JPH03627A - Tester of sealed vessel and its testing method - Google Patents

Abstract

PURPOSE:To accurately measure airtightness of a lid regardless of recessed volume of the cap and noises, by detecting the vibration of the lid surface by means of an optical point-displacement method or an optical means of luminous intensity. CONSTITUTION:A tester of a sealed vessel 1 comprises a sound wave generator 10 to give sound waves to a lid 2, a laser generator 20 for laser irradiation, a laser receiver 30 for reflected laser from the lid, and a judging apparatus 40 of the received luminous intensity. When the frequency of the sound wave from the generator 10 coincides with the proper oscillation number of the lid 2, it causes resonant oscillation. As a result, scattering distribution of the laser sent to the lid 2 from the generator 20 and reflected on the lid surface varies. This varied luminous intensity is received by an apparatus 30 and luminous volume components of disturbance are removed to feed to the judging apparatus 40. The judging apparatus 40 compares the resonant frequency with the proper oscillation numbers of the lid 2 to judge whether it is good or not, after calculation of the resonant frequency out of the variation of the received luminous intensity, and indicates the result on an indicator 42.

Description

【発明の詳細な説明】 （産業上の利用分野） 本発明は密封容器の検査装置およびその検査方法に係わ
り、特には容器に蓋をし気密性を保った密封容器の検査
装置およびその検査方法に関する。Detailed Description of the Invention (Field of Industrial Application) The present invention relates to an inspection device and method for inspecting a sealed container, and more particularly, an inspection device and a method for inspecting a sealed container that maintains airtightness by covering the container. Regarding.

（従来の技術） 従来、密封容器の検査装置および検査方法としては （１）特開昭６４−２７６３７に開示されているごとく
、容器のキャップにハロゲンランプを集光、照射し、キ
ャップの凹み量により変化する反射光量をイメージセン
サで受光してその出力レベルから容器真空度を調べる装
置。(Prior Art) Conventionally, as disclosed in Japanese Patent Application Laid-Open No. 64-27637, as an inspection apparatus and method for inspecting a sealed container, a halogen lamp is focused and irradiated on the cap of the container to determine the amount of dent in the cap. A device that detects the amount of reflected light that changes depending on the temperature using an image sensor and checks the vacuum level of the container based on the output level.

（２）特開昭６２−９８５２７に開示されているごとく
、容器のキャップの凹み量を変位センサにより検出し、
その変位量から真空度を調べる装置。(2) As disclosed in Japanese Patent Application Laid-Open No. 62-98527, the amount of dent in the cap of the container is detected by a displacement sensor,
A device that checks the degree of vacuum from the amount of displacement.

（３）特開昭５２−７１２８０に開示されているごとく
、容器のキャップに電磁マグネット等で衝撃を与え、そ
のときに発生する音をマイクロフォン等で検出し、周波
数の差異から真空度を調べる方法。(3) As disclosed in Japanese Unexamined Patent Publication No. 52-71280, a method of applying an impact to the cap of a container with an electromagnetic magnet, detecting the sound generated at that time with a microphone, etc., and checking the degree of vacuum from the difference in frequency. .

等が知られている。etc. are known.

（発明が解決しようとする課題） しかしながら、上記従来の密封容器の検査装置およびそ
の検査方法では、 （１）、（２）については、容器内の真空度に応じてキ
ャップの凹み量に変化が生じなければ測定が出来ないと
いう欠点がある。(Problems to be Solved by the Invention) However, in the above-mentioned conventional sealed container inspection device and its inspection method, regarding (1) and (2), the amount of dent in the cap changes depending on the degree of vacuum inside the container. The disadvantage is that it cannot be measured unless it occurs.

（３）においては、暗騒音（例えば、工場内の騒音）に
よって、計測に大きな影響があるため、設置場所の騒音
を小さくする必要があり、設置場所が広くなるとともに
設置するコストが高くなるという欠点がある。In (3), background noise (for example, noise in a factory) has a large effect on measurements, so it is necessary to reduce the noise at the installation location, which increases the cost of installation as the installation location becomes larger. There are drawbacks.

本発明は上記問題点に着目し、キャップの凹み量、騒音
、にも関係な（、安価に、設置場所も小さく、正確に測
定できる密封容器の検査装置およびその検査方法の提供
を目的としている（課題を解決するための手段） 上記目的を達成するために、本発明に係わる密封容器の
検査装置およびその検査方法の第１の発明では、容器に
蓋をし気密性を保った密封容器の検査において、蓋に音
波を与える音波発振装置と、１にレーザ光を照射するレ
ーザ発振装置と、レーザ光の蓋での反射を受光する受光
装置と、受光した光量より判定する判定装置と、からな
る構成としている。Ｉ８２の発明では、容器に蓋をし気
密性を保った密封容器の検査において、蓋に音波を与え
て蓋を振動させるとともに蓋にレーザ光を照射し、蓋の
振動により変化する反射光量を測定することにより密封
容器の気密性の良否を判定する方法としている。The present invention has focused on the above-mentioned problems, and aims to provide a sealed container inspection device and its inspection method that are inexpensive, require a small installation space, and can accurately measure the amount of dent in the cap and noise. (Means for Solving the Problems) In order to achieve the above object, in a first invention of a sealed container inspection device and an inspection method thereof according to the present invention, a sealed container that is kept airtight by covering the container with a lid is provided. In the inspection, a sonic oscillation device that applies sound waves to the lid, a laser oscillation device that irradiates laser light to the lid, a light receiving device that receives the reflection of the laser beam on the lid, and a determination device that makes a determination based on the amount of light received. In the invention of I82, when inspecting a sealed container that maintains airtightness by putting a lid on the container, a sound wave is applied to the lid to vibrate it, and a laser beam is irradiated to the lid to detect changes due to the vibration of the lid. This method determines whether the airtightness of a sealed container is good or bad by measuring the amount of reflected light.

（作用） 上記構成によれば、密封容器の蓋に音波（衝撃波）をラ
ンダムあるいは周期的に与え、蓋の表面の振動（変位）
を光点変位法あるいは光量等の光学的手段により検出し
、振動の基本周波数（共振周波数）を求める。容器内の
圧力が変化すると共振周波数も変化するため、圧力と共
振周波数の関係より密封容器の気密性を調べることが出
来る。(Function) According to the above configuration, sound waves (shock waves) are applied randomly or periodically to the lid of the sealed container, causing vibration (displacement) on the surface of the lid.
is detected by optical means such as the light spot displacement method or the amount of light, and the fundamental frequency (resonant frequency) of vibration is determined. Since the resonant frequency also changes when the pressure inside the container changes, the airtightness of the sealed container can be investigated from the relationship between the pressure and the resonant frequency.

（実施例） 以下に、本発明に係わる密封容器の検査装置およびその
検査方法の実施例につき、図面を参照して詳細に説明す
る。第１図は本発明の実施例の全体構成図を示し、蓋に
音波を与える音波発振装置１０と、蓋にレーザ光を照射
するレーザ発振装置２０と、レーザ光の蓋での反射を受
光する受光装置３０と、受光した光量より判定する判定
装置４０と、からなる、音波発振装置１０は音波発振器
１１と音波出力５１２とからなり、音波発ｔｌｉｉＷ１
１は音源である各周波数の音波信号の作成と所定音圧レ
ベルへの信号を増幅し音波出力器１２に出力する。音波
出力器１２は入力された音波信号をもとに密封容器の蓋
に向けて音波を放射する。レーザ発振装置２０はレーザ
電源２１とレーザ発振器２２と集光レンズ２３とからな
り、レーザ環ｆｉ２１はレーザ発振器２２の電源であり
、レーザ発振器２２は計測に必要なレーザ光を発振、出
力し、集光レンズ２３はレーザビームを蓋の表面で集光
させる。受光装置３０は受光センサ３１とバンドパスフ
ィルタ３２とからなり、受光センサ３１は蓋で反射した
レーザ反射光量を受光し、バンドパスフィルタ３２は計
ｉｌｌ　ｅ１１度に影響する外乱光量成分を除去する０
判定装置４０はシグナルプロセッサ４１と表示器４２と
からなり、シグナルプロセッサ４１は受光センサ３１か
らの受光光量の変化より振動（変位）信号を周波数解析
し、共振周波数を算出後、基準周波数（密封容器の圧力
の正常時の共振周波数）と比較し良否を判定し、結果を
出力する０表示器４２は良否の結果を表示する。(Example) Hereinafter, an example of a sealed container inspection device and an inspection method thereof according to the present invention will be described in detail with reference to the drawings. FIG. 1 shows an overall configuration diagram of an embodiment of the present invention, which includes a sound wave oscillation device 10 that applies sound waves to the lid, a laser oscillation device 20 that irradiates the lid with laser light, and a device that receives the reflection of the laser beam on the lid. The sonic wave oscillating device 10, which is composed of a light receiving device 30 and a determining device 40 that makes a determination based on the amount of light received, is composed of a sonic oscillator 11 and a sonic output 512.
Reference numeral 1 is a sound source, which generates sound wave signals of each frequency, amplifies the signals to a predetermined sound pressure level, and outputs the signals to a sound wave output device 12 . The sound wave output device 12 emits sound waves toward the lid of the sealed container based on the input sound wave signal. The laser oscillator 20 consists of a laser power source 21, a laser oscillator 22, and a focusing lens 23. The laser ring fi21 is the power source for the laser oscillator 22, and the laser oscillator 22 oscillates, outputs, and focuses laser light necessary for measurement. The optical lens 23 focuses the laser beam on the surface of the lid. The light receiving device 30 consists of a light receiving sensor 31 and a band pass filter 32. The light receiving sensor 31 receives the amount of laser reflected light reflected by the lid, and the band pass filter 32 removes the disturbance light amount component that affects the total illumination.
The determination device 40 consists of a signal processor 41 and a display 42. The signal processor 41 analyzes the frequency of the vibration (displacement) signal based on changes in the amount of light received from the light receiving sensor 31, calculates the resonance frequency, and then calculates the reference frequency (sealed container). (resonance frequency when the pressure is normal) to determine pass/fail, and the 0 indicator 42 that outputs the result displays the pass/fail result.

次に作動について説明する。Next, the operation will be explained.

蓋をされた密封容Ｈ１の蓋２の上方にスピーカ等の音波
出力器１２を配設し、音波を低周波帯域から高周波帯域
（例えば、１０Ｈｚ〜２０ＫＨｚ）までランダムあるい
は周期的に蓋２に与える、音波の周波数とＭ２の固有振
動数が合致すると１２に共振振動が生じる。このとき、
レーザ発振器２２から蓋２に発振されたレーザ光は蓋２
の表面で反射していた散乱分布が共振振動で変化する。A sound wave output device 12 such as a speaker is disposed above the lid 2 of the sealed container H1, and a sound wave is applied to the lid 2 randomly or periodically from a low frequency band to a high frequency band (for example, 10 Hz to 20 KHz). , when the frequency of the sound wave and the natural frequency of M2 match, resonant vibration occurs at 12. At this time,
The laser beam emitted from the laser oscillator 22 to the lid 2
The scattering distribution reflected on the surface changes due to resonance vibration.

この光量の変化をフォトダイオード等の受光センサ３１
で受光し、バンドパスフィルタ３２で計測精度に影響す
る外乱光量成分を除去し判定装置４０に送る０判定装置
４０ではシグナルプロセッサ４１により受光光量の変化
から振動（変位）信号を周波数解析し、共振周波数を算
出後、基準周波数（密封容器の蓋の固有振動数）と比較
し良否を判定し、結果を出力する。表示！１４２では良
否の結果を表示する。A light receiving sensor 31 such as a photodiode detects changes in the amount of light.
The bandpass filter 32 removes disturbance light amount components that affect measurement accuracy, and the 0 judgment device 40 sends the signal to the judgment device 40. In the 0 judgment device 40, a signal processor 41 analyzes the frequency of vibration (displacement) signals from changes in the received light amount, and generates resonance. After calculating the frequency, it is compared with the reference frequency (the natural frequency of the lid of the sealed container) to determine whether it is good or bad, and the results are output. display! At 142, the pass/fail results are displayed.

上記例では、受光光量の変化を検出したが、蓋が振動し
たときに生ずる反射したレーザ光路の変化を検出し、光
点変化信号としても良い。In the above example, a change in the amount of received light is detected, but a change in the reflected laser beam path that occurs when the lid vibrates may be detected and used as a light point change signal.

また、受光センサもフォトダイオードを用いたが変位が
大きい場合にはラインセンサを用いても良い。Furthermore, although a photodiode is used as the light receiving sensor, a line sensor may be used if the displacement is large.

〔実験例１〕 塑性加工されているアルミ箔の１（蓋の径、６４ｍｍ）
で容器内圧マイナス５０ｃｍＨｇとＯａｍ　Ｈｇの密封
容器を用いて密封容器の周波数と振幅を調べる。[Experiment Example 1] Plastically processed aluminum foil 1 (lid diameter, 64 mm)
Using a sealed container with an internal pressure of minus 50 cmHg and Oam Hg, the frequency and amplitude of the sealed container are investigated.

その結果、第２図、第３図に示すごとく１次共振周波数
の発生する周波数に差があることが判明した。As a result, it was found that there was a difference in the frequency at which the primary resonance frequency was generated, as shown in FIGS. 2 and 3.

〔実験例２〕 アルミ箔のＩ（ＩＩの径、７８ｍｍ）を用いて実験例１
と同様に周波数と振幅を調べる。　その結果、第４図、
ｆｊ４５図に示すごと（実験例１と同様、１次共振周波
数の発生する周波数に差があることが判明した。[Experimental example 2] Experimental example 1 was carried out using aluminum foil I (diameter of II, 78 mm).
Examine the frequency and amplitude as well. As a result, Figure 4,
As shown in Fig. fj45 (similar to Experimental Example 1), it was found that there was a difference in the frequency at which the primary resonance frequency was generated.

実験例１および２によって容器内圧の有無で蓋の共振周
波数が異なることがわかった。Experimental Examples 1 and 2 revealed that the resonant frequency of the lid differed depending on the presence or absence of internal pressure in the container.

〔実験例３〕 そこで、１次共振周波数に着目して、アルミ箔の！（蓋
の径、６４ｍｍと７８ｍｍ）を用いて周波数と真空度の
関係を調べた。その結果、第６図に示すごとく、周波数
と真空度との相関関係はマイナス１０ｃｓＨｇから差が
あり、真空度に比例して蓋の共振周波数が高くなること
が判明した。このことから、蓋の共振周波数から容器内
の真空度が判定可能である。[Experimental Example 3] Therefore, we focused on the primary resonance frequency and investigated the results of aluminum foil! (Lid diameters of 64 mm and 78 mm) were used to investigate the relationship between frequency and degree of vacuum. As a result, as shown in FIG. 6, it was found that the correlation between the frequency and the degree of vacuum varied from -10 csHg, and the resonant frequency of the lid increased in proportion to the degree of vacuum. From this, the degree of vacuum inside the container can be determined from the resonant frequency of the lid.

以上の実験例は真空度の場合を示したが、加圧時にも可
能である。Although the above experimental example shows the case of vacuum, it is also possible to apply pressure.

（発明の効果） 以上説明したように、本発明によれば、蓋に音波を与え
て蓋の表面の振動を光点変位法あるいは光量等の光学的
手段により検出するようにしたので、非接触方式でキャ
ンプの凹み量、騒音、にも関係なく、安価に、設置場所
も小さく、正確に測定できる密封容器の検査装置および
その検査方法が得られる。(Effects of the Invention) As explained above, according to the present invention, sound waves are applied to the lid and vibrations on the surface of the lid are detected by optical means such as the light spot displacement method or the amount of light. To provide a sealed container inspection device and its inspection method that are inexpensive, require a small installation space, and can accurately measure measurements regardless of the amount of dent in the camp or noise.

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本発明の実施例の全体構成図。 第２図、第３図は実験例１の周波数と振幅を示す図。 第４図、第５図は実験例２の周波数と振幅を示す図。 第６図は実験例３の周波数と真空度の関係を示す図。 ｉ　　−−・・・ １０−〜−　・ １１−−・−一 密封容器、ｌ−−一蓋 音波発振装置、 音波発振器 音波出力器、 レーザ発振装置 レーザ電源、 レーザ発振器 集光レンズ、 受光装置 受光センサ、 バンドパスフィルタ 判定装置、 シグナルプロセッサ 表示器、 FIG. 1 is an overall configuration diagram of an embodiment of the present invention. FIG. 2 and FIG. 3 are diagrams showing the frequency and amplitude of Experimental Example 1. FIG. 4 and FIG. 5 are diagrams showing the frequency and amplitude of Experimental Example 2. FIG. 6 is a diagram showing the relationship between frequency and degree of vacuum in Experimental Example 3. i ---... 10-～-・ 11--・-1 Sealed container, 1 lid sonic oscillator, sonic oscillator sonic output device, Laser oscillation device laser power, laser oscillator Condenser lens, Light receiving device light receiving sensor, band pass filter Judgment device, signal processor display,

Claims (4)

【特許請求の範囲】[Claims] （１）容器に蓋をし気密性を保った密封容器の検査にお
いて、蓋に音波を与える音波発振装置と、蓋にレーザ光
を照射するレーザ発振装置と、レーザ光の蓋での反射を
受光する受光装置と、受光した光量より判定する判定装
置と、からなることを特徴とする密封容器の検査装置。(1) In the inspection of a sealed container with a lid on the container to maintain airtightness, a sonic oscillator that applies sound waves to the lid, a laser oscillator that irradiates the lid with laser light, and receives the reflection of the laser beam from the lid. 1. A sealed container inspection device comprising: a light receiving device for detecting light; and a determining device for making a determination based on the amount of received light. （２）容器に蓋をし気密性を保つた密封容器の検査にお
いて、蓋に音波を与えて蓋を振動させるとともに蓋にレ
ーザ光を照射し、蓋の振動により変化する反射光量を測
定することにより密封容器の気密性の良否を判定する密
封容器の検査方法。(2) When inspecting a sealed container with a lid on the container to maintain airtightness, a sound wave is applied to the lid to vibrate it, and a laser beam is irradiated to the lid to measure the amount of reflected light that changes due to the vibration of the lid. A sealed container inspection method for determining whether the airtightness of a sealed container is good or bad. （３）反射光量に散乱分布の光量を用いた請求項（２）
記載の密封容器の検査方法。(3) Claim (2) in which the amount of light of the scattering distribution is used as the amount of reflected light.
Inspection method for sealed containers as described. （４）反射光量に光路の変化を用いた請求項（２）記載
の密封容器の検査方法。(4) The method for inspecting a sealed container according to claim (2), wherein a change in the optical path is used for the amount of reflected light.