JPH04142757A - Acceleration detector - Google Patents
Acceleration detectorInfo
- Publication number
- JPH04142757A JPH04142757A JP26737390A JP26737390A JPH04142757A JP H04142757 A JPH04142757 A JP H04142757A JP 26737390 A JP26737390 A JP 26737390A JP 26737390 A JP26737390 A JP 26737390A JP H04142757 A JPH04142757 A JP H04142757A
- Authority
- JP
- Japan
- Prior art keywords
- acceleration
- detection device
- acceleration detection
- semiconductor
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000001133 acceleration Effects 0.000 title claims abstract description 66
- 238000001514 detection method Methods 0.000 claims abstract description 35
- 239000000758 substrate Substances 0.000 claims description 12
- 230000005484 gravity Effects 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 abstract description 18
- 238000000034 method Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 2
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、半導体等の加速度検出装置に関するもので
ある。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to an acceleration detection device such as a semiconductor.
第３図は従来のこの種半導体加速度検出装置を示す図で
、図において、１は例えば加速度に応じてたわむ部材に
取付けられたゲージ抵抗の抵抗値の変化によってブリッ
ジ回路のバランスが崩れて出力信号が導出される半導体
加速度検出装置本体、２は半導体加速度検出装置本体１
の底面に取り付けられた基板、３け可動部４を介して基
板２に矢印５方向の振動を与える加振装置、６は重力方
向を示す矢印である。FIG. 3 is a diagram showing a conventional semiconductor acceleration detection device of this type. In the figure, 1 indicates, for example, a change in the resistance value of a gauge resistor attached to a member that bends in response to acceleration causes the bridge circuit to become unbalanced, resulting in an output signal. 2 is the semiconductor acceleration detection device main body 1 from which is derived.
A vibration excitation device applies vibration to the substrate 2 in the direction of arrow 5 through three movable parts 4, and 6 is an arrow indicating the direction of gravity.
この従来のものでは、半導体加速度検圧装置本体１は重
力方向６と平行に基板２に装着されているため、加振装
置３が動作していないと加速度が加えられず、出力信号
は導出されない。加振装置３が可動部４を矢印５の向き
に動がし始めると、半導体加速度検出装置本体１に矢印
５の向きに加速度が印加され、その加速匿に対する出力
信号が導出される。In this conventional device, the semiconductor acceleration pressure detection device main body 1 is attached to the substrate 2 in parallel to the direction of gravity 6, so if the vibration device 3 is not operating, no acceleration is applied and no output signal is derived. . When the vibration device 3 starts moving the movable part 4 in the direction of the arrow 5, acceleration is applied to the semiconductor acceleration detection device main body 1 in the direction of the arrow 5, and an output signal corresponding to the acceleration is derived.
従来の半導体加速度検出装置は、このように構成されて
いるので、加振することが必要であり、精度よく半導体
加速度検出装置の加速度に対する出力信号を得ることが
困難であるなどの問題があった。Since conventional semiconductor acceleration detection devices are configured in this way, it is necessary to excite the device, and there have been problems such as difficulty in obtaining an output signal corresponding to the acceleration of the semiconductor acceleration detection device with high accuracy. .
この発明はこのような問題点を解消するためになされた
もので、加速度検出装置本体を加振せずに高精度で加速
度に対する一出力信号を得る加速度検出装置を得ること
を目的とする。The present invention has been made to solve these problems, and an object of the present invention is to provide an acceleration detection device that can obtain an output signal for acceleration with high precision without exciting the main body of the acceleration detection device.
この発明に係る加速度検出装置は、所定方向の加速度を
検出する加速度検出装置本体が取付けられた基板を回転
装置によって回転させることによって加速度検出装置本
体の加速度検出方向に基板の回転角の余弦と重力の積か
らなる加速度を印加するようにしたものである。The acceleration detection device according to the present invention rotates the substrate on which the acceleration detection device main body for detecting acceleration in a predetermined direction is attached by a rotating device, so that the cosine of the rotation angle of the substrate and the gravity are applied to the acceleration detection direction of the acceleration detection device main body. It is designed to apply an acceleration consisting of the product of .
この発明における加速度検出装置本体は回転によって重
力と基板の回転角の余弦との積からなる加速度が印加さ
れるよう構成されているので、装置本体に振動が加えら
れないので高精度で出力信号が得られる。The main body of the acceleration detection device according to the present invention is configured so that an acceleration consisting of the product of gravity and the cosine of the rotation angle of the substrate is applied as it rotates, so no vibration is applied to the main body of the device, so the output signal can be output with high accuracy. can get.
以下この発明の一実施例を第１図および第２図にもとづ
いて説明する。即ち第１図および第２図において、７は
回転軸８を介して基板２を回転させる回転装置、９は半
導体加速度検出装置本体１に加わる重力が加速度６１と
基板２の水平方向１０に対する回転角θの余弦との積の
加速度である検出加速度である。なお、その他の構成は
第３図に示す従来のものと同様であるので説明を省略す
る。An embodiment of the present invention will be described below with reference to FIGS. 1 and 2. That is, in FIGS. 1 and 2, 7 is a rotating device that rotates the substrate 2 via a rotating shaft 8, and 9 is a rotating device that causes the gravity applied to the semiconductor acceleration detection device main body 1 to be applied to the acceleration 61 and the rotation angle of the substrate 2 with respect to the horizontal direction 10. This is the detected acceleration which is the acceleration multiplied by the cosine of θ. Note that the other configurations are the same as the conventional one shown in FIG. 3, so explanations will be omitted.
このように構成されたものでは、半導体加速度検出装置
本体１か水平になっている場合、回転角θはＯであり、
検出加速度９は車力加速度１（）（＝９．８ｍ／θ２）
である。半導体加速度検出装置本体１を回転装置７を使
い回転させて回転角θを９０にとした場・会、検出加速
度９は００（＝Ｃｍ、／θ２）である。半導体加速度検
出装置本体１を虹に回転させ回転角θを１８０度とする
と、検出加速度９は−１（）である。従って半導体加速
度検出装置本体には−ＩＧからＩＧまでの加速度が加え
られる。With this configuration, when the semiconductor acceleration detection device main body 1 is horizontal, the rotation angle θ is O,
Detected acceleration 9 is vehicle force acceleration 1 () (=9.8m/θ2)
It is. When the semiconductor acceleration detection device body 1 is rotated using the rotation device 7 and the rotation angle θ is 90, the detected acceleration 9 is 00 (=Cm, /θ2). When the semiconductor acceleration detection device main body 1 is rotated in a rainbow pattern and the rotation angle θ is 180 degrees, the detected acceleration 9 is −1(). Therefore, acceleration from -IG to IG is applied to the main body of the semiconductor acceleration detection device.
北記のようにこの発明による半導体加速度検出装置は、
半導体加速度検出装置本体を回転させることに二って、
−１（） ｙｊ・らＩＧまでの加速度を加えることがで
さ、加速度検出装置本体に加えられた加速度に対する出
力特性を高精度で得ることができる。As described in Kitaki, the semiconductor acceleration detection device according to the present invention has the following features:
Two things about rotating the semiconductor acceleration detection device body are:
-1() By adding the acceleration from yj· to IG, it is possible to obtain highly accurate output characteristics with respect to the acceleration applied to the main body of the acceleration detection device.
第１図および第２図はこの発明の一実施例を示す図で、
第１図は側面図、第２図は作用説明用の正面図、第３図
は従来のこの種加速度検出装置を示す側面図である。
図中、１は半導体加速度検出装置本体、２は基板、３は
加振装置、４は可動部、５は可動方向、６は重力方向、
７は回転装置、８は回転軸、９は検出加速度、１０は水
平方向を示す０
なお図中同一符号は同一または相当部分を示す。FIG. 1 and FIG. 2 are diagrams showing one embodiment of this invention,
FIG. 1 is a side view, FIG. 2 is a front view for explaining the operation, and FIG. 3 is a side view showing a conventional acceleration detection device of this type. In the figure, 1 is the main body of the semiconductor acceleration detection device, 2 is the substrate, 3 is the vibration device, 4 is the movable part, 5 is the movable direction, 6 is the direction of gravity,
7 is a rotating device, 8 is a rotating shaft, 9 is a detected acceleration, and 10 is 0 indicating a horizontal direction. In the drawings, the same reference numerals indicate the same or corresponding parts.
Claims (1)
の加速度検出装置本体が取付けられた基板、この基板を
回転する回転装置を備え、上記基板を回転させることに
よつて上記加速度検出装置本体の加速度検出方向に加え
られる上記基板の回転角の余弦と重力との積からなる加
速度を検出するようにしたことを特徴とする加速度検出
装置。An acceleration detection device main body that detects acceleration in a predetermined direction, a substrate to which this acceleration detection device main body is attached, and a rotation device that rotates this substrate, and detects the acceleration of the acceleration detection device main body by rotating the substrate. An acceleration detection device characterized in that the acceleration is detected by the product of the cosine of the rotation angle of the substrate applied in a direction and gravity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26737390A JPH04142757A (en) | 1990-10-03 | 1990-10-03 | Acceleration detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26737390A JPH04142757A (en) | 1990-10-03 | 1990-10-03 | Acceleration detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04142757A true JPH04142757A (en) | 1992-05-15 |
Family
ID=17443938
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26737390A Pending JPH04142757A (en) | 1990-10-03 | 1990-10-03 | Acceleration detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04142757A (en) |
-
1990
- 1990-10-03 JP JP26737390A patent/JPH04142757A/en active Pending
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