JPH0385550U - - Google Patents

Info

Publication number
JPH0385550U
JPH0385550U JP14712589U JP14712589U JPH0385550U JP H0385550 U JPH0385550 U JP H0385550U JP 14712589 U JP14712589 U JP 14712589U JP 14712589 U JP14712589 U JP 14712589U JP H0385550 U JPH0385550 U JP H0385550U
Authority
JP
Japan
Prior art keywords
helium
sniffer device
soap pump
leak detector
diagram showing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14712589U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14712589U priority Critical patent/JPH0385550U/ja
Publication of JPH0385550U publication Critical patent/JPH0385550U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Examining Or Testing Airtightness (AREA)

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本考案に係わるヘリウムスニフア装置
の一実施例を示す系統図、第2図は他の実施例を
示す系統図、第3図は従来のヘリウムスニフア装
置を示す系統図、第4図は同従来のヘリウムスニ
フア装置のバツクグランドの特性図である。 1……ヘリウムリークデイテクタ、2……補助
ポンプ、3……ソープシヨンポンプ、4……スニ
フアプローブ、5……接続フランジ、6……配管
、7……液体窒素LNタンク、8……供給配管
、9……昇温用ポンプ、10……バイパス管、1
1,12,13,14,15……弁、16……流
量調整弁、17……圧力計、18……冷凍機、1
9……温度制御装置、20……温度センサ、21
……ヒータ。
FIG. 1 is a system diagram showing one embodiment of a helium sniffer device according to the present invention, FIG. 2 is a system diagram showing another embodiment, and FIG. 3 is a system diagram showing a conventional helium sniffer device. FIG. 4 is a background characteristic diagram of the conventional helium sniffer device. 1... Helium leak detector, 2... Auxiliary pump, 3... Soaption pump, 4... Sniffer probe, 5... Connection flange, 6... Piping, 7... Liquid nitrogen LN 2 tank, 8... ... Supply piping, 9 ... Temperature rising pump, 10 ... Bypass pipe, 1
1, 12, 13, 14, 15... Valve, 16... Flow rate adjustment valve, 17... Pressure gauge, 18... Refrigerator, 1
9...Temperature control device, 20...Temperature sensor, 21
……heater.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] ヘリウムリークデイテクタの前段にソープシヨ
ンポンプを設けたヘリウムスニフア装置において
、前記ソープシヨンポンプ内を一定温度に保持す
る冷却手段を具えているたことを特徴としたヘリ
ウムスニフア装置。
1. A helium sniffer device comprising a soap pump provided upstream of a helium leak detector, the helium sniffer device comprising a cooling means for maintaining the inside of the soap pump at a constant temperature.
JP14712589U 1989-12-22 1989-12-22 Pending JPH0385550U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14712589U JPH0385550U (en) 1989-12-22 1989-12-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14712589U JPH0385550U (en) 1989-12-22 1989-12-22

Publications (1)

Publication Number Publication Date
JPH0385550U true JPH0385550U (en) 1991-08-29

Family

ID=31693656

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14712589U Pending JPH0385550U (en) 1989-12-22 1989-12-22

Country Status (1)

Country Link
JP (1) JPH0385550U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009508127A (en) * 2005-09-13 2009-02-26 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング Leak detector

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6015537A (en) * 1983-06-22 1985-01-26 バリアン・アソシエイツ・インコ−ポレイテツド Detector for crosscurrent leakage with cooling trap
JPS60133340A (en) * 1983-08-06 1985-07-16 Japan Atom Energy Res Inst Leakage detector
JPS62222138A (en) * 1986-03-24 1987-09-30 Shimadzu Corp Leak detector

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6015537A (en) * 1983-06-22 1985-01-26 バリアン・アソシエイツ・インコ−ポレイテツド Detector for crosscurrent leakage with cooling trap
JPS60133340A (en) * 1983-08-06 1985-07-16 Japan Atom Energy Res Inst Leakage detector
JPS62222138A (en) * 1986-03-24 1987-09-30 Shimadzu Corp Leak detector

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009508127A (en) * 2005-09-13 2009-02-26 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング Leak detector
JP4714271B2 (en) * 2005-09-13 2011-06-29 インフィコン ゲゼルシャフト ミット ベシュレンクテル ハフツング Leak detector

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