JPH0365921A - Optical scanner - Google Patents
Optical scannerInfo
- Publication number
- JPH0365921A JPH0365921A JP20238489A JP20238489A JPH0365921A JP H0365921 A JPH0365921 A JP H0365921A JP 20238489 A JP20238489 A JP 20238489A JP 20238489 A JP20238489 A JP 20238489A JP H0365921 A JPH0365921 A JP H0365921A
- Authority
- JP
- Japan
- Prior art keywords
- imaging
- light beam
- scanning
- optical
- optical scanning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 230000003287 optical effect Effects 0.000 title claims abstract description 62
- 238000003384 imaging method Methods 0.000 claims abstract description 53
- 238000001514 detection method Methods 0.000 claims description 9
- 238000000034 method Methods 0.000 description 12
- 238000006243 chemical reaction Methods 0.000 description 7
- 230000004075 alteration Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 3
- 230000005684 electric field Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000006185 dispersion Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Mechanical Optical Scanning Systems (AREA)
- Laser Beam Printer (AREA)
Abstract
Description
［産業上の利用分野］
本発明は、光ビームを被走査面上に走査する光走査装置
、特に、光ビームが被走査面上で常に適正に集光する様
に、且つ走査線の送りが一定間隔となる様に高精度に制
御され、複写装置，記録装置等において高品位の画像出
力等を与えることを可能にした光走査装置に関する。[Industrial Field of Application] The present invention relates to an optical scanning device that scans a light beam on a surface to be scanned, and in particular, to an optical scanning device that scans a light beam on a surface to be scanned, and in particular, a method that allows the light beam to be properly focused on the surface to be scanned and to control the scanning line feed. The present invention relates to an optical scanning device that is controlled with high precision so as to have constant intervals, and is capable of providing high-quality image output in copying devices, recording devices, etc.
【従来の技術Ｊ
光ビームを記録体面上に走査露光する光走査装置におい
て、高品位な画像を得る為には、光ビームの結像点は記
録体の表面力１ら常↓こ一定の位置にあることが望°ま
しＩ／Ｘ１６Ｓ光学系の収差或は熱膨張等によって必ず
しも一定の位置にはならない。
この為、光源或は光学系の一部を駆動することによって
、結像点の位置を一定の位置番こ保つ方式が提示されて
いる（Ｖ１４えば、特開昭６３−７８１６７号参照）。
また、レーザー光を用いた複写装置、記録装置等におい
て、高速走ｌＩ装置として広く使用されている回転多面
１！（ポリゴン）をｉｌｌ、ｓた装置では、ポリゴンの
面倒れ↓こより走査ラインに送りピッチむらが生じ、高
品位な画像が得られないことがあり、これを解決する手
段として面倒れ補正光学系を用Ｉ／）るとし１う光学的
な倒れ補正の方式が知られてし）る（特公昭５２−２８
６６６号参照）。
更に、光学的な倒れ補正の方式＆±１己録体の送りむら
によって生じる走査ライン送りピッチむらは補正できな
いこと及び光学系力ｓ？１雑化して高価格となること等
の欠点を持つことから、非光学的な倒れ補正・の方式も
提示されている（例えば、特開昭５９−１５２１７号参
照）。
【発明が解決しようとする課Ｂ】
しかし乍ら、上記従来例においては、高品位な画像を得
る為には補正する必要がある走査線送りピッチむら及び
結像点ないし集光点位置ずれの両方ではなくいずれか一
方のみが補正され、高品位な画像を得る為には不充分で
ある。
一方、上記両者を補正制御する際に、ポリゴンの面倒れ
補正の為に光学的な補正方式を用いると結像光学系は回
転非対称系にならざるを得ない、そして、この結像光学
系において結像点位置ずれを補正する為に結像系の一部
を動かすと、位置ずれ補正に従って発生する収差は、一
般に、サジタル面（走査ビームが経時的に形成する走査
面と直角な面）とメリジオナル面（走査面）において、
量、質及び割合とも異なり、両面において共に所定の許
容収差量内に収めることは困難である。
従って１本発明の目的は、上記の課題に鑑み、回転非対
称系の結像光学系を用いないで走査ライン送りピッチむ
らと光ビームの結像位置ずれとを共に補正できる光走査
装置を提供することにある。
［課題を解決する為の手段１
上記目的を達成する為の本発明では、光源からの光束を
ポリゴンなどの走査手段と結像手段とを介して被走査体
上に集光、走査する光走査装置において、光束の結像位
置を検出する第１検出手段と、第１検出手段からの情報
に基づいて光束の結像位置を結像手段の光軸方向に制御
する第１＄ｔ制御手段と、被走査体上の光走査位置を検
出する第２検出手段と、第２検出手段からの情報に基づ
いて上記光走査位置を走査面に対して垂直な方向に制御
する第２制御手段とが具備され、上記結像手段が回転対
称系となっている。
より具体的には、第１制御手段は光源、走査手段、結像
手段の少なくとも一部を駆動して光束の結像位置を制御
したり、第２制御手段は光源、走査手段、結像手段、被
走査体の少なくとも一部を駆動して光走査位置を制御し
たり、或は第２制御手段は光源と被走査体との間の光路
中に設けられた光走査位置を走査面に対して垂直方向に
変える変更駆動手段であったりする。
［作用］
上記の構成の本発明によれば、光ビームの光走査位置を
制御補正する手段が、光ビームの結像位置を制御補正す
る手段と共に併せ設けられて、結像手段が回転対称な光
学系とされているので、上記制御補正する為に結像手段
などの一部を駆動制御しても、サジタル面とメリジオナ
ル面において複雑な態様で収差が発生するようなことは
なく、簡単な制御補正方式ないし手段によって光ビーム
の結像点の位置を適正な位置に保つことができる。
［実施例１
第１図は本発明の第１実施例を示す、同図において、半
導体レーザー光源ｌから射出された光ビームはコリメー
タレンズ２により平行光束とされ、反射ミラー３によっ
てポリゴンミラー４に導かれる。このポリゴンミラー４
で偏向、走査された光ビームは、結像用のｆ・θレンズ
５によりドラム６に巻かれた記録体上に結像され、この
上を走査される。
各走査において、ナイフェツジ７及び光検出器８はシリ
ンドリカルレンズ９を介して光ビームを検出し、これに
より得られる水平同期信号によってタイミングをとって
各走査毎にレーザー光源ｌは画像情報に応じて光変調さ
れる。
以上の構成の光走査装置において１反射ミラー３は、第
２図に示す様に、例えばＰＬＺＴやピエゾ素子の如き２
個の圧電性物質から成る支持体１０．１１上に固定され
ている。
そして、第２図（ｂ）に示す様に、支持体１０．１１に
互いに極性の異なる電界を印加すれば、反射ミラー３の
反射面ｉｔ制御可能に傾動させられる。
今、支持体１０．１１間の距離を４、各支持体１Ｏ１１
１への印加電圧をＶとしたときのこれの変位量をｄとす
れば、支持体１０．１１に互いに逆極性の電界を印加し
たときの反射ミラー３の傾斜角θは、θ＝２ｄ／βとな
り、例えば、ｇ＝５ｍｍ％ｄ＝１ａｍとすれば、θ＝１
．３８分となる。従って、この反射ミラー３を、ポリゴ
ンミラー４に生じる面倒れ等を補正する様に駆動制御す
ることによって、複雑な回転非対称な光学系を用いずに
、面倒れによって生じる記録体上の走査ライン送りピッ
チむらをなくすことができ、走査光学系に回転対称な光
学系を用いることが可能となる。
一方、コリメータレンズ２は、第３図に示す様に、例え
ば、ＰＬＺＴやピエゾ素子の如き圧電性物質から成る支
持体１２上に固定されており、第３図（ｂ）に示す如く
、支持体１２に電界を印加することに、よりコリメータ
レンズ２は光軸方向に駆動させられ得る。コリメータレ
ンズ２を基準の位置より光軸方向に移動させると、コリ
メータレンズ２を通過し、た光ビームはこの移動方向及
び移動量に依存して平行光束から発散光或は収束光に変
化し、ポリゴンミラー４によって偏向走査されｆ・θレ
ンズ５により結像される際に所定の位置とは異なる位置
に結像される。
従って、コリメータレンズ２を駆動制御することにより
、ドラム６上の記録体での光ビームの結像点位置が光軸
方向に変えられる。
よって、結像光学系の収差或は熱膨張等によりスポット
結像位置変動が生じても、光ビームの露光走査の際、常
に記録体に対して一定の位置に光ビームを結像させられ
る。この際、走査光学系に回転非対称な結像光学系を用
いていると、光学系を構成する要素の位置を変えたとき
に発生する収差は一般にサジタル面とメリジオナル面に
おいて量的、質的且つ割合的にも異なることになり゛、
上述したような方法では光ビームの結像位置の変動を所
定の許容量に収めることは困難である。従って、所定の
許容量に収めるには、結像光学系を複雑な形態のものに
し更には複雑な駆動制御を行なわざるをえなくなる。
上記実施例では、回転対称な結像光学系を用いているの
で、こうした問題は生じない。
上記実施例において、結像スポットの光走査位置を移動
する手段として結像系の部分内に反射ミラーを設けたが
１例えばプリズムなどの他の手段でもよい、一般に光軸
を傾けることが可能な方法、手段であればよいので、結
像手段などを駆動する手段を用いてもよい。
また、光ビームの結像位置を変える手段としては、コリ
メータレンズ２を駆動させていたが、他の部分（例えば
、ｆ・θレンズ５など）を駆動させてもよく、一般に結
像系の焦点距離を変えられる方法、手段であればどの様
なものでもよい。
次に、上記反射ミラー３やコリメータレンズ２を制御す
る為に用いられる光ビームの光走査位置を検出する手段
や光ビームの結像状態ないし位置を検出する手段につい
て説明する。
光ビームがドラム６上に記録体上の所定の走査ラインか
らずれていたり、この走査線に対して傾いていたりする
ことは、例えば、走査ラインに沿って伸びる１対の光電
変換素子を記録体と光学的に等価な位置に配置して行な
う、所定の走査ラインに沿って光ビームが走査されると
きは上記１対の光電変換素子に同量の光が検知されて、
それを適当に処理することで光走査位置が適正であるこ
とが検知される。しかし、光ビームが所定の走査ライン
からずれると、一方の光電変換素子に多くの光量が検知
され、そのことを適当に処理することでそのずれ程度が
検知される。また、光ビームが走査ラインに対して傾く
ことは。
一方の光電変換素子から他方の光電変換素子へと検知さ
れる光量の大きさ・が変化し、その変化の度合を適当な
処理回路で測ることで上記傾きの程度が検知される。
従って、こうした光走査位置の検出情報に基づいて前述
の如く反射ミラー３などを制御することで、光走査位置
が適正に制御されることになる。
こうした制御は、記録などを行なう前に予め複数回のレ
ーザー走査を行なって反射ミラー３などを適正位置に固
定してもよいし、その状態で固定しないで、信号記録走
査などを行なう間のブランキング期間のうち、スポット
検出器付近でのみレーザーを発振させて前記の如く制御
動作を行ない信号記録走査の最中はこの適正位置に固定
する様にしてもよい、更には、一定の環境変動があった
ときなどに間欠的に制御動作を行なってもよいし、予め
各走査位置毎に制御値を検知してそれを記憶しておき光
ビーム走査時に実時間で制御動作を行なってもよい。
また、光走査位置を検出するスポット検出器は、有効走
査領域外に配置したり（例えば、片側に１個配置したり
、両側に２個配置したりする）、有効走査領域内に集光
されるビームをその手前で分割器で分割してその分割光
を受ける所に配置されたりする。
いずれにせよ、光走査位置を検出する手段としては何ら
制限はなく、適当なものが装置の設計に合わせて使用し
つる。
光ビームの結像状態を検出する手段としては、例えば、
−走査ラインに対して直角に伸びたスリット状の充電変
換素子を記録体と光学的に等価な位置に配置して行なう
。
光ビームの結像位置が被走査面である記録体に対して所
定の関係にあれば１例えば、スリット状光電変換素子で
は最大のピーク値が検出されたり、Ｉｓ小の分散の光量
分布のスポットとして検出されたり、最大の尖鋭度のス
ポットとして検出されたりして、それを検出することで
光ビームの結像位置が適正であることが検出される。
そして、光ビームの結像位置が適正であると判断された
コリメータレンズ２などの制御状態の所で固定されて信
号記録走査などが行なわれる。結像位置の制御について
も、光走査位置制御と同様に、間欠的、実時間的、その
他種々の態様で行なわれうる。この様に、結像位置の検
出手段についても何らの制限はなく、適当なものが装置
の設計に合わせて使用しつる。
［発明の効果Ｊ
以上説明した様に１本発明によれば、光ビームの光走査
位置を制御補正する手段と光ビームの結像位置を制御補
正する手段を併せ設けているので、走査ライン送りピッ
チむらの発生を抑えつつも結像手段として回転対称な光
学系を用いることができ、簡単な制御補正方式ないし手
段で光ビームの結像点の位置を記録体などの被走査面の
位置から一定の関係４゜
に保つことが出来るので、高品位な画像記録等を容易に
行なうことが可能となる。[Prior art J] In an optical scanning device that scans and exposes a light beam onto the surface of a recording medium, in order to obtain a high-quality image, the focal point of the light beam must always be at a constant position ↓ due to the surface force 1 of the recording medium. It is desirable that the position be at a constant position due to aberrations or thermal expansion of the I/X16S optical system. For this reason, a method has been proposed in which the position of the imaging point is maintained at a constant position by driving a part of the light source or the optical system (for example, see Japanese Patent Laid-Open No. 63-78167, V14). In addition, the rotating polygon 1! is widely used as a high-speed running II device in copying machines, recording devices, etc. that use laser light. (polygons), the unevenness of the feeding pitch may occur in the scanning line due to the polygon's surface tilt, making it impossible to obtain high-quality images.As a means of solving this problem, a surface tilt correction optical system is used. For example, an optical tilt correction method is known (Japanese Patent Publication No. 52-28).
(See No. 666). Furthermore, the scanning line feed pitch unevenness caused by the optical tilt correction method &±1 self-recording object feed unevenness cannot be corrected, and the optical system force s? Since this method has drawbacks such as complexity and high cost, non-optical tilt correction methods have also been proposed (for example, see Japanese Patent Laid-Open No. 15217/1983). Issue B to be Solved by the Invention However, in the conventional example described above, the scanning line feeding pitch unevenness and the positional deviation of the imaging point or light condensing point need to be corrected in order to obtain a high-quality image. Only one of them is corrected, not both, which is insufficient to obtain a high-quality image. On the other hand, when performing correction control for both of the above, if an optical correction method is used to correct the surface tilt of the polygon, the imaging optical system will inevitably become a rotationally asymmetric system. When a part of the imaging system is moved to correct the positional deviation of the imaging point, the aberrations that occur due to the correction of the positional deviation generally occur on the sagittal plane (the plane perpendicular to the scanning plane formed by the scanning beam over time). In the meridional plane (scanning plane),
It differs in quantity, quality, and proportion, and it is difficult to keep both surfaces within a predetermined allowable aberration amount. Therefore, in view of the above-mentioned problems, an object of the present invention is to provide an optical scanning device that can correct both scanning line feed pitch unevenness and optical beam imaging position deviation without using a rotationally asymmetric imaging optical system. There is a particular thing. [Means for Solving the Problems 1] In order to achieve the above object, the present invention uses optical scanning in which a light beam from a light source is focused and scanned on a scanned object via a scanning means such as a polygon and an imaging means. The apparatus includes: a first detection means for detecting the imaging position of the light beam; and a first $t control means for controlling the imaging position of the light flux in the optical axis direction of the imaging means based on information from the first detection means. , a second detection means for detecting the light scanning position on the object to be scanned, and a second control means for controlling the light scanning position in a direction perpendicular to the scanning surface based on information from the second detection means. The image forming means has a rotationally symmetrical system. More specifically, the first control means controls the imaging position of the light beam by driving at least a part of the light source, the scanning means, and the imaging means, and the second control means controls the light source, the scanning means, and the imaging means. The second control means controls the optical scanning position by driving at least a part of the object to be scanned, or the second control means controls the optical scanning position provided in the optical path between the light source and the object to be scanned with respect to the scanning surface. It may be a changing drive means for changing the vertical direction. [Operation] According to the present invention having the above configuration, the means for controlling and correcting the optical scanning position of the light beam is provided together with the means for controlling and correcting the imaging position of the light beam, so that the imaging means is rotationally symmetrical. Since it is an optical system, even if part of the imaging means is driven and controlled to make the above control correction, aberrations will not occur in a complicated manner on the sagittal plane and the meridional plane. The position of the imaging point of the light beam can be maintained at an appropriate position by means of a control correction method or means. [Embodiment 1] FIG. 1 shows a first embodiment of the present invention. In the figure, a light beam emitted from a semiconductor laser light source 1 is made into a parallel beam by a collimator lens 2, and is reflected by a reflection mirror 3 to a polygon mirror 4. be guided. This polygon mirror 4
The light beam deflected and scanned is imaged by an imaging f/theta lens 5 onto a recording medium wound around a drum 6, and scanned thereon. In each scan, the knife 7 and the photodetector 8 detect the light beam through the cylindrical lens 9, and the timing is determined by the horizontal synchronization signal obtained thereby. Modulated. In the optical scanning device having the above configuration, one reflection mirror 3 is made of two such as PLZT or piezo elements, as shown in FIG.
It is fixed on a support 10.11 made of piezoelectric material. Then, as shown in FIG. 2(b), by applying electric fields having mutually different polarities to the supports 10 and 11, the reflecting surface of the reflecting mirror 3 can be tilted in a controllable manner. Now the distance between supports 10.11 is 4, each support 1O11
When the voltage applied to the mirror 1 is V, and the amount of displacement of the mirror is d, the inclination angle θ of the reflecting mirror 3 when electric fields of opposite polarity are applied to the support 10.11 is θ=2d/ For example, if g=5mm%d=1am, θ=1
．． It will be 38 minutes. Therefore, by controlling the driving of the reflecting mirror 3 to correct the surface tilt etc. that occur in the polygon mirror 4, the scanning line on the recording medium caused by the surface tilt can be moved without using a complicated rotationally asymmetric optical system. Pitch unevenness can be eliminated, and a rotationally symmetrical optical system can be used as the scanning optical system. On the other hand, as shown in FIG. 3, the collimator lens 2 is fixed on a support 12 made of a piezoelectric material such as PLZT or a piezo element, and as shown in FIG. By applying an electric field to 12, the collimator lens 2 can be driven in the optical axis direction. When the collimator lens 2 is moved from the reference position in the optical axis direction, the light beam passing through the collimator lens 2 changes from a parallel beam to a diverging beam or a convergent beam depending on the direction and amount of movement, When deflected and scanned by the polygon mirror 4 and imaged by the f/θ lens 5, the image is formed at a position different from a predetermined position. Therefore, by driving and controlling the collimator lens 2, the position of the image point of the light beam on the recording medium on the drum 6 can be changed in the optical axis direction. Therefore, even if spot imaging position fluctuation occurs due to aberrations or thermal expansion of the imaging optical system, the light beam can always be imaged at a constant position with respect to the recording medium during exposure scanning of the light beam. At this time, if a rotationally asymmetric imaging optical system is used as the scanning optical system, the aberrations that occur when the positions of the elements that make up the optical system are changed are generally quantitative, qualitative, and The proportions will also differ.
With the method described above, it is difficult to keep the variation in the imaging position of the light beam within a predetermined tolerance. Therefore, in order to keep the amount within a predetermined tolerance, it is necessary to use a complicated imaging optical system and to perform complicated drive control. In the above embodiment, since a rotationally symmetrical imaging optical system is used, such a problem does not occur. In the above embodiment, a reflecting mirror is provided within the imaging system as a means for moving the optical scanning position of the imaging spot, but other means such as a prism may also be used, and generally the optical axis can be tilted. Any method or means may be used, and means for driving an imaging means or the like may be used. In addition, although the collimator lens 2 is driven as a means for changing the imaging position of the light beam, other parts (for example, the f/θ lens 5, etc.) may be driven, and generally the focal point of the imaging system is driven. Any method or means that can change the distance may be used. Next, a description will be given of means for detecting the optical scanning position of the light beam used to control the reflecting mirror 3 and collimator lens 2, and means for detecting the imaging state or position of the light beam. If the light beam on the drum 6 is deviated from a predetermined scanning line on the recording medium or is tilted with respect to this scanning line, for example, a pair of photoelectric conversion elements extending along the scanning line may be When a light beam is scanned along a predetermined scanning line, the same amount of light is detected by the pair of photoelectric conversion elements,
By appropriately processing it, it is detected that the optical scanning position is appropriate. However, when the light beam deviates from a predetermined scanning line, a large amount of light is detected by one photoelectric conversion element, and by appropriately processing this, the extent of the deviation can be detected. Also, the light beam is tilted with respect to the scan line. The magnitude of the amount of light detected from one photoelectric conversion element to the other photoelectric conversion element changes, and the degree of the above-mentioned inclination is detected by measuring the degree of the change using an appropriate processing circuit. Therefore, by controlling the reflecting mirror 3 and the like as described above based on the detection information of the optical scanning position, the optical scanning position can be appropriately controlled. Such control may be performed by performing multiple laser scans in advance to fix the reflecting mirror 3 in the proper position before recording, or by not fixing it in that state and by using a laser scan while performing signal recording scanning, etc. During the ranking period, the laser may be oscillated only in the vicinity of the spot detector, and the control operation may be performed as described above, and the position may be fixed at this appropriate position during the signal recording scan. The control operation may be performed intermittently when the light beam is scanned, or the control value may be detected and stored in advance for each scanning position, and the control operation may be performed in real time when the light beam is scanned. In addition, the spot detector that detects the optical scanning position may be placed outside the effective scanning area (for example, one on one side or two on both sides), or the spot detector may be placed within the effective scanning area. The beam splitter is used to split the beam before the splitter, and the splitter is placed in a place that receives the split light. In any case, there are no restrictions on the means for detecting the optical scanning position, and any suitable means can be used in accordance with the design of the apparatus. As means for detecting the imaging state of the light beam, for example,
- A slit-shaped charge conversion element extending perpendicularly to the scanning line is arranged at a position optically equivalent to the recording medium. If the imaging position of the light beam is in a predetermined relationship with respect to the recording medium, which is the scanned surface, 1. For example, in a slit-shaped photoelectric conversion element, the maximum peak value is detected, or a spot with a light intensity distribution with small Is dispersion is detected. By detecting this, it is detected that the imaging position of the light beam is appropriate. Then, the imaging position of the light beam is fixed at a controlled state of the collimator lens 2, etc., which is determined to be appropriate, and signal recording scanning and the like are performed. Control of the imaging position can also be performed intermittently, in real time, or in various other ways, similarly to the optical scanning position control. In this way, there are no restrictions on the means for detecting the imaging position, and any suitable means can be used in accordance with the design of the apparatus. [Effect of the Invention J As explained above, according to the present invention, means for controlling and correcting the optical scanning position of the light beam and means for controlling and correcting the imaging position of the light beam are both provided, so that the scanning line feed It is possible to use a rotationally symmetrical optical system as an imaging means while suppressing the occurrence of pitch unevenness, and by using a simple control correction method or means, the position of the imaging point of the light beam can be changed from the position of the scanned surface such as a recording medium. Since a constant relationship of 4° can be maintained, high-quality image recording, etc. can be easily performed.
第１図は本発明の実施例を示す構成図、第２図（ａ）は
反射ミラーの側面図、第２図（ｂ）は反射ミラーを傾動
させた状態の説明図、第３図（ａ）はコリメータレンズ
の断面図、第３図（ｂ）はコリメータレンズを駆動させ
た状態の説明図である。
１・・・・・レーザー光源、２・・・・・コリメータレ
ンズ、３・・・・・反射ミラー４・・・・・回転反射鏡
、６・・・・・記録体巻き付はドラム、７・・・・・ナ
イフェツジ、８・・・・・光検出器、９・・・・・シリ
ンドリカルレンズ、１０．１１・・・・・反射ミラー支
持体、１２・・・・・コリメータレンズ支持体FIG. 1 is a configuration diagram showing an embodiment of the present invention, FIG. 2(a) is a side view of a reflecting mirror, FIG. 2(b) is an explanatory diagram of a state in which the reflecting mirror is tilted, and FIG. ) is a sectional view of the collimator lens, and FIG. 3(b) is an explanatory diagram of the state in which the collimator lens is driven. 1...Laser light source, 2...Collimator lens, 3...Reflection mirror 4...Rotating reflector, 6...Recording material is wound on drum, 7 ...Naifetsuji, 8...Photodetector, 9...Cylindrical lens, 10.11...Reflection mirror support, 12...Collimator lens support
Claims (1)
査体上に集光、走査する光走査装置において、光束の結
像位置を検出する第１検出手段と、該第１検出手段から
の情報に基づいて光束の結像位置を結像手段の光軸方向
に制御する第１制御手段と、被走査体上の光走査位置を
検出する第２検出手段と、該第２検出手段からの情報に
基づいて光走査位置を走査面に対して垂直な方向に制御
する第２制御手段とを有し、前記結像手段が回転対称系
であることを特徴とする光走査装置。 ２、前記第１制御手段は光源、走査手段、結像手段の少
なくとも一部を駆動して光束の結像位置を制御する請求
項１記載の光走査装置。 ３、前記第２制御手段は光源、走査手段、結像手段、被
走査体の少なくとも一部を駆動して光走査位置を制御す
る請求項１記載の光走査装置。 ４、前記第２制御手段は光源と被走査体との間の光路中
に設けられている請求項１記載の光走査装置。 ５、前記第２制御手段は傾動可能に設けられた反射ミラ
ーである請求項４記載の光走査装置[Scope of Claims] 1. In an optical scanning device that focuses and scans a light beam from a light source onto a scanned object via a scanning means and an imaging means, a first detection means detects the imaging position of the light beam; , a first control means for controlling the imaging position of the light beam in the optical axis direction of the imaging means based on information from the first detection means, and a second detection means for detecting the optical scanning position on the object to be scanned. , a second control means for controlling the optical scanning position in a direction perpendicular to the scanning plane based on information from the second detection means, and the imaging means is a rotationally symmetric system. optical scanning device. 2. The optical scanning device according to claim 1, wherein the first control means controls the imaging position of the light beam by driving at least part of the light source, the scanning means, and the imaging means. 3. The optical scanning device according to claim 1, wherein the second control means controls the optical scanning position by driving at least a part of the light source, the scanning means, the imaging means, and the object to be scanned. 4. The optical scanning device according to claim 1, wherein the second control means is provided in an optical path between the light source and the object to be scanned. 5. The optical scanning device according to claim 4, wherein the second control means is a tiltable reflection mirror.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20238489A JP2747608B2 (en) | 1989-08-04 | 1989-08-04 | Optical scanning device |
| EP19900112793 EP0406844A3 (en) | 1989-07-05 | 1990-07-04 | Scanning optical apparatus |
| US08/476,047 US5627670A (en) | 1989-07-05 | 1995-06-07 | Scanning optical apparatus having beam scan controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20238489A JP2747608B2 (en) | 1989-08-04 | 1989-08-04 | Optical scanning device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0365921A true JPH0365921A (en) | 1991-03-20 |
| JP2747608B2 JP2747608B2 (en) | 1998-05-06 |
Family
ID=16456604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20238489A Expired - Fee Related JP2747608B2 (en) | 1989-07-05 | 1989-08-04 | Optical scanning device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2747608B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5245181A (en) * | 1991-06-24 | 1993-09-14 | Dainippon Screen Mfg. Co., Ltd. | Method and apparatus of detecting deviation of scanning line of light beam |
-
1989
- 1989-08-04 JP JP20238489A patent/JP2747608B2/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5245181A (en) * | 1991-06-24 | 1993-09-14 | Dainippon Screen Mfg. Co., Ltd. | Method and apparatus of detecting deviation of scanning line of light beam |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2747608B2 (en) | 1998-05-06 |
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