JPH0387558U - - Google Patents
Info
- Publication number
- JPH0387558U JPH0387558U JP14499189U JP14499189U JPH0387558U JP H0387558 U JPH0387558 U JP H0387558U JP 14499189 U JP14499189 U JP 14499189U JP 14499189 U JP14499189 U JP 14499189U JP H0387558 U JPH0387558 U JP H0387558U
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- large number
- workpiece
- plate
- model registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005498 polishing Methods 0.000 claims description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
Description
第１図は平円盤１に貼り付板３を載置した場合
の斜面図、第２図は本考案によるポリツシング定
盤４の斜面図、第３図はポリツシング定盤４に孔
４ｂを設けた場合の側断面図である。
図で１は平円盤、２は被加工物、３は貼り付板
、４はポリツシング定盤、４ａは溝、４ｂは孔、
５は把手。
Fig. 1 is a perspective view of the flat disk 1 with the adhesive plate 3 placed on it, Fig. 2 is a perspective view of the polishing plate 4 according to the present invention, and Fig. 3 is the polishing plate 4 with holes 4b. FIG. In the figure, 1 is a flat disk, 2 is a workpiece, 3 is a sticking plate, 4 is a polishing surface plate, 4a is a groove, 4b is a hole,
5 is the handle.
補正 平２．１．２９
実用新案登録請求の範囲を次のように補正する
。Amendment: January 29, 2002 The scope of claims for utility model registration is amended as follows.
【実用新案登録請求の範囲】
回転する平円盤１上に被加工物２を間接的又は
直接的に固定して配置せしめる一方、錫や銅等の
溝４ａを切り、内部に逃げを取つた各種ポリツシ
ング定盤４やリング状又は平板の固定磁石並びに
ダイヤモンドや、それに類する固定磁石等も用意
しておき、前記ポリツシング定盤４や固定磁石の
表面を被加工物の上から接せしめてなるラツピン
グ及びポリツシング加工装置。[Scope of claim for utility model registration] A workpiece 2 is indirectly or directly fixed and placed on a rotating flat disc 1, while a groove 4a is cut in tin, copper, etc. to provide an escape inside. Various types of polishing surface plates 4 , ring-shaped or flat plate fixed magnets, diamonds, and similar fixed magnets are also prepared, and the surface of the polishing surface plate 4 or fixed magnets is brought into contact with the workpiece from above for lapping. and polishing processing equipment.
Claims (1)
直接的に多数固定して配置せしめる一方、錫や銅
等の同心円又はスパイラルの多数の溝４ａを切つ
た各種ポリツシング定盤４を用意しておき、前記
ポリツシング定盤４の表面を被加工物の上から接
せしめてなるラツピング及びポリツシング加工装
置。 A large number of workpieces 2 are indirectly or directly fixed and placed on a rotating flat disc 1, while various polishing plates 4 made of tin, copper, etc., each having a large number of concentric or spiral grooves 4a cut therein are prepared. This is a wrapping and polishing processing apparatus in which the surface of the polishing surface plate 4 is brought into contact with the workpiece from above.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14499189U JPH0387558U (en) | 1989-12-18 | 1989-12-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14499189U JPH0387558U (en) | 1989-12-18 | 1989-12-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0387558U true JPH0387558U (en) | 1991-09-05 |
Family
ID=31691655
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14499189U Pending JPH0387558U (en) | 1989-12-18 | 1989-12-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0387558U (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5250385B2 (en) * | 1972-09-18 | 1977-12-23 | ||
| JPS5920938U (en) * | 1982-07-29 | 1984-02-08 | トヨタ自動車株式会社 | Workpiece positioning guide mechanism in press equipment |
| JPS6299072A (en) * | 1985-10-22 | 1987-05-08 | Sumitomo Electric Ind Ltd | Method of working semiconductor wafer |
| JPS6487148A (en) * | 1987-09-28 | 1989-03-31 | Toshiba Corp | Polishing method |
-
1989
- 1989-12-18 JP JP14499189U patent/JPH0387558U/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5250385B2 (en) * | 1972-09-18 | 1977-12-23 | ||
| JPS5920938U (en) * | 1982-07-29 | 1984-02-08 | トヨタ自動車株式会社 | Workpiece positioning guide mechanism in press equipment |
| JPS6299072A (en) * | 1985-10-22 | 1987-05-08 | Sumitomo Electric Ind Ltd | Method of working semiconductor wafer |
| JPS6487148A (en) * | 1987-09-28 | 1989-03-31 | Toshiba Corp | Polishing method |
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