JPH04100567A - Formation of monomolecular film - Google Patents
Formation of monomolecular filmInfo
- Publication number
- JPH04100567A JPH04100567A JP21493090A JP21493090A JPH04100567A JP H04100567 A JPH04100567 A JP H04100567A JP 21493090 A JP21493090 A JP 21493090A JP 21493090 A JP21493090 A JP 21493090A JP H04100567 A JPH04100567 A JP H04100567A
- Authority
- JP
- Japan
- Prior art keywords
- rotating drum
- substrate
- monomolecular film
- water tank
- upper rotating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000015572 biosynthetic process Effects 0.000 title description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 72
- 238000000034 method Methods 0.000 claims abstract description 25
- 230000002093 peripheral effect Effects 0.000 claims abstract description 16
- 239000000758 substrate Substances 0.000 claims description 87
- 230000004888 barrier function Effects 0.000 abstract description 20
- 239000000126 substance Substances 0.000 abstract description 7
- 239000010408 film Substances 0.000 description 85
- 230000002209 hydrophobic effect Effects 0.000 description 15
- 239000002356 single layer Substances 0.000 description 6
- 125000001165 hydrophobic group Chemical group 0.000 description 5
- 239000011521 glass Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 238000009434 installation Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000007246 mechanism Effects 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 230000007723 transport mechanism Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 239000012788 optical film Substances 0.000 description 1
- 239000012188 paraffin wax Substances 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 230000032258 transport Effects 0.000 description 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は単分子膜形成方法に関するものである。[Detailed description of the invention] [Industrial application field] The present invention relates to a method for forming a monolayer.
例えば液晶表示素子等の各種光学素子の基板面に、配向
膜等の分子配列方向が一方向にそろった樹脂膜を形成す
る方法として、Ｌ Ｂ （Ｌａｎｇｕｍｕｌｒ−Ｂｌｏ
ｄｇｅｔｔ）法と呼ばれる方法がある。For example, LB (Langmulr-Blo
There is a method called the dgett method.
このＬＢ法は、静水面上に前記配向膜や光学膜等となる
液状物質を滴下してその単分子を膜状に流し拡げ、この
単分子の膜を基板面に移し取ってこの基板面に単分子膜
を形成する方法である。This LB method involves dropping a liquid substance, such as the above-mentioned alignment film or optical film, onto a still water surface, spreading the single molecules in a film, and then transferring this single molecule film onto the substrate surface. This is a method of forming a monolayer.
第４図は上記ＬＢ法による従来の単分子膜形成方法を示
しており、図中１は内部に水２を満たした水槽、３はこ
の水槽１内の水面部を水平移動する水平なバー状の移動
バリアである。この単分子膜形成方法による単分子膜の
形成は次のようにして行なわれている。Fig. 4 shows the conventional monomolecular film formation method using the above-mentioned LB method. It is a movement barrier. Formation of a monomolecular film using this monomolecular film forming method is performed as follows.
まず、単分子膜を形成する基板４を水槽１内の水中に垂
直に浸漬した状態で、移動バリア３と基板４との間の水
面上に液状物質を滴下し、その単分子を膜状に流し拡げ
る。なお、この単分子は、分子の両端に親水性基ａと疎
水性基すとをもつ両親媒性の単分子であり、この水面上
を膜状に流れ拡がった単分子は、その全てが、疎水性基
すをもつ側の端部が上に向いた状態にそろう。First, while the substrate 4 on which the monomolecular film is to be formed is vertically immersed in water in the water tank 1, a liquid substance is dropped onto the water surface between the moving barrier 3 and the substrate 4, and the monomolecules are formed into a film. Spread it out. This monomolecule is an amphipathic monomolecule with a hydrophilic group a and a hydrophobic group at both ends of the molecule, and all of the monomolecules that flow and spread like a film on the water surface are Align the ends with the side with the hydrophobic group facing upwards.
次に、移動バリア３を基板４側に移動させて水面上の単
分子を密集させ、この単分子の膜Ａを、一定の表面圧に
なるように調整する。Next, the moving barrier 3 is moved to the substrate 4 side to crowd the monomolecules on the water surface, and the monomolecular film A is adjusted to have a constant surface pressure.
この後は、水面上の単分子膜Ａを移動バリア３により基
板４側に押しながら、これに同調させて基板４を垂直に
引上げて行けばよく、このようにして基板４を引上げて
行くと、水面上の単分子膜Ａが基板４の引上げにともな
って基板４面に移し取られ、基板４面に上記単分子膜Ａ
が形成される。After this, the monomolecular film A on the water surface is pushed toward the substrate 4 by the moving barrier 3, and the substrate 4 is pulled up vertically in synchronization with this. , the monomolecular film A on the water surface is transferred to the surface of the substrate 4 as the substrate 4 is pulled up, and the monomolecular film A is deposited on the surface of the substrate 4.
is formed.
なお、この基板４としては、親水性基板があるいは単分
子膜形成面に親水処理を施した基板が用いられており、
したがって、この基板４面に形成された単分子膜Ａは、
全ての単分子が親水性基ａをもつ側の端部において基板
４面に付着した−様な膜となる。Note that as this substrate 4, a hydrophilic substrate or a substrate whose monomolecular film formation surface has been subjected to hydrophilic treatment is used.
Therefore, the monomolecular film A formed on the four surfaces of the substrate is
A --like film is formed in which all the monomolecules are attached to the surface of the substrate 4 at the end portion on the side having the hydrophilic group a.
なお、この方法で基板４面に形成される単分子膜Ａの膜
厚は、単分子が一層に並んだ極めて薄い膜であるが、上
記工程を繰返して基板４面に単分子膜Ａを複数層に積層
すれば、任意の膜厚の被膜を得ることができる。The thickness of the monomolecular film A formed on the four surfaces of the substrate by this method is an extremely thin film in which single molecules are arranged in a single layer, but by repeating the above process, a plurality of monomolecular films A can be formed on the four surfaces of the substrate. By laminating them in layers, a film of any desired thickness can be obtained.
しかしながら、上記従来の単分子膜形成方法は、基板４
を水槽１内の水中に垂直に浸漬して、この基板４を引上
げながら水面上の単分子膜Ａを直接基板４面に移し取る
ものであるため、基板４の面積が大きいほど深さの大き
な水槽１を使用しなければならないという問題をもって
いた。すなわち、例えば基板４面にその全体にわたって
単分子膜Ａを形成する場合は、水槽１として、その長さ
が移動バリア３の移動ストローク〔単分子膜Ａの表面圧
調整に要する移動ストロークと、基板４の引上げに同調
して単分子膜Ａを２．基板４側に押して行くときの移動
ストローク（基板４の長さ）との合計ストローク〕に基
板４の浸漬スペースを加えた長さ以上で、幅が基板４の
幅量上のものが必要であるが、これに加えて、従来の単
分子膜形成方法では、水槽１の深さを、基板１の長さ以
上にする必要がある。そして、このように水槽１の深さ
が大きいと、水槽１にかかる水圧が高くなるため、水槽
１の耐圧強度を高くしなければならず、したがって、水
槽１の製作費が高くなるだけでなく、水１１の重量が大
きくなって、水槽１を設置する架台も高強度のものとす
る必要がある。しかも、上記従来の単分子膜形成方法で
は、水槽ｌがら基板４を引上げながら水面上の単分子膜
Ａを基板４面に移し取るものであるため、水槽１の上方
に基板４の長さに応じた基板引上げスペースを確保しな
れればならなかった。However, in the conventional monomolecular film formation method described above, the substrate 4
is vertically immersed in water in a water tank 1, and while the substrate 4 is pulled up, the monomolecular film A on the water surface is directly transferred to the surface of the substrate 4. Therefore, the larger the area of the substrate 4, the greater the depth. There was a problem that water tank 1 had to be used. That is, for example, when forming the monomolecular film A over the entire surface of the substrate 4, the length of the water tank 1 is equal to the movement stroke of the movement barrier 3 [the movement stroke required for adjusting the surface pressure of the monomolecular film A and the substrate]. In synchronization with the pulling up of step 4, monomolecular film A was pulled up 2. The length must be at least the sum of the moving stroke when pushing toward the substrate 4 (the length of the substrate 4) plus the immersion space of the substrate 4, and the width must be equal to or greater than the width of the substrate 4. However, in addition to this, in the conventional monomolecular film forming method, the depth of the water tank 1 needs to be greater than the length of the substrate 1. If the depth of the aquarium 1 is large in this way, the water pressure applied to the aquarium 1 will be high, so the pressure resistance of the aquarium 1 must be increased, which not only increases the manufacturing cost of the aquarium 1. , the weight of the water 11 increases, and the frame on which the water tank 1 is installed also needs to be made of high strength. Moreover, in the conventional monomolecular film forming method described above, the monomolecular film A on the water surface is transferred to the surface of the substrate 4 while pulling the substrate 4 out of the water tank 1. It was necessary to secure sufficient space to pull up the board.
本発明は上記のような実情にかんがみてなされたもので
あって、その目的とするところは、使用する水槽が深さ
の浅いものでよく、シかも水槽の上方に確保しなければ
ならないスペースも小さくてすむようにした、単分子膜
形成方法を提供することにある。The present invention has been made in view of the above-mentioned circumstances, and its purpose is to allow the aquarium to be used to be shallow, and also to reduce the space that must be secured above the aquarium. An object of the present invention is to provide a method for forming a monolayer that can be made small.
本発明の単分子膜形成方法は、水槽内の水面上に流し拡
げた単分子膜を、前記水面下に浸漬させて設けた下部回
転ドラムの外周面に付着させて引上げるとともに、この
下部回転ドラムの外周面に付着した前記単分子膜を、前
記下部回転ドラムの上に配置されてこの下部回転ドラム
と同調回転する上部回転ドラムの外周面に転写し、この
上部回転ドラムの上に前記基板を搬入してこの基板を前
記上部回転ドラムの回転に同調させて送りながら、前記
上部回転ドラムの外周面の前記単分子膜を前記基板面に
転写することを特徴とするものである。The method for forming a monomolecular film of the present invention involves depositing a monomolecular film spread on the water surface in an aquarium onto the outer peripheral surface of a lower rotary drum provided by immersing it under the water surface and pulling it up. The monomolecular film adhered to the outer circumferential surface of the drum is transferred to the outer circumferential surface of an upper rotary drum that is placed on the lower rotary drum and rotates in synchronization with the lower rotary drum, and the substrate is placed on the upper rotary drum. The monomolecular film on the outer peripheral surface of the upper rotating drum is transferred onto the substrate surface while the substrate is transported in synchronization with the rotation of the upper rotating drum.
すなわち、本発明は、水面上の単分子膜を下部回転ドラ
ムの外周面に付着させて引上げ、この単分子膜を上部回
転ドラムを介して基板面に移し取るものであり、このよ
うにすれば、使用する水槽は、前記下部回転ドラムの下
部が水面下に浸漬するだけの深さのもので十分であるし
、また水槽の上方には、前記上部回転ドラムの設置スペ
ースおよびこの上部回転ドラムの上を移動する基板の移
動スペースがあれば十分である。That is, in the present invention, the monomolecular film on the water surface is attached to the outer circumferential surface of the lower rotating drum and then pulled up, and this monomolecular film is transferred to the substrate surface via the upper rotating drum. It is sufficient that the water tank used is deep enough for the lower part of the lower rotating drum to be immersed under the water surface, and above the tank there is an installation space for the upper rotating drum and It is sufficient if there is enough movement space for the substrate to move above.
以下、本発明の一実施例を第１図および第２図を参照し
て説明する。An embodiment of the present invention will be described below with reference to FIGS. 1 and 2.
まず、単分子膜の形成に使用する装置の構成を説明する
と、この装置は、第１図に示すように、内部に水１２を
満たした水槽と、この水槽ｌｌ内の水面部を水平移動す
る移動バリア１３と、水槽１１内の水面上につくられた
単分子膜Ａを引上げるための下部回転ドラム１４と、こ
の下部回転ドラム１４で引上げられた単分子膜Ａを基板
１０面に転写するための上部回転ドラム１５とからなっ
ている。前記移動バリア１３は、水槽１１内の水面上の
単分子膜Ａを下部回転ドラム１４側に押し移動するもの
で、この移動バリア１３は、水槽１１のほぼ全幅にわた
る長さの水平なバーからなっており、そのほぼ下半分は
水槽１１内の水面下に浸漬させである。この移動バリア
１３は、水槽１１の両側壁に設けたレール（図示せず）
に支持されており、図示しない移動機構によって、水槽
１１の一端側（図において右側）から他端側に水平移動
されるようになっている。また、下部回転ドラム１４お
よび上部回転ドラム１５は、それぞれ水槽１１のほぼ全
幅にわたる長さのものとされており、この両回転ドラム
１４．１５の径はほぼ同一となっている。また、下部回
転ドラム１４は、その全体あるいは外周面をガラス等の
親水性物質で形成した親水性ドラムとされ、上部回転ド
ラム１５は、その全体またはドラム外周面を疎水性樹脂
等の疎水性物質で形成した疎水性ドラムとされている。First, to explain the configuration of the apparatus used to form a monomolecular film, as shown in FIG. A moving barrier 13, a lower rotating drum 14 for pulling up the monomolecular film A formed on the water surface in the water tank 11, and transferring the monomolecular film A pulled up by the lower rotating drum 14 onto the surface of the substrate 10. It consists of an upper rotating drum 15. The moving barrier 13 pushes the monomolecular film A on the water surface in the aquarium 11 toward the lower rotating drum 14. The moving barrier 13 consists of a horizontal bar with a length spanning almost the entire width of the aquarium 11. Almost the lower half of it is immersed below the water surface in the water tank 11. This moving barrier 13 consists of rails (not shown) provided on both side walls of the aquarium 11.
The water tank 11 is supported by a moving mechanism (not shown), and is horizontally moved from one end (right side in the figure) to the other end. Further, the lower rotary drum 14 and the upper rotary drum 15 each have a length that spans almost the entire width of the water tank 11, and the diameters of both rotary drums 14 and 15 are approximately the same. Further, the lower rotating drum 14 is a hydrophilic drum whose entirety or outer peripheral surface is made of a hydrophilic material such as glass, and the upper rotating drum 15 is a hydrophilic drum whose entirety or outer peripheral surface is made of a hydrophobic material such as a hydrophobic resin. It is said to be a hydrophobic drum made of.
そして、下部回転ドラム１４は、そのほぼ下半分を水面
下に浸漬させた状態で水槽１１内の他端側に移動バリア
１３と平行に設けられ、水槽１１の両側壁に回転可能に
支持されている。また、上部回転ドラム１５は、図示し
ない軸受部に支持させて下部回転ドラム１４の上にこの
下部回転ドラム１４と平行に配置されており、この上部
回転ドラム１５の下部外周面は下部回転ドラム１４の上
部外周面に極く軽い接触圧（両回転ドラム１４．１５間
に単分子膜Ａが入れる接触圧）で接触している。この下
部回転ドラム１４と上部回転ドラム１５は、図示しない
回転機構によって同調回転されるようになっており、そ
の回転方向は、下部回転ドラム１４を、その移動バリア
１３と対向する側が水面下から水面上に向かう方向に回
転させ、上部回転ドラム１５を、下部回転ドラム１４と
逆方向に回転させるように設定されている。The lower rotating drum 14 is provided at the other end of the water tank 11 in parallel with the movable barrier 13 with its lower half submerged under the water surface, and is rotatably supported by both side walls of the water tank 11. There is. Further, the upper rotating drum 15 is supported by a bearing (not shown) and is disposed above the lower rotating drum 14 in parallel with the lower rotating drum 14. The monomolecular film A is in contact with the upper outer circumferential surface of the rotating drum 14 and 15 with extremely light contact pressure (the contact pressure that allows the monomolecular film A to be placed between both rotating drums 14 and 15). The lower rotating drum 14 and the upper rotating drum 15 are rotated synchronously by a rotating mechanism (not shown), and the direction of rotation is such that the lower rotating drum 14 is moved from below the water surface to above the water surface. The upper rotary drum 15 is set to rotate in the upward direction, and the upper rotary drum 15 is rotated in the opposite direction to the lower rotary drum 14.
また、図示しないが、水槽１１の上方には、単分子ＨＡ
を形成する基板１ｏをその単分子膜形成面を下に向けた
状態で水平に支持して、この基板１０を水槽１１の一端
側から他端側に搬送する基板搬送機構が設けられている
。この基板搬送機構は、上部回転ドラム１５の回転に同
調して基板１０を搬送するもので、基板１ｏは、その先
端側から上部回転ドラム１５の上に搬入されてその下面
が上部回転ドラム１５の外周面に接し、この状態で水槽
１１の他端側に向けて水平に搬送される。Although not shown, monomolecular HA is placed above the water tank 11.
A substrate transport mechanism is provided for horizontally supporting a substrate 1o on which a monomolecular film is to be formed, with its monomolecular film forming surface facing downward, and transporting the substrate 10 from one end of the water tank 11 to the other end. This substrate transport mechanism transports the substrate 10 in synchronization with the rotation of the upper rotary drum 15. The substrate 1o is carried onto the upper rotary drum 15 from its tip side, and its lower surface is placed on the upper rotary drum 15. It contacts the outer circumferential surface, and in this state is transported horizontally toward the other end of the water tank 11.
なお、１６は基板押えローラであり、基板１ｏは、この
基板押えローラ１６によって、極く軽い接触圧（基板１
０と上部回転ドラム１５との間に単分子膜Ａが入れる接
触圧）で上部回転ドラム１６の外周面に接触される。な
お、この基板１ｏとしては、ガラス基板等の親水性基板
か、あるいは単分子膜形成面に親水処理を施した基板を
用いる。Note that 16 is a substrate holding roller, and the substrate 1o is subjected to extremely light contact pressure (substrate 1o) by this substrate holding roller 16.
The monomolecular film A is brought into contact with the outer circumferential surface of the upper rotating drum 16 with a contact pressure applied between the monomolecular film A and the upper rotating drum 15. Note that as this substrate 1o, a hydrophilic substrate such as a glass substrate or a substrate whose surface on which a monomolecular film is formed is subjected to hydrophilic treatment is used.
次に、上記装置によって行なわれる前記基板１０面への
単分子膜Ａの形成方法を説明する。Next, a method for forming the monomolecular film A on the substrate 10 surface using the above-mentioned apparatus will be explained.
まず、水槽１１上への基板１０の搬入に先立って、移動
バリア１３を水槽１１の一端側の復帰位置に移動させ、
この状態で水槽１１内の移動バリア１３と下部回転ドラ
ム１４との間の水面上に液状物質を滴下して、その単分
子を水面上に膜状に流し拡げる。この単分子は、分子（
図示せず）の両端に親水性基ａと疎水性基すとをもつ両
親媒性の単分子であり、この水面上を膜状に流れ拡がっ
た単分子は、その全てが、疎水性基すをもつ側の端部が
上に向いた状態にそろう。First, before carrying the substrate 10 onto the water tank 11, move the moving barrier 13 to the return position on one end side of the water tank 11,
In this state, a liquid substance is dropped onto the water surface between the movable barrier 13 and the lower rotary drum 14 in the water tank 11, and its single molecules are spread in a film form on the water surface. This single molecule is the molecule (
(not shown) is an amphiphilic monomolecule having a hydrophilic group a and a hydrophobic group at both ends. Align it so that the end with the side is facing upwards.
次に、復帰位置にある移動バリア１３を下部回転ドラム
１４側に移動させて水面上の単分子を密集させ、この単
分子の膜Ａを、一定の表面圧になるように調整する。Next, the movable barrier 13 in the return position is moved toward the lower rotating drum 14 to crowd the monomolecules on the water surface, and adjust the monomolecular film A to have a constant surface pressure.
この後は、水面上の単分子膜Ａを移動バリア３により下
部回転ドラム１４側に押しながら、これに同調させて下
部回転ドラム１４と前述した回転方向に回転させるとと
もに、上部回転ドラム１５を下部回転ドラム１４の回転
方向と逆方向に同調回転させ、さらに上部回転ドラム１
５の上に基板１０を搬入して、この基板１０を上部回転
ドラム１５の回転に同調させて搬送する。After this, the monomolecular film A on the water surface is pushed toward the lower rotating drum 14 side by the moving barrier 3, and in synchronization with this, the lower rotating drum 14 is rotated in the aforementioned rotation direction, and the upper rotating drum 15 is moved to the lower rotating drum 14. The upper rotating drum 1 is rotated synchronously in the opposite direction to the rotating direction of the rotating drum 14.
A substrate 10 is carried onto the drum 5, and the substrate 10 is conveyed in synchronization with the rotation of the upper rotating drum 15.
このように下部回転ドラム１４と上部回転ドラム１５を
回転させると、水面上の単分子膜Ａが移動バリア３で下
部回転ドラム１４側に押されながら順次下部回転ドラム
１４の外周面に付着して引上げられるとともに、この下
部回転ドラム１４の外周面に付着した単分子膜Ａが上部
回転ドラム１６の外周面に転写されて行く。なお、前記
下部回転ドラム１４は親水性ドラムであるため、下部回
転ドラム１４の外周面に付着した単分子膜Ａは、全ての
単分子が親水性基ａをもつ側の端部において下部回転ド
ラム１４に付着した−様な膜となり、また上部回転ドラ
ム１５は疎水性ドラムであるため、この上部回転ドラム
１５の外周面に転写された単分子膜Ａは、全ての単分子
が疎水性基すをもつ側の端部において上部回転ドラム１
５に付着した−様な膜となる。When the lower rotating drum 14 and the upper rotating drum 15 are rotated in this way, the monomolecular film A on the water surface is pushed toward the lower rotating drum 14 by the moving barrier 3 and adheres to the outer peripheral surface of the lower rotating drum 14 one after another. As it is pulled up, the monomolecular film A attached to the outer circumferential surface of the lower rotating drum 14 is transferred to the outer circumferential surface of the upper rotating drum 16. In addition, since the lower rotating drum 14 is a hydrophilic drum, the monomolecular film A attached to the outer peripheral surface of the lower rotating drum 14 is attached to the lower rotating drum at the end of the side where all monomolecules have hydrophilic groups a. Moreover, since the upper rotating drum 15 is a hydrophobic drum, the monomolecular film A transferred to the outer peripheral surface of the upper rotating drum 15 has all monomolecules with hydrophobic groups. At the end of the side with the upper rotating drum 1
It becomes a --like film attached to 5.
また、上部回転ドラム１５の上に基板１０を搬入した基
板１０を上部回転ドラム１５の回転に同調させて搬送し
て行くと、上部回転ドラム１５の外周面に付着している
単分子膜Ａが基板１０の下面に転写されて行く。なお、
この基板１０は、ガラス基板等の親水性基板かあるいは
単分子膜形成面に親水処理を施した基板であるため、こ
の基板１０面に付着した単分子膜Ａは、全ての単分子が
親水性基ａをもつ側の端部において基板１０に付着した
−様な膜となる。Further, when the substrate 10 loaded onto the upper rotating drum 15 is conveyed in synchronization with the rotation of the upper rotating drum 15, the monomolecular film A attached to the outer peripheral surface of the upper rotating drum 15 is The image is transferred to the lower surface of the substrate 10. In addition,
Since this substrate 10 is a hydrophilic substrate such as a glass substrate or a substrate whose monomolecular film formation surface has been subjected to hydrophilic treatment, all monomolecules of the monomolecular film A attached to the surface of this substrate 10 are hydrophilic. A --like film is attached to the substrate 10 at the end on the side having the group a.
なお、上記工程で基板１０面に形成される単分子膜Ａの
膜厚は、単分子が一層に並んだ極めて薄い膜であるが、
基板１０面に単分子膜Ａを複数層に積層すれば、任意の
膜厚の被膜を得ることができる。この場合は、上記のよ
うにして単分子膜Ａを転写した基板１０を上部回転ドラ
ム１５から浮かせた状態で水槽１１の一端側に逆送りす
るとともに、この基板１０の逆送り時間を利用して移動
バリア１３を復帰位置に移動させ、この後水面上に液状
物質を滴下して単分子膜Ａをつくり、この単分子膜Ａを
下部回転ドラム１４および上部回転ドラム１５を介して
基板１０面に転写する工程を繰返して、所望の膜厚にな
るまで基板１０面に単分子膜Ａを積層すればよい。The thickness of the monomolecular film A formed on the surface of the substrate 10 in the above process is an extremely thin film in which single molecules are arranged in a single layer.
By laminating a plurality of monomolecular films A on the surface of the substrate 10, a film having an arbitrary thickness can be obtained. In this case, the substrate 10 on which the monomolecular film A has been transferred as described above is floated from the upper rotating drum 15 and transported backwards to one end side of the water tank 11, and the substrate 10 is transported backwards by using the time when the substrate 10 is transported backwards. The moving barrier 13 is moved to the return position, and then a liquid substance is dropped onto the water surface to form a monomolecular film A, and this monomolecular film A is applied to the surface of the substrate 10 via the lower rotating drum 14 and the upper rotating drum 15. The monomolecular film A may be laminated on the substrate 10 surface by repeating the transfer process until the desired film thickness is reached.
すなわち、この単分子膜形成方法は、水面上の単分子膜
Ａを下部回転ドラム１４および上部回転ドラム１５を介
して基板１０面に移し取るものであり、このようにすれ
ば、使用する水槽１１は深さの浅いものでよい。すなわ
ち、例えば基板１０面にその全体にわたって単分子ＩＩ
Ａを形成する場合、水槽１１としては、その長さが移動
バリア１３の移動ストローク〔単分子膜Ａの表面圧調整
に要する移動ストロークと、下部回転ドラム１４の回転
に同調して単分子膜Ａを下部回転ドラム１４側に押して
行くときの移動ストローク（基板１０の長さ）との合計
ストローク〕に下部回転ドラム１４の設置スペースを加
えた長さ以上で、幅が基板１０の幅量上のものが必要で
あるが、この水槽１１の深さは、下部回転ドラム１４の
ほぼ下半分か水面下に浸漬するだけの深さがあれば十分
である。そして、このように水槽１１の深さが浅ければ
、水槽１１にかかる水圧は小さくなるため、水槽１１の
耐圧強度は低くて十分であり、したがって、水槽１１の
製作費を低減できるし、また水槽１１の重量も小さくな
るから、水槽１１を設置する架台を高い強度を必要とし
ない安価なのものとすることができる。しかも、この単
分子膜形成方法によれば、水槽１１の上方には、上部回
転ドラム１５の設置スペースおよびこの上部回転ドラム
の５上を移動する基板１０の移動スペースがあれば十分
であるから、水槽１１の上方に確保するスペースも小さ
くてすむ。That is, in this monomolecular film forming method, the monomolecular film A on the water surface is transferred to the surface of the substrate 10 via the lower rotating drum 14 and the upper rotating drum 15. may be shallow. That is, for example, the single molecule II is distributed over the entire surface of the substrate 10.
A, the length of the water tank 11 is determined by the movement stroke of the movement barrier 13 [the movement stroke required for adjusting the surface pressure of the monomolecular film A] and the rotation of the lower rotating drum 14 to form the monomolecular film A. The length is longer than the sum of the installation space of the lower rotating drum 14 and the moving stroke (length of the substrate 10) when pushing the However, the depth of this water tank 11 is sufficient if it is deep enough to submerge approximately the lower half of the lower rotating drum 14 under the water surface. If the depth of the aquarium 11 is shallow in this way, the water pressure applied to the aquarium 11 will be small, so the pressure resistance of the aquarium 11 will be low but sufficient, and therefore the manufacturing cost of the aquarium 11 can be reduced. Since the weight of the water tank 11 is also reduced, the frame on which the water tank 11 is installed can be made inexpensive and does not require high strength. Moreover, according to this monomolecular film forming method, it is sufficient to have an installation space for the upper rotating drum 15 and a movement space for the substrate 10 to move on the upper rotating drum 5 above the water tank 11. The space secured above the water tank 11 can also be small.
第２図は本発明の他の実施例を示している。この実施例
は、第１図に示した単分子膜形成装置を複数台基板搬送
方向に並べて配置して、この各装置により順次基板１０
に単分子膜を転写して行くようにしたものであり、この
実施例によれば、基板１０面に連続して単分子膜Ａを積
層して所望の膜厚の被膜を得ることができる。FIG. 2 shows another embodiment of the invention. In this embodiment, a plurality of monomolecular film forming apparatuses shown in FIG.
According to this embodiment, the monomolecular film A can be continuously laminated on the 10th surface of the substrate to obtain a film having a desired thickness.
また、第３図は前記上部回転ドラム１５の変形例を示し
ている。この上部回転ドラム１５は、ドラム外周面に部
分的に所定パターンの疎水性領域１５ｂを形成し、他の
領域は親水性領域１４ａとしたものであり、このような
上部回転ドラム１５を用いれば、水面上の単分子膜がド
ラム外周面の疎水性領域１５ｂのみに付着して基板面に
転写されるから、基板面に所定パターンに単分子膜を形
成することができる。なお、この上部回転ドラム１５は
、ドラム全体またはドラム外周面を疎水性樹脂等の疎水
性物質で形成した疎水性ドラムの外周面に所定領域を除
いて界面活性剤の塗布等による親水処理を施すか、ある
いはドラム全体またはドラム外周面をガラス等の親水性
物質で形成した親水性ドラムの外周面の所定領域にパラ
フィン等の塗布による疎水処理を施すことによって製造
することができる。また、ここでは上部回転ドラム１５
を部分的に疎水性領域１５ｂを形成したものとしたが、
下部回転ドラム］４を、ドラム外周面に部分的に所定パ
ターンの親水性領域を形成し他の領域は疎水性領域とし
たものとしても、基板面に所定パターンに単分子膜を形
成することができるし、また下部回転ドラム１４と上部
回転ドラム１５との両方を上記のような親水性領域と疎
水性領域とをもつドラムとして、この両ドラム１４゜１
５の親水性領域と疎水性領域とを互いに対向させても、
上記と同様に基板面に所定パターンに単分子膜を形成す
ることができる。Further, FIG. 3 shows a modification of the upper rotating drum 15. As shown in FIG. This upper rotating drum 15 has a predetermined pattern of hydrophobic regions 15b partially formed on the outer peripheral surface of the drum, and the other regions are hydrophilic regions 14a.If such an upper rotating drum 15 is used, Since the monomolecular film on the water surface adheres only to the hydrophobic region 15b on the outer peripheral surface of the drum and is transferred to the substrate surface, the monomolecular film can be formed in a predetermined pattern on the substrate surface. The upper rotating drum 15 is constructed by applying hydrophilic treatment such as applying a surfactant to the entire drum or the outer peripheral surface of a hydrophobic drum made of a hydrophobic substance such as a hydrophobic resin, except for a predetermined area. Alternatively, it can be manufactured by subjecting a predetermined area of the outer circumferential surface of a hydrophilic drum, in which the entire drum or the outer circumferential surface of the drum is formed of a hydrophilic substance such as glass, to a hydrophobic treatment by applying paraffin or the like. Also, here, the upper rotating drum 15
Although the hydrophobic region 15b was partially formed,
Even if the lower rotating drum 4 has a predetermined pattern of hydrophilic regions partially formed on the outer peripheral surface of the drum and hydrophobic regions in other regions, it is possible to form a monomolecular film in a predetermined pattern on the substrate surface. In addition, if both the lower rotating drum 14 and the upper rotating drum 15 are drums having a hydrophilic region and a hydrophobic region as described above, both drums 14°1
Even if the hydrophilic region and the hydrophobic region of No. 5 are made to face each other,
Similarly to the above, a monomolecular film can be formed in a predetermined pattern on the substrate surface.
本発明の単分子膜形成方法は、水面上の単分子膜を、水
面下に浸漬させて設けた下部回転ドラムの外周面に付着
させて引上げるとともに、この下部回転ドラムの外周面
に付着した単分子膜を、下部回転ドラムの上に配置され
てこの下部回転ドラムと同調回転する上部回転ドラムの
外周面に転写し、この上部回転ドラムの上に基板を搬入
してこの基板を上部回転ドラムの回転に同調させて送り
ながら、上部回転ドラムの外周面の単分子膜を基板面に
転写するものであるから、前記水槽は、下部回転トラム
の下部が水面下に浸漬するだけの深さがあれば十分てあ
り、したがって水槽として深さの浅いものを使用するこ
とができるし、また、水槽の上方には、前記上部回転ド
ラムの設置スペースとこの下部回転ドラムの上に接して
移動する基板の移動スペースがあれば十分であるから、
水槽の上方に確保するスペースも小さくてすむ。The method for forming a monomolecular film of the present invention involves attaching a monomolecular film on the water surface to the outer peripheral surface of a lower rotating drum provided by immersing it under the water surface and pulling it up. The monomolecular film is transferred onto the outer peripheral surface of an upper rotating drum that is placed on top of the lower rotating drum and rotates in synchronization with the lower rotating drum, and the substrate is carried onto the upper rotating drum and transferred to the upper rotating drum. The monomolecular film on the outer circumferential surface of the upper rotating drum is transferred onto the substrate surface while being fed in synchronization with the rotation of the lower rotating tram. There is enough space for the upper rotating drum and a board that moves in contact with the lower rotating drum above the aquarium. It is sufficient to have a moving space of
The space required above the tank is also small.
第１図は本発明の一実施例を示す単分子膜形成に使用す
る装置の縦断側面図、第２図は本発明の他の実施例を示
す単分子膜形成装置の配置図、第３図は本発明に用いる
上部回転ドラムの変形例を示す斜視図、第４図は従来の
単分子膜形成方法を示す図である。
１０・・・基板、１１・・・水槽、１２・・・水、１３
・・・移動バリア、１４・・・下部回転ドラム、１５・
・・上部回転ドラム、１５ａ・・・親水性領域、１５ｂ
・・・疎水性領域、１６・・・基板押えローラ、Ａ・・
・単分子膜、ａ・・・親水性基、ｂ・・・疎水性基。
出願人代理人 弁理士 鈴江武彦
１４ Ｔｉ１１’ ｒｉＪ ｈ ト−ｉ ｔ。
第１図
第２図Fig. 1 is a vertical cross-sectional side view of an apparatus used for forming a monolayer film showing one embodiment of the present invention, Fig. 2 is a layout diagram of a monomolecular film forming apparatus showing another embodiment of the invention, and Fig. 3 4 is a perspective view showing a modified example of the upper rotating drum used in the present invention, and FIG. 4 is a diagram showing a conventional monomolecular film forming method. 10...Substrate, 11...Aquarium, 12...Water, 13
... Moving barrier, 14... Lower rotating drum, 15.
... Upper rotating drum, 15a... Hydrophilic region, 15b
...Hydrophobic region, 16...Substrate holding roller, A...
- Monomolecular film, a...hydrophilic group, b...hydrophobic group. Applicant's agent Patent attorney Takehiko Suzue14 Ti11' riJ h to-i t. Figure 1 Figure 2
Claims (1)
の膜を基板面に移し取ってこの基板面に単分子膜を形成
する方法において、前記水面上の単分子膜を、前記水面
下に浸漬させて設けた下部回転ドラムの外周面に付着さ
せて引上げるとともに、この下部回転ドラムの外周面に
付着した前記単分子膜を、前記下部回転ドラムの上に配
置されてこの下部回転ドラムと同調回転する上部回転ド
ラムの外周面に転写し、この上部回転ドラムの上に前記
基板を搬入してこの基板を前記上部回転ドラムの回転に
同調させて送りながら、前記上部回転ドラムの外周面の
前記単分子膜を前記基板面に転写することを特徴とする
単分子膜形成方法。In a method in which a monomolecular film is spread on the water surface in an aquarium in the form of a film, and the monomolecular film is transferred to a substrate surface to form a monomolecular film on the substrate surface, the monomolecular film on the water surface is The monomolecular film attached to the outer circumferential surface of the lower rotating drum is attached to the outer circumferential surface of the lower rotating drum provided by immersing it under the water surface and pulled up. The substrate is transferred onto the outer circumferential surface of an upper rotating drum that rotates in synchronization with the rotating drum, and the substrate is transferred onto the upper rotating drum, and while the substrate is being fed in synchronization with the rotation of the upper rotating drum, A method for forming a monomolecular film, comprising transferring the monomolecular film on the outer peripheral surface onto the substrate surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21493090A JPH04100567A (en) | 1990-08-16 | 1990-08-16 | Formation of monomolecular film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21493090A JPH04100567A (en) | 1990-08-16 | 1990-08-16 | Formation of monomolecular film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH04100567A true JPH04100567A (en) | 1992-04-02 |
Family
ID=16663930
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21493090A Pending JPH04100567A (en) | 1990-08-16 | 1990-08-16 | Formation of monomolecular film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH04100567A (en) |
-
1990
- 1990-08-16 JP JP21493090A patent/JPH04100567A/en active Pending
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