JPH04102908A - Flow rate control device - Google Patents
Flow rate control deviceInfo
- Publication number
- JPH04102908A JPH04102908A JP22154690A JP22154690A JPH04102908A JP H04102908 A JPH04102908 A JP H04102908A JP 22154690 A JP22154690 A JP 22154690A JP 22154690 A JP22154690 A JP 22154690A JP H04102908 A JPH04102908 A JP H04102908A
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- control device
- flow
- rate control
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003068 static effect Effects 0.000 claims abstract description 13
- 230000007246 mechanism Effects 0.000 claims abstract description 7
- 239000007788 liquid Substances 0.000 claims description 19
- 230000008859 change Effects 0.000 claims description 2
- 239000012530 fluid Substances 0.000 abstract description 7
- 238000010586 diagram Methods 0.000 description 7
- 230000001105 regulatory effect Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000001276 controlling effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000036316 preload Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 239000010795 gaseous waste Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000010349 pulsation Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
Landscapes
- Flow Control (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、流体特に酸、アルカリといった薬液の流量を
制御する流量制御装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a flow rate control device for controlling the flow rate of a fluid, particularly a chemical solution such as an acid or an alkali.
従来、この種の液体の流量を制御する流量制御装置には
、気体であるカスの流量を制御する流量制御装置例えは
、マスフローコン１ヘローラの様なものは無かった。Conventionally, there has been no such type of flow control device for controlling the flow rate of liquid, such as the mass flow controller 1 roller, which controls the flow rate of gaseous waste.
第３図及び第４図は従来の流量制御装置例を示す配管系
略図である。従って、その代替手段として、第３図に示
すように、絞り弁コ９とテーパ管式流量計２０とを組み
合せ、流入する液体の流れ］８を制御したり、あるいは
、第４図に示すように、液体を預ぬる槽を設け、さらに
、この槽の底部に配管及び弁２４とを設け、この槽の水
頭圧力で、この弁２４を開き、配管に流していた。また
、この装置は、水頭圧力を維持するために、常に液面セ
ンサー２３で液面を検知し、コントロール電源２２を作
動し、弁２１を開き、液体を槽に補充するといっな比較
的に六相りの装置であった。FIGS. 3 and 4 are schematic diagrams of piping systems showing examples of conventional flow rate control devices. Therefore, as an alternative means, as shown in FIG. 3, a throttle valve 9 and a tapered pipe flowmeter 20 may be combined to control the inflowing liquid flow 8, or as shown in FIG. A tank was provided to hold the liquid, and a pipe and a valve 24 were installed at the bottom of the tank, and the valve 24 was opened by the water head pressure of the tank to allow the liquid to flow into the pipe. In addition, in order to maintain the water head pressure, this device constantly detects the liquid level with the liquid level sensor 23, operates the control power source 22, opens the valve 21, and replenishes the liquid into the tank, which is a relatively simple process. It was a compatible device.
上述した従来の流量制御装置においては以下の欠点があ
った。例えば、第３図に示した流量制御装置では、流体
の圧力変動に対し追従不可能であり、脈流を生じるとい
った欠点がある。また、液の種類によっては、各部品の
材質に制限を生しる。The conventional flow rate control device described above has the following drawbacks. For example, the flow rate control device shown in FIG. 3 has the disadvantage that it is unable to follow fluid pressure fluctuations and causes pulsating flow. Furthermore, depending on the type of liquid, there are restrictions on the materials of each part.
一方、第４図に示す流量制御装置では、流れが間欠的に
なり、連続的な流れが得ることができない。また、流量
の調節も液面センサー２３の位置合せによる為、困難で
あり、精度の非常に悪いものとなってしまうという欠点
がある。On the other hand, in the flow rate control device shown in FIG. 4, the flow is intermittent and continuous flow cannot be obtained. Further, since adjustment of the flow rate depends on the positioning of the liquid level sensor 23, it is difficult and has the disadvantage that the accuracy is extremely poor.
本発明の目的は、かかる欠点を解消する液体用の流量制
御装置を提供することである。The object of the present invention is to provide a flow control device for liquids which eliminates such drawbacks.
本発明の第１の流量制御装置は、管路の流量面積を変え
るために回転する制御板と、この制御板を回転するロー
タリーアクチュエータと、このロータリーアクチュエー
タを作動させる空気量を調節する絞り弁とを備える流量
制御装置において、前記管路の外側に流れる液体の静圧
側圧力と前記管路の中心に流れる液体の動圧側圧力との
差を検出するピトー管構造の機構と、前記圧力差により
前記絞り弁を作動させる機構とを有している。A first flow control device of the present invention includes a control plate that rotates to change the flow area of a pipe, a rotary actuator that rotates this control plate, and a throttle valve that adjusts the amount of air that operates this rotary actuator. A flow control device comprising: a mechanism having a pitot tube structure that detects a difference between the static pressure side of the liquid flowing outside the pipe line and the dynamic pressure side pressure of the liquid flowing in the center of the pipe line; The throttle valve has a mechanism for operating the throttle valve.
本発明の第２の流量制御装置は、前記静圧側圧力が一定
の圧力である空気圧であることを特徴としている。The second flow rate control device of the present invention is characterized in that the static pressure is a constant air pressure.
次に、本発明について図面を参照して説明する。 Next, the present invention will be explained with reference to the drawings.
第１図は本発明の一実施例を示す流量制御装置の配管糸
路図である。この流量制御装置は、同図に示すように、
一端側から伸ひるとともに先端が管路３の中心に位置す
る動圧側管１ａと他端側から伸びるとともに管路３の外
周と接続する低圧側管１ｂとをもつ密封された円筒状の
容器１と、この円筒状の容器］の前記一端側から気密に
挿入されるねし６と、容器１内を摺動するディスク４と
、このディスク４とねじ６との間に挟まれたばね５と、
ディスク４の片側に取付けられるとともに容器１の前記
他端側より突出するロッド１０と、このロッド］０の先
端に取付けられるとともにこのロット］０の先端の作動
で空気流量を調整する絞り弁１２と、この絞り弁１２に
定圧の圧縮空気を送る調圧弁１１と、絞り弁１２により
作動するロータリーアクチュエータ７と、このロータリ
ーアクチュエータフの回転軸と連結するとともに管路３
の流量を調節する制御板８とで構成されている。すなわ
ち、この流量制御装置は、一種のピトー管構造を有して
おり、動圧側管１ａが管路３の中心の液体の速度を検知
しており、静圧側管１ｂは管路３の外側の速度を検知し
ている。また、この動圧側管１ａと静圧側管１ｂとは円
筒状の容器１で連結され、この容器１内には、動圧側管
１ａと静圧側管１ｂの速度差による圧力で均衡を保つよ
うにディスク４がいずれか摺動するようになっている。FIG. 1 is a piping line diagram of a flow rate control device showing an embodiment of the present invention. As shown in the figure, this flow rate control device
A sealed cylindrical container 1 having a dynamic pressure side pipe 1a that extends from one end and whose tip is located at the center of the pipe 3, and a low pressure side pipe 1b that extends from the other end and connects to the outer periphery of the pipe 3. a screw 6 airtightly inserted from the one end side of the cylindrical container; a disk 4 sliding inside the container 1; a spring 5 sandwiched between the disk 4 and the screw 6;
a rod 10 attached to one side of the disk 4 and protruding from the other end of the container 1; a throttle valve 12 attached to the tip of the rod 0 and adjusting the air flow rate by the operation of the tip of the rod 0; , a pressure regulating valve 11 that sends compressed air at a constant pressure to the throttle valve 12, a rotary actuator 7 operated by the throttle valve 12, and a pipe line 3 connected to the rotation shaft of the rotary actuator tough.
and a control plate 8 that adjusts the flow rate. That is, this flow control device has a kind of Pitot tube structure, in which the dynamic pressure side pipe 1a detects the velocity of the liquid at the center of the pipe line 3, and the static pressure side pipe 1b detects the velocity of the liquid at the center of the pipe line 3. Detecting speed. The dynamic pressure side pipe 1a and the static pressure side pipe 1b are connected by a cylindrical container 1, and inside this container 1, a pressure is maintained due to the speed difference between the dynamic pressure side pipe 1a and the static pressure side pipe 1b to maintain a balance. The disk 4 is designed to slide on either side.
さらに、このディスク４の移動により、絞り弁１２が作
動し、圧縮空気がロータリーアクチュエータフに送られ
、ロータリーアクチュエータ７は所定の角度だけ回転し
、制御板８は管路３の液路の開口面積を可変させている
。このように、管路内の液体が層流であれば、流量は管
路内の中心の流れ速度と管路の断面積との積に比例する
ことから、管路の中心の流れ速度と管路側壁側の流れ速
度と差は、最も大きくとれるので、これをピトー管構造
とすれば、流量制御に際しては、制御し易い利点がある
。なお、静圧側管１には、流体源の水頭圧の変化に応じ
るために、これらを調節するために、ディスク４に与え
る予圧を調節するために、ねじ６及びばね５を設けた。Furthermore, by the movement of this disk 4, the throttle valve 12 is operated, compressed air is sent to the rotary actuator tube, the rotary actuator 7 is rotated by a predetermined angle, and the control plate 8 is controlled to control the opening area of the liquid path of the pipe line 3. is made variable. In this way, if the liquid in the pipe is a laminar flow, the flow rate is proportional to the product of the flow velocity at the center of the pipe and the cross-sectional area of the pipe. Since the difference in flow velocity on the road side wall side can be the largest, if this is made into a Pitot tube structure, there is an advantage that the flow rate can be easily controlled. Note that the static pressure side pipe 1 is provided with a screw 6 and a spring 5 in order to adjust the preload applied to the disk 4 in order to adjust these in response to changes in the head pressure of the fluid source.
さらに、このばね５は予圧を与える以外に静圧側管１の
圧力の脈動を吸収する機能を持たせるようにばね定数が
設計されている。Further, the spring constant of the spring 5 is designed so that it has a function of absorbing pressure pulsations in the static pressure side pipe 1 in addition to applying preload.
第２図は本発明の他の実施例を示す流量制御装置の配管
系統図である。この流量制御装置は、同図に示すように
、前述の実施例の静圧側管を管路より切離し、代りに予
圧機構として圧縮空気を一定の圧力に調整する調圧弁１
４ａと、容器を仕切るディスクの代りに、ダイアフラム
１３とを設けたことである。FIG. 2 is a piping system diagram of a flow rate control device showing another embodiment of the present invention. As shown in the figure, this flow rate control device has a pressure regulating valve 1 which separates the static pressure side pipe of the above-described embodiment from the pipe line and instead uses a prepressure mechanism to adjust the compressed air to a constant pressure.
4a, and a diaphragm 13 is provided instead of the disk that partitions the container.
この流量制御装置の動作は、まず、動圧側管１−５より
管路３の中心の流速より容器］４の動圧側の空気か圧縮
され、タイアフラｌ＼１３を押し上けることにより、ダ
イアフラｌ＼］３の取付りられたロッドて絞り弁１２ａ
を作動し、調圧弁１］、ａ及び配管１．４ ａを介して
送られた圧縮空気の流量を設定する。この空気の流量に
よりロータリーアクチュエータ７が所定の角度回転し、
制御板８により管路３の開口面積を変える。この実施例
の流量制御弁は、前述の実施例に比べ、静圧側管側の管
路に取付けなくて済むのて、より簡即に取付けられる利
点がある。The operation of this flow rate control device is as follows: First, the air on the dynamic pressure side of the container]4 is compressed by the flow velocity at the center of the pipe line 3 from the dynamic pressure side pipe 1-5, and by pushing up the tire flap l\13, the diaphragm l ＼] Throttle valve 12a with attached rod 3
to set the flow rate of the compressed air sent through the pressure regulating valve 1], a, and piping 1.4a. The rotary actuator 7 is rotated by a predetermined angle due to the flow rate of this air.
The control board 8 changes the opening area of the conduit 3. The flow control valve of this embodiment has the advantage that it can be installed more easily than the previous embodiments because it does not need to be installed in the pipe line on the static pressure side pipe side.
以上説明した実施例は、特に電気的に検出したり、電気
的に作動させたりするｔ！４′！ｆＩＩを設けていない
て、媒化性薬品等に使用に適用出来る利点がある。The embodiments described above are particularly suitable for electrically sensing or electrically actuated t! 4′! It has the advantage of not having fII and can be applied to medium-forming chemicals.
以上説明したように本発明は流量制御するための液体の
流れる開口面積を変える流量制御弁にフィー１−ハック
する管路内の流れ速度による圧力差を検知する機構を設
けることによって、圧力変動に対して追従するとともに
連続的に流量調整が出来る流量制御装置が得られるとい
う効果がある。As explained above, the present invention provides a mechanism for detecting the pressure difference due to the flow velocity in the pipe line to which the flow rate control valve changes the opening area through which the liquid flows. There is an effect that a flow rate control device that can follow the flow rate and continuously adjust the flow rate can be obtained.
第１図は本発明の一実施例を示す流量制御装置の配管系
統図、第２図は本発明の他の実施例を示す流量制御装置
の配管系統図、第３図及び第４図は従来の流量制御装置
の一例を示す配管系統図である。
１、 、 １４−容器、１ ａ 、 １．５ ・＝動
圧側管、１ｂ・・静圧側管、３・・管路、４・・ディス
ク、５・・・はね、６・・ねじ、７・・・ロータリーア
クチュエータ、８・・・制御板、９・・・Ｏリンク、１
０・・・ロッ＋＜、］１− 、 １．１ ａ、、 １
ｌ ｂ−調圧弁、］、２．１．２ａ１つ・・絞り弁、
１３ ・タイアフラム、１４ａ。Fig. 1 is a piping system diagram of a flow rate control device showing one embodiment of the present invention, Fig. 2 is a piping system diagram of a flow rate control device showing another embodiment of the invention, and Figs. 3 and 4 are conventional diagrams. FIG. 2 is a piping system diagram showing an example of a flow rate control device. 1, , 14-container, 1 a, 1.5 = dynamic pressure side pipe, 1b... static pressure side pipe, 3... conduit, 4... disk, 5... spring, 6... screw, 7 ...Rotary actuator, 8...Control board, 9...O link, 1
0...Ro+<, ]1-, 1.1 a,, 1
l b-pressure regulating valve,], 2.1.2a one...throttle valve,
13 - Tire flam, 14a.
Claims (1)
この制御板を回転するロータリーアクチュエータと、こ
のロータリーアクチュエータを作動させる空気量を調節
する絞り弁とを備える流量制御装置において、前記管路
の外側に流れる液体の静圧側圧力と前記管路の中心に流
れる液体の動圧側圧力との差を検出するピトー管構造の
機構と、前記圧力差により前記絞り弁を作動させる機構
とを有することを特徴とする流量制御装置。 ２、前記静圧側圧力が一定の圧力である空気圧であるこ
とを特徴とする請求項１記載の流量制御装置。[Claims] 1. A control plate that rotates to change the flow area of the pipe;
In a flow control device that includes a rotary actuator that rotates this control plate and a throttle valve that adjusts the amount of air that operates this rotary actuator, the static pressure side pressure of the liquid flowing outside the pipe line and the center of the pipe line are controlled. A flow rate control device comprising: a mechanism having a pitot tube structure that detects a difference between a dynamic pressure side pressure of a flowing liquid; and a mechanism that operates the throttle valve based on the pressure difference. 2. The flow rate control device according to claim 1, wherein the static pressure side pressure is a constant air pressure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2221546A JP2982255B2 (en) | 1990-08-23 | 1990-08-23 | Flow control device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2221546A JP2982255B2 (en) | 1990-08-23 | 1990-08-23 | Flow control device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04102908A true JPH04102908A (en) | 1992-04-03 |
| JP2982255B2 JP2982255B2 (en) | 1999-11-22 |
Family
ID=16768419
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2221546A Expired - Lifetime JP2982255B2 (en) | 1990-08-23 | 1990-08-23 | Flow control device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2982255B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5601651A (en) * | 1992-09-17 | 1997-02-11 | Fujitsu Limited | Flow control valve for use in fabrication of semiconductor devices |
| WO2003067352A1 (en) * | 2002-02-07 | 2003-08-14 | Toyo Valve Co.,Ltd. | Flow regulating valve, flow rate measuring device, flow control device, and flow rate measuring method |
-
1990
- 1990-08-23 JP JP2221546A patent/JP2982255B2/en not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5601651A (en) * | 1992-09-17 | 1997-02-11 | Fujitsu Limited | Flow control valve for use in fabrication of semiconductor devices |
| US5811349A (en) * | 1992-09-17 | 1998-09-22 | Fujitsu Limited | Method for growing a semiconductor layer |
| WO2003067352A1 (en) * | 2002-02-07 | 2003-08-14 | Toyo Valve Co.,Ltd. | Flow regulating valve, flow rate measuring device, flow control device, and flow rate measuring method |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2982255B2 (en) | 1999-11-22 |
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