JPH04129915A - Conveying device - Google Patents
Conveying deviceInfo
- Publication number
- JPH04129915A JPH04129915A JP25099190A JP25099190A JPH04129915A JP H04129915 A JPH04129915 A JP H04129915A JP 25099190 A JP25099190 A JP 25099190A JP 25099190 A JP25099190 A JP 25099190A JP H04129915 A JPH04129915 A JP H04129915A
- Authority
- JP
- Japan
- Prior art keywords
- rotary
- rotary bodies
- support arm
- drive source
- bodies
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004544 sputter deposition Methods 0.000 description 13
- 239000000758 substrate Substances 0.000 description 11
- 239000010408 film Substances 0.000 description 5
- 230000007723 transport mechanism Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000001579 optical reflectometry Methods 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
- Specific Conveyance Elements (AREA)
Abstract
Description
【発明の詳細な説明】
［発明の目的］
（産業上の利用分野）
この発明は、例えばディスク枚葉処理装置に好適な搬送
装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Object of the Invention] (Industrial Application Field) The present invention relates to a conveying device suitable for, for example, a single disk processing device.
デジタル化された音声情報や画像情報を大量に記録する
のにコンパクトディスク（以下、ＣＤと略称する）やレ
ーザーディスク（商品名）あるいはビデオディスクが広
く使用されるようになってぎた。Compact discs (hereinafter referred to as CDs), laser discs (trade name), and video discs have become widely used for recording large amounts of digitized audio and image information.
ＣＤ等は、ポリカーボネート等の透明な合成樹脂性基板
の表面にスパッタリングにより光反射率の高いアルミニ
ューム（八１）薄膜層が形成されて構成され、「１」か
ｒＯＪのデジタル情報に合わせて聞けられたピット（ｐ
ｉｔ）と称する小さな孔の有無を、レーザ光の反射波あ
るいは透過波の有無によりその記録情報を読み出し得る
ものである。CDs, etc. are constructed by sputtering a thin film layer of aluminum (81) with high light reflectivity on the surface of a transparent synthetic resin substrate such as polycarbonate, and can be listened to along with the digital information of ``1'' or rOJ. pit (p
The presence or absence of a small hole called .it) can be used to read the recorded information based on the presence or absence of a reflected wave or a transmitted wave of a laser beam.
スパッタリングによる薄膜形成は比較的短時間で行われ
ることから、多数のディスクに連続的に成膜するために
、第４図に示す構成が採用されている。Since thin film formation by sputtering is performed in a relatively short time, the configuration shown in FIG. 4 is adopted in order to continuously form films on a large number of disks.
第４図は連続スパッタリング装置の主要な機構のみを取
出して示した構成図で、まずベルトコンベア１で次々と
搬送されくるＣＤ等の基板２は、軸３ａを中心に×１方
向に回転しかつ上下（Ｙｌ）方向に移動可能な搬送機構
３の吸着パット２１に吸着され、スパッタ室４に搬送さ
れる。FIG. 4 is a configuration diagram showing only the main mechanisms of the continuous sputtering apparatus. First, substrates 2 such as CDs, which are conveyed one after another by a belt conveyor 1, rotate in the x1 direction around an axis 3a. It is attracted to the suction pad 21 of the transport mechanism 3 which is movable in the vertical (Yl) direction, and is transported to the sputtering chamber 4.
スパッタ室４内での基板２は、前記搬送機構３と同様に
、軸４１ａを中心に×２方向に回転しかつ上下（Ｙ２）
方向に移動可能な搬送装置４１のテーブル４１ｂに載置
されて搬送され、順次スパッタ源４２により成膜が行わ
れる。The substrate 2 in the sputtering chamber 4 rotates in the x2 direction around the axis 41a and rotates up and down (Y2), similar to the transport mechanism 3 described above.
The film is placed on a table 41b of a transport device 41 that is movable in the direction and transported, and a sputtering source 42 sequentially performs film formation.
スパッタ成膜後の基板２は再び搬送装置４１に載置され
、搬送機構３を経て外部に取出される。The substrate 2 after sputtering film formation is again placed on the transport device 41 and taken out to the outside via the transport mechanism 3.
ところで、スパッタ室４内で基板２を搬送する搬送装置
４１は、軸４１ａを中心に回転する駆動源を有し、旋回
あるいは回転往復運動によって搬送するように構成され
ているので、第５図に示すように少なくとも半径Ｒを超
える広い面積の空間を必要とした。By the way, the conveying device 41 that conveys the substrate 2 within the sputtering chamber 4 has a drive source that rotates around a shaft 41a, and is configured to convey by rotating or rotating reciprocating motion. As shown, a space with a wide area exceeding at least the radius R was required.
搬送装置４１の小形化は、直ちにスパッタ室４のコンパ
クト化につながる。また、基板２の成膜過程では、スパ
ッタ室４内の吸排操作か行われるが、その機能向上のた
めコンダクタンスかてぎるだ（プ大きいことが望まれ、
また設置場所の省スペースにもつながるので、搬送装置
４１の小形化は従来からの課題であった。Downsizing of the transport device 41 immediately leads to downsizing of the sputtering chamber 4. In addition, during the process of forming a film on the substrate 2, suction and evacuation operations are performed within the sputtering chamber 4, and in order to improve its functionality, the conductance is required to be large (it is desirable that the conductance be large).
Furthermore, miniaturization of the conveyance device 41 has been an issue for a long time since it leads to space saving at the installation site.
（発明が解決しようとする課題）
従来の搬送装置は、基板等の搬送物を複数の円盤状のテ
ーブルに載せ、旋回搬送させるので、その搬送には大ぎ
な空間を必要とし、例えばスパッタリング装置内に装着
すると装置全体の形状が大となり、小形化への障害とな
っていた。(Problems to be Solved by the Invention) Conventional transport devices place objects such as substrates on a plurality of disc-shaped tables and transport them in a rotating manner. When attached to a device, the overall shape of the device becomes large, which is an obstacle to miniaturization.
この発明は、簡単な構成により、小形化を実現した搬送
装置を提供することを目的とする。An object of the present invention is to provide a conveying device that is compact and has a simple configuration.
［発明の構成］
（課題を解決するための手段）
この発明による搬送装置は、固定された円板体と、この
円板体の外周面に接触しつつ回転する一対の第１の回転
体と、この第１の回転体の外周面に接触しつつ回転する
一対の第２の回転体と、この一対の第２の回転体に夫々
固定され互いに高さを異にして取付りられた受皿と、前
記第１の回転体及び第２の回転体の各回転軸を回転自在
に軸支して連結する支持アームと、この支持アームを駆
動することによって前記第１及び第２の回転体が前記円
板体を中心に回転駆動して前記受皿を往復動けしめる駆
動源とを具備することを特徴とする。[Structure of the Invention] (Means for Solving the Problems) A conveying device according to the present invention includes a fixed disc body, and a pair of first rotating bodies that rotate while contacting the outer peripheral surface of the disc body. , a pair of second rotating bodies that rotate while contacting the outer circumferential surface of the first rotating body, and saucers that are fixed to the pair of second rotating bodies and are attached at different heights from each other. , a support arm that rotatably supports and connects each rotation shaft of the first rotary body and the second rotary body; and by driving the support arm, the first and second rotary bodies are rotated. It is characterized by comprising a drive source that rotates around the disc body to reciprocate the saucer.
（作 用）
この発明による搬送装置は、第１の回転体と第２の回転
体とが支持アームによって回転自在に連結され、かつこ
れ等が円板体を中心にして回転するので、第２の回転体
に固定して取イ」りられた受皿は、円板体をほぼ直線的
に横切って直線的な往復移動を行うので、その移動に伴
う軌跡は短くなり、搬送に伴う占有空間を小さくするこ
とができる。(Function) In the conveying device according to the present invention, the first rotating body and the second rotating body are rotatably connected by the support arm, and these rotate around the disc body, so that the second rotating body The tray, which is fixed to the rotary body and taken out, performs linear reciprocating movement almost straight across the disc body, so the trajectory associated with the movement is shortened, and the space occupied during transportation is reduced. Can be made smaller.
（実施例）
以下、この発明による搬送装置の一実施例を第１図ない
し第３図を参照して詳細に説明する。(Embodiment) Hereinafter, an embodiment of the conveying device according to the present invention will be described in detail with reference to FIGS. 1 to 3.
即ち、この実施例による搬送装置５は、まず、円板状の
カムであって固定された円板体５１を有し、この円板体
５１の外周面はこれに接触しつつ回転すｌす
る一対の第１の回転体５２．５２’が対向して配置構成
されている。That is, the conveyance device 5 according to this embodiment first has a fixed disc body 51 which is a disc-shaped cam, and the outer circumferential surface of the disc body 51 rotates while contacting the disc body 51. A pair of first rotating bodies 52, 52' are arranged facing each other.
次に、その第１の回転体５２．５２’の回転駆動力を受
りるように、この第１の回転体５２．５２’の外周面に
接触しつつ回転する一対の第２の回転体５３゜５３′が
構成され、この一対の第２の回転体５３゜５３′ の各
回転軸５３ａ、 ５３ａ’には、夫々互いに高さを異に
した受皿５４．５４’が固定して取付（プられている。Next, a pair of second rotating bodies rotate while contacting the outer peripheral surface of the first rotating body 52.52' so as to receive the rotational driving force of the first rotating body 52.52'. 53° 53' are constructed, and saucers 54 and 54' having different heights are fixedly attached to the respective rotating shafts 53a and 53a' of this pair of second rotating bodies 53° 53'. is being pulled.
更に、前記第１及び第２の各回転体５２．５２’５３、
５３’ は、夫々の各回転１１１］５２ａ、 ５２ａ’
、 ５３ａ。Furthermore, each of the first and second rotating bodies 52,52'53,
53' are each rotation 111] 52a, 52a'
, 53a.
５３ａ′ が受持アーム５５によって夫々回転自在に連
結されている。53a' are rotatably connected to each other by a receiving arm 55.
この支持アーム５５の中央部は、モータからなる駆動源
５６に固定され、矢印Ｘ方向への回転駆動力を受りると
すれば、この支持アーム５５に軸支された第１の回転体
５２．５２’は円板体５１の外周面に、また第２の回転
体５３．５３’ は第１の回転体５２゜５２′の外周面
に夫々接触しつつ矢印Ｘ方向に回転する。The center portion of this support arm 55 is fixed to a drive source 56 consisting of a motor, and if it receives rotational driving force in the direction of arrow .52' and the second rotating body 53 and 53' rotate in the direction of the arrow X while contacting the outer circumferential surface of the disc body 51 and the second rotating body 53 and 53' respectively contacting the outer circumferential surface of the first rotating body 52 and 52'.
この結果、第２の回転体５３．５３’の軸５３ａ。As a result, the shaft 53a of the second rotating body 53.53'.
５３ａ′に夫々固定された各受皿５４．５４’は、第２
図に示す状態から円板体５１を挟／ｖで互いに反対方向
く受皿５４はＸ方向、受皿５４′ はＸ′力方向に移動
し、第３図に示すように、前記受皿５４は前記円板体５
１を挟んで互いに反対方向に相対移動して基板（２）を
搬送する。Each of the saucers 54 and 54' fixed to the second
From the state shown in the figure, the saucer 54 is moved in the X direction and the saucer 54' is moved in the direction of the X' force in opposite directions with the disc body 51 being held at /v, and as shown in FIG. Plate body 5
The substrate (2) is conveyed by relatively moving in opposite directions with the substrate (2) in between.
各受皿５４． り４’ は一対の第２の回転体５３．５
３’に互いに取付り高さを異にして取イ」りられている
から、次に駆動源５６の回転方向を矢印Ｘとは反対方向
に回転させることににって、互いに衝突することなく相
対的に対向移動できる。Each saucer 54. 4' is a pair of second rotating bodies 53.5
3' are installed at different heights, so by rotating the driving source 56 in the direction opposite to the arrow Can move relative to each other.
このように、駆動源５６によって、第１図及び第２図に
示す矢印Ｘ方向及びその逆方向に各回転体（５２〜５３
′）を反復往復運動させることによって、受皿５４は、
円板体５１を中心に交互に直線的に対向移動するので、
搬送に伴う往復移動軌跡は短くなり、装置の小形化が可
能となる。In this way, the driving source 56 moves each rotating body (52 to 53) in the direction of the arrow X shown in FIGS.
') by repeatedly reciprocating the tray 54,
Since they alternately move linearly oppositely around the disc body 51,
The reciprocating trajectory associated with conveyance is shortened, and the device can be made more compact.
この結果、搬送物の搬送移動に予め大きな空間を必要と
せず、小さな空間で行うことができ、例えばこれをスパ
ッタ室（４）内での基板搬送に適用した場合、内容積を
より小さくできるから、吸排気時間を短かくＪ−ること
かできる。As a result, the conveyance movement of the conveyed object does not require a large space in advance, and can be carried out in a small space. For example, when this is applied to conveying a substrate within the sputtering chamber (4), the internal volume can be made smaller. , the intake and exhaust time can be shortened.
なお、上記実施例では、各回転体５２．５２’ 、 ５
３゜５３′ は円板カムであるとして説明したが、要す
るに、円板体５１を中心に各回転体５２．５２’ 、
５３゜５３′か駆動源５６の回転駆動力を受εプで回転
移動できれば良いので、円板体５１はしめ各回転体（５
２〜５３′）を例えば歯車で構成しても全く同様な機能
及び効果を１ｑることかできる。In addition, in the above embodiment, each rotating body 52, 52', 5
Although the explanation has been made assuming that 3°53' is a disc cam, in short, each rotating body 52, 52',
It is sufficient if the disc body 51 can be rotated by receiving the rotational driving force of the drive source 56.
Even if the parts 2 to 53' are constructed of gears, for example, the same functions and effects can be obtained.
また、駆動源５６も回転往復運動を行う機能を有すれば
よいので、回転モータに限らず、例えば直線往復運動を
回転往復運動に変換ざＵて往復動を行う、いわゆるビニ
オン及びラックの組合わせ機構で構成しても良い。Further, since the drive source 56 only needs to have the function of performing rotational reciprocating motion, it is not limited to a rotary motor, but may also be a combination of a so-called binion and a rack that performs reciprocating motion by converting linear reciprocating motion into rotary reciprocating motion. It may be configured by a mechanism.
以上のように、この発明による搬送装置によれば、簡単
な構成によって、一対の受皿５４は互いに衝突すること
なく交差するように直線的に移動させ得るので、全体の
構成の移動空間での小形化が実現するものであり、スパ
ッタリング装置に限らρ
ず、他の搬送機構例えば半導体ウェハーの処理装置等に
も適用して顕著４１効宋か得られる。As described above, according to the conveyance device according to the present invention, the pair of receiving trays 54 can be linearly moved so as to cross each other without colliding with each other due to the simple configuration. It can be applied not only to sputtering equipment but also to other transport mechanisms such as semiconductor wafer processing equipment, etc., and a remarkable 41 effect can be obtained.
［発明の効果］
この発明による搬送装置は、基板等を載けだ一対の受皿
は互いに、交差して直線上を移動り−るにうに構成され
るので、全体は小形化され、搬送装置に広く適用できる
ものであり、実用上の効果大である。[Effects of the Invention] The conveyance device according to the present invention is configured such that the pair of trays on which substrates, etc. are placed intersect with each other and move in a straight line. It is widely applicable and has great practical effects.
第１図はこの搬送装置の装置実施例を示す側面図、第２
図は第１図に示ター装置の平面図、第３図は第１図に示
づ゛装置の搬送状態を示すものでＡＡ線断面図、第４図
は従来の搬送装置を適用した連続スパッタリング装置を
示す構成図、第５図は第４図に示す搬送装置の平面図で
ある。
１・・・ベルトコンベア、 ２・・・基板、２１・・・
吸着パラ１〜、 ３・・・搬送機構、４・・・スパッ
タ室、 ４１，５・・・搬送装置、４１ａ・・・軸
、 ４２・・・スパッタ源、５１・・・円板
体、 ５２．５２’・・・第１の回転体、５３、５
３’・・・第２の回転体、
５４゜
５４′
・・・受ｌ１１１．
５５・・・支１．．＋１アーム、
５６・・・駆動源。Fig. 1 is a side view showing an embodiment of this conveyance device;
Figure 1 is a plan view of the equipment shown in Figure 1, Figure 3 is a cross-sectional view taken along line AA, showing the conveyance state of the equipment shown in Figure 1, and Figure 4 is a continuous sputtering process using the conventional conveyance equipment. FIG. 5 is a block diagram showing the apparatus, and FIG. 5 is a plan view of the conveying device shown in FIG. 1... Belt conveyor, 2... Board, 21...
Adsorption paras 1-, 3...Transport mechanism, 4...Sputter chamber, 41, 5...Transport device, 41a...Axis, 42...Sputter source, 51...Disc body, 52 .52'...first rotating body, 53, 5
3'...Second rotating body, 54°54'...Receptacle l111. 55... Support 1. ．． +1 arm, 56... drive source.
Claims (1)
つ回転する一対の第１の回転体と、この第１の回転体の
外周面に接触しつつ回転する一対の第２の回転体と、こ
の一対の第２の回転体に夫々固定され互いに高さを異に
して取付けられた受皿と、前記第１の回転体及び第２の
回転体の各回転軸を回転自在に軸支して連結する支持ア
ームと、この支持アームを駆動することによって前記第
１及び第２の回転体が前記円板体を中心に回転駆動して
前記受皿を往復動せしめる駆動源とを具備することを特
徴とした搬送装置。A fixed disk body, a pair of first rotating bodies that rotate while contacting the outer circumferential surface of the disk body, and a pair of second rotating bodies that rotate while contacting the outer circumferential surface of the first rotating bodies. a rotary body, a saucer fixed to the pair of second rotary bodies and mounted at different heights from each other, and rotatable shafts of the first and second rotary bodies; It includes a support arm that supports and connects, and a drive source that drives the first and second rotating bodies to rotate about the disc body by driving the support arm, thereby reciprocating the saucer. A transport device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25099190A JP2511566B2 (en) | 1990-09-20 | 1990-09-20 | Transfer device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25099190A JP2511566B2 (en) | 1990-09-20 | 1990-09-20 | Transfer device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04129915A true JPH04129915A (en) | 1992-04-30 |
| JP2511566B2 JP2511566B2 (en) | 1996-06-26 |
Family
ID=17216039
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25099190A Expired - Fee Related JP2511566B2 (en) | 1990-09-20 | 1990-09-20 | Transfer device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2511566B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102633114A (en) * | 2012-04-26 | 2012-08-15 | 济南大学 | Visual worktable for workpiece conveying on catenary |
| JP2015168842A (en) * | 2014-03-06 | 2015-09-28 | Ｄｏｗａサーモテック株式会社 | carburizing hardening equipment |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106892259B (en) * | 2017-03-09 | 2019-12-17 | 铜陵三佳山田科技股份有限公司 | Loading platform for fixing material sheet operation |
-
1990
- 1990-09-20 JP JP25099190A patent/JP2511566B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102633114A (en) * | 2012-04-26 | 2012-08-15 | 济南大学 | Visual worktable for workpiece conveying on catenary |
| JP2015168842A (en) * | 2014-03-06 | 2015-09-28 | Ｄｏｗａサーモテック株式会社 | carburizing hardening equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2511566B2 (en) | 1996-06-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5336029A (en) | Loading apparatus having a suction-hold mechanism | |
| US6297611B1 (en) | Robot having independent end effector linkage motion | |
| JP2808826B2 (en) | Substrate transfer device | |
| JP2751975B2 (en) | Load lock chamber of semiconductor processing equipment | |
| WO2005111263A1 (en) | Vacuum processing apparatus | |
| JPH04129915A (en) | Conveying device | |
| JPH07187385A (en) | Device to carry disk-formed substrate in vacuum covered device | |
| WO2001034503A1 (en) | Rotating shuttle payload platform | |
| JPH0811606B2 (en) | Transfer device | |
| JP3113729B2 (en) | Parallel link robot with coaxial drive | |
| JP3155015B2 (en) | A device that moves a substrate through a substrate processing device | |
| JP4557418B2 (en) | Multi-layer film forming equipment | |
| JP2004039706A (en) | Transport device | |
| JPH1022364A (en) | Vacuum chucking hand in transfer apparatus | |
| JP2000042952A (en) | Conveyer device and conveying method | |
| JPH03285068A (en) | Sputtering system | |
| JPH09234681A (en) | Carrying device | |
| JPH11183394A (en) | Disk surface inspecting method and device | |
| JP2003197712A (en) | Substrate carrying equipment, and substrate housing cassette carrying equipment | |
| JP3085969B2 (en) | Plate transfer device | |
| JP3220332B2 (en) | Air suction holding mechanism for magnetic disk | |
| JPH06282885A (en) | Apparatus and method for forming film for disk | |
| JP2003170382A (en) | Robot for carrying substrate | |
| JPH0285364A (en) | Magnetron-type sputtering device | |
| JP3017945B2 (en) | Disk transport device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20080416 Year of fee payment: 12 |
|
| FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20090416 Year of fee payment: 13 |
|
| LAPS | Cancellation because of no payment of annual fees |