JPH0381631A - Rotary sensor - Google Patents
Rotary sensorInfo
- Publication number
- JPH0381631A JPH0381631A JP21840489A JP21840489A JPH0381631A JP H0381631 A JPH0381631 A JP H0381631A JP 21840489 A JP21840489 A JP 21840489A JP 21840489 A JP21840489 A JP 21840489A JP H0381631 A JPH0381631 A JP H0381631A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- torque
- rotational position
- sensor
- rotational
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims abstract description 26
- 230000035699 permeability Effects 0.000 claims abstract description 6
- 239000010409 thin film Substances 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 3
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 230000008859 change Effects 0.000 abstract description 4
- 238000003754 machining Methods 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 230000035945 sensitivity Effects 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- UQSXHKLRYXJYBZ-UHFFFAOYSA-N Iron oxide Chemical compound [Fe]=O UQSXHKLRYXJYBZ-UHFFFAOYSA-N 0.000 description 2
- 239000010408 film Substances 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 239000003921 oil Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 229910018499 Ni—F Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 230000004069 differentiation Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 230000005415 magnetization Effects 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Testing Or Calibration Of Command Recording Devices (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
この発明は、モータ、エンジン等の回転軸における回転
位置(角速度)およびトルクを検出する回転センサに関
する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a rotation sensor that detects the rotational position (angular velocity) and torque of a rotating shaft of a motor, engine, or the like.
(従来の技術〉
近年、工場自動化機器や情報機器の発展に伴い、これら
機器の回転駆動手段であるモータ等においては、該モー
タ等の回転軸の回転位置およびトルクを高精度に制御す
ることが要求されている。例えば、最近の旋盤にあって
は、機械加工の複合化と加工時間の短縮化を図るため、
両面加工を連続的に行なえるよう、回転軸を2つ設け、
回転を停止させることなく、一方の回転軸から他方の回
転軸にワークを移動できる高精度な回転制御システムが
要求されている。(Prior art) In recent years, with the development of factory automation equipment and information equipment, it has become difficult to control the rotational position and torque of the rotating shaft of the motor etc. with high precision in the motors etc. that are the rotational drive means of these equipments. For example, in recent lathes, in order to combine machining and shorten machining time,
Two rotating axes are installed to enable continuous double-sided machining.
There is a need for a highly accurate rotation control system that can move a workpiece from one rotating shaft to another without stopping rotation.
このような回転制御中に、予め定めた加工条件通りワー
クを正確に移動させるためには、上記回転軸の回転位置
と回転トルクを検出して、その検出信号を制御部に送っ
て電気的に制御する必要がある。この場合、回転軸の回
転位置信号と回転トルク信号はそれぞれ、回転軸上と軸
外に別々に配設した光学式回転位置センサと磁気式トル
クセンサとによって検知されている。During such rotation control, in order to accurately move the workpiece according to predetermined machining conditions, the rotational position and rotational torque of the rotating shaft are detected, and the detection signal is sent to the control unit to electrically need to be controlled. In this case, the rotational position signal and rotational torque signal of the rotational shaft are detected by an optical rotational position sensor and a magnetic torque sensor that are respectively disposed on and off the rotational shaft.
(発明が解決しようとする問題点)
このように従来にあっては、光学式回転位置センサと磁
気式トルクセンサとが別々に配設されているため、セン
サ構造が全体として大型化し複雑化するとともに、水、
油、塵埃などに対する密封保護構造も別々に設けなけれ
ばならないため複雑化し、製造コストが高くなるという
問題があった。(Problems to be Solved by the Invention) Conventionally, as the optical rotational position sensor and the magnetic torque sensor are arranged separately, the overall sensor structure becomes large and complicated. With water,
A sealing protection structure against oil, dust, etc. must also be provided separately, which increases complexity and increases manufacturing costs.
ところで近年、回転位置検出のセンサとしては、磁気記
録媒体と磁気抵抗体を組合せて回転位置を検出する磁気
式のものが開発されている(「日経メカニカル」誌19
89年5月15日号68頁)。Incidentally, in recent years, as a sensor for detecting rotational position, a magnetic type sensor that detects rotational position by combining a magnetic recording medium and a magnetoresistive element has been developed (Nikkei Mechanical magazine 19
May 15, 1989 issue, p. 68).
また、トルク検出のセンサとしては、ソレノイドコイル
と磁気歪み媒体を組合せてトルクを検出する磁歪式のも
のが開発されている(特開昭62−206421号)。Furthermore, as a sensor for detecting torque, a magnetostrictive type sensor that detects torque by combining a solenoid coil and a magnetostrictive medium has been developed (Japanese Patent Application Laid-open No. 206421/1983).
(発明の目的)
本発明者らは、上述の技術背景を考慮し、非接触の磁気
式回転位置センサとトルクセンサを回転軸上で1つにま
とめることができれば、回転軸の回転位置とトルクとの
双方を同時に検出できるばかりでなく、コンパクト構造
の回転制御用センサを安価に得ることができるという点
に着目して、この発明を完成したものである。より具体
的には、−上記回転位置およびトルクを電気信号として
検出する非接触式の回転センサを得るため、回転位置の
検出には磁気抵抗体と磁気記録媒体を用い、またトルク
の検出にはソレノイドコイルと磁気歪み媒体を用いたも
のである。(Objective of the Invention) Considering the above-mentioned technical background, the present inventors believe that if a non-contact magnetic rotational position sensor and a torque sensor can be integrated into one on a rotating shaft, the rotational position and torque of the rotating shaft can be improved. This invention was completed by focusing on the fact that not only can both be detected simultaneously, but also that a rotation control sensor with a compact structure can be obtained at low cost. More specifically, - In order to obtain a non-contact rotation sensor that detects the rotational position and torque as electrical signals, a magnetoresistive element and a magnetic recording medium are used to detect the rotational position, and a magnetic recording medium is used to detect the torque. It uses a solenoid coil and a magnetostrictive medium.
すなわち、この発明の目的は、モータやエンジン等にお
ける回転軸の制御に係わる回転センサにおいて、高分解
能の回転位置センサとトルクセンサを回転軸上に一体化
して設けることにより、簡単な構造で回転位置とトルク
を同時に検出でき、耐環境性に優れ、高い感度性能を有
する回転センサを提供することにある。That is, an object of the present invention is to provide a rotation sensor for controlling the rotation shaft of a motor, engine, etc. by integrating a high-resolution rotation position sensor and a torque sensor on the rotation shaft, thereby controlling the rotation position with a simple structure. The object of the present invention is to provide a rotation sensor that can simultaneously detect torque and torque, has excellent environmental resistance, and has high sensitivity performance.
(問題点を解決するための手段)
この発明は、上記のような目的を達成するため回転軸の
外周面に、回転トルクの大きさに応じて透磁率が変化す
る軟磁性薄膜よりなる磁気歪み媒体と、円周方向に等間
隔に分割着磁した硬磁性薄膜よりなる磁気記録媒体とを
設け、この回転軸を、抽受を介して外筒支持枠内に回転
自在に保持し、この外筒支持枠の前記磁気歪み媒体、磁
気記録媒体と対応する位置にそれぞれ、トルク検出用の
ソレノイドコイル、回転位置検出用の磁気抵抗体を配設
したことを特徴とする。(Means for Solving the Problems) In order to achieve the above-mentioned objects, the present invention has a magnetostrictive film made of a soft magnetic thin film whose magnetic permeability changes depending on the magnitude of the rotational torque, on the outer peripheral surface of the rotating shaft. A magnetic recording medium made of a hard magnetic thin film divided and magnetized at equal intervals in the circumferential direction is provided, and this rotating shaft is rotatably held within an outer cylinder support frame via a bolt. The present invention is characterized in that a solenoid coil for torque detection and a magnetic resistance body for rotational position detection are disposed at positions corresponding to the magnetostrictive medium and the magnetic recording medium on the cylinder support frame, respectively.
(1乍用)
請求項1記載の発明に係わる回転センサによれば、回転
軸にトルクが加わると、磁気企み媒体の透磁率が変化し
、これに起因する発生磁束の変化をトルク検出用ソレノ
イドで検出することにより、回転軸のトルクを検知でき
る。また磁気抵抗体の抵抗値は、磁気記録媒体に対する
回転方向における相対位置関係に応じて変化する。つま
り、回転軸の外筒支持枠に対する回転位置の変化に伴い
磁気抵抗体の抵抗値も変化する。従ってこの抵抗値を検
知することにより、回転軸の回転位置を検知できる。な
お、回転位置信号を時間微分することにより、frj速
度が得られることはいうまでもない。(For 1 unit) According to the rotation sensor according to the invention described in claim 1, when torque is applied to the rotating shaft, the magnetic permeability of the magnetic medium changes, and the change in the generated magnetic flux caused by this is detected by the torque detection solenoid. By detecting this, the torque of the rotating shaft can be detected. Further, the resistance value of the magnetoresistive element changes depending on the relative positional relationship in the rotational direction with respect to the magnetic recording medium. In other words, as the rotational position of the rotating shaft with respect to the outer cylinder support frame changes, the resistance value of the magnetic resistance body also changes. Therefore, by detecting this resistance value, the rotational position of the rotating shaft can be detected. It goes without saying that the frj speed can be obtained by time-differentiating the rotational position signal.
以上のように、請求項1記載の発明では、回転軸上に、
磁気記録媒体と磁気抵抗体の組み合せからなる回転位置
検出手段と、磁気歪み媒体とソレノイドコイルの組み合
せからなるトルク検出手段とを配設したため、回転軸の
回転位置とトルクとの双方を1個の回転センサで検知す
ることができる。As described above, in the invention according to claim 1, on the rotating shaft,
Since a rotational position detection means consisting of a combination of a magnetic recording medium and a magnetoresistive element and a torque detection means consisting of a combination of a magnetostrictive medium and a solenoid coil are provided, both the rotational position and torque of the rotating shaft can be detected in one piece. It can be detected with a rotation sensor.
また請求項2記載の発明では、トルク検出用ソレノイド
コイル、回転位置検出用磁気抵抗体を外筒支持枠内に固
定するとともに、この外筒支持枠を磁気シールド材料で
形成したため、外筒支持枠は、水、油、塵埃などが内部
に侵入するのを防止するだけではなく、トルク検出用ソ
レノイドコイルおよび回転位置検出用磁気抵抗体に対し
てそのまま磁気シールド手段としても機能する。これに
より、センサ検出部への外乱磁気による影響を防止して
回転センサの感度を向」ニさせることができる。Further, in the invention as claimed in claim 2, since the solenoid coil for torque detection and the magnetic resistance body for rotational position detection are fixed within the outer cylinder support frame, and this outer cylinder support frame is formed of a magnetic shielding material, the outer cylinder support frame not only prevents water, oil, dust, etc. from entering the inside, but also functions as a magnetic shielding means for the torque detection solenoid coil and the rotational position detection magnetic resistance body. Thereby, the sensitivity of the rotation sensor can be improved by preventing the influence of magnetic disturbance on the sensor detection section.
(実施例) 以下にこの発明の一実施例を図面に基づいて説明する。(Example) An embodiment of the present invention will be described below based on the drawings.
第1図は、この実施例による回転センサの構造を示す断
面図である。この図において、1は、図示しない駆動用
モータの回転力を負荷側に伝達する回転軸で、回転軸1
は、鋼鉄等の磁気シールド材料からなる外筒支持枠2内
に、↑(k受6,6−を介して回転自在に保持されてい
る。この回転軸1の中間部分外周の所定位置には、磁気
企み媒体5がIC(挿・固定されている。この磁気歪み
媒体5は第2図に示すように、磁気異方性の方向が互い
に異なる領域Aと領域Bを有している。FIG. 1 is a sectional view showing the structure of a rotation sensor according to this embodiment. In this figure, 1 is a rotating shaft that transmits the rotational force of a drive motor (not shown) to the load side, and the rotating shaft 1
is rotatably held in an outer cylinder support frame 2 made of a magnetically shielding material such as steel via k receivers 6, 6-. , a magnetostrictive medium 5 is inserted and fixed in an IC (IC). As shown in FIG. 2, this magnetostrictive medium 5 has a region A and a region B in which the directions of magnetic anisotropy are different from each other.
また、回転軸1の磁気歪み媒体5近傍部分には、第3図
に示すように、非磁性のステンレス月料からなる円筒状
基台7が嵌挿・固定されている。この基台7の外周表面
には、磁気シールド性を有する厚さ20μmのNi−F
e合金メツキ膜11が破着され、さらにこの」二には、
所定棉の磁気記録媒体4が基台7の円周方向に沿って1
/2πラジアン間隔、つまり360分割して着磁されて
いる。Further, as shown in FIG. 3, a cylindrical base 7 made of non-magnetic stainless steel is fitted and fixed in a portion of the rotating shaft 1 near the magnetostrictive medium 5. As shown in FIG. The outer peripheral surface of this base 7 is made of Ni-F with a thickness of 20 μm that has magnetic shielding properties.
The e-alloy plating film 11 is broken, and furthermore,
A magnetic recording medium 4 made of predetermined cotton is placed along the circumferential direction of the base 7.
It is magnetized at intervals of /2π radians, that is, divided into 360.
磁気記録媒体4は、ここではパーマロイと酸化鉄よりな
る厚さ約200μmの硬磁性薄膜が用いられ、その着磁
ピッチは約220μmに設定されている。The magnetic recording medium 4 is made of a hard magnetic thin film of about 200 μm thick made of permalloy and iron oxide, and its magnetization pitch is set to about 220 μm.
一方、外筒支持枠2内面の上記磁気企み媒体5と対応す
る部分には、トルク検出用のソレノイドコイル8,8′
が設けられている。このソレノイドコイル8.8′は磁
気歪み媒体5の領域A、 Bからの発生磁気と錯交する
ように配置されている。On the other hand, on the inner surface of the outer cylinder support frame 2, a portion corresponding to the magnetic medium 5 is provided with solenoid coils 8, 8' for detecting torque.
is provided. This solenoid coil 8.8' is arranged so as to intersect with the generated magnetism from regions A and B of the magnetostrictive medium 5.
また、外商支持枠2内面の上記磁気記録媒体4と対応す
る部分には、磁気抵抗センサとして機能する回転位置横
山用の磁気抵抗体3.3−が設けられている。この磁気
抵抗体3と3′は、回転軸1の回転ブレによる出力電流
の増減変動を極力補償するために、外筒支持枠2の円周
方向において180°だけ互いに変位した位置に配置さ
れている。Furthermore, a magnetoresistive element 3.3- for the rotational position horizontal position, which functions as a magnetoresistive sensor, is provided in a portion of the inner surface of the foreign support frame 2 that corresponds to the magnetic recording medium 4. The magnetic resistance elements 3 and 3' are arranged at positions displaced from each other by 180° in the circumferential direction of the outer cylinder support frame 2 in order to compensate as much as possible for fluctuations in output current due to rotational wobbling of the rotating shaft 1. There is.
ここでは、磁気抵抗体3,3′の構造は、ガラス基板上
にN−1−Fe合金薄膜を形成してなり、磁気抵抗体3
,3゛の2相出力φA、φA′とφB。Here, the structure of the magnetoresistive elements 3 and 3' is formed by forming an N-1-Fe alloy thin film on a glass substrate.
, 3゛ two-phase outputs φA, φA' and φB.
φB′は磁気記録媒体4の回転方向において位相差90
°を有するように設定されている。これら回転位置検出
用磁気抵抗体3.3′および前記トルク検出用ソレノイ
ドコイル8,8′により得られた出力はそれぞれ、リー
ド線10.10”および9,9′を介して、図示しない
検出回路に入力されるようになっている。この検出回路
は人力回餡部、ブリッジ回路部、出力回路部からなり、
必要により角速度を検出するための微分回路部を有して
いる。φB' is a phase difference of 90 in the rotation direction of the magnetic recording medium 4.
° is set to have. The outputs obtained from the rotational position detecting magnetic resistor 3.3' and the torque detecting solenoid coils 8, 8' are sent to a detection circuit (not shown) via lead wires 10.10" and 9, 9', respectively. This detection circuit consists of a manual conversion section, a bridge circuit section, and an output circuit section.
It has a differentiation circuit section for detecting angular velocity if necessary.
次に、この実施1列の回転センサの検出動作を説明する
。Next, the detection operation of this first row of rotation sensors will be explained.
今、駆動用モータにより回転軸1が回転してこれにトル
クが加わると、このトルクは回転!lhlの磁気歪み媒
体5に伝わって、その透磁率がトルクの大きさに応じて
変化する。磁気歪み媒体5の透磁率が変化すると、これ
を検出するソレノイドコイル8.8′のインダクタンス
が変化し、それに応じた電気信号が出力される。この電
気信号はリード線9.9′を介して検出回路に入力され
、これにより、回転軸1に加わるトルクが検知される。Now, when the drive motor rotates the rotating shaft 1 and torque is applied to it, this torque rotates! The torque is transmitted to the magnetostrictive medium 5 of lhl, and its permeability changes depending on the magnitude of the torque. When the magnetic permeability of the magnetostrictive medium 5 changes, the inductance of the solenoid coil 8.8' that detects this changes, and an electric signal corresponding to the change is output. This electrical signal is input to the detection circuit via the lead wire 9.9', whereby the torque applied to the rotating shaft 1 is detected.
他方、磁気記録媒体4の回転位置は、磁気抵抗体3,3
′との相対位置関係に応じて磁気抵抗体3.3′の電気
抵抗値を変化させる。そのため磁気抵抗体3.3′では
磁気記録媒体4、つまり回転軸1の回転位置に応じた大
きさの電気信号がパルスとして出力される。この信号は
リード線10゜10′を介して検出回路に人力され、こ
れにより、回転軸1の回転位置が検知される。さらに、
この回転位置を微分回路によって時間微分することによ
り、回転軸1の111速度が検知される。また、必要に
より回転軸1の回転方向をI’ll別する際は、回転軸
1の円周」二における基準位置からの電気信号の変化状
態を検出することによって、回転?1l11の疋転・逆
転が判別される。On the other hand, the rotational position of the magnetic recording medium 4 is
The electrical resistance value of the magnetoresistive element 3.3' is changed depending on the relative positional relationship with the magnetoresistive element 3.3'. Therefore, the magnetoresistive element 3.3' outputs an electric signal as a pulse having a magnitude corresponding to the rotational position of the magnetic recording medium 4, that is, the rotating shaft 1. This signal is inputted to the detection circuit via the lead wire 10.degree. 10', whereby the rotational position of the rotary shaft 1 is detected. moreover,
By time-differentiating this rotational position using a differentiating circuit, the 111 speed of the rotating shaft 1 is detected. In addition, when the rotation direction of the rotating shaft 1 is determined by I'll if necessary, the rotation direction is determined by detecting the state of change in the electrical signal from the reference position at the circumference of the rotating shaft 1. A diversion/reversal of 1l11 is determined.
以上のようにこの実施例によれば、機能面では、回転軸
1の回転位置、角速度、トルクおよび回転方向の判別を
1個の回転センサによって検出することができるので、
最近の旋盤などにおける機械加工の複合化、自動化に十
分対応できる。また構造面では、信号検出部分である磁
気歪み媒体5゜磁気記録媒体4などを回転軸1の中間付
近にまとめて配設したので、水、油、塵埃などの侵入を
防止するための密封構造をコンパクトに摺戊することが
できる。加えて外筒支持枠2は磁気歪み媒体5と磁気記
録媒体4の双方に対してJ(通の磁気シールド部材とし
て機能するので、磁気シールド構造が簡素化し製造コス
トの低減化を図ることができるとともに、外乱磁気に対
するセンサ出力の倍加性を向上させることができる。As described above, according to this embodiment, in terms of functionality, the rotational position, angular velocity, torque, and rotational direction of the rotating shaft 1 can be detected by one rotation sensor.
It is fully compatible with the complex machining and automation of recent lathes, etc. In addition, in terms of structure, the magnetostrictive medium 5° magnetic recording medium 4, which is the signal detection part, is arranged near the middle of the rotating shaft 1, so it has a sealed structure to prevent the intrusion of water, oil, dust, etc. can be printed compactly. In addition, the outer tube support frame 2 functions as a magnetic shielding member for both the magnetostrictive medium 5 and the magnetic recording medium 4, which simplifies the magnetic shielding structure and reduces manufacturing costs. At the same time, it is possible to improve the ability to double the sensor output against magnetic disturbance.
(発明の効果)
以上説明したように、請求項1記載の発明によれば、外
筒支持枠内の回転軸」二に回転位置検出手段とトルク検
出手段とを一体化して組み込む構成としたため、回転軸
の回転位置とトルクの双方を1個の回転センサで検出す
ることができ、製作が容易でセンサ全体の構造をコンパ
クト化することができるという効果が得られる。(Effects of the Invention) As explained above, according to the invention as set forth in claim 1, since the rotational position detection means and the torque detection means are integrally incorporated in the rotation shaft "2" in the outer cylinder support frame, Both the rotational position and the torque of the rotating shaft can be detected with one rotation sensor, and the advantage is that manufacturing is easy and the overall structure of the sensor can be made compact.
また、請求項2記載の発明によれば、外筒支持枠は外乱
磁気等に対するシールド部材として機能するので、セン
サ内部への塵埃などの侵入を防止してセンサ検出感度の
信頼性を向上させることができるばかりでなく、外部環
境に対するシールド構造の簡素化、製造コストの低減化
を図ることができる。Further, according to the invention as claimed in claim 2, the outer cylinder support frame functions as a shield member against disturbance magnetic field, etc., so that it is possible to prevent dust and the like from entering the inside of the sensor and improve the reliability of sensor detection sensitivity. In addition, it is possible to simplify the shielding structure against the external environment and reduce manufacturing costs.
第1図はこの発明に係わる回転センナの概略構成を示す
断面図、第2図は同回転センサにおける磁気歪み媒体と
ソレノイドコイルとの組み合せによるトルク検出部を示
す斜視図、第3図は同回転センサにおける磁気記録媒体
と磁気抵抗体との組み合せによる回転位置検出部を示す
斜視図、である。
1・・・回転軸
2・・・外筒支持枠
3.3′・・・磁気抵抗体
4・・・磁気記録媒体
5・・・磁気歪み媒体
6・・・軸受′
7・・・円筒状基台
8.8′・・・ソレノイドコイル
特許出廟人 日立粉末冶金株式会社Fig. 1 is a cross-sectional view showing a schematic configuration of a rotation sensor according to the present invention, Fig. 2 is a perspective view showing a torque detection section in the rotation sensor using a combination of a magnetostrictive medium and a solenoid coil, and Fig. 3 is a rotation sensor according to the present invention. FIG. 2 is a perspective view showing a rotational position detection section in a sensor that is a combination of a magnetic recording medium and a magnetoresistive element. 1...Rotating shaft 2...Outer cylinder support frame 3.3'...Magnetic resistance body 4...Magnetic recording medium 5...Magnetostrictive medium 6...Bearing' 7...Cylindrical shape Base 8.8'... Solenoid coil patent creator Hitachi Powder Metallurgy Co., Ltd.
Claims (1)
磁率が変化する軟磁性薄膜よりなる磁気歪み媒体と、円
周方向に等間隔に分割着磁した硬磁性薄膜よりなる磁気
記録媒体とを設け、この回転軸を、軸受を介して外筒支
持枠内に回転自在に保持し、この外筒支持枠の前記磁気
歪み媒体、磁気記録媒体と対応する位置にそれぞれ、ト
ルク検出用のソレノイドコイル、回転位置検出用の磁気
抵抗体を配設したことを特徴とする回転センサ。 2 上記外筒支持枠が磁気シールド材料よりなることを
特徴とする請求項1記載の回転センサ。[Scope of Claims] 1. A magnetostrictive medium made of a soft magnetic thin film whose magnetic permeability changes depending on the magnitude of the rotational torque, and a hard magnetic medium magnetized at equal intervals in the circumferential direction on the outer peripheral surface of the rotating shaft. A magnetic recording medium made of a thin film is provided, the rotary shaft is rotatably held within an outer cylinder support frame via a bearing, and the rotary shaft is rotatably held in the outer cylinder support frame at a position corresponding to the magnetostrictive medium and the magnetic recording medium. A rotation sensor characterized in that a solenoid coil for torque detection and a magnetic resistance element for rotational position detection are respectively provided. 2. The rotation sensor according to claim 1, wherein the outer tube support frame is made of a magnetically shielding material.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21840489A JPH0381631A (en) | 1989-08-24 | 1989-08-24 | Rotary sensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21840489A JPH0381631A (en) | 1989-08-24 | 1989-08-24 | Rotary sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0381631A true JPH0381631A (en) | 1991-04-08 |
Family
ID=16719384
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21840489A Pending JPH0381631A (en) | 1989-08-24 | 1989-08-24 | Rotary sensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0381631A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07268898A (en) * | 1994-03-31 | 1995-10-17 | Masago Kogyo Kk | Hydraulic grab bucket |
JP2010237082A (en) * | 2009-03-31 | 2010-10-21 | Hitachi Cable Ltd | Torque-index sensor |
JP2011122943A (en) * | 2009-12-10 | 2011-06-23 | Showa Corp | Torque sensor |
JP2019219169A (en) * | 2018-06-15 | 2019-12-26 | 日本精工株式会社 | Torque measurement device |
-
1989
- 1989-08-24 JP JP21840489A patent/JPH0381631A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07268898A (en) * | 1994-03-31 | 1995-10-17 | Masago Kogyo Kk | Hydraulic grab bucket |
JP2010237082A (en) * | 2009-03-31 | 2010-10-21 | Hitachi Cable Ltd | Torque-index sensor |
JP2011122943A (en) * | 2009-12-10 | 2011-06-23 | Showa Corp | Torque sensor |
JP2019219169A (en) * | 2018-06-15 | 2019-12-26 | 日本精工株式会社 | Torque measurement device |
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