JPH0373055B2 - - Google Patents

Info

Publication number: JPH0373055B2
Authority: JP; Japan
Prior art keywords: thickness; resin; light beam; substrate; replica
Prior art date: 1982-03-19
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.): Expired - Lifetime

Application number

JP57042758A

Other languages

English (en)

Japanese (ja)

Other versions

JPS58161808A (ja

Inventor

Kazuo Shigematsu

Yoshinori Myamura

Shinkichi Horigome

Motoyasu Terao

Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)

Hitachi Ltd

Original Assignee

Hitachi Ltd

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1982-03-19

Filing date

1982-03-19

Publication date

1991-11-20

1982-03-19 Application filed by Hitachi Ltd filed Critical Hitachi Ltd

1982-03-19 Priority to JP4275882A priority Critical patent/JPS58161808A/ja

1983-09-26 Publication of JPS58161808A publication Critical patent/JPS58161808A/ja

1991-11-20 Publication of JPH0373055B2 publication Critical patent/JPH0373055B2/ja

Status Granted legal-status Critical Current

Links

239000011347 resin Substances 0.000 claims description 28
229920005989 resin Polymers 0.000 claims description 28
239000000758 substrate Substances 0.000 claims description 23
238000000034 method Methods 0.000 claims description 5
238000004519 manufacturing process Methods 0.000 claims 5
238000005286 illumination Methods 0.000 claims 1
230000001678 irradiating effect Effects 0.000 claims 1
230000003287 optical effect Effects 0.000 description 15
238000010586 diagram Methods 0.000 description 10
238000001514 detection method Methods 0.000 description 4
238000005259 measurement Methods 0.000 description 4
239000011521 glass Substances 0.000 description 2
230000035945 sensitivity Effects 0.000 description 2
238000005452 bending Methods 0.000 description 1
238000007796 conventional method Methods 0.000 description 1
238000006073 displacement reaction Methods 0.000 description 1
238000005516 engineering process Methods 0.000 description 1
230000004907 flux Effects 0.000 description 1
239000011810 insulating material Substances 0.000 description 1
230000010076 replication Effects 0.000 description 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
- G01D11/02—Bearings or suspensions for moving parts
- G01D11/06—Strip or thread suspensions, e.g. in tension

Landscapes

Physics & Mathematics (AREA)
General Physics & Mathematics (AREA)
Manufacturing Optical Record Carriers (AREA)
Length Measuring Devices By Optical Means (AREA)

JP4275882A 1982-03-19 1982-03-19 レプリカの製造方法 Granted JPS58161808A (ja)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
JP4275882A JPS58161808A (ja)	1982-03-19	1982-03-19	レプリカの製造方法

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
JP4275882A JPS58161808A (ja)	1982-03-19	1982-03-19	レプリカの製造方法

Publications (2)

Publication Number	Publication Date
JPS58161808A JPS58161808A (ja)	1983-09-26
JPH0373055B2 true JPH0373055B2 (nl)	1991-11-20

Family

ID=12644888

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
JP4275882A Granted JPS58161808A (ja)	1982-03-19	1982-03-19	レプリカの製造方法

Country Status (1)

Country	Link
JP (1)	JPS58161808A (nl)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS63184003A (ja) *	1987-01-27	1988-07-29	Makoto Nagura	光ビ−ムによる板厚の測定方法
JP2016024009A (ja) *	2014-07-18	2016-02-08	株式会社ミツトヨ	厚さ測定装置及び厚さ測定方法
CN104154868A (zh) *	2014-08-06	2014-11-19	复旦大学	一种基于双焦镜的非接触透镜中心厚度测量装置

1982
- 1982-03-19 JP JP4275882A patent/JPS58161808A/ja active Granted

Also Published As

Publication number	Publication date
JPS58161808A (ja)	1983-09-26

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