JPH0373055B2 - - Google Patents
Info
- Publication number
- JPH0373055B2 JPH0373055B2 JP57042758A JP4275882A JPH0373055B2 JP H0373055 B2 JPH0373055 B2 JP H0373055B2 JP 57042758 A JP57042758 A JP 57042758A JP 4275882 A JP4275882 A JP 4275882A JP H0373055 B2 JPH0373055 B2 JP H0373055B2
- Authority
- JP
- Japan
- Prior art keywords
- thickness
- resin
- light beam
- substrate
- replica
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000011347 resin Substances 0.000 claims description 28
- 229920005989 resin Polymers 0.000 claims description 28
- 239000000758 substrate Substances 0.000 claims description 23
- 238000000034 method Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims 5
- 238000005286 illumination Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 15
- 238000010586 diagram Methods 0.000 description 10
- 238000001514 detection method Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 230000010076 replication Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
- G01D11/02—Bearings or suspensions for moving parts
- G01D11/06—Strip or thread suspensions, e.g. in tension
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing Optical Record Carriers (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4275882A JPS58161808A (ja) | 1982-03-19 | 1982-03-19 | レプリカの製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4275882A JPS58161808A (ja) | 1982-03-19 | 1982-03-19 | レプリカの製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS58161808A JPS58161808A (ja) | 1983-09-26 |
JPH0373055B2 true JPH0373055B2 (nl) | 1991-11-20 |
Family
ID=12644888
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4275882A Granted JPS58161808A (ja) | 1982-03-19 | 1982-03-19 | レプリカの製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS58161808A (nl) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63184003A (ja) * | 1987-01-27 | 1988-07-29 | Makoto Nagura | 光ビ−ムによる板厚の測定方法 |
JP2016024009A (ja) * | 2014-07-18 | 2016-02-08 | 株式会社ミツトヨ | 厚さ測定装置及び厚さ測定方法 |
CN104154868A (zh) * | 2014-08-06 | 2014-11-19 | 复旦大学 | 一种基于双焦镜的非接触透镜中心厚度测量装置 |
-
1982
- 1982-03-19 JP JP4275882A patent/JPS58161808A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS58161808A (ja) | 1983-09-26 |
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