JPH0338763Y2 - - Google Patents
Info
- Publication number
- JPH0338763Y2 JPH0338763Y2 JP1983156670U JP15667083U JPH0338763Y2 JP H0338763 Y2 JPH0338763 Y2 JP H0338763Y2 JP 1983156670 U JP1983156670 U JP 1983156670U JP 15667083 U JP15667083 U JP 15667083U JP H0338763 Y2 JPH0338763 Y2 JP H0338763Y2
- Authority
- JP
- Japan
- Prior art keywords
- screw
- rod
- hole
- pitch
- nut
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012212 insulator Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 claims 1
- 239000000919 ceramic Substances 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 230000003746 surface roughness Effects 0.000 description 3
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Description
【考案の詳細な説明】
本考案は、四重極質量分析計のロツド固定装置
に関し、特にロツド及びロツドの支持体に関する
ものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a rod fixing device for a quadrupole mass spectrometer, and more particularly to a rod and a rod support.
四重極質量分析計のロツド部は、第１図に示す
ように、アルミナ等のセラミツクスからなる２ケ
のヨーク１と、モリブデンあるいはステンレスス
チールからなる４ケのロツド２とにより構成され
ている。一方四重極質量分析計では、４本のロツ
ド２の内半径γ0が、ロツド２の直径Ｄに対して、
次の(1)式で与えられる値で一定であることが高分
解能及び高感度を得る必要条件である。 As shown in FIG. 1, the rod portion of the quadrupole mass spectrometer is composed of two yokes 1 made of ceramic such as alumina and four rods 2 made of molybdenum or stainless steel. On the other hand, in a quadrupole mass spectrometer, the inner radius γ 0 of the four rods 2 is
A constant value given by the following equation (1) is a necessary condition for obtaining high resolution and high sensitivity.
γ0＝Ｄ／２×1.1468 ……(1)
従つて、ヨーク１には各ロツドが次の(2)式で表
される直径Ｌの円に内接するようにロツドの接触
面１ｂが設けられている。 γ 0 =D/2×1.1468... (1) Therefore, the contact surface 1b of the rod is provided in the yoke 1 so that each rod is inscribed in a circle with a diameter L expressed by the following equation (2). ing.
Ｌ＝2D＋γ0 ……(2)
第２図に従来の支持法を示す。ヨーク１にバカ
穴１ａをあけロツド２ａにメネジをあけ、ネジ３
及びナツト４でロツド２ａを締め付けロツド２を
ヨーク１へ固定していた。このようなロツドの固
定方法で所定のγ0を±5μ以下に押えることはもち
ろんのこと、ヨーク１の接触面１ｂの加工精度を
±5μに押え、ロツド２との接触面１ｂの面あら
さを1μ程度に押える必要があつた。きかし、ア
ルミナ等のセラミツクスで10μ以下の加工精度を
要求すると歩留りが上がらず事実上難しい。又ネ
ジの締め付けトルクにより、ロツド２とヨーク１
の接触面１ｂの当り具合により、γ0が２〜3μ程度
変化してしまい±5μ以下のγ0の組み立て精度を得
ることは難しかつた。 L=2D+γ 0 ...(2) Figure 2 shows the conventional support method. Drill a hole 1a in yoke 1, drill a female thread in rod 2a, and insert screw 3.
Then, the rod 2a was tightened with a nut 4 to fix the rod 2 to the yoke 1. With this method of fixing the rod, not only can the predetermined γ 0 be kept below ±5μ, but also the machining accuracy of the contact surface 1b of the yoke 1 can be kept within ±5μ, and the surface roughness of the contact surface 1b with the rod 2 can be reduced. It was necessary to reduce the thickness to around 1μ. Requiring machining accuracy of 10μ or less for ceramics such as aluminum and alumina does not increase yield and is practically difficult. Also, depending on the tightening torque of the screw, rod 2 and yoke 1
Depending on the contact condition of the contact surface 1b, γ 0 changes by about 2 to 3 μ, making it difficult to obtain an assembly accuracy of γ 0 of ±5 μ or less.
本考案は、上記のような従来の欠点を除去する
ためになされたものであり、特に、ヨーク１に使
われているセラミツクスの加工精度が15μ程度で
も特別な調整上の熟練を要せず、γ0を±5μ以内に
組み上げるようにしたものである。 The present invention was made in order to eliminate the above-mentioned drawbacks of the conventional technology.In particular, even if the machining accuracy of the ceramics used for the yoke 1 is about 15μ, it does not require special adjustment skills. It is designed so that γ 0 is within ±5μ.
以下第３図、第４図による本考案を詳述する。 The present invention will be described in detail below with reference to FIGS. 3 and 4.
アルミナまたは、セラミツクスの各ヨーク１に
第１のバカ穴１ａをあけ、ナツト７をバカ穴１ａ
上に取り付ける。第１のネジ５の端部５ａ，５ｂ
にネジが切つてあり、５ａの部分かわずかにピツ
チがあらくしてある。つまり、５ａには第１のネ
ジピツチが、５ｂには第２のネジピツチが切られ
ている。止めネジ６は第１のネジの上から締めつ
け前記第１のネジを固定する止めネジである。２
は四重極ロツドで、８は(1)式で計算された半径を
持つゲージであり±1μC以下の精度で仕上げられ
ている。ヨーク１の内径Ｌは、(2)式で計算された
値の−5μ〜＋20μの精度でよく、1bの面あらさ
は、±2μ程度で良い。 Drill a first hole 1a in each yoke 1 made of alumina or ceramics, and insert the nut 7 into the hole 1a.
Attach it on top. Ends 5a, 5b of the first screw 5
There is a thread cut in the top, and the pitch is slightly roughened at part 5a. That is, a first screw pitch is cut in 5a, and a second screw pitch is cut in 5b. The set screw 6 is a set screw that is tightened from above the first screw to fix the first screw. 2
is a quadrupole rod, and 8 is a gauge with a radius calculated by formula (1), which is finished with an accuracy of ±1μC or less. The inner diameter L of the yoke 1 may have an accuracy of −5 μ to +20 μ of the value calculated by equation (2), and the surface roughness of the yoke 1 may have an accuracy of about ±2 μ.
組み立ての方法は、４本のロツド２ａ〜２ｄの
中心にゲージ８を入れ、第１のネジ５をナツト７
に入れて回転させる。第１のネジ５の第２のネジ
ピツチを有する先端はロツド２ａの第１のネジ穴
９にねじ込み、ロツド２ａをゲージ８に接するよ
うにする。この時対面するロツド２ｃ側と交互に
第１のネジを回転させるようにする。ロツド２
ｂ，２ｄに対しても同様に調整する。第１のネジ
５の１回転に対してロツド２が進む距離は第１の
ネジの５ａの部分の第１のネジピツチと5b部分
の第２のネジピツチ（第１のネジピツチより僅か
に小さい）の差であるから微調が可能である。即
ちロツド２ａがヨーク１側によせられる量よりわ
ずかに第１のネジ５の矢印Ａ方向に進む量が多く
なつている。四本のロツド２ａ〜２ｄがゲージ８
に等しく接するように各第１のネジ５を調節後、
各第１のネジ５の後ろから止めネジ６を締め、第
１のネジ５を固定する。又、第１のネジ５の調整
後５ｂ部分のガタを押さえるために、第４図に示
すように、もう一本のネジである第２のネジ４で
各ロツド２を固定する。この第２のネジ４による
固定構造は、第２図に示す従来の構造と同じであ
る。つまり、各ヨーク１の各ロツド２に対応する
位置に第２のバカ穴１ａを設け、その位置に直列
する位置の各ヨーク２に第２のネジ穴９を設け
る。そこに、ワツシヤー３を介して第２のネジ４
を締めつけて各ロツド２を固定する。 The assembly method is to insert the gauge 8 into the center of the four rods 2a to 2d, and insert the first screw 5 into the nut 7.
and rotate. The tip of the first screw 5 having the second threaded pitch is screwed into the first screw hole 9 of the rod 2a so that the rod 2a contacts the gauge 8. At this time, the first screw is rotated alternately with the facing rod 2c side. rod 2
Adjust similarly for b and 2d. The distance that the rod 2 advances per one rotation of the first screw 5 is the difference between the first screw pitch in the section 5a of the first screw and the second screw pitch (slightly smaller than the first screw pitch) in the section 5b. Therefore, fine adjustment is possible. That is, the amount by which the first screw 5 moves in the direction of arrow A is slightly greater than the amount by which the rod 2a is moved toward the yoke 1 side. Four rods 2a to 2d are gauge 8
After adjusting each first screw 5 so that it is in equal contact with
Tighten the setscrews 6 from behind each of the first screws 5 to fix the first screws 5. Further, in order to prevent play in the portion 5b after adjusting the first screw 5, each rod 2 is fixed with a second screw 4, which is another screw, as shown in FIG. The fixing structure using the second screw 4 is the same as the conventional structure shown in FIG. That is, a second blank hole 1a is provided in each yoke 1 at a position corresponding to each rod 2, and a second screw hole 9 is provided in each yoke 2 at a position in series with the second blank hole 1a. There, insert the second screw 4 through the washer 3.
Tighten to secure each rod 2.
本考案によれば、第３図に示した取り付け機構
により、ロツド２の位置を上下方向に微調整でき
るため、ゲージ８によるγ0の精度出しが容易に行
える。従つて、従来のようにヨークの接触面１ｂ
の精度及び粗さが、γ0の組み立て精度を大きく左
右しないため、ヨーク１の接触面１ｂの加工精度
が15μ程度で面あらさが2μ程度と加工が容易にな
り歩留りが向上した。又μ0のバラツキも小さくな
り性能のそろつたロツド部が簡単な調整で得られ
るようになつた。 According to the present invention, the position of the rod 2 can be finely adjusted in the vertical direction using the mounting mechanism shown in FIG . Therefore, as in the conventional case, the contact surface 1b of the yoke
Since the accuracy and roughness of the yoke 1 do not greatly affect the assembly accuracy of γ 0 , the processing accuracy of the contact surface 1b of the yoke 1 is about 15 μm, and the surface roughness is about 2 μm, making the processing easy and improving the yield. Also, the variation in μ 0 has become smaller, making it possible to obtain rod parts with uniform performance through simple adjustments.
第１図は従来の四重極質量計ロツド部を示す斜
視図、第２図は従来のロツドの固定装置を示す断
面図、第３図は本考案によるロツド固定装置の実
施例を示す断面図、第４図は第３図の四重極のロ
ツドの取り付け状態を示す斜視図である。
１……ヨーク、２ａ〜２ｄ……四重極ロツド、
４……第２のネジ、５……第１のネジ、６……止
めネジ、７……ナツト。
Fig. 1 is a perspective view showing a conventional quadrupole mass meter rod part, Fig. 2 is a sectional view showing a conventional rod fixing device, and Fig. 3 is a sectional view showing an embodiment of the rod fixing device according to the present invention. and FIG. 4 is a perspective view showing how the rod of the quadrupole shown in FIG. 3 is attached. 1...Yoke, 2a-2d...Quadrupole rod,
4... Second screw, 5... First screw, 6... Set screw, 7... Nut.
Claims (1)
定位置に支持するための絶縁物からなる一組のヨ
ークと、 前記各ロツド支持位置に対応する前記各ヨーク
外周から径方向に設けられた第１のバカ穴と、 前記ロツドに前記第１のバカ穴に直列するよう
に設けられた第１のネジピツチを有する第１のネ
ジ穴と、 前記バカ穴の入り口部に取り付けられた第２の
ネジピツチを有するナツトと、 先端部に第１のネジピツチを有し、他端部に第
２のネジピツチを有し、先端部を前記ロツトの第
１のネジ穴に、他端部は前記ナツトに位置するよ
うにネジ締めされている第１のネジと、 第２のネジピツチを有し、前記ナツトに挿入さ
れ、前記第１のネジの上から締めつけ前記第１の
ネジを固定する止めネジと、 更に、前記各ロツド支持位置に対応する前記各
ヨーク外周から径方向に設けられた第２のバカ穴
と、 前記ロツドに前記第２のバカ穴に直列するよう
に設けられた第２のネジ穴と、 前記第２のバカ穴と前記第２のネジ穴にネジ込
めらた第２のネジよりなることを特徴とする四重
極質量分析計のロツド固定構造。[Claims for Utility Model Registration] A set of yokes made of four metal rods, an insulator for supporting the rods at predetermined positions, and a set of yokes from the outer periphery of each of the yokes corresponding to each of the rod support positions. a first screw hole provided in the radial direction; a first screw hole having a first screw pitch provided in the rod so as to be in series with the first hole; and an entrance portion of the hole; a nut having a second threaded pitch attached thereto; a nut having a first threaded pitch at a distal end and a second threaded pitch at the other end; The part has a first screw screwed so as to be located in the nut, and a second screw pitch, and is inserted into the nut and is tightened from above the first screw to fix the first screw. further, a second blank hole provided in the radial direction from the outer periphery of each of the yokes corresponding to each of the rod support positions; and a second blank hole provided in the rod so as to be in series with the second blank hole. A rod fixing structure for a quadrupole mass spectrometer, comprising: a second screw hole; and a second screw screwed into the second blank hole and the second screw hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15667083U JPS6064562U (en) | 1983-10-07 | 1983-10-07 | Quadrupole mass spectrometer rod fixing structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15667083U JPS6064562U (en) | 1983-10-07 | 1983-10-07 | Quadrupole mass spectrometer rod fixing structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6064562U JPS6064562U (en) | 1985-05-08 |
| JPH0338763Y2 true JPH0338763Y2 (en) | 1991-08-15 |
Family
ID=30345632
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15667083U Granted JPS6064562U (en) | 1983-10-07 | 1983-10-07 | Quadrupole mass spectrometer rod fixing structure |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6064562U (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3056847B2 (en) * | 1991-09-11 | 2000-06-26 | 日本原子力研究所 | Quadrupole electrode and method of manufacturing the same |
| US10566180B2 (en) | 2018-07-11 | 2020-02-18 | Thermo Finnigan Llc | Adjustable multipole assembly for a mass spectrometer |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS585322U (en) * | 1981-06-30 | 1983-01-13 | 三洋電機株式会社 | Flyback transformer with high voltage variable resistor |
-
1983
- 1983-10-07 JP JP15667083U patent/JPS6064562U/en active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS585322U (en) * | 1981-06-30 | 1983-01-13 | 三洋電機株式会社 | Flyback transformer with high voltage variable resistor |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6064562U (en) | 1985-05-08 |
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