JPH0414727B2 - - Google Patents
Info
- Publication number
- JPH0414727B2 JPH0414727B2 JP60008705A JP870585A JPH0414727B2 JP H0414727 B2 JPH0414727 B2 JP H0414727B2 JP 60008705 A JP60008705 A JP 60008705A JP 870585 A JP870585 A JP 870585A JP H0414727 B2 JPH0414727 B2 JP H0414727B2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- screw
- counter
- valley
- peak
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007547 defect Effects 0.000 claims description 21
- 238000007689 inspection Methods 0.000 claims description 18
- 230000003287 optical effect Effects 0.000 claims description 12
- 230000008859 change Effects 0.000 claims description 7
- 238000005259 measurement Methods 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 23
- 238000012545 processing Methods 0.000 description 11
- 230000005856 abnormality Effects 0.000 description 5
- 239000002131 composite material Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000003754 machining Methods 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 230000006399 behavior Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000003111 delayed effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Description
【発明の詳細な説明】
［産業上の利用分野］
この発明はねじの加工工程におけるねじ部表面
の欠陥を光学的に検査するねじの表面検査装置に
関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a screw surface inspection device that optically inspects defects on the surface of a screw portion during a screw processing process.
［従来の技術］
この発明に先行して同一出願人より出願された
第１の発明として、光をねじの中心を通る法線に
沿つて照射ならびにねじの軸方向に走査し、この
反射光を光電変換した信号波形の山、谷および稜
線部の変化を検出することにより、ねじの各部の
異常を検出することができる検査装置がある。[Prior Art] As a first invention filed by the same applicant prior to this invention, light is irradiated along the normal line passing through the center of a screw and scanned in the axial direction of the screw, and this reflected light is There is an inspection device that can detect abnormalities in various parts of a screw by detecting changes in peaks, valleys, and ridges of a photoelectrically converted signal waveform.
以下、図に基づいてこの発明に先行する第１の
発明の実施例を説明する。第７図は先行発明にか
かわる検査装置の光学系を示す概略図、第８図は
ねじ部の拡大図、第９図は検出信号の波形図であ
る。図中１は頂角θを有するねじ、２は走査角α
で入射される入射光、３はハーフミラー、４は反
射光を受けて光電変換を行なう光電素子５はねじ
１の山部、６はねじ１の谷部、７はねじ１の稜線
部、８は光電素子４の出力信号波形で、８ａはね
じ１の山部５、８ｂは谷部、８ｃは稜線部にそれ
ぞれ相当する信号部分であり、この第７図におい
て、光はハーフミラー３を経由してねじ１に対
し、好ましくはねじの中心を通る法線に沿つてね
じの軸方向に走査され走査入射光２となる。 Hereinafter, an embodiment of the first invention that precedes this invention will be described based on the drawings. FIG. 7 is a schematic diagram showing the optical system of the inspection device according to the prior invention, FIG. 8 is an enlarged view of the threaded portion, and FIG. 9 is a waveform diagram of the detection signal. In the figure, 1 is a screw with an apex angle θ, 2 is a scanning angle α
3 is a half mirror; 4 is a photoelectric element 5 that receives reflected light and performs photoelectric conversion; 6 is a crest of the screw 1; 7 is a ridge of the screw 1; is the output signal waveform of the photoelectric element 4, 8a is the signal portion corresponding to the crest 5 of the screw 1, 8b is the signal portion corresponding to the trough, and 8c is the signal portion corresponding to the ridge. In this FIG. 7, the light passes through the half mirror 3. The incident light beam 2 is scanned in the axial direction of the screw 1, preferably along a normal line passing through the center of the screw.
かかる構成において、ねじ１からの反射光はハ
ーフミラー３で反射され光電素子４に入光する。
この時の反射光の形態としては、光がねじの法線
に沿つて入射し、軸方向（ねじに直交方向）に走
査しているため、ねじの山部５、谷部６、稜線部
７からの光は同一直線上に伸びることはいうまで
もなく、効率良く光電素子４に入光する。一方、
ねじの形状から考えると、第８図に示すように、
ねじに山部５はあたかも凸面鏡であるかと同様の
作用をし、光を大きな角度で散乱させるのに対
し、ねじの谷部６ではあたかも凹面鏡であるかの
如く作用し、光を集束させることは明らかであ
る。 In this configuration, the reflected light from the screw 1 is reflected by the half mirror 3 and enters the photoelectric element 4.
The form of the reflected light at this time is that the light enters along the normal line of the screw and scans in the axial direction (direction perpendicular to the screw), so the crests 5, troughs 6, and ridges 7 of the screw It goes without saying that the light from the photoelectric element 4 extends in the same straight line and efficiently enters the photoelectric element 4. on the other hand,
Considering the shape of the screw, as shown in Figure 8,
The ridges 5 on the screw act as if it were a convex mirror, scattering light at a large angle, whereas the troughs 6 of the screw act as if it were a concave mirror, and do not focus the light. it is obvious.
上記構成においては、ねじ１から一定以上の距
離をとつて光電素子４を配置したため、ねじ山部
５で散乱する光は検知せず、谷部６からの光が検
知されていた。又、ねじの稜線部７は凸から凹へ
変化する過程であると同時に、各稜線間で多重反
射が発生して複雑なふるまいの反射光になるが、
光線追従の結果、山部５から谷部６に光が移動す
るにつれて最終反射角の変化の絶対値が小さくな
り入射方向に向うことが明らかである。したがつ
て、光電素子４で得られた信号は第９図の如く走
査入射光２の走査域下のねじ山数に一致した規則
正しい繰り返し波形になる。同図において、信号
波形の極大値がねじの谷部６からの信号、信号波
形の極小値がねじの山部５からの信号、極大値が
ねじの山部５からの信号、極大値から極小値に至
る部分がねじの稜線部７に各々対応していること
は明らかである。 In the above configuration, since the photoelectric element 4 is arranged at a distance of a certain distance from the screw 1, the light scattered by the threaded portion 5 is not detected, but the light from the valley portion 6 is detected. Also, the ridgeline 7 of the screw is in the process of changing from convex to concave, and at the same time multiple reflections occur between each ridgeline, resulting in reflected light with a complicated behavior.
As a result of the light ray tracing, it is clear that as the light moves from the peak 5 to the trough 6, the absolute value of the change in the final reflection angle becomes smaller and moves toward the incident direction. Therefore, the signal obtained by the photoelectric element 4 has a regular repeating waveform corresponding to the number of threads under the scanning area of the scanning incident light 2, as shown in FIG. In the figure, the maximum value of the signal waveform is the signal from the trough 6 of the screw, the minimum value of the signal waveform is the signal from the crest 5 of the screw, the maximum value is the signal from the crest 5 of the screw, and the minimum value from the maximum value is the signal from the crest 5 of the screw. It is clear that the parts leading to the values each correspond to a ridge 7 of the thread.
また、この発明に先行して同一出願人より出願
された第２の発明として、光をねじの表面に照射
点を通過する法線に対して所定の角度をもたせて
照射し且つねじの軸方向に平行に走査し、上記ね
じの各部位に対応して分離する各反射光を光電変
換した信号波形の変化を検出することにより、ね
じの各部位の異常を検出すことができるねじの表
面欠陥検査装置がある。 Further, as a second invention filed by the same applicant prior to this invention, light is irradiated onto the surface of a screw at a predetermined angle with respect to the normal passing through the irradiation point, and the axial direction of the screw is Screw surface defects can be detected in each part of the screw by scanning parallel to the surface of the screw and detecting changes in the signal waveform obtained by photoelectrically converting each reflected light that is separated corresponding to each part of the screw. There is testing equipment.
以下、図に基づいてこの発明に先行する第２の
発明の実施例を説明する。第１０図は第２の先行
発明にかかわる検査装置の光学系を示す概略図、
第１１図はねじ部における反射光の経路を示す平
面図、第１２図イ，ロ，ハは各光電素子の出力信
号波形をそぞれ示す波形図である。 Hereinafter, an embodiment of the second invention that precedes this invention will be described based on the drawings. FIG. 10 is a schematic diagram showing the optical system of the inspection device according to the second prior invention;
FIG. 11 is a plan view showing the path of reflected light in the threaded portion, and FIGS. 12A, 12B, and 12C are waveform diagrams showing the output signal waveforms of each photoelectric element, respectively.
図において、１０はねじ１の山部５から反射さ
れる反射光１１はねじ１の稜線部７から反射され
る反射光１２はねじ１の谷部６から反射される反
射光１３，１４，１５は各反射光１０，１１，１
２を受光して光電変換する光電素子、１６はねじ
１の山部の外周円１７はねじ１の谷部の外周円、
２０は光電素子１３の出力信号、２１は光電素子
１５の出力信号、２２は光電素子１４の出力信号
波形である。 In the figure, reference numeral 10 indicates reflected light 11 reflected from the crest 5 of the screw 1, reflected light 12 reflected from the ridge 7 of the screw 1, and reflected light 13, 14, 15 reflected from the trough 6 of the screw 1. are each reflected light 10, 11, 1
2, a photoelectric element that receives light and photoelectrically converts it; 16 is the outer circumference of the crest of the screw 1; 17 is the outer circumference of the trough of the screw 1;
20 is the output signal of the photoelectric element 13, 21 is the output signal of the photoelectric element 15, and 22 is the output signal waveform of the photoelectric element 14.
第１０図において、光は好ましくはねじ１の軸
方向に沿つてなおかつねじ１の中心を通る法線
（図示せず）から大きく外してねじ１に投射、走
査されて走査入射光２となる。この時、第１１図
において明らかなように、まずねじ山部５からの
反射光１０がねじ山外周円１６に対して発生し、
同様にねじ谷部６からの反射光１２がねじ谷外周
円１７に対して発生する。ここで両反射光１０と
１２は両外周円１６と１７の直径の差に起因して
空間的に大きく分離されることは明らかであり、
その途中（間の空間）においてねじ稜線部からの
反射光１１が発生する。一方、走査入射光２はね
じの軸方向に平行に走査されているため、ねじ１
上の沢山ある各ねじ山、ねじ谷、ねじ稜線からの
各反射光は各々一直線上、すなわち第１１図にお
いて各々１０，１２，１１の各反射光の方向に一
致する。したがつて、ねじ１の軸方向に細長く伸
びた形状を有する各光電素子１３，１５，１４で
上記各反射光１０，１２，１１を受け光電変換す
ることによりねじ１の各部位に対する反射信号を
得ることができる。第１２図はこのようにして得
られた信号の一例を示すものであり、２０がねじ
山に対応する出力信号波形、２１が谷に対応する
出力信号波形２２がねじ稜線に対応する出力信号
波形を各々示している。 In FIG. 10, light is projected onto the screw 1 and scanned, preferably along the axial direction of the screw 1 and largely off the normal (not shown) passing through the center of the screw 1, to become a scanning incident light beam 2. At this time, as is clear from FIG. 11, the reflected light 10 from the threaded portion 5 is first generated against the threaded outer circumferential circle 16.
Similarly, reflected light 12 from the thread root portion 6 is generated with respect to the thread root outer circumferential circle 17. It is clear that the reflected lights 10 and 12 are spatially separated largely due to the difference in diameter between the outer circles 16 and 17.
Reflected light 11 from the thread ridgeline portion is generated in the middle (in the space between). On the other hand, since the scanning incident light 2 is scanned parallel to the axial direction of the screw,
The reflected lights from the many screw threads, thread valleys, and thread ridges are aligned in a straight line, that is, in the direction of the reflected lights 10, 12, and 11 in FIG. 11, respectively. Therefore, each of the reflected lights 10, 12, 11 is received and photoelectrically converted by each photoelectric element 13, 15, 14 having a shape elongated in the axial direction of the screw 1, thereby generating a reflected signal for each part of the screw 1. Obtainable. FIG. 12 shows an example of a signal obtained in this way, where 20 is an output signal waveform corresponding to a thread, 21 is an output signal waveform corresponding to a valley, and 22 is an output signal waveform corresponding to a thread ridge. are shown respectively.
同図に示すように、光の走査（時間の経過）に
伴つて、まず出力信号波形２０にパルスが発生
し、以後、出力信号波形２２、出力信号波形２１
の順に発生する。この時、各信号波形は光電素子
１３，１４，１５に入る各反射光１０，１１，１
２が空間的に大きく分離されているため、他の部
分からの反射光の影響を全く受けず安定した出力
信号波形を得ることができる。又、ねじ１の各部
に欠陥が発生した場合、第１２図示すように対応
する部分の反射光が乱れて結果的に対応する各出
力波形２０，２１，２２が乱れるので、これを検
出することにより欠陥を抽出する。 As shown in the figure, as the light scans (time passes), a pulse is first generated in the output signal waveform 20, and then the output signal waveform 22 and the output signal waveform 21.
Occurs in the following order. At this time, each signal waveform is the reflected light 10, 11, 1 entering the photoelectric elements 13, 14, 15.
2 are largely separated spatially, it is possible to obtain a stable output signal waveform without being affected by reflected light from other parts at all. Furthermore, if a defect occurs in each part of the screw 1, the reflected light of the corresponding part will be disturbed as shown in Fig. 12, and as a result, the corresponding output waveforms 20, 21, 22 will be disturbed, so it is necessary to detect this. Defects are extracted by
［発明が解決しようとする問題点］
しかるに、従来の装置は以上のように構成され
ていたので、第１の先行発明では、山信号が小さ
く山に発生する小さな欠陥を検出しにくいという
欠点、また第２の先行発明においては３個の光電
素子と、３個の信号処理回路を必要とし、装置が
複雑高価になるという欠点が各々あつた。[Problems to be Solved by the Invention] However, since the conventional device was configured as described above, the first prior invention has the disadvantage that the peak signal is small and it is difficult to detect small defects occurring in the peaks. Further, the second prior invention requires three photoelectric elements and three signal processing circuits, and each has the disadvantage that the device becomes complicated and expensive.
更に、上記第２の先行発明の光学系において光
学的もしくは電気的手段により信号を合成するこ
とにより、山信号の振幅を大きくすると共に、光
電素子及び信号処理回路を単一にして簡略化した
装置を提案されているが、欠陥発生部位が特定で
きないという問題点を有している。 Furthermore, by combining the signals by optical or electrical means in the optical system of the second prior invention, the amplitude of the mountain signal is increased, and a simplified device is provided in which the photoelectric element and the signal processing circuit are unified. has been proposed, but it has the problem that the location where the defect occurs cannot be identified.
この発明は上記のような問題点を解消するため
になされたもので、表面検査領域をねじの切り終
り部まで拡大することにより、欠陥の発生部位を
特定できるねじの表面検査装置を得ることを目的
とする。 This invention was made to solve the above-mentioned problems, and aims to provide a screw surface inspection device that can identify the location of defects by expanding the surface inspection area to the end of the thread cut. purpose.
［問題点を解決するための手段］
この発明に係る表面検査装置は、表面検査領域
をねじ切り終り部の不完全加工領域まで拡大し
て、不完全加工領域を含んだ連続時系列信号を
得、その中から不完全加工による信号の変化によ
り、ねじ山、谷信号の内の山信号を消去されたも
のを検知することにより、欠陥の発生部位を特定
できるようにしたものである。[Means for solving the problem] The surface inspection device according to the present invention expands the surface inspection area to the incompletely machined area at the end of thread cutting to obtain a continuous time series signal including the incompletely machined area, By detecting among the thread signals where the ridge signal among the thread ridge and valley signals has been erased due to a change in the signal due to incomplete machining, it is possible to identify the location where the defect has occurred.
［作用］
この発明においては、連続時系列信号の最初の
パルス列が不完全加工による信号の変化を含んだ
ものであり、さらに不完全加工は通例としてねじ
の山部にしか発生しないことから、最初のパルス
列は山対応信号を全く含んでいない信号として扱
うことにより、以下連続する信号を山対応信号と
谷対応信号に弁別する。[Operation] In this invention, since the first pulse train of the continuous time-series signal includes signal changes due to incomplete machining, and since incomplete machining usually occurs only at the crest of the thread, By treating the pulse train as a signal that does not include any peak-corresponding signals, subsequent consecutive signals are distinguished into peak-corresponding signals and valley-corresponding signals.
［実施例］
以下、この発明の実施例を図について説明す
る。第４図において、３０はレンズ、３１は光電
素子であり、レンズ３０は望ましくはその設定位
置とレーザ走査光２の試料面上位置からの距離
が、レンズ３０自身の焦点距離よりも長い距離に
なつており、この口径はねじ面からの各反射光を
受光できる大きさを持つている。かかる構成にお
いて、光はねじ１に対して、ねじ軸方向に沿つて
走査され、走査入射光２となり、ねじ１からの反
射光は、ねじ１の山部、谷部、稜部に対応した散
乱をして、レンズ３０に入射し、同レンズ３０で
光電素子３１上に集光される。また、光電素子３
１はレンズ３０の集光位置に設置されており、こ
の時の光電素子３１の出力は第１２図イ，ロ，ハ
の各信号の和になり、１本の信号ライン上の時系
列変化として各信号が発生することはいうまでも
ない。[Example] Hereinafter, an example of the present invention will be described with reference to the drawings. In FIG. 4, 30 is a lens, and 31 is a photoelectric element. The lens 30 is preferably set at a distance from the position of the laser scanning beam 2 on the sample surface that is longer than the focal length of the lens 30 itself. The aperture is large enough to receive each reflected light from the threaded surface. In this configuration, light is scanned along the screw axis direction with respect to the screw 1 and becomes scanning incident light 2, and reflected light from the screw 1 is scattered corresponding to the peaks, valleys, and ridges of the screw 1. The light then enters the lens 30 and is focused onto the photoelectric element 31 by the lens 30. In addition, the photoelectric element 3
1 is installed at the focusing position of the lens 30, and the output of the photoelectric element 31 at this time is the sum of the signals A, B, and C in Figure 12, and is expressed as a time series change on one signal line. It goes without saying that each signal is generated.
第５図はこの時の信号形態を示しており、実際
のねじ表面に対する実験の結果ねじ山に対応する
信号２０が単独で発生し、ねじの谷信号２１と稜
信号２２が合成された新しい信号３５が発生す
る。 FIG. 5 shows the signal form at this time. As a result of experiments on the actual screw surface, a signal 20 corresponding to the thread thread is generated independently, and a new signal is generated by combining the thread valley signal 21 and the ridge signal 22. 35 occurs.
第６図は、この発明の前提技術における実施例
を説明するブロツク図で、３６は加算増幅器、３
７は加算増幅器３６の出力で、加算増幅器３６に
は第１０図の光電素子１３，１４，１５の各出力
２０，２１，２２が入力される。この結果出力３
７には第５図に示すと同じ信号が発生する。 FIG. 6 is a block diagram illustrating an embodiment of the basic technology of the present invention, in which 36 is a summing amplifier;
7 is the output of the summing amplifier 36, into which the outputs 20, 21, and 22 of the photoelectric elements 13, 14, and 15 shown in FIG. 10 are input. This result output 3
7, the same signal as shown in FIG. 5 is generated.
第５図に示す信号において、ねじ山部に異常が
発生すれば対応する山信号２０に、またねじの山
部もしくは稜部分に異常が発生すれば、対応する
合成信号３５に各々変化が発生する。ねじ部に異
常が無い場合は、第９図、第１２図の信号列から
明らかなように、各信号はねじ形状の規則正しい
変化に対応した規則正しい繰返しをするため、第
５図の信号列も山信号２０と合成信号３５が規則
正しく繰返される。したがつて、この規則正しい
繰返し信号の中から異常信号を検出することは周
知の電子回路的な処理手段で容易に実施すること
ができ、その検出方法として通常表面検査に利用
されている方法は、第５図の信号に対して該信号
が欠陥によつて変化する領域に２値化スライスレ
ベル３４を設定して、第５図の波形を“Ｈ”，
“Ｌ”２値のパルス列に変換してその変化を検出
するものである。 In the signals shown in FIG. 5, if an abnormality occurs in a threaded portion, a change occurs in the corresponding peak signal 20, and if an abnormality occurs in a threaded threaded portion or ridge portion, a change occurs in the corresponding composite signal 35. . If there is no abnormality in the threaded part, as is clear from the signal trains in Figures 9 and 12, each signal repeats regularly in response to regular changes in the thread shape, so the signal train in Figure 5 will also be a peak. Signal 20 and composite signal 35 are regularly repeated. Therefore, detecting an abnormal signal from among these regularly repeated signals can be easily carried out using a well-known electronic circuit processing means, and the method usually used for surface inspection is as follows. A binarization slice level 34 is set for the signal in FIG. 5 in a region where the signal changes due to a defect, and the waveform in FIG. 5 is set to "H".
It converts into a binary "L" pulse train and detects its change.
なお、第４図において、レンズ３０は必ずしも
レンズに限定されるものではなく、例えば凹面
鏡、長円鏡等の集光機能を有するもの、あるいは
オプテイカルフアイバ束のように等価的に同一の
機能を有するものに置換えることは可能である。 In addition, in FIG. 4, the lens 30 is not necessarily limited to a lens, but may have a condensing function such as a concave mirror or an elliptical mirror, or may have an equivalent function such as an optical fiber bundle. It is possible to replace it with what you already have.
しかしながら、第５図のようなアナログ波形で
は、変化信号が山信号であるか谷・稜合成信号で
あるかは明らかであるが、例えば第５図のスライ
スレベル３４で２値化されたパルス列において
は、ほぼ等しい幅のパルスが続くため、上記のよ
うな欠陥発生信号がどちらかに属しているかの識
別は不可能であつた。一方、欠陥の発生部位とい
うのは、一般に表面検査においては、ノイズ消
去、同一欠陥であることの認識、周期欠陥の認
識、欠陥ランクの定義等のために非常に重要な情
報であるとされており、したがつて、欠陥発生部
位が特定できないということが最大の問題となつ
ていた。そこで、この発明は上記のような問題点
に鑑み、表面検査領域をねじの切り終り部まで拡
大することにより、欠陥の発生部位を特定できる
ようにするものである。 However, in the analog waveform shown in FIG. 5, it is clear whether the changing signal is a peak signal or a valley/edge composite signal, but for example, in the pulse train binarized at slice level 34 in FIG. Since the pulses of approximately the same width continue, it is impossible to identify which type the defect occurrence signal belongs to. On the other hand, the location of a defect is generally considered to be very important information in surface inspection for noise cancellation, recognition of the same defect, recognition of periodic defects, definition of defect rank, etc. Therefore, the biggest problem has been that the site where the defect occurs cannot be identified. In view of the above-mentioned problems, the present invention extends the surface inspection area to the end of thread cutting, thereby making it possible to specify the location where the defect occurs.
以下、この発明の具体的一実施例を図について
説明する。第１図はこの発明における信号処理回
路図、第２図はねじの断面形状を簡略表現した概
略図、第３図は第２図のねじに対して、第４図の
光学系で得られた波形、および第１図の信号処理
回路で、山、谷等の各部位信号を得る処理を説明
するブロツク波形図である。図において、５は完
全ねじ山、６は完全ねじ谷、９は不完全ねじ山、
４０は増幅器、４１はスライスレベル３４を持つ
波形整形器、４４はスイツチ、４５はプリセツト
カウンタ、４６は発振器、４７はメモリ、４８は
プリセツトカウンタ、４９はメモリ、４３は波形
整形器出力、５０は谷部位確定信号、５１は山部
位確定信号である。 Hereinafter, a specific embodiment of the present invention will be described with reference to the drawings. Fig. 1 is a signal processing circuit diagram according to the present invention, Fig. 2 is a schematic representation of the cross-sectional shape of the screw, and Fig. 3 is a signal processing circuit diagram for the screw shown in Fig. 2 obtained with the optical system shown in Fig. 4. FIG. 2 is a block waveform diagram illustrating waveforms and processing for obtaining signals of each region such as peaks and valleys in the signal processing circuit of FIG. 1; In the figure, 5 is a complete thread, 6 is a complete thread, 9 is an incomplete thread,
40 is an amplifier, 41 is a waveform shaper with slice level 34, 44 is a switch, 45 is a preset counter, 46 is an oscillator, 47 is a memory, 48 is a preset counter, 49 is a memory, 43 is a waveform shaper output, 50 is a valley part determination signal, and 51 is a peak part determination signal.
第２図において光（図示せず）はねじ１の不完
全ねじ部９から完全ねじ部５の方向に向つて走査
される。この時光電素子の出力は第３図ａに示す
如く、不完全ねじ部９の信号が異常となり、完全
ねじ部５，６とに対しては第５図の如く信号２０
もしくは３５が発生する。この時、不完全ねじ部
９では前述の如く信号に異常が発生することが明
らかであることから、第３図ａの信号列の最初の
数パルスは、明らかにねじ山信号を含まないもの
となる。したがつて、このパルスをねじの谷およ
び稜の合成信号３５であると特定することは可能
である。 In FIG. 2, light (not shown) is scanned from the incompletely threaded portion 9 of the screw 1 in the direction of the fully threaded portion 5. In FIG. At this time, the output of the photoelectric element is as shown in FIG. 3a, the signal for the incompletely threaded portion 9 becomes abnormal, and the signal for the fully threaded portions 5 and 6 becomes 20 as shown in FIG.
Or 35 will occur. At this time, since it is clear that an abnormality occurs in the signal at the incompletely threaded portion 9 as described above, the first few pulses of the signal train in Fig. 3a clearly do not contain a thread signal. Become. Therefore, it is possible to identify this pulse as the composite signal 35 of the thread valley and ridge.
第１図の信号処理回路において、増幅器４０の
出力４１は波形整形器４２にとつてスライスレベ
ル３４で２値化され、第３図ｂのようなパルス列
となる。ここで信号３５はスライスレベル３４の
ように、信号３５の尖鋭な部分を扱つた時には谷
信号の位置を示し、信号３５の裾の広がつた部分
が稜部分に対応するものである。 In the signal processing circuit shown in FIG. 1, the output 41 of the amplifier 40 is binarized by the waveform shaper 42 at the slice level 34, resulting in a pulse train as shown in FIG. 3b. Here, the signal 35 indicates the position of a valley signal when handling a sharp portion of the signal 35 like the slice level 34, and the widened portion of the signal 35 corresponds to a ridge portion.
第１図構成において信号４３はスイツチ４４を
経由してプリセツトカウンタ４５に入力する。こ
の時プリセツトカウンタ４５の信号４１のパルス
間隔T0を発振器４６の出力クロツクを計数する
ことによつて計測し、該計数値はすぐにメモリ４
７に収納される。この時、同時にスイツチ４４が
開かれて、信号４３は切れてしまうが、メモリ４
７の収納値がプリセツトカウンタ４５に与えら
れ、プリセツトカウンタはT0の時間を再び発振
器出力４６のクロツクを計数することにより発生
し、T0に達した時にパルスを発生して再びメモ
リ４７の内容を取り込み、以降連続してパルス間
隔T0のパルス列５０を発生する。また、第２の
プリセツトカウンタ４８は、パルス列４３を受け
てメモリ４９に予め収納されているデータをプリ
セツトして発振器４６の出力クロツクを計数する
ことによりパルス列４３からT1ずつ時間の遅れ
たパルス列５１を発生する。この時T1の値をね
じ山信号が発生する位置に調整してメモリ４９に
記憶させる作業は容易であり、しかも信号列４１
はねじの山、谷の規則正しい繰返しに対応して、
規則正しい時間毎に繰返し発生することは明らか
であり、したがつて第３図のパルス列５０は谷確
定部位、５１は山確定部位を示していることは明
らかである。また、特に例示はしていないが、ね
じの稜部分は信号３５の裾広がり部分に対応して
おり、その部分、パルス列５０と５１をOR処理
したパルス列の空白部に該当することはいうまで
もない。 In the configuration of FIG. 1, signal 43 is input to preset counter 45 via switch 44. At this time, the pulse interval T0 of the signal 41 of the preset counter 45 is measured by counting the output clock of the oscillator 46, and the counted value is immediately stored in the memory 4.
It is stored in 7. At this time, the switch 44 is opened at the same time and the signal 43 is cut off, but the memory 4
The stored value of 7 is given to the preset counter 45, which is generated by counting the clock of the oscillator output 46 again for the time T0 , and when T0 is reached, it generates a pulse and stores it again in the memory 47. After that, a pulse train 50 with a pulse interval T 0 is continuously generated. Further, the second preset counter 48 receives the pulse train 43, presets the data stored in advance in the memory 49, and counts the output clock of the oscillator 46, thereby generating a pulse train delayed by T1 from the pulse train 43. 51 is generated. At this time, it is easy to adjust the value of T 1 to the position where the thread signal is generated and store it in the memory 49.
corresponds to the regular repetition of the ridges and valleys of the thread,
It is clear that the pulse train occurs repeatedly at regular intervals, and therefore it is clear that the pulse train 50 in FIG. 3 shows the valley-defined region, and the pulse train 51 shows the peak-defined region. Although not specifically illustrated, the ridge of the screw corresponds to the widening part of the signal 35, and it goes without saying that this part corresponds to the blank part of the pulse train obtained by ORing the pulse trains 50 and 51. do not have.
なお、上記実施例では光走査方向を不完全ねじ
部９から完全ねじ部５に進行する方向で説明した
が、その逆の方向に光が進行する場合、不完全ね
じ部９は走査の最後に発生することになる。この
時は検査結果としての欠陥の発生位置を記憶して
不完全ねじ部に基づく谷信号部位確定信号から、
所定パルス幅毎に逆上つて欠陥部位を特定する
か、一回目の走査結果において測定した谷信号山
信号部位を記憶して次回からの測定に利用するこ
とも可能である。 In the above embodiment, the light scanning direction was explained as the direction in which the light travels from the incompletely threaded portion 9 to the fully threaded portion 5. However, when the light travels in the opposite direction, the incompletely threaded portion 9 is scanned at the end of the scan. will occur. At this time, the location of the defect as an inspection result is memorized and the valley signal based on the incomplete thread part is determined.
It is also possible to specify the defective part by reversing the pulse width every predetermined pulse width, or to store the valley signal peak signal part measured in the first scan result and use it for the next measurement.
［発明の効果］
以上のように、この発明によれば、検査領域を
ねじの不完全加工領域まで拡張して、不完全加工
に伴ないねじの山信号が消えて谷信号だけになる
領域を利用して谷信号部位を、また谷信号部位か
ら一定の時間遅れを伴なつた山信号部位を各々特
定できる信号を作り出すことにより、検出した欠
陥の発生位置が、山に発生しているかまたは谷に
発生しているかを特定できる利点が得られる。[Effects of the Invention] As described above, according to the present invention, the inspection area is extended to the incompletely machined area of the thread, and the area where the crest signal of the thread disappears due to incomplete processing and only the valley signal remains. By using this method to generate signals that can identify the valley signal region and the peak signal region with a certain time delay from the valley signal region, the position of the detected defect can be determined whether it is occurring on a peak or a valley. This has the advantage of being able to identify what is occurring.
第１図はこの発明に係る信号処理回路の一実施
例を示す回路図、第２図はねじの断面部位の簡略
概略図、第１図光学系で得られた信号波形図、第
３図ａ〜ｄは第１図の回路図における各部動作波
形図、第４図はこの発明の前提技術となる光学系
の概略構成図、第５図は第４図における出力波形
図、第６図は第４図に対応する電気回路図、第７
図は第１の先行発明における光学系の概略図、第
８図はねじの各部における光のふるまいを説明す
る説明図、第９図は第７図の光学系において得ら
れる信号波形図、第１０図は第２の先行発明にお
ける光学系の概略図、第１１図はねじ部における
反射光の経路を示す平面図、第１２図イ，ロ，ハ
は各光電素子の出力信号波形図である。
図中、１はねじ、２は入射光、５は山部、６は
谷部、７は稜線部、１５は増幅器、１６は波形整
形器、１７はスイツチ、１８はカウンタ、１９は
発振器、２０はメモリ、２１はカウンタ、２２は
メモリ、２３は２値化信号、２４は谷部位確定信
号、２５は山部位確定信号、３０はレンズ、３１
は光電素子、３６は加算器である。なお、図中、
同一符号は同一もしくは相当部位を示す。
Fig. 1 is a circuit diagram showing an embodiment of the signal processing circuit according to the present invention, Fig. 2 is a simplified schematic diagram of a cross-sectional area of a screw, Fig. 1 is a signal waveform diagram obtained by the optical system, Fig. 3 is a -d are operation waveform diagrams of each part in the circuit diagram of Fig. 1, Fig. 4 is a schematic configuration diagram of the optical system which is the premise technology of this invention, Fig. 5 is an output waveform diagram in Fig. 4, and Fig. 6 is a diagram of the output waveforms in Fig. 4. Electrical circuit diagram corresponding to Figure 4, No. 7
The figure is a schematic diagram of the optical system in the first prior invention, Figure 8 is an explanatory diagram explaining the behavior of light in each part of the screw, Figure 9 is a signal waveform diagram obtained in the optical system of Figure 7, and Figure 10 is a diagram of the signal waveform obtained in the optical system of Figure 7. The figure is a schematic diagram of the optical system in the second prior invention, FIG. 11 is a plan view showing the path of reflected light in the screw portion, and FIG. 12 A, B, and C are output signal waveform diagrams of each photoelectric element. In the figure, 1 is a screw, 2 is an incident light, 5 is a peak, 6 is a valley, 7 is a ridge, 15 is an amplifier, 16 is a waveform shaper, 17 is a switch, 18 is a counter, 19 is an oscillator, 20 21 is a counter, 22 is a memory, 23 is a binarized signal, 24 is a valley part determination signal, 25 is a peak part determination signal, 30 is a lens, 31
is a photoelectric element, and 36 is an adder. In addition, in the figure,
The same reference numerals indicate the same or equivalent parts.
Claims (1)
光することにより該ねじの表面を検査するねじの
表面検査装置において、ねじの山と谷の各部信号
を単一の信号ライン上の時系列変化信号として測
定する測定手段を備えるとともに、検査開始領域
をねじ山加工がなされていないねじの不完全加工
領域まで拡大することにより、ねじの山信号、谷
信号の内の山信号を消去して谷信号列のみを得る
谷信号確定手段と、完全ねじ部において上記谷信
号列からねじの1/2ピツチに相当する時間遅れで
発生する信号列を山信号列として確定する山信号
確定手段を備え、上記山、谷信号列のいずれかに
欠陥が発生したかを検出して欠陥の発生部位を特
定することを特徴としたねじの表面検査装置。 ２ 谷信号確定手段として、時系列変化信号を適
当なスライスレベルで２値化する波形整形器、該
波形整形器から出力される最初の２パルス間のパ
ルス間隔を測定する第１のカウンタ、該第１のカ
ウンタの計算値を受けてその値を記憶すると同時
に、該記憶値を第１のカウンタのプリセツト値と
して払い出し、該第１のカウンタを該計算値如の
パルス列を発生させるようにした第１のメモリを
備えるとともに、山信号確定手段として、該第１
のカウンタから送出されるパルス列の一定間隔の
時間遅れ量を指定する第２のメモリ、該第２のメ
モリの値をプリセツト値とし、かつ該第１のカウ
ンタからの出力とトリガとして一定のパルス列を
発生させる第２のカウンタを備え、該第１のカウ
ンタの出力パルス列、該第２のカウンタの出力パ
ルス列を山谷の部位確定信号とし、第１のカウン
タの出力パルス列と、第２のカウンタの出力パル
ス列のオア出力パルス列の空白部位を稜部位確定
信号としたことを特徴とする特許請求の範囲第１
項記載のねじの表面検査装置。 ３ 谷、山信号を確定する手段として、予め欠陥
の位置を記憶した後、不完全ねじ部の山信号乱れ
から谷信号部位を特定して、所定パルス幅毎に逆
上るか、または、第１回目の光走査結果から該不
完全ねじ部の山信号乱れを利用して、谷信号、山
信号部位を特定し、該特定部位を記憶して次回か
らの測定に用いることを特徴とする特許請求の範
囲第１項記載のねじの表面検査装置。[Scope of Claims] 1. In a screw surface inspection device that inspects the surface of a screw by scanning light in the axial direction of the screw and receiving the reflected light, signals for each part of the crests and valleys of the screw are transmitted in a single manner. It is equipped with a measuring means that measures time-series change signals on the signal line, and by expanding the inspection start area to the incompletely machined area of the screw where the thread has not been machined, the inner part of the thread crest and valley signals can be measured. A means for determining a valley signal by erasing the peak signal to obtain only a valley signal train, and determining a signal train generated at a time delay corresponding to 1/2 pitch of the thread from the valley signal train in a completely threaded part as a mountain signal train. What is claimed is: 1. A screw surface inspection device, comprising: a peak signal determining means for detecting whether a defect has occurred in either the peak or valley signal array, and specifying the location where the defect has occurred. 2. As a valley signal determination means, a waveform shaper that binarizes the time-series changing signal at an appropriate slice level, a first counter that measures the pulse interval between the first two pulses output from the waveform shaper, and The second counter receives the calculated value of the first counter and stores the value, and at the same time outputs the stored value as a preset value of the first counter, causing the first counter to generate a pulse train according to the calculated value. 1 memory, and the first memory serves as a peak signal determining means.
a second memory for specifying the amount of time delay at fixed intervals for the pulse train sent out from the counter; the value of the second memory is used as a preset value; and the fixed pulse train is used as the output from the first counter and the trigger; The output pulse train of the first counter and the output pulse train of the second counter are used as peak and valley part determination signals, and the output pulse train of the first counter and the output pulse train of the second counter are provided. Claim 1, characterized in that the blank portion of the OR output pulse train is used as the edge portion determination signal.
The surface inspection device for screws described in Section 1. 3. As a means of determining the valley and peak signals, after memorizing the position of the defect in advance, the valley signal part is identified from the disturbance of the peak signal of the incomplete thread part, and it is reversed at every predetermined pulse width, or the first A patent claim characterized in that valley signal and peak signal areas are specified by using the peak signal disturbance of the incomplete thread part from the results of the second optical scanning, and the specific areas are memorized and used for the next measurement. Scope 1. The screw surface inspection device according to item 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP870585A JPS61167807A (en) | 1985-01-21 | 1985-01-21 | Inspecting instrument for surface of screw |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP870585A JPS61167807A (en) | 1985-01-21 | 1985-01-21 | Inspecting instrument for surface of screw |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61167807A JPS61167807A (en) | 1986-07-29 |
| JPH0414727B2 true JPH0414727B2 (en) | 1992-03-13 |
Family
ID=11700350
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP870585A Granted JPS61167807A (en) | 1985-01-21 | 1985-01-21 | Inspecting instrument for surface of screw |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61167807A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007017747B4 (en) * | 2007-04-12 | 2009-05-07 | V & M Deutschland Gmbh | Method and device for the optical measurement of external threads |
| JP4965495B2 (en) * | 2008-03-31 | 2012-07-04 | トヨタ自動車株式会社 | Method and apparatus for inspecting screws |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57165705A (en) * | 1981-04-06 | 1982-10-12 | Nippon Kokan Kk <Nkk> | Tester for screw member |
-
1985
- 1985-01-21 JP JP870585A patent/JPS61167807A/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57165705A (en) * | 1981-04-06 | 1982-10-12 | Nippon Kokan Kk <Nkk> | Tester for screw member |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61167807A (en) | 1986-07-29 |
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