JPH0385550U - - Google Patents
Info
- Publication number
- JPH0385550U JPH0385550U JP14712589U JP14712589U JPH0385550U JP H0385550 U JPH0385550 U JP H0385550U JP 14712589 U JP14712589 U JP 14712589U JP 14712589 U JP14712589 U JP 14712589U JP H0385550 U JPH0385550 U JP H0385550U
- Authority
- JP
- Japan
- Prior art keywords
- helium
- sniffer device
- soap pump
- leak detector
- diagram showing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000001307 helium Substances 0.000 claims description 7
- 229910052734 helium Inorganic materials 0.000 claims description 7
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 7
- 239000000344 soap Substances 0.000 claims 2
- 238000001816 cooling Methods 0.000 claims 1
- 238000011144 upstream manufacturing Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 239000007788 liquid Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
Landscapes
- Examining Or Testing Airtightness (AREA)
Description
第1図は本考案に係わるヘリウムスニフア装置
の一実施例を示す系統図、第2図は他の実施例を
示す系統図、第3図は従来のヘリウムスニフア装
置を示す系統図、第4図は同従来のヘリウムスニ
フア装置のバツクグランドの特性図である。
1……ヘリウムリークデイテクタ、2……補助
ポンプ、3……ソープシヨンポンプ、4……スニ
フアプローブ、5……接続フランジ、6……配管
、7……液体窒素LN2タンク、8……供給配管
、9……昇温用ポンプ、10……バイパス管、1
1,12,13,14,15……弁、16……流
量調整弁、17……圧力計、18……冷凍機、1
9……温度制御装置、20……温度センサ、21
……ヒータ。
FIG. 1 is a system diagram showing one embodiment of a helium sniffer device according to the present invention, FIG. 2 is a system diagram showing another embodiment, and FIG. 3 is a system diagram showing a conventional helium sniffer device. FIG. 4 is a background characteristic diagram of the conventional helium sniffer device. 1... Helium leak detector, 2... Auxiliary pump, 3... Soaption pump, 4... Sniffer probe, 5... Connection flange, 6... Piping, 7... Liquid nitrogen LN 2 tank, 8... ... Supply piping, 9 ... Temperature rising pump, 10 ... Bypass pipe, 1
1, 12, 13, 14, 15... Valve, 16... Flow rate adjustment valve, 17... Pressure gauge, 18... Refrigerator, 1
9...Temperature control device, 20...Temperature sensor, 21
……heater.
Claims (1)
ンポンプを設けたヘリウムスニフア装置において
、前記ソープシヨンポンプ内を一定温度に保持す
る冷却手段を具えているたことを特徴としたヘリ
ウムスニフア装置。 1. A helium sniffer device comprising a soap pump provided upstream of a helium leak detector, the helium sniffer device comprising a cooling means for maintaining the inside of the soap pump at a constant temperature.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14712589U JPH0385550U (en) | 1989-12-22 | 1989-12-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14712589U JPH0385550U (en) | 1989-12-22 | 1989-12-22 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0385550U true JPH0385550U (en) | 1991-08-29 |
Family
ID=31693656
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14712589U Pending JPH0385550U (en) | 1989-12-22 | 1989-12-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0385550U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009508127A (en) * | 2005-09-13 | 2009-02-26 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング | Leak detector |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6015537A (en) * | 1983-06-22 | 1985-01-26 | バリアン・アソシエイツ・インコ−ポレイテツド | Detector for crosscurrent leakage with cooling trap |
JPS60133340A (en) * | 1983-08-06 | 1985-07-16 | Japan Atom Energy Res Inst | Leakage detector |
JPS62222138A (en) * | 1986-03-24 | 1987-09-30 | Shimadzu Corp | Leak detector |
-
1989
- 1989-12-22 JP JP14712589U patent/JPH0385550U/ja active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6015537A (en) * | 1983-06-22 | 1985-01-26 | バリアン・アソシエイツ・インコ−ポレイテツド | Detector for crosscurrent leakage with cooling trap |
JPS60133340A (en) * | 1983-08-06 | 1985-07-16 | Japan Atom Energy Res Inst | Leakage detector |
JPS62222138A (en) * | 1986-03-24 | 1987-09-30 | Shimadzu Corp | Leak detector |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009508127A (en) * | 2005-09-13 | 2009-02-26 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング | Leak detector |
JP4714271B2 (en) * | 2005-09-13 | 2011-06-29 | インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング | Leak detector |
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