JPH038335U - - Google Patents
Info
- Publication number
- JPH038335U JPH038335U JP6889789U JP6889789U JPH038335U JP H038335 U JPH038335 U JP H038335U JP 6889789 U JP6889789 U JP 6889789U JP 6889789 U JP6889789 U JP 6889789U JP H038335 U JPH038335 U JP H038335U
- Authority
- JP
- Japan
- Prior art keywords
- exposure
- pin
- presser plate
- exposure apparatus
- movable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007664 blowing Methods 0.000 claims 1
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Description
第１図は本装置の縦断面図、第２図は剥離作業
中における押え板と露光テーブルの拡大縦断面図
、第３図は押え板が露光テーブル上に下ろされた
状態の拡大平面図である。
１００……露光装置本体、１１０……ランプハ
ウス、１２０……押え板、１３０……露光テーブ
ル、１４０……ポンプ装置、２１０……第１のピ
ン、２２０……第２のピン、２３０……開口、２
４０……弾性ベルト、２４５……ベルト、２６０
……ノズル部。
Figure 1 is a longitudinal cross-sectional view of this device, Figure 2 is an enlarged vertical cross-sectional view of the presser plate and exposure table during peeling work, and Figure 3 is an enlarged plan view of the presser plate lowered onto the exposure table. be. 100...Exposure apparatus body, 110...Lamp house, 120...Press plate, 130...Exposure table, 140...Pump device, 210...First pin, 220...Second pin, 230... opening, 2
40...Elastic belt, 245...Belt, 260
...Nozzle part.
Claims (1)
の上方に配置された露光用ランプと、それらの間
を上下移動可能に取り付けられた透明の押え板と
を備え、前記露光テーブルは、上下運動可能な第
１のピンを、前記テーブルの表面上から突出した
状態にて、前記テーブルの上側端部付近に有し、
また前記押え板は、上下運動可能な第２のピンを
、前記押え板の表面から突出した状態にて、前記
押え板の下側端部付近に有し、前記押え板と露光
テーブルとが隣接した状態から所定の距離だけ離
隔した状態まで前記第１のピンと第２のピンの先
端部が係合し続けるようになつており、さらに、
前記露光テーブルは、前記露光テーブルの上側表
面に沿つて空気を送るための送風装置を有してい
ることを特徴とする露光装置。 (2) 請求項第１項に記載の露光装置において、
前記露光装置が吸引装置を有し、前記吸引装置が
、前記テーブル上であつて、第１のピンの周りに
設けられた開口に連通していることを特徴とする
露光装置。[Claims for Utility Model Registration] (1) A flat plate-shaped exposure table, an exposure lamp placed above the table, and a transparent presser plate attached so as to be movable up and down between them. The exposure table has a first pin movable up and down, protruding from the surface of the table, near an upper end of the table,
Further, the presser plate has a second pin movable up and down protruding from the surface of the presser plate near the lower end of the presser plate, and the presser plate and the exposure table are adjacent to each other. The tips of the first pin and the second pin continue to be engaged from the state where they are separated from each other by a predetermined distance, and further,
An exposure apparatus characterized in that the exposure table has a blower device for blowing air along an upper surface of the exposure table. (2) In the exposure apparatus according to claim 1,
An exposure apparatus characterized in that the exposure apparatus has a suction device, and the suction device communicates with an opening provided on the table and around the first pin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6889789U JPH038335U (en) | 1989-06-13 | 1989-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6889789U JPH038335U (en) | 1989-06-13 | 1989-06-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH038335U true JPH038335U (en) | 1991-01-25 |
Family
ID=31603735
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6889789U Pending JPH038335U (en) | 1989-06-13 | 1989-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH038335U (en) |
-
1989
- 1989-06-13 JP JP6889789U patent/JPH038335U/ja active Pending
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