JPH0346533A - Pressure detector - Google Patents
Pressure detectorInfo
- Publication number
- JPH0346533A JPH0346533A JP18337889A JP18337889A JPH0346533A JP H0346533 A JPH0346533 A JP H0346533A JP 18337889 A JP18337889 A JP 18337889A JP 18337889 A JP18337889 A JP 18337889A JP H0346533 A JPH0346533 A JP H0346533A
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- bellows
- sensitivity
- piezoelectric vibrator
- base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims abstract description 26
- 238000007789 sealing Methods 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 abstract description 21
- 230000008602 contraction Effects 0.000 abstract description 4
- 239000013078 crystal Substances 0.000 description 13
- 238000001514 detection method Methods 0.000 description 13
- 238000009530 blood pressure measurement Methods 0.000 description 9
- 239000007789 gas Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 3
- 229910018503 SF6 Inorganic materials 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000003566 sealing material Substances 0.000 description 2
- 229920002545 silicone oil Polymers 0.000 description 2
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 101150097169 RBBP8 gene Proteins 0.000 description 1
- UUAGAQFQZIEFAH-UHFFFAOYSA-N chlorotrifluoroethylene Chemical group FC(F)=C(F)Cl UUAGAQFQZIEFAH-UHFFFAOYSA-N 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 229940079593 drug Drugs 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229920013639 polyalphaolefin Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 239000013535 sea water Substances 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 229960000909 sulfur hexafluoride Drugs 0.000 description 1
- 210000005239 tubule Anatomy 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は圧電振動子を圧力検出素子として用いる圧力検
出器に関するものであり、ざらに詳しくはこの圧電振動
子がこの圧電振動子を収納する圧力応動型容器に機械的
に非接触の状態で気密封止され、外部圧力の変動により
この圧力応動型容器の容積が変動し、この容積変動に伴
う内部気圧変動を圧電振動子の共振周波数等の電気的特
性の変化により外部圧力を検出する方式の圧力検出器に
関するものである。[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a pressure detector that uses a piezoelectric vibrator as a pressure detection element, and more specifically, the present invention relates to a pressure detector that uses a piezoelectric vibrator as a pressure detection element. It is hermetically sealed in a pressure-responsive container without mechanical contact, and the volume of this pressure-responsive container fluctuates due to fluctuations in external pressure.The internal pressure fluctuations associated with this volume fluctuation are reflected by the resonant frequency of the piezoelectric vibrator, etc. The present invention relates to a pressure sensor that detects external pressure based on changes in the electrical characteristics of the pressure sensor.
周囲雰囲気の圧力の変化を検出する代表的な圧電振動子
として、屈曲振動モード、輪郭振動モードで振動する水
晶振動子があげられる。これら水晶振動子の電気的特性
（例えば共振周波数、あるいはクリスタルインピーダン
ス）は周囲雰囲気の圧力変化により略直線的乙こ変化す
る特性を有しており、この特性を利用して圧力の測定を
行う。−船釣には水晶振動子表面の電極膜の保護等のｋ
め、この圧力検出素子として機能する水晶振動子を直接
被測定気圧下に置かず、ベローズ等の圧力応動型容器内
に設置し、この容器内の内部気圧変動を検出する。この
為、圧力応動型容器外の圧力を如何に効率よく容器内に
伝えるかが−っの解決課題であり、また圧力検出器とし
ての特性向上の着目点でもあった。A typical piezoelectric vibrator for detecting changes in pressure in the surrounding atmosphere is a crystal vibrator that vibrates in a bending vibration mode or a contour vibration mode. The electrical characteristics (for example, resonant frequency or crystal impedance) of these crystal oscillators have a characteristic that changes approximately linearly due to changes in the pressure of the surrounding atmosphere, and this characteristic is used to measure pressure. - For boat fishing, protection of the electrode film on the surface of the crystal oscillator, etc.
Therefore, the crystal oscillator functioning as this pressure detection element is not placed directly under the atmospheric pressure to be measured, but is placed inside a pressure-responsive container such as a bellows, and internal pressure fluctuations within this container are detected. For this reason, how to efficiently transmit the pressure outside the pressure-responsive container to the inside of the container has been a problem to be solved, and has also been a point of focus for improving the characteristics of a pressure detector.
尚、本発明でいう「応動」という詔は、外からの働きか
けに則して作動することを意味し、また「感度」という
詔は外部圧力の変化量に対する圧力検出素子として機能
する圧電振動子の共振周波数の変化量あるいはクリスタ
ルインピーダンスの変化量のことを言う。尚、従来例、
実施例においては外部圧力の変化量に対する共振周波数
変化量を意味している。In addition, the edict "response" in the present invention means to operate in accordance with an external influence, and the edict "sensitivity" refers to a piezoelectric vibrator that functions as a pressure detection element for the amount of change in external pressure. The amount of change in the resonant frequency or the amount of change in crystal impedance. In addition, the conventional example,
In the embodiment, it means the amount of change in resonance frequency with respect to the amount of change in external pressure.
（従来技術） 一般的な圧力検出器の構造を第１図とともに説明する。(Conventional technology) The structure of a general pressure detector will be explained with reference to FIG.
第１図は圧力検出器１の内部断面の模式図である。圧力
検出器１は全体として円柱形状であり、圧力応動部を有
する容器であるベローズ２と、基台３と、圧電振動子４
とからなる。外部圧力変化により伸縮応動するベローズ
２は、その内部に圧電振動子の１種で圧力検出素子とし
て機能する音叉型水晶振動子４を有しており、大気圧で
３−
３Ｆａの不活性ガスが充填された状態で基台３と気密刺
止されている。尚、基台３と音叉型水晶振動子４とはシ
ール材５で接続されている。第５図に小すように圧力検
出器１に外部圧力Ｐが加わるとベローズ２が圧縮され、
ベローズ２の内部気圧が上昇する。この気圧の上昇に応
じて音叉型水晶振動子４の共振周波数が略直線的に低下
し、よってこの変化量を検出して外部圧力を測定する。FIG. 1 is a schematic diagram of an internal cross section of the pressure detector 1. As shown in FIG. The pressure detector 1 has a cylindrical shape as a whole, and includes a bellows 2 which is a container having a pressure responsive part, a base 3, and a piezoelectric vibrator 4.
It consists of The bellows 2, which expands and contracts in response to changes in external pressure, has inside it a tuning fork-type crystal oscillator 4, which is a type of piezoelectric oscillator and functions as a pressure detection element. In the filled state, it is hermetically sealed to the base 3. Incidentally, the base 3 and the tuning fork type crystal resonator 4 are connected with a sealing material 5. As shown in FIG. 5, when external pressure P is applied to the pressure detector 1, the bellows 2 is compressed.
The internal pressure of bellows 2 increases. In response to this rise in atmospheric pressure, the resonance frequency of the tuning fork crystal resonator 4 decreases substantially linearly, and the amount of change is detected to measure the external pressure.
（発明が解決しようとする課題）
上記ＳＦｓガスを各々封入して、圧力検出器にかける外
部圧力を漸次変化させた場合の共振周波数の変化の様子
を第４図のＢで示す。尚、詳細な実験条件については後
述する。このグラフから明らかなようにＳＦｓガスのみ
を用いた場合、外部圧力の変化に伴う共振周波数の変化
量は比較的少ない（すなわち感度が低い）ことが分かる
。ただし使途によっては、例えは海水の深度を測定する
ような場合は充分実用に耐え得る感度ではある。(Problems to be Solved by the Invention) B in FIG. 4 shows how the resonance frequency changes when the above SFs gases are each sealed and the external pressure applied to the pressure detector is gradually changed. Note that detailed experimental conditions will be described later. As is clear from this graph, when only SFs gas is used, the amount of change in the resonance frequency due to changes in external pressure is relatively small (that is, the sensitivity is low). However, depending on the purpose of use, for example when measuring the depth of seawater, the sensitivity may be sufficient for practical use.
しかし、例えば浴槽の水量をその水圧で検出しようとす
るように、極めて微圧かっ微変動の圧力を検出しようと
する場合、このような従来の圧力検出器の構成では総体
的に感度が低く、よって圧力検出の分解能が低いので微
小な外部圧力変動を検出しないことがあり、高精度の圧
力検出を行うのに適していなかった。However, when trying to detect very small pressures or slight fluctuations in pressure, such as trying to detect the amount of water in a bathtub by its water pressure, such conventional pressure detector configurations have overall low sensitivity. Therefore, since the resolution of pressure detection is low, minute external pressure fluctuations may not be detected, and it is not suitable for highly accurate pressure detection.
また一方、圧力検出器としての感度を決定する要因とし
てベローズのバネ定数がある。この定数が小さいと感度
は増すが圧力測定範囲は狭くなる。On the other hand, the spring constant of the bellows is a factor that determines the sensitivity as a pressure detector. If this constant is small, the sensitivity increases, but the pressure measurement range becomes narrow.
逆にこの定数を大きくすると感度は減少するが圧力測定
範囲は広くなる。後者の場合、外部圧力変化に対するベ
ローズの圧縮量が小さくなりすぎ、よって内部気圧変化
量も小さくなる。そうすると圧電振動子が検出する感度
は微少なものとなり、結果として微少な外部圧力変化を
検出しなかったり、検出の分解能が極端に悪化すること
があった。Conversely, if this constant is increased, the sensitivity will decrease, but the pressure measurement range will become wider. In the latter case, the amount of compression of the bellows in response to a change in external pressure becomes too small, and therefore the amount of change in internal pressure also becomes small. In this case, the detection sensitivity of the piezoelectric vibrator becomes minute, and as a result, minute external pressure changes may not be detected or the detection resolution may be extremely deteriorated.
このため感度の向上と圧力測定範囲の拡大の両者を同時
に満足させるためには、圧力応動型容器としてベローズ
を用いた場合、圧力応動型容器のバネ定数を小さくする
とともに高さあるいは径を大きくする等、圧力応動型容
器の大型化が必要となり、このため圧力検出器の小型化
の防げとなっていた。Therefore, in order to simultaneously improve sensitivity and expand the pressure measurement range, when using a bellows as a pressure-responsive container, it is necessary to reduce the spring constant of the pressure-responsive container and increase its height or diameter. etc., it is necessary to increase the size of the pressure-responsive container, which prevents downsizing of the pressure detector.
本発明は上記問題点を解決するためになされたもので、
以下の事項を実現する圧力検出器を提供することを目的
とするものである。The present invention has been made to solve the above problems,
The object of the present invention is to provide a pressure detector that achieves the following.
■、圧力検出器の感度を向上させることにより、圧力測
定の分解能を向上させ、高精度の圧力検出を実現する。■By improving the sensitivity of the pressure detector, the resolution of pressure measurement is improved and high-precision pressure detection is achieved.
■、小型化しても圧力測定範囲を狭めないで圧力検出器
の感度を向上させる。■Improve the sensitivity of the pressure detector without narrowing the pressure measurement range even if it is miniaturized.
■、同じく小型化しても感度を低下させないで圧力検出
器の圧力測定範囲を広げる。■ Similarly, even if the pressure sensor is miniaturized, the pressure measurement range of the pressure sensor can be expanded without reducing the sensitivity.
（課題を解決するための手段）
上記目的を達成するために、圧力検出器を圧力検出素子
である圧電振動子と、この圧電振動子の収納部を有する
基台と、この基台の上部を被覆し気密刺止する圧力応動
部を有する容器とからなり、前記圧電振動子の収納部以
外の所定の空間に体積変化の少ない不活性液体を充填し
た構成にした。(Means for Solving the Problems) In order to achieve the above object, a pressure sensor is equipped with a piezoelectric vibrator as a pressure detection element, a base having a housing for the piezoelectric vibrator, and an upper part of the base. The container has a pressure-responsive part that is covered and hermetically sealed, and a predetermined space other than the housing part of the piezoelectric vibrator is filled with an inert liquid whose volume changes little.
またこの上記圧力検出器において、前記不活性液体が充
崩された圧力応動部内部と前記収納部とを細管にて空間
的につないでいる構成にすることにより、あるいは、前
記不活性液体に粘性の高い、または表面張力の大きい液
体を採用することにより、この不活性液体が前記収納部
に侵入することがなくなり、信頼性が向上する。In addition, in this pressure sensor, the inside of the pressure-responsive part filled with the inert liquid and the storage part are spatially connected by a thin tube, or the inert liquid has a viscous By employing a liquid with a high surface tension or a high surface tension, this inert liquid will not enter the storage portion, and reliability will be improved.
（作用）
ベローズ等の圧力応動部を有する容器はバネ定数を持っ
ており、これが外部圧力をベローズ内部に伝達する際の
機械的抵抗となる。外部圧力はこの抵抗相当分が減殺さ
れてベローズ内部に伝達され、圧力検出器としての感度
が低下する。(Function) A container having a pressure-responsive part such as a bellows has a spring constant, which acts as a mechanical resistance when transmitting external pressure to the inside of the bellows. The external pressure is transmitted to the interior of the bellows after being reduced by an amount equivalent to this resistance, reducing the sensitivity as a pressure detector.
すなわち、第５図に示すベローズ動作モデルを参煕して
考えると、密到されたベローズに所定の外部圧力が加え
られたときの力学的均衡は以下の式で表わせる。That is, considering the bellows operation model shown in FIG. 5, the mechanical balance when a predetermined external pressure is applied to the tightly packed bellows can be expressed by the following equation.
Ｐ−３＝ ｋｘ＋ （ＰＯ“−ＰＯ）Ｓ ・・・■こ
こで、Ｐは外部圧力、Ｓはへローズの受圧部の面積、ｋ
はへローズのバネ定数、Ｘは収縮した寸法、ＰＯは非加
圧時のベローズの内圧、ＰＯ”は加圧時のベローズの内
圧である。P-3= kx+ (PO"-PO)S...■Here, P is the external pressure, S is the area of the pressure receiving part of the hero, and k
is the spring constant of the bellows, X is the contracted dimension, PO is the internal pressure of the bellows when no pressure is applied, and PO'' is the internal pressure of the bellows when pressurized.
■式からＸの寸法（収縮量）が大きくなるほど機械的抵
抗は大きくなることが分かる。(2) It can be seen from the formula that the larger the dimension of X (the amount of contraction), the larger the mechanical resistance.
本発明によれ乙よ、ベローズの大部分を不活性液体で充
填することにより、気体部分が極めて小さくなり、この
ため気体部分の圧力変化は従来と同じでもベローズの収
縮が小さくて済み、ベローズの機械的抵抗の影響を極小
に抑えることができる。According to the present invention, by filling most of the bellows with an inert liquid, the gas part becomes extremely small.Therefore, even though the pressure change in the gas part is the same as before, the contraction of the bellows is small. The influence of mechanical resistance can be minimized.
（実施例） 本発明による実施例を説明する。(Example) Examples according to the present invention will be described.
圧力検出器の構成については第１図とともに従来技術の
項で説明した構成と略同じである。すなわち圧力検出器
１は全体として円柱形状であり、圧力応動を備えた容器
である一端が開口した金属製のベローズ２と、このベロ
ーズ２の開口部と接続される金属製の基台３と、この基
台３に設置される圧電振動子４とからなる。基台３内に
は圧電振動子収納部３２とこの収納部とベローズ２内部
を空間で接続する細管３３が設けられている。圧力検出
素子として機能する圧電振動子４は、この７−
実施例では屈曲振動を行なわしめるよう電極配置された
（図面では電極配置は省略している）音叉型水晶振動子
であり、シール材５にて基台３に固着される。そして大
気圧のＳＦ６ （６フツ化イオウ）を圧電振動子の収
納部に充填し、前記ベローズ内部には不活性液体６とし
てシリコンオイルを充崩し、ベローズ２の開口部２１と
基台のフランジ部３１を、抵抗溶接、半田イ」け等の手
段を用いて気密側止する。なお、７はサーミスタ等の温
度補償素子を収納する部分である。The configuration of the pressure detector is substantially the same as that described in the prior art section with reference to FIG. That is, the pressure detector 1 has a cylindrical shape as a whole, and includes a metal bellows 2 that is a pressure-responsive container with an open end, and a metal base 3 that is connected to the opening of the bellows 2. It consists of a piezoelectric vibrator 4 installed on this base 3. Inside the base 3, a piezoelectric vibrator storage section 32 and a thin tube 33 that connects this storage section and the inside of the bellows 2 via space are provided. The piezoelectric vibrator 4 that functions as a pressure detection element is a tuning fork-type crystal vibrator in which electrodes are arranged to perform bending vibration (the electrode arrangement is omitted in the drawing) in this 7-embodiment, and the sealing material 5 It is fixed to the base 3 at. Then, SF6 (sulfur hexafluoride) at atmospheric pressure is filled into the housing part of the piezoelectric vibrator, and the inside of the bellows is filled with silicone oil as an inert liquid 6, and the opening 21 of the bellows 2 and the flange of the base are filled. 31 is hermetically sealed on the side using resistance welding, soldering, or other means. Note that 7 is a part that houses a temperature compensating element such as a thermistor.
このベローズ内部に不活性液体を、圧電振動子の収納部
にＳＦｓを各々充填する方法としては、例えはへローズ
の開口部を上向きに設置し、不活性液体を所定量注入し
た後、ＳＦｓ雰囲気中で基台を緩やかに上向いた開口部
に挿入して刺止する方法、あるいはベローズの上面（受
圧面）に***を設け、このベローズをＳＦａ雰囲気中で
基台に接合したのち、不活性液体をこの***から注入し
、その後この***を刺止する方法等があげられる。いず
れの場合も、この充填時には細管の存在により、不活υ
−
性液体は圧電振動子収納部に流人することはない。To fill the inside of the bellows with an inert liquid and the piezoelectric vibrator housing with SFs, for example, the opening of the bellows is installed facing upward, a predetermined amount of inert liquid is injected, and then an SFs atmosphere is filled. Insert the base into the gently upward opening in the interior and fix it, or make a small hole on the top surface (pressure receiving surface) of the bellows and bond the bellows to the base in an SFa atmosphere, and then insert an inert liquid An example of this method is to inject the drug through this small hole and then puncture the small hole. In either case, during this filling, the presence of tubules causes inert υ
- Sexual liquids cannot flow into the piezoelectric vibrator housing.
第４図に従来のＳＦｓガスを封入した場合（従来例日）
と、不活性液体を充填した場合（本発明Ａ）との圧力−
感度特性の比較を示す。尚、実験条件は表１のとおりで
ある。Figure 4 shows the case when conventional SFs gas is filled (conventional example)
and the pressure when filled with inert liquid (invention A) -
A comparison of sensitivity characteristics is shown. Note that the experimental conditions are as shown in Table 1.
衷１
※大気圧下での共振周波数
このグラフから本発明を示すＡは従来例を示すＢに較べ
、感度が飛躍的に向上していることが分かる。Note 1 *Resonance frequency under atmospheric pressure From this graph, it can be seen that A showing the present invention has a dramatically improved sensitivity compared to B showing the conventional example.
尚、本発明Ａにおいて０．５ｋｇ／ｃＴＩＰの外部圧力
を加えた場合の音叉型水晶振動子の共振抵抗埴は約４０
０にΩであり、実用上例等差し支えない。In addition, in the present invention A, when an external pressure of 0.5 kg/cTIP is applied, the resonance resistance of the tuning fork type crystal resonator is approximately 40
0 and Ω, and there is no problem in practical use.
その他の実施例
その他の実施例を図面とともに説明する。尚、各構成部
分の番号は最初の実施例に使用した番号を援用する。Other embodiments Other embodiments will be described with reference to the drawings. Note that the numbers used in the first embodiment are used for the numbers of each component.
本発明は上記実施例に限定されるものではなく、例えは
第２図に示すように細管３４を基台中にて屈曲させ、ベ
ローズ２内と収納部３２内との距離を長くとる構成とし
てもよい。The present invention is not limited to the above embodiment, and for example, as shown in FIG. 2, the thin tube 34 may be bent in the base to increase the distance between the inside of the bellows 2 and the inside of the storage section 32. good.
また、第３図に示すようにループ状の細管３５を基台の
開口部３６に接合してもよい。Further, as shown in FIG. 3, a loop-shaped thin tube 35 may be joined to the opening 36 of the base.
これら２実施例はベローズ２内と収納部３２との距離を
長くでき、たとえ過大な外部圧力がベローズに加わった
場合でも、シリコンオイル等の不活性液体が収納部に流
入することはなく、実用上の信頼性を向上させることが
できる。These two embodiments can increase the distance between the inside of the bellows 2 and the housing part 32, and even if excessive external pressure is applied to the bellows, inert liquid such as silicone oil will not flow into the housing part, making it practical. reliability can be improved.
さらに、不活性液体に粘性の高いもの、あるいは表面張
力の大きいものを選べは、この不活性液体の収納部への
流人事故がなくなり、信頼性が向上する。Furthermore, if an inert liquid with high viscosity or high surface tension is selected, there will be no accident of the inert liquid flowing into the storage section, and reliability will be improved.
本発明は上記実施例に限定されるものではなく、圧力検
出器の所望の外形寸法、圧力測定範囲、感１
度に応じて、上記表に示した条件を有機的に取り込み、
設計条件を決定すればよいことは言うまでもない。The present invention is not limited to the above embodiments, but organically incorporates the conditions shown in the above table according to the desired external dimensions, pressure measurement range, and sensitivity of the pressure detector.
Needless to say, all that is required is to determine the design conditions.
尚、実施例に圧力検出素子として機能する圧電振動子と
して音叉型水晶振動子を取り上げたが、これに限られる
ものではなく、他の振動モードの振動子であってもよく
、また圧力検出手段としてクリスタルインピーダンスの
変化量を用いてもよい。さらに圧力応動型容器としてベ
ローズを取り上げたが、例えばダイヤフラムなどを用い
てもよい。Although a tuning fork type crystal resonator is used as a piezoelectric resonator functioning as a pressure detection element in the embodiment, it is not limited to this, and a resonator with other vibration modes may be used. The amount of change in crystal impedance may be used as the value. Further, although a bellows is used as a pressure-responsive container, for example, a diaphragm or the like may also be used.
また、不活性液体のみならず、例えはポリα−オレフィ
ン、あるいはクロロトリフルオロエチレンの低重合物等
であってもよい。In addition to the inert liquid, it may also be, for example, a polyα-olefin or a low polymer of chlorotrifluoroethylene.
（発明の効果）
本発明によれば、ベローズの大部分を不活性液体で充填
することにより、気体部分が極めて小さくなる。このた
め気体部分の圧力変化は従来と同じでもベローズの収縮
が小さくて済み、ベローズの機械的抵抗の影響を極小に
抑えることができる。(Effects of the Invention) According to the present invention, by filling most of the bellows with an inert liquid, the gas portion becomes extremely small. Therefore, even though the pressure change in the gas portion is the same as in the conventional case, the contraction of the bellows is small, and the influence of the mechanical resistance of the bellows can be minimized.
＝１２−
よって、従来例に示した構成に較べて、大幅に圧力検出
器の感度を向上させることができ、極微圧の変動も検出
することができる。=12- Therefore, compared to the configuration shown in the conventional example, the sensitivity of the pressure detector can be significantly improved, and even extremely small pressure fluctuations can be detected.
また、この感度向上に伴い、圧力検出器を小型化しても
圧力測定範囲を狭めることがなく、また感度を低下させ
ずに圧力測定範囲を広げることができる。Moreover, with this improvement in sensitivity, even if the pressure detector is downsized, the pressure measurement range will not be narrowed, and the pressure measurement range can be expanded without reducing the sensitivity.
第１図、第２図、第３図は本発明の実施例を示す図、第
４図は本発明による効果を示すグラフ、第５図は本発明
の原理を示す図である。
２・・・ベローズ
６・・・不活性液体
３３．３４．３５◆◆◆細管1, 2, and 3 are diagrams showing examples of the present invention, FIG. 4 is a graph showing the effects of the present invention, and FIG. 5 is a diagram showing the principle of the present invention. 2...Bellows 6...Inert liquid 33.34.35◆◆◆Tube
Claims (3)
子の収納部を有する基台と、基台の上部を被覆し気密封
止する圧力応動部を有する容器とからなり、前記圧電振
動子の収納部以外の所定の空間に体積変化の少ない不活
性液体を充填したことを特徴とする圧力検出器。(1) Consisting of a piezoelectric vibrator as a pressure sensing element, a base having a storage part for the piezoelectric vibrator, and a container having a pressure responsive part covering and airtightly sealing the upper part of the base, the piezoelectric vibrator is 1. A pressure detector characterized in that a predetermined space other than a child storage section is filled with an inert liquid whose volume changes little.
記収納部とを細管にて空間的につないでいることを特徴
とする特許請求項第１項記載の圧力検出器。(2) The pressure sensor according to claim 1, wherein the inside of the pressure responsive part filled with the inert liquid and the storage part are spatially connected by a thin tube.
の大きい液体であることを特徴とする特許請求項第１項
、第２項記載の圧力検出器。(3) The pressure sensor according to claim 1 or 2, wherein the inert liquid is a liquid with high viscosity or high surface tension.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18337889A JPH0346533A (en) | 1989-07-14 | 1989-07-14 | Pressure detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18337889A JPH0346533A (en) | 1989-07-14 | 1989-07-14 | Pressure detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0346533A true JPH0346533A (en) | 1991-02-27 |
Family
ID=16134721
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18337889A Pending JPH0346533A (en) | 1989-07-14 | 1989-07-14 | Pressure detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0346533A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997036156A1 (en) * | 1996-03-28 | 1997-10-02 | Ami Co., Ltd. | Air pack type contact pressure measuring method |
-
1989
- 1989-07-14 JP JP18337889A patent/JPH0346533A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1997036156A1 (en) * | 1996-03-28 | 1997-10-02 | Ami Co., Ltd. | Air pack type contact pressure measuring method |
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