JPH0373347A - Ink-jet recording device - Google Patents
Ink-jet recording deviceInfo
- Publication number
- JPH0373347A JPH0373347A JP21047389A JP21047389A JPH0373347A JP H0373347 A JPH0373347 A JP H0373347A JP 21047389 A JP21047389 A JP 21047389A JP 21047389 A JP21047389 A JP 21047389A JP H0373347 A JPH0373347 A JP H0373347A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- substrate
- slit
- flow path
- ink
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims abstract description 15
- 239000007788 liquid Substances 0.000 claims abstract description 9
- 238000000926 separation method Methods 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 2
- 238000003754 machining Methods 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Ink Jet (AREA)
Abstract
Description
【発明の詳細な説明】
技１じと艷
本発明は、インクジェット記録装置、より詳細には、イ
ンクジェット記録装置におけるヘッド部の構造に関する
。DETAILED DESCRIPTION OF THE INVENTION Technical Field The present invention relates to an inkjet recording apparatus, and more particularly, to a structure of a head section in an inkjet recording apparatus.
史来枝先
圧電効果を利用してインクキャビティ内のインクをイン
クノズルから液滴状に噴射させることは古くから知られ
ている３例えば、特開昭６０−９０７７０号公報には、
振動板上に圧電素子を設け、該圧電素子を剛性部材によ
って剛体的に保持するようにしたインクジェット記録ヘ
ッドが開示されている。また、特開昭６２−５６１５０
号公報には、圧電体プレート自身にキャビティ溝を形成
し。It has been known for a long time that ink in an ink cavity is ejected from an ink nozzle in the form of droplets by utilizing the piezoelectric effect at the tip of a branch.3 For example, Japanese Patent Laid-Open No. 60-90770
An inkjet recording head has been disclosed in which a piezoelectric element is provided on a diaphragm and the piezoelectric element is rigidly held by a rigid member. Also, JP-A-62-56150
In the publication, a cavity groove is formed in the piezoelectric plate itself.
該圧電体プレートにカバープレーｈを接合し、キャビテ
ィ溝で複数列のインクキャビティを構成するようにした
インクジェット記録ヘッドが開示されている。しかし、
上記両公報には、ともに圧電素子から外部への電極−の
とり出しについての開示はなく１通常のはんだ付等によ
るリード線の引き出しが想定されているに過ぎず、集積
化された時の電極の配線、接続処理が大変で、加工１組
立が困難で、コスト高になる欠点があった。An inkjet recording head is disclosed in which a cover plate h is bonded to the piezoelectric plate and a plurality of rows of ink cavities are formed by cavity grooves. but,
Both of the above publications do not disclose how to take out the electrodes from the piezoelectric element to the outside, but only assume that the lead wires will be taken out by normal soldering, etc. Wiring and connection processes are difficult, processing and assembly are difficult, and costs are high.
且−一直
本発明は、上述のごとき実情に鑑みてなされたもので、
特に、高密度に集積化された電気的アクチュエート手段
から、外部への電気的接続において、構成部品を単純化
し、かつ、少量化することで加工性、組立性を向上させ
、コストの低減を図るとともに、信頼性の向上に寄与す
ることを目的としてなされたものである。The present invention was made in view of the above-mentioned circumstances, and
In particular, by simplifying and reducing the number of component parts for electrical connections from highly integrated electrical actuating means to the outside, it is possible to improve processability and assembly, and reduce costs. This was done with the aim of contributing to the improvement of reliability.
遭−一」叉
本発明は、上記目的を遠戚するために、流路の長手方向
に対して互いに間隔をあけた多数の平行流路と液滴噴射
のために該各流路に接続された各ノズルと、該流路に給
液する供給手段とを有し。In order to remotely achieve the above object, the present invention provides a plurality of parallel channels spaced apart from each other in the longitudinal direction of the channels, and a plurality of parallel channels connected to each channel for droplet jetting. and a supply means for supplying liquid to the flow path.
ある流路のアクチュエート部ンが選択された時にその選
択された流路の壁面の少なくとも一面が長手方向に垂直
な変位を生じされる圧電素子の駆動によって対応接続さ
れているノズルから、液滴を吐出させるインクジェット
記録装置において、流路に対応するように圧電素子を実
質的に独立分割するようにスリットを設け、該圧電素子
を接合保持する基板上に設けられた電極パターンを、該
圧電素子のスリット加工と同時に、パターン分離するこ
とによって、圧電素子から外部への独立した電気的接続
をすることを特徴としたものである。When an actuating part of a certain flow path is selected, at least one wall surface of the selected flow path is caused to be displaced perpendicularly to the longitudinal direction. In an inkjet recording device that ejects slits, slits are provided so as to substantially independently divide the piezoelectric element so as to correspond to the flow paths, and an electrode pattern provided on a substrate that connects and holds the piezoelectric element is connected to the piezoelectric element. The piezoelectric element is characterized by an independent electrical connection to the outside by pattern separation at the same time as the slit processing.
以下本発明の実施例に基づいて説明する。The present invention will be explained below based on examples.
第１図は、本発明によるインクジェット記録装置の一実
施例を説明するための斜視図、第２図は。FIG. 1 is a perspective view for explaining an embodiment of an inkjet recording apparatus according to the present invention, and FIG.
第１図のｎ−ｎ線断面図、第３図は、第１図のｍ−ｍ線
断面図で、図中、工は流路板、２は圧電素子、３は基板
、４は郷動ＩＣ，１１は流路。Fig. 1 is a sectional view taken along the line nn in Fig. 1, and Fig. 3 is a sectional view taken along the line m-m in Fig. 1. IC, 11 is a flow path.
１２は共通液室、工３はインク供給路、１４はノズル（
オリフィス）、１５は充填材、１６は圧電素子電極、１
７ａ〜１７ｃは電極で、基板３上に接合保持された圧電
素子２は個別に７クチユエーシヨン可能なように実質的
にスリットによって分離され、スリット部には充填材１
５が埋設されている。流路板ｌには圧電素子２のアクチ
ュエート部に対応して、平行な流路上１が設けられ、圧
電素子２と接合している。流路１１の一方の延長上にノ
ズル１４が、また他の一方には、共通液室１２およびイ
ンク供給路１３が接続し、インクタンクより（図示せず
）各インク流路１１にインクが給液される。12 is a common liquid chamber, 3 is an ink supply path, and 14 is a nozzle (
orifice), 15 is a filling material, 16 is a piezoelectric element electrode, 1
Reference numerals 7a to 17c are electrodes, and the piezoelectric elements 2 bonded and held on the substrate 3 are substantially separated by slits so that they can be individually cut, and the slits are filled with a filling material 1.
5 is buried. The channel plate 1 is provided with a parallel channel 1 corresponding to the actuator portion of the piezoelectric element 2, and is connected to the piezoelectric element 2. A nozzle 14 is connected to one extension of the flow path 11, and a common liquid chamber 12 and an ink supply path 13 are connected to the other end, and ink is supplied from an ink tank (not shown) to each ink flow path 11. liquid.
選択された圧電素子２に電気信号が入力されると、当該
圧電素子２は厚み方向への変位をおこし、対応するイン
ク流路１１に容積変化を与える。これによるインク流路
１１内の圧力が増加し、それによってインク液がノズル
１４より吐出する。When an electric signal is input to the selected piezoelectric element 2, the piezoelectric element 2 causes displacement in the thickness direction, and changes the volume of the corresponding ink flow path 11. This increases the pressure within the ink flow path 11, and as a result, ink liquid is ejected from the nozzle 14.
第４図及び第５図は、本発明によるインクジェット記録
ヘッドの詳細な構成を説明するための斜視図、第６図は
、第５図の■−■線断面図で、基板３は通常シリコン、
セラミック、ガラス、樹脂等よりなり、電極は、通常、
圧電素子、駆動ＩＣ電極接続用電極１７ａと、外部リー
ド線接続用電極１７ｂと、グランド電極用電極１７ｃと
から成り、これら電極が基板３上にバターニングされて
施されている。このように、電極がパターニングされた
基板３上に、概略の位置決めによって圧電素子２をたと
えば、接着等の手段により接合する（第４図）。つぎに
この圧電素子２にスリット２０の加工をたとえば切削加
工等により行う（第５図）、スリット２０の巾を３０〜
４０μｍ、圧電素子２の巾を８０〜９０μｍ程度で加工
することにより８本／ｍ程度の集積化が可能となる。こ
れは通常のダイシングソー等により十分加工可能である
。4 and 5 are perspective views for explaining the detailed structure of the inkjet recording head according to the present invention, and FIG. 6 is a cross-sectional view taken along the line ■-■ in FIG.
The electrodes are usually made of ceramic, glass, resin, etc.
It consists of a piezoelectric element, a drive IC electrode connection electrode 17a, an external lead wire connection electrode 17b, and a ground electrode electrode 17c, and these electrodes are patterned on the substrate 3. In this way, the piezoelectric element 2 is bonded to the substrate 3 on which the electrodes are patterned by means of adhesive or the like by roughly positioning the piezoelectric element 2 (FIG. 4). Next, a slit 20 is formed in this piezoelectric element 2 by, for example, cutting (Fig. 5), and the width of the slit 20 is set to 30 to
By processing the piezoelectric element 2 to a width of about 40 μm and a width of about 80 to 90 μm, integration of about 8 pieces/m becomes possible. This can be sufficiently processed using a normal dicing saw or the like.
第６図は、上述のごとく、スリット２０を形成した後の
図で、このスリット加工によって圧電素子２が実質的に
分離されるのと同時に電極パターンも分離・独立される
。つまり、このとき圧電素子２と同時に基板３も一部加
工することになる。FIG. 6 is a diagram after the slits 20 have been formed as described above, and the piezoelectric elements 2 are substantially separated by this slit processing, and at the same time, the electrode patterns are also separated and made independent. That is, at this time, part of the substrate 3 is also processed at the same time as the piezoelectric element 2.
また、基板３の前面（第６図Ｍ部）は、グランド電極１
７ｃを分離しないようにするため加工をしないようにす
るのがよい。Further, the front surface of the substrate 3 (section M in FIG. 6) has a ground electrode 1.
In order to prevent separation of 7c, it is better not to process it.
このあとで、駆動ＩＣ４（分離した電極のパターンのピ
ッチに合わせて電極が配置されている。）をチップフロ
ーなどによって取付る。基板３の材質を適当に選択する
ことによって、駆動ＩＣ４の放熱を十分に行うことも可
能となる。After this, the drive IC 4 (electrodes are arranged according to the pitch of the separated electrode pattern) is attached by chip flow or the like. By appropriately selecting the material of the substrate 3, it is also possible to sufficiently dissipate heat from the drive IC 4.
また、前述のスリット加工において、外部ＩＪ−ド線接
続用のパターンも同一ピッチで分離独立されるので、必
要に応じて選択的にワイヤー、ボンディング等により使
用することができる。In addition, in the above-mentioned slit processing, the patterns for external IJ-wire connections are also separated and independent at the same pitch, so that they can be selectively used with wires, bonding, etc. as needed.
第７図（、）、（ｂ）は圧電索子２の電極構成の例を示
す図で、（ａ）図は圧電素子が単層の場合、（ｂ）図は
積層のもので、２ａはグランド電極、２ｂはホット電極
を示し、圧電素子は（ｂ）図に示すように！１層タイプ
のものと使用することも可能である。7(a) and 7(b) are diagrams showing examples of the electrode configuration of the piezoelectric element 2, in which (a) is a single layer piezoelectric element, (b) is a laminated one, and 2a is a The ground electrode, 2b indicates the hot electrode, and the piezoelectric element is shown in (b)! It is also possible to use a single layer type.
勿−一−−果
以上の説明から明らかなように、本発明によると、同時
加工することにより、圧電素子の実効巾と基板上の電極
パターンの巾とが同一となって分離されるので、電気的
接続のアライメントが簡易化され、また、各個別に分割
された圧電素子の電極面が十分な面積をもって基板の電
極面に接合されるので、電気的接続の信頼性があがる。Of course, as is clear from the above explanation, according to the present invention, by simultaneous processing, the effective width of the piezoelectric element and the width of the electrode pattern on the substrate become the same and are separated. The alignment of the electrical connection is simplified, and since the electrode surfaces of each individually divided piezoelectric element are bonded to the electrode surface of the substrate with a sufficient area, the reliability of the electrical connection is improved.
集積化された電極の配線、接続処理の構成が単純化され
、加工・組立性を容易にし、コストの低減を図れる。The configuration of integrated electrode wiring and connection processing is simplified, facilitating processing and assembly, and reducing costs.
基板上に駆動ＩＣ体を直載することでヘッド本体が小型
軽量化が可能となり、信頼性が向上する。By mounting the drive IC directly on the substrate, the head body can be made smaller and lighter, improving reliability.
等の利点がある。There are advantages such as
第１図は、本発明によるインクジェット記録装置の一実
施例を説明するための斜視図、第２図は、第工図のｎ−
ｎ線断面図、第３図は、第１図の＋ｎ−ｍｎ−ｍ線断面
図同第４図５図は、本発明によるインクジェット記録ヘ
ッドの威作過程を説明するための斜視図、第６図は、第
５図の■−■線断面図、第７図は、圧電素子の構成例を
示す図である。
１・・流路板、２・・・圧電素子、３・・・基板、４・
・・駆動ＩＣ１１１・・・流路、１２・・・共通液室、
１３・・・インク供給路、１４・・・ノズル（オリフィ
ス）、１５・・・充填材、１６・・・圧電素子電極、１
７ａ〜１７ｃ・・・電極。
第３図FIG. 1 is a perspective view for explaining one embodiment of an inkjet recording apparatus according to the present invention, and FIG. 2 is a n-
3 is a sectional view taken along the +n-mn-m line in FIG. 1; FIG. The figure is a sectional view taken along the line ■--■ in FIG. 5, and FIG. 7 is a diagram showing an example of the configuration of the piezoelectric element. 1... Channel plate, 2... Piezoelectric element, 3... Substrate, 4...
...Drive IC111...Flow path, 12...Common liquid chamber,
13... Ink supply path, 14... Nozzle (orifice), 15... Filler, 16... Piezoelectric element electrode, 1
7a to 17c...electrodes. Figure 3
Claims (1)
平行流路と液滴噴射のために該各流路に接続された各ノ
ズルと、該流路に給液する供給手段とを有し、ある流路
のアクチュエーションが選択された時に該選択された流
路の壁面の少なくとも一面が長手方向に垂直な変位を生
じさせられる圧電素子の駆動によって対応するノズルか
ら、液滴を吐出させるインクジェット記録装置において
、前記流路に対応するように圧電素子を実質的に独立分
割するようにスリットを設け、該圧電素子を接合保持す
る基板上に設けられた電極パターンを該圧電素子のスリ
ット加工と同時にパターン分離することによって、圧電
素子から外部への独立した電気的接続としたことを特徴
とするインクジェット記録装置。1. A large number of parallel flow channels spaced apart from each other in the longitudinal direction of the flow channels, each nozzle connected to each flow channel for jetting droplets, and a supply means for supplying liquid to the flow channels. and when actuation of a certain channel is selected, droplets are ejected from the corresponding nozzle by driving a piezoelectric element that causes displacement perpendicular to the longitudinal direction of at least one wall surface of the selected channel. In an inkjet recording apparatus, a slit is provided so as to substantially independently divide the piezoelectric element so as to correspond to the flow path, and an electrode pattern provided on a substrate for bonding and holding the piezoelectric element is connected to the slit of the piezoelectric element. An inkjet recording device characterized in that an independent electrical connection from a piezoelectric element to the outside is achieved by pattern separation at the same time as processing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21047389A JP2807497B2 (en) | 1989-08-14 | 1989-08-14 | Ink jet recording device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21047389A JP2807497B2 (en) | 1989-08-14 | 1989-08-14 | Ink jet recording device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0373347A true JPH0373347A (en) | 1991-03-28 |
| JP2807497B2 JP2807497B2 (en) | 1998-10-08 |
Family
ID=16589925
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21047389A Expired - Fee Related JP2807497B2 (en) | 1989-08-14 | 1989-08-14 | Ink jet recording device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2807497B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0550030A2 (en) * | 1991-12-26 | 1993-07-07 | Seiko Epson Corporation | Ink jet recording head and process for forming same |
| US5761783A (en) * | 1994-03-29 | 1998-06-09 | Citizen Watch Co., Ltd. | Ink-jet head manufacturing method |
| US5764257A (en) * | 1991-12-26 | 1998-06-09 | Seiko Epson Corporation | Ink jet recording head |
| JP2003519027A (en) * | 2000-01-07 | 2003-06-17 | ザール テクノロジー リミテッド | Droplet deposition device |
-
1989
- 1989-08-14 JP JP21047389A patent/JP2807497B2/en not_active Expired - Fee Related
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0550030A2 (en) * | 1991-12-26 | 1993-07-07 | Seiko Epson Corporation | Ink jet recording head and process for forming same |
| US5517225A (en) * | 1991-12-26 | 1996-05-14 | Seiko Epson Corporation | Ink jet recording head |
| US5630274A (en) * | 1991-12-26 | 1997-05-20 | Seiko Epson Corporation | Method of making an ink jet recording head |
| EP0795404A2 (en) * | 1991-12-26 | 1997-09-17 | Seiko Epson Corporation | Ink jet recording head |
| US5764257A (en) * | 1991-12-26 | 1998-06-09 | Seiko Epson Corporation | Ink jet recording head |
| EP0795404A3 (en) * | 1991-12-26 | 2000-11-02 | Seiko Epson Corporation | Ink jet recording head |
| US6286942B1 (en) | 1991-12-26 | 2001-09-11 | Seiko Epson Corporation | Ink jet recording head with mechanism for positioning head components |
| US5761783A (en) * | 1994-03-29 | 1998-06-09 | Citizen Watch Co., Ltd. | Ink-jet head manufacturing method |
| US6039440A (en) * | 1994-03-29 | 2000-03-21 | Citizen Watch Co., Ltd. | Ink-jet head |
| JP2003519027A (en) * | 2000-01-07 | 2003-06-17 | ザール テクノロジー リミテッド | Droplet deposition device |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2807497B2 (en) | 1998-10-08 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |