JPH0376037B2 - - Google Patents
Info
- Publication number
- JPH0376037B2 JPH0376037B2 JP10481086A JP10481086A JPH0376037B2 JP H0376037 B2 JPH0376037 B2 JP H0376037B2 JP 10481086 A JP10481086 A JP 10481086A JP 10481086 A JP10481086 A JP 10481086A JP H0376037 B2 JPH0376037 B2 JP H0376037B2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- gear switch
- gas laser
- valves
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 32
- 230000010355 oscillation Effects 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 6
- 230000003287 optical effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/036—Means for obtaining or maintaining the desired gas pressure within the tube, e.g. by gettering, replenishing; Means for circulating the gas, e.g. for equalising the pressure within the tube
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Description
【発明の詳細な説明】 〔発明の目的〕 （産業上の利用分野） 本発明はガスレーザ発振装置に関する。[Detailed description of the invention] [Purpose of the invention] (Industrial application field) The present invention relates to a gas laser oscillation device.
（従来の技術）
ガスレーザ媒質が大気圧以上で、レーザ光が放
電方向に対して直交して放出されるTEA
（Transve−rsely Excited Atomosphric
pressure）CO2レーザやエキシマレーザなど発振
装置では放電用の電源部のスイツチング用には電
気絶縁性気体で所定の圧力に維持されたギヤツプ
スイツチが使われている。第３図は従来における
上記発振装置の一例で次のように構成されてい
る。すなわち、１はガスレーザ管で内部には横断
面がかまぼこ状になる一組の放電電極２ａ，２ｂ
が相対向して設けられている。３は直流の高圧パ
ルスを発生する電源部でギヤツプスイツチ４を介
してガスレーザ管１に所定の電力を供給するよう
になつている。ギヤツプスイツチ４はトリガー発
生器５に接続されてスイツチ動作を受けるように
なつているとともに供給装置６から空気または窒
素ガスその他の電気絶縁性気体を電磁弁７および
圧力設定器８を介して供給されるようになつてい
る。上記電源部３、トリガー発生器５およい電磁
弁７は制御装置９によつてそれぞれ電圧、トリガ
ー動作および弁の開閉動作を制御されるようにな
つている。なお、ギヤツプスイツチ４にはニード
ルバルブ１０を設けた排気管１１が接続され過剰
気体を排出するようになつている。(Prior technology) TEA in which the gas laser medium is at atmospheric pressure or higher and the laser light is emitted perpendicular to the discharge direction.
（Transve−rsely Excited Atomophric
In oscillator devices such as CO 2 lasers and excimer lasers, a gear switch, which is maintained at a predetermined pressure using electrically insulating gas, is used to switch the power source for discharge. FIG. 3 shows an example of the above-mentioned conventional oscillation device, which is constructed as follows. That is, 1 is a gas laser tube, and inside thereof is a pair of discharge electrodes 2a and 2b whose cross section is semicylindrical.
are provided facing each other. Reference numeral 3 denotes a power supply section that generates high-voltage DC pulses and supplies a predetermined amount of power to the gas laser tube 1 via a gear switch 4. The gear switch 4 is connected to a trigger generator 5 for switching operation, and is supplied with air, nitrogen gas, or other electrically insulating gas from a supply device 6 via a solenoid valve 7 and a pressure setting device 8. It's becoming like that. The voltage, trigger operation, and valve opening/closing operation of the power supply section 3, trigger generator 5, and electromagnetic valve 7 are controlled by a control device 9, respectively. Incidentally, an exhaust pipe 11 provided with a needle valve 10 is connected to the gear switch 4 to exhaust excess gas.
上記の構成において、ギヤツプスイツチ４を適
正動作させるためにはギヤツプスイツチ４内を所
定の圧力範囲、例えば電源部３の出力電圧が
30KVでは1.3〜1.5Kg／cm2といつた圧力に保つ必
要がある。上記範囲以上の圧力の場合にはトリガ
ーが入力されてもスイツチング動作が行われない
いわゆるミストリガーが生じ、また範囲以下の圧
力の場合にはトリガーを入力しなくてもスイツチ
ングが行われてしまう、いわゆる自爆現象が生じ
る。ところで、レーザエネルギ（レーザ１パルス
当りのエネルギ）は電源部３の出力電圧の上げ、
下げによつて行われる。したがつて、所定範囲以
上の電圧で動作させるときにはギヤツプスイツチ
４の圧力も同時に調整しなければならないという
不便さがあつた。 In the above configuration, in order to operate the gear switch 4 properly, the pressure inside the gear switch 4 must be within a predetermined pressure range, for example, the output voltage of the power supply section 3 must be maintained.
At 30KV, it is necessary to maintain a pressure of 1.3 to 1.5Kg/ cm2 . If the pressure is above the above range, a so-called mis-trigger occurs in which the switching operation is not performed even if the trigger is input, and if the pressure is below the range, switching will be performed without the trigger input. A so-called self-destruction phenomenon occurs. By the way, the laser energy (energy per laser pulse) increases the output voltage of the power supply section 3,
It is done by lowering. Therefore, when operating at a voltage above a predetermined range, the pressure of the gear switch 4 must also be adjusted at the same time, which is inconvenient.
（発明が解決しようとする問題点）
以上のように、制御装置９によつて電源部３、
トリガー発生器５および電磁弁７が制御され、圧
力設定器８が制御外になる不都合に鑑み、本発明
はこの不都合を解消することのできるガスレーザ
発振装置を提供することを目的とする。(Problems to be Solved by the Invention) As described above, the power supply section 3,
In view of the disadvantage that the trigger generator 5 and the electromagnetic valve 7 are controlled and the pressure setting device 8 is out of control, an object of the present invention is to provide a gas laser oscillation device that can eliminate this disadvantage.
（問題点を解決するための手段と作用）
開閉動作を制御される弁と所定の圧力に設定す
る圧力設定器を介して絶縁性気体の供給を受ける
ギヤツプスイツチを備えたガスレーザ発振器にお
いて、弁および圧力設定器は複数組有し複数の弁
の切換えで異なつた圧力の電気絶縁性気体をギヤ
ツプスイツチに供給するように構成したもので、
ギヤツプスイツチ内のガス圧を放電電圧の変化に
即応可能となる。
(Means and effects for solving the problem) In a gas laser oscillator equipped with a gear switch that receives an insulating gas supply via a valve whose opening/closing operation is controlled and a pressure setting device that sets a predetermined pressure, the valve and the pressure The setting device has multiple sets and is configured to supply electrically insulating gas at different pressures to the gear switch by switching multiple valves.
The gas pressure inside the gear switch can be quickly adjusted to changes in discharge voltage.
（実施例）
以下、実施例を示す図面に基いて本発明を説明
する。なお、第３図と共通する部分には同一符号
を付し詳細な説明は省略する。すなわち、第３図
に示した構成と異なるところは供給装置６からギ
ヤツプスイツチ４への電気絶縁性気体の供給管路
に一方の組になる電磁弁７ａと圧力設定器８ａ
と、他方の組になる電磁弁７ｂと圧力設定器８ｂ
とを並列に設けた構成にした点にある。ところで
上記電磁弁７ａ，７ｂはそれぞれ制御装置９によ
つて交互に制御動作の制御を受けるようになつて
いる。また、圧力設定器８ａ，８ｂは互いに異な
つた設定圧力になつている。これら設定圧力は
27KV〜34KVで動作するTEACO2レーザでは一
方の圧力設定器８ａは1.5Kg／cm2、他方の圧力設
定器８ｂは1.8Kg／cm2に設定されている。(Example) Hereinafter, the present invention will be described based on drawings showing examples. Note that parts common to those in FIG. 3 are designated by the same reference numerals, and detailed explanations will be omitted. That is, the difference from the configuration shown in FIG. 3 is that the electrically insulating gas supply line from the supply device 6 to the gear switch 4 includes one set of a solenoid valve 7a and a pressure setting device 8a.
and the other set of solenoid valve 7b and pressure setting device 8b
The main point is that the configuration is such that these are provided in parallel. By the way, the electromagnetic valves 7a and 7b are alternately controlled by the control device 9. Further, the pressure setting devices 8a and 8b have different set pressures. These set pressures are
In a TEACO 2 laser operating at 27KV to 34KV, one pressure setting device 8a is set to 1.5Kg/cm 2 and the other pressure setting device 8b is set to 1.8Kg/cm 2 .
以上の構成において、電源部３から27〜30KV
の電圧をギヤツプスイツチ４を通してガスレーザ
管１に印加してレーザ発振動作させる場合には、
ギヤツプスイツチ４が低圧で動作するように制御
される。すなわち、制御装置９からの信号によつ
て双方の電磁バルブ７ａ，７ｂに対し高圧側にな
る電磁バルブ７ｂは閉じられ、低圧側の電磁バル
ブ７ａが開かれて、1.5Kg／cm2の空気等の絶縁性
気体がギヤツプスイツチ４に供給され、適正のス
イツチ動作が行われる。また、31〜34KVの条件
でレーザ発振動作させる場合には上記とは逆に電
磁バルブ７ａが閉じ、電磁バルブ７ｂが開かれ
て、1.8Kg／cm2の電気絶縁性気体がギヤツプスイ
ツチ４に供給され適正のスイツチ動作が行われ
る。なお、上記実施例では圧力の設定を２系統に
よつて変えるようにしたが、電磁バルブ、圧力設
定器を３組以上設け種々の圧力が選ばれるように
してもよい。 In the above configuration, 27 to 30KV from power supply section 3
When applying the voltage to the gas laser tube 1 through the gear switch 4 to cause laser oscillation,
The gear switch 4 is controlled to operate at low pressure. That is, in response to a signal from the control device 9, the electromagnetic valve 7b on the high pressure side of both electromagnetic valves 7a and 7b is closed, and the electromagnetic valve 7a on the low pressure side is opened, so that 1.5 kg/cm 2 of air, etc. The insulating gas is supplied to the gear switch 4, and proper switch operation is performed. In addition, when operating the laser oscillation under the conditions of 31 to 34 KV, the solenoid valve 7a is closed and the solenoid valve 7b is opened, contrary to the above, and 1.8 Kg/cm 2 of electrically insulating gas is supplied to the gear switch 4. Proper switch action is taken. In the above embodiment, the pressure setting is changed by two systems, but three or more sets of electromagnetic valves and pressure setting devices may be provided so that various pressures can be selected.
第２図は本発明の他の実施例で、ギヤツプスイ
ツチ４にこのギヤツプスイツチ４内の放電光を受
光する光センサ１５を設け、上記受光した信号が
制御装置９に入力されるようにするとともに、制
御装置９において上記受光の回数とトリガー発生
器５でのトリガー回数とを比較し、その比較結果
に基いて電磁バルブ７ａ，７ｂの開閉動作を制御
する構成にしたものである。すなわち、この制御
は上記比較によつてトリガー回数が受光の回数よ
り多い場合はミストリガーとして判定し、ギヤツ
プスイツチ４内の圧力が供給電圧下の適正圧力よ
り高くなつていることを電磁バルブ７ａ側の開放
による圧力降下で適正に保つように行う。一方、
トリガー回数が受光の回数より少ない場合は自爆
として判定呈し上記とは逆の制御が行われる。 FIG. 2 shows another embodiment of the present invention, in which a gear switch 4 is provided with an optical sensor 15 that receives discharge light within the gear switch 4, and the received signal is input to a control device 9, and the control The device 9 compares the number of times the light is received and the number of times the trigger generator 5 triggers, and the opening and closing operations of the electromagnetic valves 7a and 7b are controlled based on the comparison result. That is, in this control, if the number of triggers is greater than the number of times of light reception based on the above comparison, it is determined as a mis-trigger, and the solenoid valve 7a side indicates that the pressure inside the gear switch 4 is higher than the appropriate pressure under the supply voltage. This is done in such a way that the pressure is maintained appropriately by the pressure drop caused by opening. on the other hand,
If the number of triggers is less than the number of light receptions, it is judged as a self-destruction and the control opposite to the above is performed.
第４図は、第２図の制御系ダイヤグラムを示す
ものである。電源部３において、１６は、制御装
置９からの周波数信号を電圧信号に変えるための
周波数・電圧変換器である。この周波数・電圧変
換器１６からの出力信号により、電源部３の電圧
は設定される。１７は、電源部３の出力電圧をモ
ニターするための分圧器である。制御装置９にお
いて、１８は周知の演算器である。１９ａ，１９
ｂはそれぞれ電磁バルブ７ａ，７ｂを動作させる
ためのリレーである。２０は演算器１８からの信
号を入力し、トリガー発生器５に必要なパルス信
号を発生するパルス発生器である。また演算器１
８からパルス発生器２０に送られる信号は、同時
にカウンタ２１にも送られ、トリガーの発生回数
をカウントするのに使われる。２２は光センサ１
５からの光信号を電気信号に変換する光・電気変
換器である。この光・電気変換器２２からの信号
は、カウンタ２３に送られ、ギヤツプスイツチ４
の動作回数を数えるのに使われる。２４はカウン
タ２１，２３の数を比較する比較器である。２５
は、演算器１８からの信号により、任意の周波数
のパルスを発生するパルス発振器である。２６は
分圧器１７のモニター信号と演算器の所望設定電
圧を比較するための比較器である。 FIG. 4 shows a control system diagram of FIG. 2. In the power supply unit 3, 16 is a frequency/voltage converter for converting the frequency signal from the control device 9 into a voltage signal. The voltage of the power supply unit 3 is set by the output signal from the frequency/voltage converter 16. 17 is a voltage divider for monitoring the output voltage of the power supply section 3. In the control device 9, 18 is a well-known arithmetic unit. 19a, 19
b are relays for operating the electromagnetic valves 7a and 7b, respectively. Reference numeral 20 denotes a pulse generator that receives the signal from the arithmetic unit 18 and generates a pulse signal necessary for the trigger generator 5. Also, arithmetic unit 1
The signal sent from 8 to the pulse generator 20 is also sent to the counter 21 at the same time and is used to count the number of trigger occurrences. 22 is optical sensor 1
This is an optical-to-electrical converter that converts the optical signal from 5 into an electrical signal. The signal from the optical/electrical converter 22 is sent to the counter 23, and the gear switch 4
It is used to count the number of operations. A comparator 24 compares the numbers of the counters 21 and 23. 25
is a pulse oscillator that generates pulses of arbitrary frequency based on the signal from the arithmetic unit 18. 26 is a comparator for comparing the monitor signal of the voltage divider 17 and the desired set voltage of the arithmetic unit.
以上のように、電源部の電圧が変つた場合にギ
ヤツプスイツチへのガス供給をその電圧に応じた
圧力になるガス供給路が開かれる動作を制御する
ようにしたので、ミストリガー、自爆といつた誤
動作が防止されるようになつたとともに、従来の
ように電圧が変る毎にギヤツプスイツチへのガス
圧力をいちいち調節する不便さがなくなつた。ま
た、ギヤツプスイツチへのガス圧調整は電磁弁の
開閉により行われるため、従来より早くガス圧調
整ができるという効果も得られた。
As described above, when the voltage of the power supply section changes, the gas supply to the gear switch is controlled so that the gas supply path is opened at a pressure corresponding to the voltage. Malfunctions are now prevented, and the inconvenience of adjusting the gas pressure to the gear switch each time the voltage changes is eliminated. Additionally, since the gas pressure to the gear switch is adjusted by opening and closing a solenoid valve, the gas pressure can be adjusted more quickly than before.
第１図は本発明の一実施例を示す構成図、第２
図は本発明の他の実施例を示す構成図、第３図は
従来例を示す構成図、第４図は第２図の制御系ダ
イヤグラムを示すブロツク図である。
１……ガスレーザ管、３……電源部、４……ギ
ヤツプスイツチ、５……トリガ発生器、６……供
給装置、７ａ，７ｂ……電磁弁、８ａ，８ｂ……
圧力設定器、９……制御装置。
FIG. 1 is a configuration diagram showing one embodiment of the present invention, and FIG.
3 is a block diagram showing another embodiment of the present invention, FIG. 3 is a block diagram showing a conventional example, and FIG. 4 is a block diagram showing the control system diagram of FIG. 2. DESCRIPTION OF SYMBOLS 1... Gas laser tube, 3... Power supply unit, 4... Gear switch, 5... Trigger generator, 6... Supply device, 7a, 7b... Solenoid valve, 8a, 8b...
Pressure setting device, 9...control device.
Claims (1)
ルス動作するガスレーザ管と、このガスレーザ管
に所定の電力を供給する電源部と電気絶縁性気体
によつて所定圧力に維持され上記電力の供給のス
イツチング動作を行うギヤツプスイツチとこのギ
ヤツプスイツチを動作させるトリガー発生器と弁
および圧力設定器を通して上記電気絶縁性気体を
供給する供給装置と上記電源部からの供給電力と
トリガ発生器のトリガー動作および弁の開閉とを
制御する制御装置とを備えたガスレーザ発振装置
において、上記弁および圧力設定器は複数組有し
上記制御装置による上記複数の弁の切換えで異な
つた圧力の電気絶縁性気体をギヤツプスイツチに
供給するように構成したことを特徴とするガスレ
ーザ発振装置。 ２ 複数の弁は電源部の出力電圧により切り換え
られることを特徴とする特許請求の範囲第１項記
載のガスレーザ発振装置。 ３ 複数の弁はトリガ発生器およびギヤツプスイ
ツチの双方の動作回数の差に応じて所望する圧力
を供給する側に切り換えられることを特徴とする
特許請求の範囲第１項記載のガスレーザ発振装
置。[Claims] 1. A gas laser tube that operates in pulses by setting a gas laser medium at a pressure higher than atmospheric pressure, a power supply section that supplies a predetermined amount of power to this gas laser tube, and an electrically insulating gas that maintains the above pressure at a predetermined pressure. A gear switch that performs a switching operation for supplying electric power, a trigger generator that operates this gear switch, a supply device that supplies the electrically insulating gas through a valve and a pressure setting device, power supplied from the power supply section, and a trigger operation of the trigger generator. and a control device for controlling the opening and closing of the valves, the valves and the pressure setting device have a plurality of sets, and the plurality of valves can be switched by the control device to generate electrically insulating gases at different pressures. A gas laser oscillation device characterized in that it is configured to supply a gas laser to a gear switch. 2. The gas laser oscillation device according to claim 1, wherein the plurality of valves are switched by the output voltage of the power supply unit. 3. The gas laser oscillation device according to claim 1, wherein the plurality of valves are switched to the side that supplies a desired pressure depending on the difference in the number of operations of both the trigger generator and the gear switch.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10481086A JPS62262483A (en) | 1986-05-09 | 1986-05-09 | Gas laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10481086A JPS62262483A (en) | 1986-05-09 | 1986-05-09 | Gas laser oscillator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62262483A JPS62262483A (en) | 1987-11-14 |
| JPH0376037B2 true JPH0376037B2 (en) | 1991-12-04 |
Family
ID=14390771
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10481086A Granted JPS62262483A (en) | 1986-05-09 | 1986-05-09 | Gas laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62262483A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0494296U (en) * | 1991-01-07 | 1992-08-17 |
-
1986
- 1986-05-09 JP JP10481086A patent/JPS62262483A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62262483A (en) | 1987-11-14 |
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