JPH0389615A - Electrode structure for piezoelectric resonator - Google Patents
Electrode structure for piezoelectric resonatorInfo
- Publication number
- JPH0389615A JPH0389615A JP22720189A JP22720189A JPH0389615A JP H0389615 A JPH0389615 A JP H0389615A JP 22720189 A JP22720189 A JP 22720189A JP 22720189 A JP22720189 A JP 22720189A JP H0389615 A JPH0389615 A JP H0389615A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- layer
- chromium
- film
- gold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000853 adhesive Substances 0.000 claims abstract description 16
- 230000001070 adhesive effect Effects 0.000 claims abstract description 16
- 229910018487 Ni—Cr Inorganic materials 0.000 claims abstract description 13
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 claims abstract description 13
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 13
- 229910052737 gold Inorganic materials 0.000 claims abstract description 13
- 239000010931 gold Substances 0.000 claims abstract description 13
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 7
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 7
- 239000011651 chromium Substances 0.000 claims abstract description 7
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 4
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 239000012528 membrane Substances 0.000 claims 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract description 11
- 229910052709 silver Inorganic materials 0.000 abstract description 11
- 239000004332 silver Substances 0.000 abstract description 11
- 239000002245 particle Substances 0.000 abstract description 8
- 239000013078 crystal Substances 0.000 abstract description 6
- 230000010355 oscillation Effects 0.000 abstract description 2
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 229910000510 noble metal Inorganic materials 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
【発明の詳細な説明】
く本発明の目的〉
［産業上の利用分野１
本発明は、導電性接着剤との密着性を向上させた圧電振
動子の電極構造に関する。DETAILED DESCRIPTION OF THE INVENTION OBJECTS OF THE INVENTION [Industrial Field of Application 1] The present invention relates to an electrode structure of a piezoelectric vibrator that has improved adhesion to a conductive adhesive.
［従来の技術１
従来より圧電振動子の電極構造として、クロムやニッケ
ルクロム上に金や銀の二重層にした電極膜が広く利用さ
れ、はんだ付けに適した電極であることが知られている
。[Conventional technology 1] Conventionally, as the electrode structure of piezoelectric vibrators, electrode films consisting of a double layer of gold or silver on chromium or nickel-chromium have been widely used, and are known to be suitable for soldering. .
しかし導電性接着剤の場合には第２層が金の場合、その
第２層の金が導電性接着剤の銀粒子に拡散し易く、電極
切れ等不都合が生じ易くなっていた。However, in the case of a conductive adhesive, when the second layer is gold, the gold in the second layer tends to diffuse into the silver particles of the conductive adhesive, making it easy to cause problems such as electrode breakage.
［発明が解決しようとする課題１
そこで従来のクロムやニッケルクロムと金の二重膜では
、表面の金が導電性接着剤の銀に拡散されるため、導電
性接着剤の銀に拡散されない電極構造が求められている
。[Problem to be solved by the invention 1 Therefore, in conventional double films of chromium or nickel chromium and gold, the gold on the surface is diffused into the silver of the conductive adhesive. Structure is required.
［本発明の目的］
本発明の目的は、少なくとも導電性接着剤で固着する支
持部分の電極構造を３重層として、導電性接着剤の銀粒
子に電極金属が拡散せず、電極切れを生じない電極構造
を提供することにある。[Objective of the present invention] The object of the present invention is to make the electrode structure of at least the supporting part fixed with a conductive adhesive a triple layer, so that the electrode metal does not diffuse into the silver particles of the conductive adhesive and the electrode does not break. The purpose is to provide an electrode structure.
く本発明の構成〉
【課題を解決する手段１
そこで本発明では、クロムと金の２重層の上に少なくと
も導電性接着剤を塗布する支持部分にニッケルクロム膜
を設け、金膜が導電性接着剤の銀粒子へ拡散することを
防止している。[Structure of the present invention] [Means for solving the problem 1] Therefore, in the present invention, a nickel-chromium film is provided on the double layer of chromium and gold at least on the supporting part where the conductive adhesive is applied, and the gold film is used as the conductive adhesive. This prevents the agent from diffusing into the silver particles.
［作用及び実施例１ 第１図は、本発明の実施例を示す断面図である。[Effect and Example 1 FIG. 1 is a sectional view showing an embodiment of the present invention.
圧電振動子、ここでは水晶振動子を例に挙げる。A piezoelectric vibrator, here a crystal vibrator, is taken as an example.
水晶振動板１には第１層電極膜２としてクロムが３００
〜１００ＯＡ蒸着され、第２層電極膜３として金が５０
０〜２００ＯＡ蒸着され、少なくとも支持部分について
は第３層電極膜４としてニッケルクロムが５００〜１５
００Ａ蒸着され、電極膜が施されている。The crystal diaphragm 1 contains 300% chromium as the first layer electrode film 2.
~100 OA was deposited, and 50 OA of gold was deposited as the second layer electrode film 3.
0 to 200 OA is deposited, and at least on the supporting portion, nickel chromium is deposited at 500 to 15
00A vapor deposited and an electrode film is applied.
第３電極膜上には支持具との間を電気的接続と固着を兼
ねて導電性接着剤が塗布され、乾燥して固着している。A conductive adhesive is coated on the third electrode film for both electrical connection and fixation to the support, and is dried and fixed.
導電性接着剤は主に銀粒子とバインダー（固着剤）から
戒り、従来はこの銀粒子に最上層の金の電極膜が喰われ
てしまっていたが、本発明では最上層にニッケルクロム
をもちいることにより、ニッケルクロムは銀粒子には喰
われないので、電極切れによる発振停止やＣ１（クリス
タルインピーダンス〉の上昇がなくなった。Conductive adhesives mainly contain silver particles and binders (fixing agents), and in the past, the top layer of gold electrode film was eaten away by these silver particles, but in the present invention, nickel chromium is used as the top layer. By using nickel chromium, it is not eaten by silver particles, so oscillation stoppage and C1 (crystal impedance) increase due to electrode breakage are eliminated.
少なくとも支持部分には３層の電極膜が施されている必
要があるり、他の励振電極には２層の電極膜でもよいが
、必要に応じて励振電極、引出電極にも前述した３層の
電極膜層にしてもよい。At least the support part needs to be coated with three layers of electrode film, and other excitation electrodes may have two layers of electrode film, but if necessary, the excitation electrode and extraction electrode may also be coated with the three layers described above. It may also be an electrode film layer.
従来の常識でいえば、最上層（空気と接する層）には、
貴金属の膜が用いられる場合が多いが、これは支持具と
の電気的接触に有利な点があり、また酸化膜を生じ易い
金属を最上層に用いると、電気的な接触に不都合である
と考えられているが、実験によりＮ認した結果、必ずし
もニッケルクロム層を最上層にしても電気的接続には支
障がなく、経時変化もないことがわかった。そして、前
述した電極切れ等もなく、貴金属で生じ易い支持具にか
かる応力による腹側がれにも強いことがわかった。According to conventional wisdom, the top layer (the layer in contact with air) has
A noble metal film is often used, but this has the advantage of making electrical contact with the support, and using a metal that tends to form an oxide film as the top layer may be disadvantageous for making electrical contact. However, as a result of the experiment, it was found that even if the nickel chromium layer is used as the top layer, there is no problem with electrical connection and there is no change over time. It was also found that there was no electrode breakage as described above, and that the device was resistant to ventral side peeling due to stress applied to the support, which tends to occur with noble metals.
さらに最上層の電極は、ニッケルクロムの他、ニッケル
であっても同等の効果が得られる。Furthermore, the same effect can be obtained even if the uppermost layer electrode is made of nickel instead of nickel chromium.
本発明に用いられる圧電体としては、水晶の他、タンタ
ル酸リチウム、圧電セラミック等がある。Piezoelectric materials used in the present invention include lithium tantalate, piezoelectric ceramics, and the like in addition to crystal.
く本発明の効果〉
本発明によって、導電性接着剤を用いた時、接着剤の銀
に圧電振動板に施された表面の金属が拡散し電極切れを
起こしていたが、少なくとも導電性接着剤を用いる第３
層にニッケルクロムを用いたことにより、拡散が無くな
り安定した電極膜を実現できた。According to the present invention, when a conductive adhesive is used, the metal on the surface of the piezoelectric diaphragm diffuses into the silver of the adhesive, causing electrode breakage, but at least the conductive adhesive The third using
By using nickel chromium for the layer, diffusion was eliminated and a stable electrode film was realized.
第１図は本発明の実施例を示す断面図である。 １・・・・・・・・・圧電振動板、 ２・・・・・・−・・第１層電極膜、 ３・・・・・・・・・第２層電極膜、 ４・・・・・・・・・第３層電極膜 FIG. 1 is a sectional view showing an embodiment of the present invention. 1...Piezoelectric diaphragm, 2...--First layer electrode film, 3... Second layer electrode film, 4...Third layer electrode film
Claims (1)
くとも支持部分における圧電振動板にクロムから成る第
１電極膜と、金から成る第２電極膜と、ニッケルクロム
またはニッケルから成る第３電極膜とから成る圧電振動
子の電極構造。A piezoelectric vibrator is fixed to a support using a conductive adhesive, and the piezoelectric diaphragm at least in the support portion has a first electrode film made of chromium, a second electrode film made of gold, and a third electrode made of nickel chromium or nickel. Electrode structure of a piezoelectric vibrator consisting of a membrane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1227201A JPH07109969B2 (en) | 1989-08-31 | 1989-08-31 | Electrode structure of piezoelectric vibrator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1227201A JPH07109969B2 (en) | 1989-08-31 | 1989-08-31 | Electrode structure of piezoelectric vibrator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0389615A true JPH0389615A (en) | 1991-04-15 |
| JPH07109969B2 JPH07109969B2 (en) | 1995-11-22 |
Family
ID=16857083
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1227201A Expired - Lifetime JPH07109969B2 (en) | 1989-08-31 | 1989-08-31 | Electrode structure of piezoelectric vibrator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07109969B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0722894A (en) * | 1993-06-30 | 1995-01-24 | Rohm Co Ltd | Ceramic oscillation element and piezoelectric oscillator using the same |
| EP1187323A1 (en) * | 2000-03-03 | 2002-03-13 | Daishinku Corporation | Crystal vibration device |
| JP2006191466A (en) * | 2005-01-07 | 2006-07-20 | Seiko Instruments Inc | Piezoelectric vibrator, oscillator and electronic apparatus |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5291676A (en) * | 1976-01-29 | 1977-08-02 | Seiko Instr & Electronics Ltd | Profile slide vibrator |
| JPS5425692A (en) * | 1977-07-29 | 1979-02-26 | Nippon Denpa Kogyo Kk | Thin film structure |
| JPS5793715A (en) * | 1980-12-02 | 1982-06-10 | Seiko Instr & Electronics Ltd | Electrode construction of piezoelectric oscillator |
| JPS5827548U (en) * | 1981-08-15 | 1983-02-22 | マツダ株式会社 | Engine cylinder block structure |
| JPS58173847A (en) * | 1982-04-07 | 1983-10-12 | Matsushita Electric Ind Co Ltd | Manufacture of element |
| JPS59125127U (en) * | 1983-02-09 | 1984-08-23 | 株式会社村田製作所 | piezoelectric resonator |
| JPH0241510U (en) * | 1988-09-12 | 1990-03-22 |
-
1989
- 1989-08-31 JP JP1227201A patent/JPH07109969B2/en not_active Expired - Lifetime
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5291676A (en) * | 1976-01-29 | 1977-08-02 | Seiko Instr & Electronics Ltd | Profile slide vibrator |
| JPS5425692A (en) * | 1977-07-29 | 1979-02-26 | Nippon Denpa Kogyo Kk | Thin film structure |
| JPS5793715A (en) * | 1980-12-02 | 1982-06-10 | Seiko Instr & Electronics Ltd | Electrode construction of piezoelectric oscillator |
| JPS5827548U (en) * | 1981-08-15 | 1983-02-22 | マツダ株式会社 | Engine cylinder block structure |
| JPS58173847A (en) * | 1982-04-07 | 1983-10-12 | Matsushita Electric Ind Co Ltd | Manufacture of element |
| JPS59125127U (en) * | 1983-02-09 | 1984-08-23 | 株式会社村田製作所 | piezoelectric resonator |
| JPH0241510U (en) * | 1988-09-12 | 1990-03-22 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0722894A (en) * | 1993-06-30 | 1995-01-24 | Rohm Co Ltd | Ceramic oscillation element and piezoelectric oscillator using the same |
| EP1187323A1 (en) * | 2000-03-03 | 2002-03-13 | Daishinku Corporation | Crystal vibration device |
| EP1187323A4 (en) * | 2000-03-03 | 2005-04-06 | Daishinku Corp | Crystal vibration device |
| JP2006191466A (en) * | 2005-01-07 | 2006-07-20 | Seiko Instruments Inc | Piezoelectric vibrator, oscillator and electronic apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07109969B2 (en) | 1995-11-22 |
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