JPH0344535U

JPH0344535U -

Info

Publication number: JPH0344535U
Application number: JP10416389U
Authority: JP
Priority date: 1989-09-05
Filing date: 1989-09-05
Publication date: 1991-04-25

Description

【図面の簡単な説明】[Brief explanation of the drawing]

第１図は、この考案の一実施例を示す断面図で
ある。第２図は、第１図に示した薄膜部材９の正
面図である。第３図は、第２図の線−に沿う
拡大断面図である。第４図は、第１図に示した吸
着装置にプリント回路基板４が吸着された状態を
示す断面図である。第５図は、同じ吸着装置に反
りが生じたプリント回路基板４ａが吸着された状
態を示す断面図である。第６図は、この考案の他
の実施例の断面図である。第７図は、従来の吸着
装置を示す断面図である。図において、４，４ａはプリント回路基板（板
状物）、６は吸着穴、７は吸着板、８は吸着面、
９６，９ａは薄膜部材、１０，１０ａは開口部、
１２は端縁部、１５は負圧源である。 FIG. 1 is a sectional view showing an embodiment of this invention. FIG. 2 is a front view of the thin film member 9 shown in FIG. 1. FIG. 3 is an enlarged sectional view taken along line - in FIG. 2. FIG. 4 is a sectional view showing a state in which the printed circuit board 4 is sucked by the suction device shown in FIG. FIG. 5 is a sectional view showing a state in which a warped printed circuit board 4a is suctioned by the same suction device. FIG. 6 is a sectional view of another embodiment of this invention. FIG. 7 is a sectional view showing a conventional adsorption device. In the figure, 4 and 4a are printed circuit boards (plate-like objects), 6 is a suction hole, 7 is a suction plate, 8 is a suction surface,
96, 9a are thin film members, 10, 10a are openings,
12 is an edge portion, and 15 is a negative pressure source.

Claims

【実用新案登録請求の範囲】 (1) 板状物を吸着保持するための負圧が与えら
れる複数個の吸着穴が設けられた吸着板を備える
、板状物吸着装置において、前記吸着板の、板状物を吸着する側の吸着面に
は、弾性体からなる薄膜部材が貼付けられ、前記薄膜部材は、前記吸着穴に連通する開口部
を有するとともに、吸着保持されるべき板状物の
外周縁の内側の位置で当該板状物に接触する端縁
部を有し、前記端縁部には、その全周にわたつて、前記吸
着面より起こされた形状が付されている、ことを特徴とする、板状物吸着装置。 (2) 前記開口部は、複数個の前記吸着穴をカバ
ーする大きさとされ、かつ、前記薄膜部材は、前
記開口部を取り囲む枠状をなす、請求項１記載の
板状物吸着装置。[Claims for Utility Model Registration] (1) In a plate-like object suction device comprising a suction plate provided with a plurality of suction holes to which negative pressure is applied for suctioning and holding a plate-like object, the suction plate comprises: A thin film member made of an elastic body is attached to the suction surface on the side that suctions the plate-like object, and the thin film member has an opening that communicates with the suction hole and holds the plate-like object to be suctioned and held. It has an edge portion that contacts the plate-like object at a position inside the outer peripheral edge, and the edge portion has a shape that is raised from the suction surface over the entire circumference. A plate-like object adsorption device characterized by: (2) The plate-shaped object suction device according to claim 1, wherein the opening is sized to cover the plurality of suction holes, and the thin film member has a frame shape surrounding the opening.