JPH0359935A - Motor direct-coupled type rotating couple cathode - Google Patents
Motor direct-coupled type rotating couple cathodeInfo
- Publication number
- JPH0359935A JPH0359935A JP19535689A JP19535689A JPH0359935A JP H0359935 A JPH0359935 A JP H0359935A JP 19535689 A JP19535689 A JP 19535689A JP 19535689 A JP19535689 A JP 19535689A JP H0359935 A JPH0359935 A JP H0359935A
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- rotating
- motor
- rotating shaft
- bearings
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 claims abstract description 11
- 239000000498 cooling water Substances 0.000 claims description 8
- 230000001678 irradiating effect Effects 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 12
- 238000001816 cooling Methods 0.000 abstract description 3
- 230000002093 peripheral effect Effects 0.000 abstract 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は回転対陰極表面に電子線を照射してＸ線を発生
させるモータ直結形回転対陰極に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a motor-directly connected rotating anode that generates X-rays by irradiating the surface of the rotating anode with an electron beam.
従来、銅、クロム、タングステン等から構成した回転対
陰極を高速で回転させ、電子線を照射してＸ線を発生さ
せる装置が医療用や工業用に使用されている。回転対陰
極を高速で回転させているのは電子線照射による局部的
な加熱による温度上昇を防止するためである。BACKGROUND ART Conventionally, devices have been used for medical and industrial purposes that rotate a rotating anticathode made of copper, chromium, tungsten, etc. at high speed and irradiate it with electron beams to generate X-rays. The reason why the rotating anticathode is rotated at high speed is to prevent temperature rise due to local heating caused by electron beam irradiation.
医療用としては、容器内にＸ線管を収納し、外部からコ
イルで磁性体を回転させるか、モータ直結により回転対
陰極を回転させ、電子線を照射してパルス的にＸ線を発
生させるようにした非水冷形の回転対陰極Ｘ線管が提案
されている。For medical use, an X-ray tube is housed in a container, and a magnetic material is rotated by a coil from the outside, or a rotating anticathode is rotated by direct connection to a motor, and an electron beam is irradiated to generate pulsed X-rays. A non-water-cooled rotating anode cathode X-ray tube has been proposed.
また、工業用としては、ベルト駆動で高速回転する回転
対陰極の内面を水冷し、これに電子線を照射してＸ線を
発生するようにした水冷形の回転対陰極Ｘ線管が提案さ
れている。In addition, for industrial use, a water-cooled rotating anode cathode X-ray tube has been proposed, in which the inner surface of a rotating anode that rotates at high speed by a belt is water-cooled, and the tube is irradiated with electron beams to generate X-rays. ing.
しかしながら、医療用の回転対陰極Ｘ線管は、非水冷形
であるためにＸ線出力が弱く、出力もパルス的にしか取
り出せないという問題があった。However, since medical rotating anode cathode X-ray tubes are non-water cooled, they have a problem in that their X-ray output is weak and the output can only be taken out in pulses.
また、従来の工業用の回転対陰極Ｘ線管は、ベルト駆動
であるために、偏荷重による回転軸の振動やプーリの僅
かな軸ずれによるベルトの振動が発生し、組み合わされ
た測定光学系の軸ずれの原因となるという問題があり、
さらにベルトの張力により回転対陰極Ｘ線管の回転軸が
直角方向に力を受け、そのため玉軸受がラジアル荷重を
受けて軸受の寿命を短くするとともに、水シールや真空
シールの寿命にも影響を与えるという問題があった。Furthermore, because conventional industrial rotary anode cathode X-ray tubes are driven by a belt, vibrations of the rotating shaft due to unbalanced loads and vibrations of the belt due to slight axis misalignment of the pulley occur, and the combined measurement optical system There is a problem that it causes axis misalignment.
Furthermore, the tension of the belt applies force to the rotating shaft of the rotating anode X-ray tube in the right angle direction, which causes the ball bearing to receive radial load, shortening the life of the bearing and also affecting the life of the water seal and vacuum seal. There was a problem of giving.
本発明は上記課題を解決するためのもので、回転対陰極
の回転軸の振動がなく、軸受の寿命を延長し、水漏れの
可能性を大幅に少なくすることができるモータ直結形回
転対陰極を提供することを目的とする。The present invention is intended to solve the above problems, and is a motor-directly connected rotating anode that does not cause vibration of the rotating shaft of the rotating anode, extends the life of the bearing, and greatly reduces the possibility of water leakage. The purpose is to provide
本発明は、真空室内に配置され、内面を冷却水により冷
却された回転対陰極に対して電子線を照射し、Ｘ線を発
生させるようにした回転対陰極Ｘ線発生装置において、
回転対陰極回転軸と同軸上にモータを装着し、回転対陰
極を直接モータ駆動するようにしたことを特徴とする。The present invention relates to a rotating anode cathode X-ray generator that is arranged in a vacuum chamber and generates X-rays by irradiating an electron beam onto a rotating anode cathode whose inner surface is cooled by cooling water.
The present invention is characterized in that a motor is mounted coaxially with the rotating anode cathode rotation shaft, and the rotating anode cathode is directly driven by the motor.
本発明は、ベルトを介することなく回転対陰極の回転軸
を直接モータ駆動することにより、振動を少なくし、か
つ回転軸に直角な力が作用するのを防止し、その結果軸
受にラジアル荷重がかかるのを防止することができるの
で、軸受の寿命を延長し、さらに真空シール、水シール
の寿命を延ばすことができる。The present invention reduces vibration and prevents a force perpendicular to the rotating shaft from acting on the rotating shaft by directly driving the rotating shaft of the rotating anode cathode with a motor without using a belt, thereby reducing radial load on the bearing. Since this can be prevented, the life of the bearing can be extended, and the life of the vacuum seal and water seal can also be extended.
以下、実施例を説明する。 Examples will be described below.
第１図は本発明のモータ直結形回転対陰極の実施例を示
す図である。図中、１は回転対陰極、２は磁気シール、
３．４は軸受、５はモータ、６は水シール、７は真空チ
ャンバ、８は回転センサ、９はケーブル、１０は回転軸
、１１は冷却水導管、１２は流入口、１３は排水口、■
４は陰極、１５は窓、１６は電子線、１７はＸ線である
。FIG. 1 is a diagram showing an embodiment of a motor-directly coupled rotating anode of the present invention. In the figure, 1 is a rotating anticathode, 2 is a magnetic seal,
3.4 is a bearing, 5 is a motor, 6 is a water seal, 7 is a vacuum chamber, 8 is a rotation sensor, 9 is a cable, 10 is a rotating shaft, 11 is a cooling water conduit, 12 is an inlet, 13 is a drain port, ■
4 is a cathode, 15 is a window, 16 is an electron beam, and 17 is an X-ray.
図において、真空チャンバ７内は図示しない真空排気装
置で常時排気され、チャンバ内に銅、クロム、タングス
テン等からなる回転対陰極ｌが設けられており、回転対
陰極周側面に対向して陰極１４が配置されている。また
、真空チャンバ７にはＸ線取り出し用のベリリウム等か
らなる窓１５が設けられている。回転対陰極１に接続さ
れた回転軸１０にはモータ５として、例えば誘導電動機
が軸受３．４の間に装着され、モータの回転子が回転対
陰極の回転軸に直結されている。この場合、回転対陰極
の回転軸そのものをモータの回転子とすることも可能で
ある。そしてケーブル９を通して通電し、モータ５を駆
動することにより回転子と直結した回転軸１０が直接駆
動される。対陰極の回転が低速となると対陰極表面が溶
解してしまうので、これを防止するために回転センサ８
で回転速度を検出し、所定速度より低下した場合には装
置を停止するようになっている。軸受３．４の部分は大
気圧であり、真空チャンバ内との間は磁気シール２によ
り真空針じされ、チャンバ内は常に高真空に維持されて
いる。冷却系は、図の矢印Ａから冷却水が導入され、回
転軸１０と冷却水導管１１との間を通して回転対陰極１
の内側の面を冷却し、冷却水導管１１を通って矢印Ｂで
示すように排出される。なお、モータと矢印Ａで示され
ろ水道人口との間は水シール６によりシールされている
。また、流入口１２から冷却水を導き、磁気シール２、
モータ５を冷却して排水口１３から排出して冷却するこ
とも可能になっている。In the figure, the inside of a vacuum chamber 7 is constantly evacuated by an evacuation device (not shown), and a rotating anode cathode l made of copper, chromium, tungsten, etc. is provided in the chamber, and a cathode 14 is placed opposite the circumferential side of the rotating anode cathode. is located. Further, the vacuum chamber 7 is provided with a window 15 made of beryllium or the like for extracting X-rays. A motor 5, for example, an induction motor, is mounted on a rotating shaft 10 connected to the rotating anode cathode 1 between bearings 3.4, and the rotor of the motor is directly connected to the rotating shaft of the rotating anode cathode. In this case, it is also possible to use the rotating shaft of the rotating anode cathode itself as the rotor of the motor. Then, by applying electricity through the cable 9 and driving the motor 5, the rotating shaft 10 directly connected to the rotor is directly driven. If the rotation speed of the anticathode becomes low, the surface of the anticathode will melt, so in order to prevent this, the rotation sensor 8
The rotation speed is detected, and if the rotation speed falls below a predetermined speed, the device is stopped. The bearing 3.4 is at atmospheric pressure, and is connected to the inside of the vacuum chamber by a magnetic seal 2, so that the inside of the chamber is always maintained at a high vacuum. In the cooling system, cooling water is introduced from arrow A in the figure, and is passed between the rotating shaft 10 and the cooling water conduit 11 to the rotating anticathode 1.
cooling water is discharged through the cooling water conduit 11 as shown by arrow B. Note that a water seal 6 seals between the motor and the water supply indicated by arrow A. In addition, the cooling water is guided from the inlet 12, and the magnetic seal 2,
It is also possible to cool the motor 5 and discharge it from the drain port 13 for cooling.
このような構成において、冷却系により回転対陰極１、
磁気シール２、モータ５を冷却し、陰極１４に負の高電
圧を印加して回転対陰極■の周側面に電子線を照射する
と、回転対陰極周側面からはＸ線が発生してその一部は
窓１５より外部へ取り出すことができる。このとき、回
転軸１０は軸受３と４間に設けられたモータ５により直
接駆動されているのでベルト駆動の場合のように偏荷重
がかかることがなく、回転軸の振動の発生を防止するこ
とができる。また、回転軸に直角に荷重がかかることが
ないので軸受３．４に対してラジアル荷重がかからず、
軸受の寿命を大幅に延長するとともに、磁気シール、水
シールの寿命を延ばすことができる。In such a configuration, the rotating anticathode 1,
When the magnetic seal 2 and the motor 5 are cooled, a negative high voltage is applied to the cathode 14, and an electron beam is irradiated onto the circumferential side of the rotating anode cathode (■), X-rays are generated from the circumferential side of the rotating anode cathode. can be taken out from the window 15. At this time, since the rotating shaft 10 is directly driven by the motor 5 provided between the bearings 3 and 4, an uneven load is not applied as in the case of belt drive, and vibrations of the rotating shaft are prevented. I can do it. In addition, since no load is applied perpendicularly to the rotating shaft, no radial load is applied to the bearing 3.4.
It can significantly extend the life of bearings, as well as the life of magnetic seals and water seals.
以上のように本発明によれば、水冷形の回転対陰極にお
いてモータにより回転対陰極の回転軸を直接駆動するの
で、ベルトが無くなるため当然ベルトのバタつきによる
振動がなくなって振動が減少し、また回転軸の偏荷重が
なくなって回転軸自体の振動を小さくでき、さらに、回
転軸に対してラジアル荷重がかかることがないので、軸
受の寿命や真空シール、水シールの寿命を大幅に延ばす
ことができる。また、ベルトを使用しないために外部モ
ータが不要となり、装置周辺のスペースが有効利用でき
るとともにベルトの危険防止対策が不要となり、回転対
陰極と陰極を装着された真空チャンバの設置状態が容易
に変えられ、Ｘ線を任意の方向に取り出すことが可能と
なる。As described above, according to the present invention, in the water-cooled rotating anode, the motor directly drives the rotating shaft of the rotating anode, so there is no belt, so vibrations due to belt flapping are naturally eliminated, and vibrations are reduced. In addition, the unbalanced load on the rotating shaft is eliminated, reducing the vibration of the rotating shaft itself.Furthermore, since no radial load is applied to the rotating shaft, the life of bearings, vacuum seals, and water seals can be significantly extended. I can do it. In addition, since no belt is used, an external motor is not required, making effective use of the space around the device, eliminating the need for safety measures for the belt, and making it easy to change the installation status of the vacuum chamber equipped with the rotating anode and cathode. This makes it possible to extract X-rays in any direction.
第１図は本発明のモータ直結形回転対陰極の一実施例を
示す図である。
１・・・回転対陰極、２・・・磁気シール、３．４・・
・軸受、５・・・モータ、６・・・水シール、７は真空
チャンバ、１４・・・陰極、１５・・・窓、１６・・・
電子線、１７・・・Ｘ線。FIG. 1 is a diagram showing an embodiment of a motor-directly connected rotating anode of the present invention. 1... Rotating anticathode, 2... Magnetic seal, 3.4...
・Bearing, 5...Motor, 6...Water seal, 7 is vacuum chamber, 14...Cathode, 15...Window, 16...
Electron beam, 17...X-ray.
Claims (1)
れた回転対陰極に対して電子線を照射し、Ｘ線を発生さ
せるようにした回転対陰極Ｘ線発生装置において、回転
対陰極回転軸と同軸上にモータを装着し、回転対陰極を
直接モータ駆動するようにしたことを特徴とするモータ
直結形回転対陰極。(1) In a rotating anode cathode X-ray generator that generates X-rays by irradiating an electron beam onto a rotating anode placed in a vacuum chamber and whose inner surface is cooled by cooling water, a rotating anode cathode is rotated. A motor-directly connected rotating anode, characterized in that a motor is mounted coaxially with the shaft, and the rotating anode is directly driven by the motor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19535689A JPH0359935A (en) | 1989-07-27 | 1989-07-27 | Motor direct-coupled type rotating couple cathode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19535689A JPH0359935A (en) | 1989-07-27 | 1989-07-27 | Motor direct-coupled type rotating couple cathode |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0359935A true JPH0359935A (en) | 1991-03-14 |
Family
ID=16339811
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19535689A Pending JPH0359935A (en) | 1989-07-27 | 1989-07-27 | Motor direct-coupled type rotating couple cathode |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0359935A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004104647A1 (en) * | 2003-05-22 | 2004-12-02 | Carl Zeiss Jena Gmbh | Adjustable pinhole |
| JP2007217153A (en) * | 2006-02-17 | 2007-08-30 | Fuji Xerox Co Ltd | Image forming device |
| JP2008156024A (en) * | 2006-12-21 | 2008-07-10 | Nisca Corp | Paper feeder |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61151956A (en) * | 1984-12-25 | 1986-07-10 | Toshiba Corp | Rotary anode type x-ray tube |
-
1989
- 1989-07-27 JP JP19535689A patent/JPH0359935A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61151956A (en) * | 1984-12-25 | 1986-07-10 | Toshiba Corp | Rotary anode type x-ray tube |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004104647A1 (en) * | 2003-05-22 | 2004-12-02 | Carl Zeiss Jena Gmbh | Adjustable pinhole |
| JP2007217153A (en) * | 2006-02-17 | 2007-08-30 | Fuji Xerox Co Ltd | Image forming device |
| JP2008156024A (en) * | 2006-12-21 | 2008-07-10 | Nisca Corp | Paper feeder |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US3836805A (en) | Rotating anode x-ray tube | |
| US6181765B1 (en) | X-ray tube assembly | |
| US4993055A (en) | Rotating X-ray tube with external bearings | |
| JPS6086741A (en) | High vacuum rotary anode x-ray tube | |
| US7515687B2 (en) | Compact source with very bright X-ray beam | |
| US4130773A (en) | X-ray tube with liquid-cooled rotary anode | |
| JPH0359935A (en) | Motor direct-coupled type rotating couple cathode | |
| US4734927A (en) | Equipped force-convection housing unit for a rotating-anode X-ray tube | |
| JP2010080406A (en) | X ray generating method and x ray generating device | |
| JPS6169365A (en) | Magnetic coupling joint | |
| US4414681A (en) | Rotary anode x-ray tube | |
| JP2008027852A (en) | Envelope rotating x-ray tube device | |
| JP2001077446A (en) | Excimer laser | |
| US3870915A (en) | X-ray tube | |
| JP2902454B2 (en) | Driving method of rotating body provided with shaft sealing device | |
| JPS63193443A (en) | Rotary anode x-ray generating device | |
| CN111243924B (en) | Rotating target mechanism for ray source | |
| JPS55126948A (en) | X-ray generator | |
| JP2806556B2 (en) | Ion implanter | |
| JPH0461736A (en) | X-ray generating device | |
| JPS55154049A (en) | Sealing type rotary anticathode x-ray tube | |
| JPS601740A (en) | Rotary anode x-ray tube | |
| JP2758934B2 (en) | Rotating anti-cathode X-ray generator | |
| US20070053496A1 (en) | X-ray generating method and X-ray generating apparatus | |
| JPS6266545A (en) | Rotary anode x-ray generator |