設置し
た。第９図中、１６７はプラズマ室、１６８は単結晶ダ
イヤモンド型、１６９は試料ホルダー　１７０は電磁石
、１７１はガス導入管、１７２はマイクロ波導波管、１
７３はマイクロ波導入窓、１７４は膜厚分布補整マスク
である。まず、装置内を不図示の排気系によりｌＸ１０
−’Ｔｏｒｒに排気した後、ガス供給系１７１より、Ｃ
Ｈ４：　２　ＳＣＣＭ、　　Ｈ２：　４００　ＳＣＣＭ
導入し、ガス圧を８０　Ｔｏｒｒとした。次に、　２．
４５ＧＨｚのマイクロ波をマイクロ波導波管１７２によ
り、マイクロ波導入窓１７３より２ＫＷ投入した。この
とき、外部の電磁石１７０によりマイクロ波導入窓位置
で２，０ＯＯＧａｕｓｓ、型母材位置で８７５　Ｇａｕ
ｓｓとなる発散磁界を形成した。型母材は８００℃に加
熱し回転しながらダイヤモンドの成膜を行なった。型母
材の表面に直前に膜厚補整マスク１７４を置き、型形状
が非球面形状になるようにした。このとき、最も膜厚が
厚いところで５０ｕｍとなるように成膜を行なった。Fugoto 1 A single crystal diamond finished and polished into a spherical shape by the same method as in Example 1 was placed in a film forming apparatus shown in FIG. In Fig. 9, 167 is a plasma chamber, 168 is a single crystal diamond type, 169 is a sample holder, 170 is an electromagnet, 171 is a gas introduction tube, 172 is a microwave waveguide, 1
73 is a microwave introduction window, and 174 is a film thickness distribution correction mask. First, the inside of the device was pumped to lX10 using an exhaust system (not shown).
-'Torr, then from the gas supply system 171, C
H4: 2 SCCM, H2: 400 SCCM
was introduced, and the gas pressure was set at 80 Torr. Next, 2.
A 45 GHz microwave was introduced through a microwave waveguide 172 through a microwave introduction window 173 at a power of 2 kW. At this time, the external electromagnet 170 generates 2,000 Gauss at the microwave introduction window position and 875 Gauss at the mold base material position.
A diverging magnetic field of ss was formed. The mold base material was heated to 800° C. and a diamond film was formed while rotating. A film thickness compensation mask 174 was placed immediately before the surface of the mold base material so that the mold shape became an aspherical shape. At this time, the film was formed so that the thickness was 50 um at the thickest point.

こうして得られた型を用いて実施例１と同様の成形テス
トを行ない、実施例１と同様の結果を得た。A molding test similar to that in Example 1 was conducted using the mold thus obtained, and the same results as in Example 1 were obtained.

叉１１江丘 実施例１と同様の方法により球面形状に仕上げ研磨した
単結晶ダイヤモンドを、実施例３と同様の装置を用い、
膜厚補整マスクと型母材の付置を空洞共振器の出口から
後方に下げ、磁場の大きさが６００　Ｇａｕｓｓの位置
とした。ガスとしてはＣＨ４：２０　ＳＣＣＭを導入し
、ガス圧を８Ｘ１０−’Ｔｏｒｒとした後、マイクロ波
を５００Ｗ投入し、さらに不図示のバイアスＩＩ源によ
り型母材に一６００Ｖのバイアスを印加した状態で、ダ
イヤモンド状炭素膜を型形状が非球面形状になるよう成
膜した。11 Eoka A single crystal diamond finished and polished into a spherical shape by the same method as in Example 1 was polished using the same equipment as in Example 3.
The film thickness correction mask and the mold base material were placed backward from the exit of the cavity resonator, and the magnetic field was placed at a position where the magnitude of the magnetic field was 600 Gauss. After introducing CH4:20 SCCM as the gas and setting the gas pressure to 8X10-'Torr, microwaves of 500 W were applied, and a bias of -600 V was applied to the mold base material by a bias II source (not shown). A diamond-like carbon film was formed so that the mold shape was aspherical.

こうして得られた型を用いて実施例１と同様の成形テス
トを行ない、実施例１と同様の結果を得た。A molding test similar to that in Example 1 was conducted using the mold thus obtained, and the same results as in Example 1 were obtained.

［発明の効果］ 以上説明したように、本発明の光学素子成形用型によれ
ば、型材・料として天然または人工のダイヤモンド結晶
を使用することにより、またこの上に気相合成法により
ダイヤモンド膜またはダイヤモンド状炭素膜を形成する
ことにより、型とガラス成形品の離型性が極めて良好で
、表面粗さ、面精度、透過率、形状精度の良好な成形品
が得られる。更にこの型を用いてプレス成形を長時間繰
り返しても、傷やクラックの発生といった欠陥を生じな
い極めて耐久性の高い光学素子成形用型が得られる。[Effects of the Invention] As explained above, according to the mold for molding an optical element of the present invention, by using natural or artificial diamond crystal as the mold material, and by forming a diamond film thereon by vapor phase synthesis. Alternatively, by forming a diamond-like carbon film, it is possible to obtain a molded product with extremely good releasability between the mold and the glass molded product, and with good surface roughness, surface precision, transmittance, and shape accuracy. Furthermore, even if press molding is repeated for a long time using this mold, an extremely durable mold for molding an optical element can be obtained that does not produce defects such as scratches or cracks.

本発明により得られた光学素子成形用型を用いることに
より、生産性の向上とコストダウンを実現することが可
能となった。By using the mold for molding an optical element obtained according to the present invention, it has become possible to improve productivity and reduce costs.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図及び第２図は本発明に係る光学素子成形用型の一
例を示す断面図であり、第１図は成形前の状態、第２図
は成形後の状態を示す。 第３図は本発明に係る光学素子成形用型の製造に使用す
るレーザ加工機を示す模式断面図である。 第４は本発明に係る光学素子成形用型の製造に使用する
研磨装置を示す模式断面図である。 第５及び第７は本発明に係る光学素子成形用型を使用す
るレンズの成形装置を示す断面図で、第５図は非連続成
形タイプ、第７図は連続成形タイプである。 第６図レンズ成形の際の時間温度関係図である。 第８図は本発明に係る光学素子成形用型の製造に使用す
る研磨装置を示す模式断面図である。 第９図は本発明に係る光学素子成形用型の製造に使用す
る成膜装置（ＥＣＲ−ＰＣＶＤ装置）を示す断面模式図
である。 １・・・単結晶ダイヤモンド型、 ２・・・ろう材、 ３・・・単結晶ダイヤモンド型支持体、４・・・ガラス
素材、 ５・・・成形されたレンズ、 ６・・・レーザ光源、　　　　７川レンズ、８・・・Ｘ
走査ミラー　　　９・・・Ｙ走査ミラー１０・・・集光
光学系、　　　１１・・・型、１２・・・試料ステージ
、　　１３・・・型、１４・・・スカイフ皿、　　　５
１・・・真空槽本体、５２・・・フタ、　　　　　　５
３・・・上型、５４・・・下型、　　　　　　５５・・
・上型おさえ、５６・・・用型、　　　　　５７・・・
型ボルダ−５８・・・ヒーター、　　　　５９・・・つ
き上げ棒、６０・・・エアシリンダ、　６１・・・油回
転ポンプ、６２．６３．６４・・・バルブ。 ６５・・・流入パイプ、　　　６６・・・バルブ、６７
・・・流出パイプ、　　６８・・・バルブ、６９・・・
温度センサ、　　　７ｏ・・・水冷パイプ、７１・・・
台、　　　　　　　１０２・・・成形装置、０４・・・
取入れ用置換室、 ０６・・・成形室、 １０・・・取出し用置換室、 １２・・・ゲートバルブ、 １４・・・ゲートバルブ、１ １８・・・レール、　　　　１ ２２・・・ロッド、　　　　１ ２６・・・バルブ、　　　　１ ３０・・・上型、　　　　　１ ３４・・・ロッド、　　　　１ ３８・・・シリンダ、　　　１ ４２・・・容器、　　　　　１ ４６・・・蒸着物質、　　　１ ５０・・・シリンダ、　　　１ ６０・・・型、　　　　　１ ６２・・・スカイフ皿、　　１ ６４・・・空気軸受、　　　１ ６６・・・モータ、　　　　１ ６８・・・型、　　　　　１ ７０・・・電磁石、　　　　１ １０８・・・蒸着室、 １６・・・ゲートバルブ、 ２０・・・パレット、 ２４・・・シリンダ、 ２８・・・ヒータ、 ３２・・・下型、 ３６・・・ロッド、 ４０・・・シリンダ、 ４４・・・ヒータ、 ４８・・・ロッド、 ５２・・・バルブ、 ６１・・・空気軸受、 ６３・・・ベアリング、 ６５・・・スプリング、 ６７・・・プラズマ室、 ６９・・・試料ホルダー ７１・・・ガス導入管、 ｌ ７２・・・マイクロ波導波管、 １７３・・・マイクロ波導入窓、 ７４・・・膜厚補整マスク。1 and 2 are cross-sectional views showing an example of the mold for molding an optical element according to the present invention, with FIG. 1 showing the state before molding, and FIG. 2 showing the state after molding. FIG. 3 is a schematic cross-sectional view showing a laser processing machine used for manufacturing the mold for molding an optical element according to the present invention. The fourth is a schematic cross-sectional view showing a polishing apparatus used for manufacturing the mold for molding an optical element according to the present invention. 5 and 7 are cross-sectional views showing a lens molding apparatus using the optical element molding mold according to the present invention; FIG. 5 is a discontinuous molding type, and FIG. 7 is a continuous molding type. FIG. 6 is a time-temperature relationship diagram during lens molding. FIG. 8 is a schematic cross-sectional view showing a polishing apparatus used for manufacturing a mold for molding an optical element according to the present invention. FIG. 9 is a schematic cross-sectional view showing a film forming apparatus (ECR-PCVD apparatus) used for manufacturing a mold for molding an optical element according to the present invention. DESCRIPTION OF SYMBOLS 1... Single-crystal diamond type, 2... Brazing material, 3... Single-crystal diamond-shaped support, 4... Glass material, 5... Molded lens, 6... Laser light source, 7 river lens, 8...X
Scanning mirror 9... Y scanning mirror 10... Condensing optical system, 11... Type, 12... Sample stage, 13... Type, 14... Scaife plate, 5
1... Vacuum chamber body, 52... Lid, 5
3... Upper mold, 54... Lower mold, 55...
・Upper mold holding, 56... mold, 57...
Type boulder 58... Heater, 59... Lifting rod, 60... Air cylinder, 61... Oil rotary pump, 62.63.64... Valve. 65...Inflow pipe, 66...Valve, 67
...Outflow pipe, 68...Valve, 69...
Temperature sensor, 7o...Water cooling pipe, 71...
Base, 102... Molding device, 04...
Replacement chamber for intake, 06... Molding chamber, 10... Replacement chamber for takeout, 12... Gate valve, 14... Gate valve, 1 18... Rail, 1 22... Rod, 1 26... Valve, 1 30... Upper mold, 1 34... Rod, 1 38... Cylinder, 1 42... Container, 1 46... Evaporation substance, 1 50... Cylinder, 1 60... type, 1 62... skiff plate, 1 64... air bearing, 1 66... motor, 1 68... type, 1 70... electromagnet, 1 108... vapor deposition Chamber, 16... Gate valve, 20... Pallet, 24... Cylinder, 28... Heater, 32... Lower mold, 36... Rod, 40... Cylinder, 44... Heater, 48... Rod, 52... Valve, 61... Air bearing, 63... Bearing, 65... Spring, 67... Plasma chamber, 69... Sample holder 71... Gas introduction pipe, l 72... Microwave waveguide, 173... Microwave introduction window, 74... Film thickness correction mask.

Claims (2)

【特許請求の範囲】[Claims] １．ガラスよりなる光学素子のプレス成形に用いる光学
素子成形用型において、型母材が天然または人工のダイ
ヤモンド結晶であることを特徴とする光学素子成形用型
。1. An optical element mold used for press molding an optical element made of glass, wherein the mold base material is a natural or artificial diamond crystal. ２．前記型母材上にダイヤモンド膜またはダイヤモンド
状炭素膜が気相合成法により形成され、かつ非球面形状
を有することを特徴とする請求項１記載の光学素子成形
用型。2. 2. The mold for molding an optical element according to claim 1, wherein a diamond film or a diamond-like carbon film is formed on the mold base material by a vapor phase synthesis method and has an aspherical shape.
JP27781890A 1990-10-18 1990-10-18 Optical element forming mold Pending JPH04154635A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27781890A JPH04154635A (en) 1990-10-18 1990-10-18 Optical element forming mold

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27781890A JPH04154635A (en) 1990-10-18 1990-10-18 Optical element forming mold

Publications (1)

Publication Number Publication Date
JPH04154635A true JPH04154635A (en) 1992-05-27

Family

ID=17588694

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27781890A Pending JPH04154635A (en) 1990-10-18 1990-10-18 Optical element forming mold

Country Status (1)

Country Link
JP (1) JPH04154635A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0933656A3 (en) * 1998-02-02 2000-02-09 Matsushita Electric Industrial Co., Ltd. Optical waveguide component and a method of producing the same
JP2009500667A (en) * 2005-07-08 2009-01-08 エレメント シックス リミテッド Single crystal diamond element having a convex surface and processing method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0933656A3 (en) * 1998-02-02 2000-02-09 Matsushita Electric Industrial Co., Ltd. Optical waveguide component and a method of producing the same
JP2009500667A (en) * 2005-07-08 2009-01-08 エレメント シックス リミテッド Single crystal diamond element having a convex surface and processing method thereof
US8309205B2 (en) 2005-07-08 2012-11-13 Element Six Limited Single crystal diamond elements having convex surfaces and methods of its fabrication

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