JPH04134610A - Perpendicular recording thin film magnetic head and its manufacturing - Google Patents
Perpendicular recording thin film magnetic head and its manufacturingInfo
- Publication number
- JPH04134610A JPH04134610A JP25330890A JP25330890A JPH04134610A JP H04134610 A JPH04134610 A JP H04134610A JP 25330890 A JP25330890 A JP 25330890A JP 25330890 A JP25330890 A JP 25330890A JP H04134610 A JPH04134610 A JP H04134610A
- Authority
- JP
- Japan
- Prior art keywords
- ferrite
- coil
- magnetic head
- thin film
- recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 18
- 238000004519 manufacturing process Methods 0.000 title description 6
- 229910000859 α-Fe Inorganic materials 0.000 claims abstract description 42
- 239000011521 glass Substances 0.000 claims abstract description 11
- 239000000696 magnetic material Substances 0.000 claims abstract description 10
- 239000011347 resin Substances 0.000 claims abstract description 6
- 229920005989 resin Polymers 0.000 claims abstract description 6
- 230000004907 flux Effects 0.000 claims description 9
- 239000000463 material Substances 0.000 claims description 5
- 238000007517 polishing process Methods 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims 2
- 238000000034 method Methods 0.000 abstract description 16
- 230000008569 process Effects 0.000 abstract description 10
- 239000010408 film Substances 0.000 abstract description 9
- 238000007747 plating Methods 0.000 abstract description 5
- 229910003962 NiZn Inorganic materials 0.000 abstract description 4
- 238000004544 sputter deposition Methods 0.000 abstract description 3
- 238000005520 cutting process Methods 0.000 abstract description 2
- 239000000758 substrate Substances 0.000 abstract description 2
- WHOPEPSOPUIRQQ-UHFFFAOYSA-N oxoaluminum Chemical compound O1[Al]O[Al]1 WHOPEPSOPUIRQQ-UHFFFAOYSA-N 0.000 abstract 2
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 10
- 230000000694 effects Effects 0.000 description 4
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- 238000005304 joining Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
〔概要〕
垂直記録用磁気ヘッドおよびその製造方法に関し、
周波数特性が優れまた能率的製造が可能な薄膜磁気ヘッ
ドを提供することを目的し、
主磁極と磁気的に結合され、磁束のリターンバスとなる
フェライト部材の一面を非磁性材料を介してフェライト
シールド部材が取り囲み、かつ他面を開放面とするよう
に、両フェライト部材を接合し、記録再生用コイルをフ
ェライト部材と非磁性材料の前記開放面にスパイラル状
に延在するように設けてなる垂直記録用薄膜磁気ヘッド
において、記録再生用コイルの全体もしくはその大部分
が収納できる深さの環状の溝部を前記フェライト部材と
非磁性材料の開放面に形成し、溝部内にスパイラルコイ
ルを樹脂絶縁層を介して形成するように構成する。[Detailed Description of the Invention] [Summary] Regarding a magnetic head for perpendicular recording and a method for manufacturing the same, the present invention aims to provide a thin film magnetic head that has excellent frequency characteristics and can be manufactured efficiently. Both ferrite members are bonded so that one side of the ferrite member, which serves as a magnetic flux return bus, is surrounded by a ferrite shield member via a non-magnetic material, and the other side is open, and the recording/reproducing coil is connected to the ferrite member. In the thin film magnetic head for perpendicular recording, which is provided so as to extend spirally on the open surface of the non-magnetic material, an annular groove portion having a depth capable of accommodating the whole or most of the recording/reproducing coil is formed by using the ferrite material. The spiral coil is formed on the open surface of the member and the nonmagnetic material, and a spiral coil is formed in the groove via a resin insulating layer.
［産業上の利用分野］
本発明は磁気ディスク装置又は磁気テープ装置などの磁
気記録装置に搭載される薄膜磁気ヘッドに関するもので
あり、特に渦電流損失に起因する周波数特性の劣化のな
い垂直記録用磁気ヘッド、ならびにその製造方法を提供
することを目的としている。[Industrial Field of Application] The present invention relates to a thin film magnetic head installed in a magnetic recording device such as a magnetic disk device or a magnetic tape device, and particularly to a thin film magnetic head for perpendicular recording without deterioration of frequency characteristics caused by eddy current loss. The object of the present invention is to provide a magnetic head and a method for manufacturing the same.
垂直記録はこれまで用いられてきている水平記録の限界
を打破する可能性のある高密度記録方式として注目され
ており、磁気ヘッドにも一層の高性能化が要求されてい
る。Perpendicular recording is attracting attention as a high-density recording method that has the potential to overcome the limits of horizontal recording that has been used up until now, and magnetic heads are also required to have even higher performance.
［従来の技術］
従来の垂直記録用薄膜磁気ヘッドの例を第３図および第
４図に示す。図において、ｌは磁束のリターンパスとな
るフェライト部材である。磁束は主磁極４−垂直磁気記
録媒体−フエライト部材１−バックギャップ７−主磁極
４のバスで流れる。[Prior Art] Examples of conventional thin film magnetic heads for perpendicular recording are shown in FIGS. 3 and 4. In the figure, l is a ferrite member that serves as a return path for magnetic flux. The magnetic flux flows through the main magnetic pole 4 - perpendicular magnetic recording medium - ferrite member 1 - back gap 7 - main magnetic pole 4 bus.
２はガラスから成る非磁性材、３は径が約３μｍのＣｕ
１ｌより成るコイル、４は主磁極である。主磁極４の媒
体対向面の面積は、その面積当りの磁束の量が垂直磁気
記録媒体の保磁力を超え媒体が磁気的に飽和する、すな
わち書込みが行われるように定められる６５は記録能力
向上のため主磁極上に約１μｍの厚みで設けられる盛上
げＮｉＦｅ層である。ＮｉＦｅ１１５は軟磁性を有し、
記録時の主磁極４が磁気的に飽和するのを妨げるととも
に、主磁極４の磁気抵抗を下げる。2 is a non-magnetic material made of glass, 3 is Cu with a diameter of about 3 μm
The coil consists of 1l, and 4 is the main magnetic pole. The area of the medium facing surface of the main magnetic pole 4 is determined so that the amount of magnetic flux per area exceeds the coercive force of the perpendicular magnetic recording medium, and the medium is magnetically saturated, that is, writing is performed. 65 improves recording performance. Therefore, a raised NiFe layer with a thickness of about 1 μm is provided on the main pole. NiFe115 has soft magnetism,
This prevents the main magnetic pole 4 from becoming magnetically saturated during recording and lowers the magnetic resistance of the main magnetic pole 4.
７はフェライト部材ｌと主磁極４を磁気的に結合するバ
ックギャップである。第３図の構造では、ディスクを回
転させるモーターなどから洩れる磁束やボイスコイルモ
ーターにより外部浮遊磁界が存在すると既に記録された
媒体上の情報がイレーズされやすいという問題点があり
、そのため第４図では、リターンバス部材ｌの回りをフ
ェライトからなるシールド部材６が取り囲む構造となっ
ている。7 is a back gap that magnetically couples the ferrite member l and the main magnetic pole 4. The structure shown in Figure 3 has the problem that information already recorded on the medium is likely to be erased if there is an external stray magnetic field due to the magnetic flux leaking from the motor that rotates the disk or the voice coil motor. , the return bus member l is surrounded by a shield member 6 made of ferrite.
しかし、これらの従来構造の薄膜磁気ヘッドにおいては
、主磁極４とリターンパスｌとの磁束結合のためのバッ
クギャップ部７にはＬＯｔｔｒｒＪＪ、上の厚いめっき
ＮｉＦｅ層を形成する必要があり、ＮｉＦｅ層７の膜厚
に比例する渦電流損失のため磁気ヘッドの周波数特性が
制限され高周波数では磁性体の透磁率（μ）が低下する
ことによって、記録密度特性の向上が阻害されるという
問題点があった。However, in these conventional thin-film magnetic heads, it is necessary to form a thick NiFe layer on the back gap portion 7 for magnetic flux coupling between the main pole 4 and the return path 1, and the NiFe layer is The problem is that the frequency characteristics of the magnetic head are limited due to the eddy current loss proportional to the film thickness of No. 7, and the permeability (μ) of the magnetic material decreases at high frequencies, which inhibits the improvement of recording density characteristics. there were.
したがって、本発明は周波数特性が優れまた能率的製造
が可能な薄膜磁気ヘッドを提供することを目的とする。Therefore, an object of the present invention is to provide a thin film magnetic head that has excellent frequency characteristics and can be manufactured efficiently.
〔課題を解決するための手段１
本発明に係る垂直記録用薄膜磁気ヘッドは、主磁極と磁
気的に結合され、磁束のリターンパスとなるフェライト
部材の一面を非磁性材料を介してフェライトシールド部
材が取り囲みかつ他面が開放面となるように、両フェラ
イト部材を接合し、記録再生用コイルを前記フェライト
部材と前記非磁性材料の前記開放面にてスパイラル状に
延在するように設けてなる垂直記録用薄膜磁気ヘッドに
おいて、前記記録再生用コイルの全体もしくはその大部
分が収納できる深さの環状の溝部を前記フェライト部材
と非磁性材料の前記開放面に形成し、該溝部内にスパイ
ラルコイルを絶縁層を介して形成したことを特徴とする
。[Means for Solving the Problems 1] The thin-film magnetic head for perpendicular recording according to the present invention includes a ferrite shield member that is magnetically coupled to the main pole and serves as a magnetic flux return path by connecting one surface of the ferrite member to the ferrite shield member through a non-magnetic material. Both ferrite members are bonded so that the ferrite member is surrounded by the ferrite member and the other side is an open surface, and a recording/reproducing coil is provided so as to extend in a spiral shape between the ferrite member and the open surface of the nonmagnetic material. In the thin film magnetic head for perpendicular recording, an annular groove having a depth capable of accommodating all or most of the recording/reproducing coil is formed in the open surface of the ferrite member and the nonmagnetic material, and a spiral coil is placed in the groove. is formed with an insulating layer interposed therebetween.
また、本発明にＳいては従来例におけるバックギャップ
部のＮｉＦｅ膜厚をゼロにすることができ、この場合は
主Ｍｉ極が直接フェライト部材に接続される構造の垂直
記録用薄膜磁気ヘッドが提供される。Furthermore, the present invention provides a perpendicular recording thin film magnetic head having a structure in which the NiFe film thickness in the back gap region in the conventional example can be reduced to zero, and in this case, the main Mi pole is directly connected to the ferrite member. be done.
また本発明に係る垂直磁気記録用薄膜磁気ヘラの製造方
法においては、磁束のリターンバスとなるフェライト部
材の一面を非磁性材料を介してフェライトシールド部材
が取り囲むように、両フェライト部材をガラスにて接合
し、両フェライト部材の非接合面を平滑研磨し、平滑研
摩された平面上に記録再生用コイルの全体もしくはその
大部分が収納できる深さの環状の溝部を形成し、該溝部
内にスパイラルコイルを上下に樹脂絶縁層を介して作成
した後、無ｔｌ［ｅ線層をスパッタ被着し平面研磨工程
を施した後、主磁極を形成することを特徴とする。Further, in the method for manufacturing a thin film magnetic spatula for perpendicular magnetic recording according to the present invention, both ferrite members are covered with glass so that one side of the ferrite member, which serves as a magnetic flux return bus, is surrounded by the ferrite shield member via a non-magnetic material. After joining, the non-joining surfaces of both ferrite members are polished smooth, and an annular groove with a depth that can accommodate the entire or most of the recording/reproducing coil is formed on the polished flat surface, and a spiral groove is formed in the groove. The method is characterized in that after the coil is created with resin insulating layers interposed above and below, a non-tl[e-line layer is sputtered and a surface polishing process is performed, and then the main pole is formed.
請求項１記載の発明ではリターンバス部材に凹部を設け
、その中にコイルを充填することで従来必要であったパ
ックギャップ部のＮｉＦｅ膜厚を低減することによって
渦電流損失を少なくすることができる。なお、フェライ
トシールド部材を設けない磁気ヘッド（第３図）におい
ても凹部を設けることによる効果はあるが、この構造の
磁気ヘッドは外部浮遊磁界による問題があるので、本発
明ではフェライトシールド部材を設ける構造の磁気ヘッ
ドを特徴とする
請求項２記載の発明ではＮｉＦｅ層を使用しないで、主
磁極を直接フェライト部材と接続することによりＮｉＦ
ｅ層に起因する渦電流損失をなくすることができる。In the invention as claimed in claim 1, by providing a recess in the return bus member and filling the recess with a coil, it is possible to reduce the eddy current loss by reducing the thickness of the NiFe film in the pack gap, which was required in the past. . Although the effect of providing a recessed portion can be obtained even in a magnetic head without a ferrite shield member (Fig. 3), a magnetic head with this structure has problems due to external stray magnetic fields, so in the present invention, a ferrite shield member is provided. In the invention according to claim 2, which is characterized by a magnetic head having a structure in which the NiF
Eddy current loss caused by the e-layer can be eliminated.
請求項３記載の方法はＮｉＦｅ膜をめっきしないかある
いはめっきするにしても、その厚さを溝の深さの分だけ
少なくすることができるので、めっき工程が能率的にな
る。In the method of claim 3, the NiFe film is not plated, or even if it is plated, the thickness can be reduced by the depth of the groove, making the plating process more efficient.
以下、実施例により本発明の詳細な説明する。Hereinafter, the present invention will be explained in detail with reference to Examples.
［実施例］
第１図（ａ）および（ｂ）に本発明の実施例によるヘッ
ド平面構造および断面構造を示す。[Example] FIGS. 1(a) and 1(b) show a planar structure and a cross-sectional structure of a head according to an example of the present invention.
第１図（ｂ）は第１図（ａ）におけるＡ−Ａ’線の断面
を示したものである。FIG. 1(b) shows a cross section taken along line AA' in FIG. 1(a).
主磁極４は厚みが０．２〜０．５μｍの軟磁性材からな
り、その上に厚みが１〜３μｍのＮｉＦｅ盛上げ層５を
被着している。The main pole 4 is made of a soft magnetic material with a thickness of 0.2 to 0.5 μm, and a NiFe raised layer 5 with a thickness of 1 to 3 μm is deposited thereon.
磁束のリターンバスとなるフェライト部材１の背面側（
主磁極４と反対側）の回りを非磁性材料である低融点ガ
ラス２を介してフェライトシールド部材６が取り囲んで
いる。フェライト部材１と低融点ガラスには溝が形成さ
れている。８ａおよび８ｂはそれぞれ浦の外周縁および
内周縁である。１ｌ１８は記録再生用コイル３の全体が
収納できる深さに形成され、該溝８部内にスパイラル状
の該コイルを上下に樹脂絶縁層９を介して接着している
。The back side (
A ferrite shield member 6 surrounds the magnetic pole (on the opposite side from the main magnetic pole 4) with a low melting point glass 2, which is a non-magnetic material, interposed therebetween. A groove is formed in the ferrite member 1 and the low melting point glass. 8a and 8b are the outer peripheral edge and inner peripheral edge of the ura, respectively. 1l18 is formed to a depth that can accommodate the entire recording/reproducing coil 3, and the spiral coil is bonded to the top and bottom of the groove 8 via a resin insulating layer 9.
以下、第２図（ａ）〜（ｅ）を参照して本発明にかかる
磁気ヘッド製造の実施例について詳細な説明を行う。Hereinafter, an embodiment of manufacturing a magnetic head according to the present invention will be described in detail with reference to FIGS. 2(a) to 2(e).
まず、第２図（ａ）に示すように、リターンバス部材と
なるＮｉＺｎフェライト１およびスライダを兼ねるシー
ルド用ＮｉＺｎフェライト部材６を低融点ガラス２を用
いてガラス接着により接合し、その後平面研磨を行い、
基板面１ａ、２ａを形成する。First, as shown in FIG. 2(a), the NiZn ferrite member 1 serving as a return bus member and the NiZn ferrite member 6 for shielding that also serves as a slider are joined by glass bonding using low melting point glass 2, and then surface polishing is performed. ,
Substrate surfaces 1a and 2a are formed.
次に、第２図（ｂ）に示すように、コイルが収納できる
ようにリターンバス部材１、ガラスＭ２に環状の１８を
形成する。Next, as shown in FIG. 2(b), an annular ring 18 is formed on the return bus member 1 and the glass M2 so that the coil can be housed therein.
さらに、樹脂絶縁層９ａ、９ｂを上下に介してＣｕより
成るスパイラルコイル３をめっきプロセスにて溝部８に
作製し、Ａ、ｆｆ、Ｏ，膜１ｏをスパッタ被着後、平面
研磨により平滑面を形成する（第２図（Ｃ））。Furthermore, a spiral coil 3 made of Cu is formed in the groove 8 by a plating process with the resin insulating layers 9a and 9b interposed above and below, and after sputtering A, ff, O, and the film 1o, a smooth surface is polished by surface polishing. (Fig. 2(C)).
次いで、第２図（ｄ）に示すように、主磁極４および盛
上げ層５をめっきにより形成し、図示しないコイル端子
パッドを形成後、ＡρＺＯＳ保護膜１２をスパッタ形成
し、平面研磨工程を経て成膜プロセスが完了する。Next, as shown in FIG. 2(d), the main pole 4 and the raised layer 5 are formed by plating, and after forming a coil terminal pad (not shown), an AρZOS protective film 12 is formed by sputtering, and a surface polishing process is performed. The membrane process is completed.
最後に、機械加工によるブロック切断、レール面形成後
、第２図（ｄ）のＢ−Ｂ’線まで研削加工をおこない、
ヘッドが完成する。Finally, after cutting the block by machining and forming the rail surface, grinding is performed to the line BB' in Figure 2 (d).
The head is completed.
また、第２図（ｅ）に示すように、コイル３が２層以上
に巻かれているために、コイル全体が環状溝８に収納で
きない場合においても、バックギャップ部７のＮｉＦｅ
層の膜厚を低減できるため、渦電流による悪影響を低減
することができる。Further, as shown in FIG. 2(e), even if the entire coil cannot be accommodated in the annular groove 8 because the coil 3 is wound in two or more layers, the NiFe in the back gap portion 7
Since the thickness of the layer can be reduced, the adverse effects of eddy currents can be reduced.
以上述べたように、本発明によればフェライトリターン
バスを有する単磁極型垂直磁気ヘッドにおいて、バック
ギャップ部のＮｉＦｅの渦電流の影響を低減できるため
、記録密度特性の向上が可能となる。As described above, according to the present invention, in a single-pole perpendicular magnetic head having a ferrite return bus, it is possible to reduce the influence of the eddy current of NiFe in the back gap portion, thereby making it possible to improve recording density characteristics.
第１図（ａ）、（ｂ）は本発明の実施例に係る垂直記録
用薄膜磁気ヘッドの断面図、
第２図（ａ）〜（ｅ）は本発明に係る製造法の説明図で
あって、
東２図（ａ）両フェライト部材を接着する工程、
第２図（ｂ）は溝を形成する工程、
第２図（Ｃ）はコイルを溝に埋込む工程、第２図（ｄ）
は最終工程にそれぞれ該当し、第２図（ｅ）は第２図（
ｄ）に該当し、バックギャップ部に薄いＮｉＦｅ層を介
在させる場合の実施例に該当し、
第３図および第４図は従来の垂直記録用薄膜磁気ヘッド
の断面図である。FIGS. 1(a) and (b) are cross-sectional views of a perpendicular recording thin-film magnetic head according to an embodiment of the present invention, and FIGS. 2(a) to (e) are illustrations of the manufacturing method according to the present invention. Figure 2 (a) shows the process of gluing both ferrite members together; Figure 2 (b) shows the process of forming the groove; Figure 2 (C) shows the process of embedding the coil in the groove; Figure 2 (d)
correspond to the final process, and Fig. 2(e) corresponds to Fig. 2(
d) corresponds to an embodiment in which a thin NiFe layer is interposed in the back gap portion, and FIGS. 3 and 4 are cross-sectional views of a conventional thin-film magnetic head for perpendicular recording.
Claims (1)
パスとなるフェライト部材（１）の一面を非磁性材料（
２）を介してフェライトシールド部材（６）が取り囲み
、かつ他面を開放面となるように、両フェライト部材を
接合し、記録再生用コイル（３）を前記フェライト部材
（１）と非磁性材料（２）の前記開放面にスパイラル状
に延在するように設けてなる垂直記録用薄膜磁気ヘッド
において、 前記記録再生用コイル（３）の全体もしくはその大部分
が収納できる深さの環状の溝部を前記フェライト部材（
１）と非磁性材料（２）の開放面に形成し、該溝部内に
スパイラルコイルを絶縁層（９）を介して形成したこと
を特徴とする垂直記録用薄膜磁気ヘッド。 ２、主磁極（４）が直接前記フェライト部材（１）に接
続されることを特徴とする請求項１記載の垂直記録用薄
膜磁気ヘッド。 ３、磁束のリターンパスとなるフェライト部材（１）の
一面を非磁性材料を介してフェライトシールド部材（６
）が取り囲むように、両フェライト部材（１、６）をガ
ラス（２）にて接合し、両フェライト部材（１、６）の
非接合面を平滑研磨し、平滑研摩された平面上に記録再
生用コイル（３）の全体もしくはその大部分が収納でき
る深さの環状の溝部を形成し、該溝部内にスパイラルコ
イルを上下に樹脂絶縁層（９）を介して作成した後、無
機絶縁層（１２）をスパッタ被着し平面研磨工程を施し
た後、主磁極（４）と前記フェライト部材（１）を接続
することを特徴とする垂直記録用薄膜磁気ヘッドの製造
方法。[Claims] 1. One surface of the ferrite member (1), which is magnetically coupled to the main magnetic pole (4) and serves as a return path for magnetic flux, is covered with a non-magnetic material (
2), the ferrite shield member (6) surrounds the ferrite member (6), and the other side is open. (2) In the perpendicular recording thin film magnetic head provided so as to extend spirally on the open surface, an annular groove portion having a depth capable of accommodating the entire or most part of the recording/reproducing coil (3); The ferrite member (
1) A thin film magnetic head for perpendicular recording, characterized in that it is formed on the open surface of a nonmagnetic material (2), and a spiral coil is formed in the groove with an insulating layer (9) interposed therebetween. 2. The thin film magnetic head for perpendicular recording according to claim 1, wherein the main pole (4) is directly connected to the ferrite member (1). 3. A ferrite shield member (6
) are surrounded by both ferrite members (1, 6) with glass (2), the non-bonded surfaces of both ferrite members (1, 6) are polished smooth, and recording and reproduction are performed on the smooth polished plane. After forming an annular groove deep enough to accommodate the entire or most part of the coil (3), and creating a spiral coil in the groove with resin insulation layers (9) interposed above and below, an inorganic insulation layer ( 12) is sputter-deposited and subjected to a surface polishing process, and then the main pole (4) and the ferrite member (1) are connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25330890A JPH04134610A (en) | 1990-09-21 | 1990-09-21 | Perpendicular recording thin film magnetic head and its manufacturing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25330890A JPH04134610A (en) | 1990-09-21 | 1990-09-21 | Perpendicular recording thin film magnetic head and its manufacturing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04134610A true JPH04134610A (en) | 1992-05-08 |
Family
ID=17249488
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25330890A Pending JPH04134610A (en) | 1990-09-21 | 1990-09-21 | Perpendicular recording thin film magnetic head and its manufacturing |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04134610A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6958886B2 (en) * | 2000-12-26 | 2005-10-25 | Alps Electric Co., Ltd. | Perpendicular magnetic recording head having main magnetic pole layer formed on high-flatness surface, and method of manufacturing the head |
| US7296338B2 (en) | 2004-07-30 | 2007-11-20 | Hitachi Global Storage Technologies Netherlands B.V. | Method and apparatus for providing a reverse air bearing surface head with trailing shield design for perpendicular recording |
-
1990
- 1990-09-21 JP JP25330890A patent/JPH04134610A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6958886B2 (en) * | 2000-12-26 | 2005-10-25 | Alps Electric Co., Ltd. | Perpendicular magnetic recording head having main magnetic pole layer formed on high-flatness surface, and method of manufacturing the head |
| US7181829B2 (en) | 2000-12-26 | 2007-02-27 | Alps Electric Co., Ltd. | Method of manufacturing a perpendicular magnetic recording head |
| US7472470B2 (en) | 2000-12-26 | 2009-01-06 | Tdk Corporation | Method of manufacturing a perpendicular magnetic recording head |
| US7296338B2 (en) | 2004-07-30 | 2007-11-20 | Hitachi Global Storage Technologies Netherlands B.V. | Method and apparatus for providing a reverse air bearing surface head with trailing shield design for perpendicular recording |
| US7978430B2 (en) | 2004-07-30 | 2011-07-12 | Hitachi Global Storage Technologies Netherlands B.V. | Apparatus for providing a reverse air bearing surface head with trailing shield design for perpendicular recording |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0291806A (en) | Vertically magnetized thin-film head | |
| JPH0477370B2 (en) | ||
| JP2902480B2 (en) | Method for manufacturing read / write magnetic head and magnetic head obtained by the method | |
| JPH04134610A (en) | Perpendicular recording thin film magnetic head and its manufacturing | |
| JPS6142717A (en) | Thin-film magnetic head | |
| US4731299A (en) | Composite magnetic material | |
| JPS60231903A (en) | Composite type magnetic head and its production | |
| JPH02501962A (en) | Recording/reproducing magnetic head and its manufacturing method | |
| JPH0417105A (en) | Perpendicular thin film magnetic head | |
| KR0152601B1 (en) | Core of composite magnetic head and the manufacturing method | |
| JPH069083B2 (en) | Vertical magnetic head | |
| JPS62205507A (en) | Magnetic head | |
| KR940004485B1 (en) | Magnetic head and manufacturing method thereof | |
| KR100200853B1 (en) | Magnetic head for recording and reproducing and the manufacturing method | |
| KR890003866B1 (en) | The complicated magnetic material | |
| JPS60115014A (en) | Magnetic head for vertical magnetization | |
| JPH0312010A (en) | Production of thin-film magnetic head for perpendicular magnetic recording | |
| JPH0467246B2 (en) | ||
| JPS6059516A (en) | Composite head for vertical magnetic recording and reproducing | |
| JPS61126611A (en) | Production of magnetic head | |
| JPS6151606A (en) | Vertical magnetization type magnetic head and its manufacture | |
| JPS6251009A (en) | Magnetic core and its production | |
| JPH07182607A (en) | Compound magnetic head apparatus and its manufacture | |
| JPH046607A (en) | Production of perpendicular thin-film magnetic head | |
| JPS60119610A (en) | Single magnetic pole type magnetic head for vertical recording |