JPH03294137A - Minute parallel displacement driving device - Google Patents
Minute parallel displacement driving deviceInfo
- Publication number
- JPH03294137A JPH03294137A JP9123290A JP9123290A JPH03294137A JP H03294137 A JPH03294137 A JP H03294137A JP 9123290 A JP9123290 A JP 9123290A JP 9123290 A JP9123290 A JP 9123290A JP H03294137 A JPH03294137 A JP H03294137A
- Authority
- JP
- Japan
- Prior art keywords
- parallel
- plate member
- displacement
- fixed plate
- frame
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 98
- 230000003287 optical effect Effects 0.000 claims abstract description 28
- 125000006850 spacer group Chemical group 0.000 claims abstract description 8
- 230000005489 elastic deformation Effects 0.000 claims description 21
- 230000008602 contraction Effects 0.000 claims description 15
- 238000005452 bending Methods 0.000 claims description 14
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 3
- 229910000639 Spring steel Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000006378 damage Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 230000005641 tunneling Effects 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000036316 preload Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Details Of Measuring And Other Instruments (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、位相干渉法による光学素子反射面測定器や測
長器における光学素子の移動、走査をトンネル顕微鏡に
おける試料等の荒送り、超精密加工機における工具の送
り等に用いられる微小平行変位駆動装置に関し、詳しく
は、固定板部材と変位板部材とがピエゾ素子にその伸縮
方向の弾性圧力を加えるように圧接した弾性変形部材を
介して平行に連結されていて、ピエゾ素子への電圧の印
加に応じて固定板部材り対し変位板部材が平行に変位す
る微小平行変位駆動装置に関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention is applicable to the movement and scanning of optical elements in optical element reflection surface measuring devices and length measuring devices using phase interferometry, as well as rough feeding and super feeding of samples, etc. in tunneling microscopes. Regarding a minute parallel displacement drive device used for feeding tools in precision processing machines, in detail, a fixed plate member and a displacement plate member are pressed against a piezo element through an elastic deformation member so as to apply elastic pressure in the direction of expansion and contraction of the piezo element. The present invention relates to a minute parallel displacement drive device in which a displacement plate member is connected in parallel to each other and is displaced in parallel to a fixed plate member in response to application of a voltage to a piezo element.
例えば、公知の第１５図に示したようなフィゾー型位相
干渉計におけるフィゾー参照レンズの光軸方向への微小
平行移動に、ＵＳＰ４５７７１３１号公報に記載されて
いる第１６図の側面図と第１７図の平面図に示したよう
な駆動装置が用いられる。第１５図において、１はレー
ザ光源、２は光束拡張レンズ、３はハーフミラ−４はコ
リメータレンズ、５はフィゾー参照レンズ、６はフィゾ
ー参照レンズ５を光軸方向に微小平行移動させる駆動装
置、７は被検反射面、８は結像レンズ、９は干渉像の投
影スクリーンや像信号を得るＣＯＤと言った受光検知部
材であり、第１６．１７図の駆動装置６において、６Ａ
は固定板部材、６Ｂは変位板部材、６Ｃは両端ｔこねじ
締めによってそれぞれ固定板部材６Ａおよび変位板部材
６Ｂを連結して両部材６Ａと６Ｂを平行に対向させてい
るアクチュエータ、６Ｄはフィゾー参照レンズ５と言っ
た光学素子５０を変位板部材６Ｂに取付けでいる光学素
子取付枠、６Ｅは詳細を第１８図に示したアクチュエー
タ６Ｃに内蔵されているピエゾ素子６Ｆに電圧を印加す
る電圧印加手段である。For example, the side view of FIG. 16 and the side view of FIG. 17 described in US Pat. A drive device as shown in the plan view is used. In FIG. 15, 1 is a laser light source, 2 is a beam expansion lens, 3 is a half mirror, 4 is a collimator lens, 5 is a Fizeau reference lens, 6 is a drive device that moves the Fizeau reference lens 5 minutely in parallel in the optical axis direction, 7 is a reflecting surface to be inspected, 8 is an imaging lens, 9 is a light receiving detection member such as a projection screen for an interference image or a COD for obtaining an image signal.
6B is a fixed plate member, 6B is a displacement plate member, 6C is an actuator which connects the fixed plate member 6A and the displacement plate member 6B by tightening screws at both ends so that both members 6A and 6B face each other in parallel, and 6D is a Fizeau plate member. An optical element mounting frame in which an optical element 50 such as a reference lens 5 is attached to a displacement plate member 6B, and 6E is a voltage application for applying a voltage to a piezo element 6F built in an actuator 6C whose details are shown in FIG. It is a means.
第１８図のアクチュエータ６Ｃは、弾性係数が小さいＡ
Ｑ等の金属部材から成る筒体６Ｇの内部にピエゾ素子６
Ｆを収容し、筒体６Ｇの孔を塞ぐように孔の両端部と℃
合等によって係合している栓体６Ｈの円錐状対向凹面の
底端でピエゾ素子６Ｆの両端の円錐状突端を挟圧するこ
とによりピエゾ素子６Ｆを保持した構成で、ピエゾ素子
６Ｆが印加電圧に応りで伸縮し易いように、筒体６Ｇの
中央部分は肉厚の薄い伸縮部とし、それに連なる両端側
の栓体６Ｈが係合するような部分は肉厚の厚い連結部と
している。そして、アクチュエータ６ｃは、筒体６Ｇの
連結部に設けたねじ孔にねし込まれるねしによって第１
６．１７図のように固定板部材６Ａと変位板部材６Ｂと
に連結している。The actuator 6C in FIG. 18 has a small elastic modulus A
A piezo element 6 is placed inside a cylindrical body 6G made of a metal member such as Q.
℃ to accommodate both ends of the hole and close the hole of the cylindrical body 6G.
The piezo element 6F is held by pressing the conical protrusions at both ends of the piezo element 6F with the bottom ends of the conical opposing concave surfaces of the plug body 6H that are engaged with each other. The center portion of the cylinder 6G is made into a thin-walled expandable portion so that it can easily expand and contract in response, and the portions connected to the central portion where the plugs 6H on both end sides engage are made into thick-walled connecting portions. The actuator 6c is connected to the first
6.17 It is connected to the fixed plate member 6A and the displacement plate member 6B as shown in FIG.
すなわち、第１６．１７図の駆動装置６は、電圧印加手
段６Ｅでアクチュエータ６ｃのピエゾ素子６Ｆに印加す
る電圧を変化することによって、アクチュエータ６ Ｃ
のピエゾ素子６Ｆに栓体６Ｈを介し弾性伸長応力に基づ
く圧力を加えている弾性変形部材の筒体６Ｇが伸縮し、
したがって固定板部材６Ａと変位板部材６Ｂの対向間隔
が伸縮して、第１５図のフィゾー参照レンズ５のような
光学素子５０を光軸方向に微小平行移動させるものであ
る。That is, the drive device 6 of FIG. 16.17 changes the voltage applied to the piezo element 6F of the actuator 6c by the voltage application means 6E, thereby controlling the actuator 6C.
The cylindrical body 6G, which is an elastically deformable member that applies pressure based on elastic expansion stress to the piezo element 6F through the plug body 6H, expands and contracts.
Therefore, the opposing distance between the fixed plate member 6A and the displacement plate member 6B expands and contracts, and the optical element 50, such as the Fizeau reference lens 5 shown in FIG. 15, is moved minutely in parallel in the optical axis direction.
ところで、ピエゾ素子は、■印加電圧によって生ずる極
部的変位が必ずしもピエゾセラミックの積層方向に真直
ぐな方向とは限らず、襞らがの曲がりが生ずる、■予圧
がない場合は、伸長量が大きいと破壊することがある、
■伸縮量と電圧関係が外部から伸縮方向に加わる圧力の
性質に依存し、圧力が比較的小さく一定であれば、伸縮
量と電圧の関係が比例した直線的になるが、圧力が大き
く伸縮量に比例するときは、伸縮量と電圧の関係が非直
線的になる、と１つだ特性を示す。By the way, in piezo elements, 1) the polar displacement caused by the applied voltage is not necessarily in a straight direction in the stacking direction of the piezoceramic, and the folds are bent; and 2) the amount of elongation is large if there is no preload. may be destroyed,
■The relationship between the amount of expansion and contraction and the voltage depends on the nature of the pressure applied from the outside in the direction of expansion and contraction. If the pressure is relatively small and constant, the relationship between the amount of expansion and contraction and voltage will be proportional and linear, but if the pressure is large and the amount of expansion and contraction is One characteristic is that the relationship between the amount of expansion and contraction becomes non-linear when it is proportional to .
そこで第１８図のアクチュエータ６Ｃは、ピエゾ素子６
Ｆの両端を円錐状とし、ピエゾ素子６Ｆを挟圧保持する
栓体６■の挟圧部を円錐角がピエゾ素子６Ｆのそれより
も大きい円錐状凹面の底端としたことで、ピエゾ素子特
性の■の曲がりを吸収する。また、栓体６Ｈの締め込み
による挟圧力を適当にすることで、ピエゾ素子特性の■
の破壊の問題を解消する。さらに、筒体６Ｇの弾性係数
が小さいＡＱ等の金属材料から成る肉厚の薄い伸縮部に
よって、ピエゾ素子特性の■の伸縮量と電圧の関係がで
きるだけ直線的になるようにしている。Therefore, the actuator 6C in FIG.
The characteristics of the piezo element are improved by making both ends of F into a conical shape, and by making the clamping part of the stopper 6■ which holds the piezo element 6F under pressure the bottom end of a conical concave surface whose cone angle is larger than that of the piezo element 6F. ■Absorb the bending of. In addition, by adjusting the clamping force by tightening the stopper 6H, the characteristics of the piezo element can be improved.
solve the problem of destruction. Furthermore, the relationship between the amount of expansion and contraction of the piezo element characteristic (2) and the voltage is made as linear as possible by the thin expansion/contraction portion of the cylinder 6G made of a metal material such as AQ having a small elastic modulus.
このようなアクチュエータ６Ｃを用いた第１６．１７図
の駆動装置においても、イ、２個のアクチュエータ６Ｃ
を用いているから、それらの特性が揃っていないと光学
素子５０を平行変位させることができない、口、アクチ
ュエータ６Ｃは、基本的に弾性変形部材の弾性伸長変形
を利用したものであるから、筒体６ＧにＡＩ２のような
弾性係数の小さい金属材料を用いざるを得す、従って温
度変化によるドリフト変位を生じさせ易く、たとえ２個
のアクチュエータ６Ｃの特性を揃えたとしても、２個の
アクチュエータ６０間で駆動時の発熱や外乱により温度
差が生じた場合は、光学素子５０を平行変位させること
ができない、０．２個のアクチュエータ６Ｃを用いても
、アクチュエータ６Ｃが弾性係数の小さい金属材料から
成る筒体６Ｇを用いた剛性の低い構造のものであるから
、例えば、光学素子取付枠６Ｄと光学素子５０も含めて
５〜５ ｋｇｆと１′つた比較的重量のある変位板部材
６Ｂをアクチュエータ６Ｃで支持した場合は、アクチュ
エータ６Ｃに撓みが生じ易く、光学素子５０を微小変位
させたときに撓み共振が発生し易い、等の問題がある。Also in the drive device shown in Fig. 16.17 using such actuators 6C, a.
Since the actuator 6C basically utilizes elastic elongation deformation of an elastic deformation member, the optical element 50 cannot be displaced in parallel unless these characteristics are aligned. It is necessary to use a metal material with a small elastic modulus such as AI2 for the body 6G, and therefore it is easy to cause drift displacement due to temperature changes, and even if the characteristics of the two actuators 6C are made the same, If a temperature difference occurs between the two due to heat generation or disturbance during driving, the optical element 50 cannot be displaced in parallel. Since it has a low-rigidity structure using a cylindrical body 6G made up of If the actuator 6C is supported by the actuator 6C, the actuator 6C is likely to be bent, and when the optical element 50 is slightly displaced, bending resonance is likely to occur.
本発明は、上述のような駆動装置の問題を解消するため
になされたものであり、駆動源として市販のピエゾ素子
をそのまま使うことができて安価に構成され、しかも光
学素子保持枠等を設は得る変位板部材が撓むことなくピ
エゾ素子への印加電圧に応じ固定板部材に対し安定して
平行変位する微小平行変位駆動装置の提供を目的とする
。The present invention has been made in order to solve the above-mentioned problems with the drive device, and it is possible to use a commercially available piezo element as a drive source as it is, has an inexpensive structure, and is equipped with an optical element holding frame, etc. The object of the present invention is to provide a minute parallel displacement drive device in which a displacement plate member is stably displaced parallel to a fixed plate member in response to a voltage applied to a piezo element without being bent.
本発明は、固定板部材と変位板部材とがピエゾ素子にそ
の伸縮方向の弾性圧力を加えるように圧接した弾性変形
部材を介して平行に連結されていて、ピエゾ素子への電
圧の印加に応じて固定板部材に対し変位板部材が平行に
変位する微小平行変位駆動装置において、弾性変形部材
が、それぞれ長さの中央から等分の中間部分２ケ所に扁
平四角断面の上層を下層とで繋がって四角断面の中層の
抜けた上下層平行撓み部分のある基本断面四角の対称的
な平行梁部と、長さの中心線に対し対称的な平面形状と
平行梁部に等しい厚さでそれぞれ平行梁部の両端部を連
結する対称的な連結梁部とから成る枠部と、各平行梁部
の申実中央部分から枠部の下面に直角に伸びる平行支柱
部とから成り、固定板部材または変位板部材が平行支柱
部の下端に連結され、ピエゾ素子が各連結梁部の中央位
置で固定板部材または変位板部材と枠部とによって挟圧
されるように平行に配設されて、変位板部材または固定
板部材が各連結梁部の中央または中央から等分の位置で
枠部の上面にスペーサ部を介し連結されていることを特
徴とする微小平行変位駆動装置、まｔ；は、同じく固定
板部材に対し変位板部材が平行に変位する微小平行変位
駆動装置において、弾性変形部材が、それぞれ長さの中
央から等分の中間部分２カ所に扁平四角断面の上層と下
層とで繋がって四角断面の中層の抜けた上下層平行撓み
部分のある基本断面四角の対称的な平行梁部と、長さの
中心線に対し対称的な平面形状と平行梁部に等しい厚さ
でそれぞれ平行梁部の両端部を連結する対称的な連結梁
部とから成る枠部と、各連結梁部の中央部分から枠部の
下面に直角に伸びる平行支柱部とから成り、固定板部材
または変位板部材が平行支柱部の下端に連結され、ビエ
ゾ素子が各平行梁部の中実な中央位置で固定板部材また
は変位板部材と枠部とによって挟圧されるように平行に
配設されて、変位板部材または固定板部材が各平行梁部
の中実な中央位置で枠部の上面にスペーサ部を介し連結
されていることを特徴とする微小平行変位駆動装置にあ
り、このいずれかの構成によって前記目的を達成する。In the present invention, the fixed plate member and the displacement plate member are connected in parallel through an elastically deformable member that is pressed against the piezo element so as to apply elastic pressure in the direction of expansion and contraction of the piezo element. In a minute parallel displacement drive device in which a displacement plate member is displaced parallel to a fixed plate member, an elastic deformation member connects the upper layer of the flat square section to the lower layer at two intermediate portions equally divided from the center of the length. A symmetrical parallel beam part with a basic cross section of square with a parallel bending part of the upper and lower layers with a middle layer missing in the square cross section, and a parallel beam part with a symmetrical planar shape and a thickness equal to the parallel beam part with respect to the center line of the length. It consists of a frame section consisting of a symmetrical connecting beam section that connects both ends of the beam section, and a parallel support section that extends from the central part of each parallel beam section at right angles to the lower surface of the frame section, and is composed of a fixed plate member or The displacement plate member is connected to the lower end of the parallel column part, and the piezo element is arranged in parallel so that it is pinched by the fixed plate member or the displacement plate member and the frame part at the center position of each connecting beam part, and A minute parallel displacement driving device, characterized in that a plate member or a fixed plate member is connected to the upper surface of the frame part via a spacer part at the center of each connecting beam part or at a position equidistant from the center; Similarly, in a micro-parallel displacement drive device in which a displacement plate member is displaced parallel to a fixed plate member, an elastic deformation member has an upper layer and a lower layer connected to each other in a flat rectangular cross section at two intermediate portions equally divided from the center of the length. A symmetrical parallel beam part with a basic cross section of square with a parallel bending part of the upper and lower layers with a middle layer missing in the square cross section, and a parallel beam part with a symmetrical planar shape and a thickness equal to the parallel beam part with respect to the center line of the length. It consists of a frame consisting of a symmetrical connecting beam that connects both ends of the beam, and a parallel support that extends from the center of each connecting beam at right angles to the lower surface of the frame, and is a fixed plate member or a displacement plate. The member is connected to the lower end of the parallel support portion, and the Viezo element is arranged in parallel so as to be pinched by the fixed plate member or the displacement plate member and the frame portion at a solid center position of each parallel beam portion, A minute parallel displacement drive device characterized in that a displacement plate member or a fixed plate member is connected to the upper surface of a frame portion via a spacer portion at a solid central position of each parallel beam portion, and either of the above configurations is provided. The above objective is achieved by:
すなわち、本発明の微小平行変位駆動装置は、前述のア
クチュエータ６Ｃとは異なり、弾性変形部材の枠部の長
さの中央から等分の中間部分２ケ所に平行撓み部分のあ
る平行梁部を両持ち梁としたような弾性撓み変形を利用
したものであるから、温度変化によるドリフト変位を生
じさせることが少なく、弾性変形部材に剛性の高い鋼材
等を用いることができて、重量のある変位板部材を支持
した場合も撓みが少なく、変位板部材したがって光学素
子等を微小変位させたときに撓み共振が発生することも
少なく、そして、２個のピエゾ素子の曲がりの吸収や破
壊の問題の解消および伸縮量と電圧の直線的関係を揃え
ること等はアクチュエータ６Ｃにおけると同様の手段で
行い得るので、安価に構成されて、光学素子等を安定し
てピエゾ素子に印加する電圧に応じ平行変位させること
ができる。That is, unlike the actuator 6C described above, the minute parallel displacement drive device of the present invention has a parallel beam portion having parallel bending portions at two intermediate portions equally divided from the center of the length of the frame portion of the elastic deformation member. Because it utilizes elastic deformation similar to that of a support beam, drift displacement due to temperature changes is less likely to occur, and highly rigid steel materials can be used for the elastic deformation members, making it possible to create a heavy displacement plate. Even when the member is supported, there is little deflection, and deflection resonance is less likely to occur when the displacement plate member and therefore the optical element etc. are minutely displaced, and the problem of absorption of bending and destruction of the two piezo elements is solved. Also, since the linear relationship between the amount of expansion and contraction and the voltage can be made equal by the same means as in the actuator 6C, it can be constructed at low cost, and the optical element etc. can be stably displaced in parallel according to the voltage applied to the piezo element. be able to.
以下、第１図乃至第１４図によって本発明を説明する。 The present invention will be explained below with reference to FIGS. 1 to 14.
第１図および第２図は本発明の駆動装置のｌｆｌを示す
光学素子保持枠も含めた側面図および光学素子保持枠を
除いた平面図、第３図および第４図は他の例を示す同様
の側面図および平面図、第５図および第６図は本発明の
駆動装置に用いられる弾性変形部材の１例を示す枠部表
面の紙面に直角な方向の等変位線グラフおよび紙面に平
行な方向の等応力線グラフ、第７図および第８図は同じ
く弾性変形部材の他の例を示す等変位線グラフおよび等
応力線グラフ、第９図および第１Ｏ図は第７゜８図の弾
性変形部材の枠部の側面図および斜視図における第５．
７図と同様の等変位線グラフ、第１１図および第１２図
は第７〜ＩＯ図の弾性変形部材の枠部上面四隅部分にス
ペーサ部を介して連結された変位板部材表面の紙面に直
角な方向の等変位線グラフおよび斜視図におけると同様
の等変位線グラフ、第１３図および第１４図は比較例の
弾性変形部材枠部表面の紙面に直角な方向の等変位線グ
ラフおよび紙面に平行な方向の等応力線グラフである。1 and 2 are side views including the optical element holding frame and a plan view excluding the optical element holding frame, showing lfl of the drive device of the present invention, and FIGS. 3 and 4 show other examples. Similar side views and plan views, and FIGS. 5 and 6 show an example of an elastically deformable member used in the drive device of the present invention, and a graph of equal displacement lines on the surface of the frame in a direction perpendicular to the plane of the paper, and a graph parallel to the plane of the paper. Figures 7 and 8 are equal displacement line graphs and equal stress line graphs showing other examples of elastically deformable members, and Figures 9 and 1O are equivalent stress line graphs in Figures 7-8. No. 5 in the side view and perspective view of the frame portion of the elastically deformable member.
The same displacement line graph as in Fig. 7, Fig. 11 and Fig. 12 shows the surface of the displacement plate member connected to the four corners of the upper surface of the frame of the elastically deformable member in Figs. 13 and 14 are equal displacement line graphs in the direction perpendicular to the paper surface of the elastic deformation member frame surface of the comparative example and the same displacement line graphs as in the perspective view. It is a graph of equal stress lines in parallel directions.
第１．２図および第３．４図に示した本発明の駆動装置
６０において、６１は固定板部材、６２は変位板部材、
６３は一端をねじ等により固定板部材６１に固定された
ピエゾ素子、６４はばね鋼等より成る弾性変位部材、６
５は変位板部材６２にねじ等により固定されて光学素子
５０を取付ける光学素子取付枠でおる。８１．２図の弾
性変位部材６４は、枠部６４Ａ・ハ平行梁部中央部分か
ら下面に直角に伸びる平行支柱部６４Ｂの先端にねじ等
により固定板部材６１を固定し、枠部６４Ａの平行梁部
と連結梁部の４ケ所の連結部上面にスペーサ部６６を介
してねじ等により変位板部材６２を固定して、固定板部
材６１と変位板部材６２とを平行に保っている。そして
、枠部６４Ａの連結梁部中央部分に螺合等によって設け
た圧力調節部材６７の先端平面でピエゾ素子６３の先端
に形成しｔ−球面と圧接している。また、第３．４図の
弾性変位部材６４は、枠部６４Ａの連結梁部中央部分か
ら下面に直角の伸びる平行支柱部６４Ｂの先端にねし等
により固定板部材６１を固定し、枠部６４Ａの平行梁部
の中央部分上面にスペーサ部６６を介してねじ等ｔこよ
り変位板部材６２を固定して、固定板部材６１と変位板
部材６２を平行に保っている。そして、枠部６４Ａの平
行梁部中央部分に螺合等によって設けた圧力調節部材６
７の先端平面でピエゾ素子６３の先端に形成した球面と
圧接している。In the drive device 60 of the present invention shown in FIGS. 1.2 and 3.4, 61 is a fixed plate member, 62 is a displacement plate member,
63 is a piezo element whose one end is fixed to the fixing plate member 61 with a screw or the like; 64 is an elastic displacement member made of spring steel or the like;
Reference numeral 5 denotes an optical element mounting frame which is fixed to the displacement plate member 62 with screws or the like to mount the optical element 50 thereon. The elastic displacement member 64 in Fig. 81.2 is constructed by fixing the fixing plate member 61 with screws or the like to the tip of the parallel support portion 64B extending perpendicularly to the lower surface from the central portion of the parallel beam portion of the frame portion 64A. The displacement plate member 62 is fixed to the upper surface of the four connecting parts between the beam part and the connecting beam part with screws or the like via spacer parts 66, so that the fixed plate member 61 and the displacement plate member 62 are kept parallel to each other. The flat surface of the pressure adjusting member 67, which is screwed into the center of the connecting beam of the frame 64A, is formed at the tip of the piezo element 63 and is in pressure contact with the t-spherical surface. In addition, the elastic displacement member 64 in Fig. 3.4 is constructed by fixing the fixing plate member 61 with screws or the like to the tip of a parallel support portion 64B extending perpendicularly to the lower surface from the center portion of the connecting beam portion of the frame portion 64A. The displacement plate member 62 is fixed to the upper surface of the center portion of the parallel beam portion 64A with a screw or the like via a spacer portion 66 to maintain the fixed plate member 61 and the displacement plate member 62 parallel to each other. A pressure adjusting member 6 is provided by screwing or the like on the central portion of the parallel beam portion of the frame portion 64A.
The tip plane of 7 is in pressure contact with the spherical surface formed at the tip of the piezo element 63.
本発明の駆動装置６０においては、固定板部材６１と変
位板部材６２が上述のように弾性変形部材６４を介して
連結されているから、ピエゾ素子６３に印加する電圧イ
こ応じて変化する固定板部材６１と変位板部材６２の相
対的平行変位は、弾性変形部材６４の枠部６４Ａの両持
ち粱としての平行梁部の弾性撓み変形を利用している。In the drive device 60 of the present invention, since the fixed plate member 61 and the displacement plate member 62 are connected via the elastically deformable member 64 as described above, the fixed plate member 61 and the displacement plate member 62 are connected to each other via the elastically deformable member 64. The relative parallel displacement of the plate member 61 and the displacement plate member 62 utilizes the elastic deformation of the parallel beam portion of the frame portion 64A of the elastically deformable member 64 as a double-sided support.
しかも、平行梁部は中央の力点から等分の中間部分の２
ケ所に、扁平四角断面の上層と下層とで繋って四角断面
の中層の孔６４Ｈがおいている上下層平行撓み部分を有
するから、弾性変形部材６４にばね鋼のような剛性の高
い材料を用いていても平行梁部を比較的小さい力でピエ
ゾ素子６３の伸縮方向に弾性撓み変形させることができ
る。したがって、ピエゾ素子６３の伸縮量と電圧の関係
を直線的にできる。また、２側のピエゾ素子６３の伸縮
量と電圧の関係を圧力調節部材６７によって揃えること
ができる。これらによって、平行梁部の中央の力点部分
と両端側の力点部分の固定板部材６１に対する平行性を
変位板部材６２に実質的な撓みや傾きが生じないように
維持することができ、そのため変位板部材６２に取付け
られた光学素子５０を変形やティルトさせることなく固
定板部材６１に対し安定して平行変位させることができ
る。Moreover, the parallel beam part has two equal parts in the middle from the central force point.
Since the upper and lower layers have a parallel bending portion in which the upper and lower layers of the flat square cross section are connected and the hole 64H of the middle layer of the square cross section is placed, the elastically deformable member 64 is made of a highly rigid material such as spring steel. Even if it is used, the parallel beam portion can be elastically deformed in the direction of expansion and contraction of the piezo element 63 with a relatively small force. Therefore, the relationship between the amount of expansion and contraction of the piezo element 63 and the voltage can be made linear. Further, the relationship between the amount of expansion and contraction of the piezo element 63 on the second side and the voltage can be made equal by the pressure adjustment member 67. With these, it is possible to maintain the parallelism of the force point portion at the center of the parallel beam portion and the force point portions at both ends with respect to the fixed plate member 61 so that no substantial deflection or inclination occurs in the displacement plate member 62, so that the displacement The optical element 50 attached to the plate member 62 can be stably displaced parallel to the fixed plate member 61 without deforming or tilting it.
なお、図示例では弾性変形部材６４の枠部６４の連結梁
部を四角断面の平行梁にしているが、連結梁部は平面形
状が長さの中心線に対し対称的で、且つ再連結梁部が対
称的であれば、平行梁でなくてもよい。また、固定板部
材６１と変位板部材６２をそれぞれ光束の通る角孔６１
Ａと丸孔６２Ａが設けられているものにしているが、変
位板部材６２を固定板部材６１の反対側に光を反射する
光学素子５０や走査型トンネル顕微鏡の試料あるいは超
精密加工機の工具等の取付けに利用するときは、これら
の孔６１Ａや６２Ａが不要となることは言うまでもない
。さらに、固定板部材６１と変位板部材６２を弾性変形
部材６４に対し図示例とは入れ換えて固定してもよい。In the illustrated example, the connecting beam portion of the frame portion 64 of the elastically deformable member 64 is a parallel beam with a square cross section, but the connecting beam portion has a planar shape that is symmetrical with respect to the center line of its length, and a reconnecting beam. As long as the parts are symmetrical, it does not need to be a parallel beam. Further, the fixed plate member 61 and the displacement plate member 62 are each provided with a square hole 61 through which the light flux passes.
A and a round hole 62A are provided, but the displacement plate member 62 can be used as an optical element 50 that reflects light to the opposite side of the fixed plate member 61, a sample of a scanning tunneling microscope, or a tool of an ultra-precision processing machine. It goes without saying that these holes 61A and 62A are unnecessary when used for attaching the like. Furthermore, the fixed plate member 61 and the displacement plate member 62 may be fixed to the elastically deformable member 64 by replacing them with those shown in the illustrated example.
第１．２図の本発明の駆動装置における弾性変形部材６
４の枠部６４Ａの弾性変形は、第５，６図あるいは第７
〜ｌＯ図に示したように行われる。Elastic deformation member 6 in the drive device of the invention shown in FIG. 1.2
The elastic deformation of the frame portion 64A of No. 4 is shown in Figs. 5 and 6 or Fig. 7.
~lO is performed as shown in the diagram.
第５，６図は、弾性変形部材６４が縦弾性係数２．ＩＸ
ｌｏ’ｋｇｆ／ｍｍ”のステンレス鋼から成っていて
、枠部６４Ａの寸法が第５図におけるＬ ｌ 、 Ｌ
２ ＝１５２ｍｍ。5 and 6, the elastic deformation member 64 has a longitudinal elastic modulus of 2. IX
The frame portion 64A is made of stainless steel with a diameter of 1.0 kgf/mm, and the dimensions of the frame portion 64A are L l and L in FIG.
2 = 152mm.
Ｗ ｌ 、 Ｗ ２ ＝ ２１１１Ｑ＋、孔６４Ｈから
平行梁部と連結梁部の連結部までの距離ｃ −４，５１
１１１、孔６４■の輻Ｐ−２７，５ｍａ＋、孔６４Ｈの
紙面に直角方向の高さ５ｓｉｎ、枠部６４Ａの厚さ１５
ｍｍ、孔６４Ｈのある上下層平行撓み部分の上層と下層
の厚さが各５１であり、２債のピエゾ素子６３の各押圧
力が３６ｋｇｆの条件で求めたグラフである。そして、
第５図における等変位線Ｑｌ−ＱＢは、Ｑｌと（２２，
−、Ｑ７とＱｌ７）高さの差Ａｆｆが各０．００３７８
６μｍ１第６図における等応力線３１〜Ｓ８は、５１と
Ｓ２．・・・、Ｓ７とＳ８の応力（方向は等応力線に直
角）の差が各０．２１２６ｋｇｆ／ｍｍ”である。W l , W 2 = 2111Q+, distance c from the hole 64H to the connecting part of the parallel beam part and the connecting beam part -4,51
111, the radius of the hole 64■ is P-27, 5ma+, the height of the hole 64H in the direction perpendicular to the paper surface is 5 sin, and the thickness of the frame 64A is 15
This is a graph obtained under the conditions that the thickness of the upper layer and the lower layer of the upper and lower layer parallel bending portions where the hole 64H is located is 51 mm, and the pressing force of each piezo element 63 of 2 bonds is 36 kgf. and,
The equidisplacement line Ql-QB in FIG. 5 is equal to Ql and (22,
-, Q7 and Ql7) height difference Aff is 0.00378 each
6μm1 The equal stress lines 31 to S8 in FIG. 6 are 51 and S2. ..., the difference in stress between S7 and S8 (direction perpendicular to the iso-stress line) is 0.2126 kgf/mm''.
＊５．６図から、この弾性変形部材６４を用いた第１．
２図の本発明の駆動装置では、弾性変形部材６４に四隅
で固定された変位板部材６２は、傾いたり撓んだりする
こと殆どなしに、固定板部材６１に対し２ΔＱ〜３Δｇ
の範囲の平行変位をすることが分かる。*From Figure 5.6, the first.
In the drive device of the present invention shown in FIG. 2, the displacement plate member 62 fixed at the four corners to the elastic deformation member 64 has an angle of 2ΔQ to 3Δg with respect to the fixed plate member 61 with almost no inclination or bending.
It can be seen that there is a parallel displacement in the range of .
第７〜ｌＯ図は、弾性変形部材６４が枠部６４Ａの平行
梁部の孔６４Ｈの高さをｌ１ｍ＋１１．上下層平行撓み
部分の上層と下層厚さを各２■としている点が第５゜６
図の弾性変形部材６４と異なる以外は第５．６図と同じ
条件で求めたグラフである。7 to 10, the elastic deformation member 64 adjusts the height of the hole 64H in the parallel beam portion of the frame portion 64A to l1m+11. The point that the thickness of the upper layer and the lower layer of the parallel bending part of the upper and lower layers is each 2cm is 5th and 6th.
This is a graph obtained under the same conditions as FIG. 5.6 except that the elastic deformation member 64 shown in the figure is different.
第５．６図と同様の第７．８図、さらには第９゜１０図
から、この弾性変位部材６４を用いた第１．２図の本発
明の駆動装置では、変位板部材６２は、傾いたり撓んだ
りすること一層なしに、固定板部材６１に対し４Δａ〜
５Δｇの範囲の平行変位をすることが分かる。そして、
第１１．１２図のグラフも変位板部材６２の撓みが表面
最大高低差で２ΔＱ程度であることを示している。From FIG. 7.8, which is similar to FIG. 5.6, and further from FIGS. 9 and 10, in the drive device of the present invention shown in FIG. 4Δa~ with respect to the fixed plate member 61 without tilting or bending.
It can be seen that there is a parallel displacement in the range of 5Δg. and,
The graphs in FIGS. 11 and 12 also show that the deflection of the displacement plate member 62 is about 2ΔQ in terms of the maximum surface height difference.
また、第７〜１０図は、第３〜４図の駆動装置における
弾性変形部材６４の平行梁部上下層平行撓み部分の寸法
を第７〜１０図の弾性変形部材６４のそれと同様にすれ
ば、第３〜４図の駆動装置においても同様の効果が得ら
れることを示している。Further, FIGS. 7 to 10 show that if the dimensions of the parallel bending portions of the upper and lower layers of the parallel beam portion of the elastic deformation member 64 in the drive device of FIGS. 3 to 4 are the same as those of the elastic deformation member 64 of FIGS. 7 to 10, , it is shown that similar effects can be obtained with the drive devices shown in FIGS. 3 and 4.
に
すなわち、第１．２図や第３．４１１’；Ｍした本発明
の駆動装置は、第１５図の駆動装置６や走査型トンネル
顕微鏡の試料荒送り装置あるいは超精密加工機の工具送
り装置等として好適に用いられる。In other words, the drive device of the present invention shown in FIGS. 1.2 and 3.411' can be used as the drive device 6 in FIG. It is suitably used as, etc.
以上に対して、第１３．１４図は、弾性変形部材が第５
，６図の枠部６４Ａの角孔を内接円孔とし、平行梁部の
孔６４）１の高さを９１、その上方と下方の上層と下層
の厚さを３１１Ｉ１１としたものである点が第５．６図
のものと異なる以外は第５．６図と同じ条件で求めたグ
ラフである。平行支柱部のある部分でも応力勾配が強く
現れていることが第１４図から分かるように、このよう
な弾性変形部材を用いた場合は、第７〜１２図の例と比
較したときは勿論、第５．６図の例と比較しても、変位
板部材６２に傾きや撓みが生じ易い。In contrast to the above, FIGS. 13 and 14 show that the elastic deformation member is
, 6, the square hole in the frame 64A is an inscribed circular hole, the height of the hole 64) in the parallel beam part is 91, and the thickness of the upper and lower layers above and below it is 311I11. This is a graph obtained under the same conditions as in Fig. 5.6, except that it is different from that in Fig. 5.6. As can be seen from FIG. 14 that a strong stress gradient appears even in some parts of the parallel struts, when such an elastically deformable member is used, of course, when compared with the examples shown in FIGS. 7 to 12, Even compared to the example shown in FIG. 5.6, the displacement plate member 62 is more likely to be tilted or bent.
以上述べたように、本発明の微小平行変位駆動装置は、
市販のピエゾ素子をそのまま使うことができて安価に構
成され、しかも光学素子枠等を設は得る変位板部材が撓
むことなくピエゾ素子への印加電圧に応じ固定板部材に
対し安定して平行に変位するから、位相干渉計の光学素
子微小駆動装置等として好適に用いることができる。As described above, the minute parallel displacement drive device of the present invention has the following features:
Commercially available piezo elements can be used as they are, and the configuration is inexpensive.Moreover, the displacement plate member used to install the optical element frame etc. does not bend and is stably parallel to the fixed plate member according to the voltage applied to the piezo element. Therefore, it can be suitably used as an optical element micro-driving device for a phase interferometer.
第１図および第２図は本発明の駆動装置の１例を示す光
学素子保持枠も含めた側面図および光学素子保持枠を除
いた平面図、第３因および第４図は他の例を示す同様の
側面図および平面図、第５図および第６図は本発明の駆
動装置に用いられる弾性変形部材の１例を示す枠部表面
の紙面に直角な方向の等変位線グラフおよび紙面ｌこ平
行な方向の等応力線グラフ、第７図および第８図は同じ
く弾性変形部材の他の例を示す等変位線グラフおよび等
応力線グラフ、第９図および第１Ｏ図は！７゜８図の弾
性変形部材の幹部の側面図および斜視図における第５，
７図と同様の等変位線グラフ、第１１図および第１２図
は第７〜１０図の弾性変形部材の枠部上面四隅部分にス
ペーサ部を介して連結された変位板部材表面の紙面に直
角な方向の等変位線グラフ、および斜視図におけると同
様の等変位線グラフ、第１３図および＃ １４Ｉ！ｌは
比較例の弾性変形部材枠部表面の紙面に直角な方向の等
変位線グラフおよび紙面に平行な方向の等応力線グラフ
、第１５図は本発明の駆動装置が用いられる位相干渉計
の構成概要側面図、第１６図および第１７図は従来の光
学素子を微小平行移動させる駆動装置の側面図および平
面図、第１８図は第１６．１７図の駆動装置に用いられ
ているアクチュエータの構造を示す部分断面図である。
１・・・レーザ光源 ２・・−光束拡張レンズ３・
・・ハーフミラ−４・・・コリメータレンズ５・・・フ
ィゾー参照レンズ
６・・・駆動装置 ７・・・被検反射面８・・・
結像レンズ ９・・・受光検知部材５０・・・光学
素子
６０・・・微小平行変位駆動装置
６１・・・固定板部材 ６２・・・変位板部材６３
・・・ピエゾ素子 ６４・・・弾性変位部材６４Ａ
・・・枠部 ６４Ｂ・・・平行支柱部６５・・
・光学素子取付枠 ６６・・・スペーサ部６７・・・圧
力調節部材FIGS. 1 and 2 are a side view including an optical element holding frame and a plan view excluding the optical element holding frame, showing one example of the driving device of the present invention, and FIGS. 3 and 4 show other examples. 5 and 6 are similar side views and plan views, and FIGS. 5 and 6 are graphs of equal displacement lines on the surface of the frame in a direction perpendicular to the plane of the paper and the plane of the paper showing one example of the elastically deformable member used in the drive device of the present invention. Equal stress line graphs in parallel directions, FIGS. 7 and 8 are equal displacement line graphs and equal stress line graphs showing other examples of elastically deformable members, and FIGS. 9 and 10 are! No. 5 in the side view and perspective view of the trunk of the elastically deformable member in Figure 7.8.
The same displacement line graph as in Fig. 7, and Figs. 11 and 12 show the surface of the displacement plate member connected to the four corners of the upper surface of the frame of the elastically deformable member in Figs. 7 to 10 at right angles to the plane of the paper. 13 and #14I! 1 is a graph of equal displacement lines in a direction perpendicular to the plane of the paper and a graph of constant stress lines in the direction parallel to the plane of the paper on the surface of the frame portion of an elastically deformable member of a comparative example, and FIG. 15 is a graph of a phase interferometer in which the drive device of the present invention is used. 16 and 17 are a side view and a plan view of a conventional drive device that moves an optical element minutely in parallel, and FIG. 18 is a diagram of an actuator used in the drive device shown in FIGS. 16 and 17. FIG. 3 is a partial cross-sectional view showing the structure. 1... Laser light source 2... - Luminous flux expansion lens 3.
...Half mirror 4...Collimator lens 5...Fizeau reference lens 6...Drive device 7...Test reflective surface 8...
Imaging lens 9... Light reception detection member 50... Optical element 60... Minute parallel displacement drive device 61... Fixed plate member 62... Displacement plate member 63
... Piezo element 64 ... Elastic displacement member 64A
...Frame part 64B...Parallel support part 65...
・Optical element mounting frame 66... Spacer part 67... Pressure adjustment member
Claims (5)
縮方向の弾性圧力を加えるように圧接した弾性変形部材
を介して平行に連結されていて、ピエゾ素子への電圧の
印加に応じて固定板部材に対し変位板部材が平行に変位
する微小平行変位駆動装置において、弾性変形部材が、
それぞれ長さの中央から等分の中間部分２ケ所に扁平四
角断面の上層を下層とで繋がって四角断面の中層の抜け
た上下層平行撓み部分のある基本断面四角の対称的な平
行梁部と、長さの中心線に対し対称的な平面形状と平行
梁部に等しい厚さでそれぞれ平行梁部の両端部を連結す
る対称的な連結梁部とから成る枠部と、各平行梁部の中
実中央部分から枠部の下面に直角に伸びる平行支柱部と
から成り、固定板部材または変位板部材が平行支柱部の
下端に連結され、ピエゾ素子が各連結梁部の中央位置で
固定板部材または変位板部材と枠部とによって挟圧され
るように平行に配設されて、変位板部材または固定板部
材が各連結梁部の中央または中央から等分の位置で枠部
の上面にスペーサ部を介し連結されていることを特徴と
する微小平行変位駆動装置。(1) The fixed plate member and the displacement plate member are connected in parallel via an elastically deformable member that is pressed against the piezo element so as to apply elastic pressure in the direction of expansion and contraction of the piezo element, and when a voltage is applied to the piezo element, In a minute parallel displacement drive device in which a displacement plate member is displaced parallel to a fixed plate member, the elastic deformation member is
A symmetrical parallel beam part with a basic cross section of square, with parallel bending parts of the upper and lower layers, where the upper layer of the flat square cross section is connected to the lower layer and the middle layer of the square cross section is missing, at two intermediate parts equally divided from the center of the length. , a frame part consisting of a planar shape symmetrical with respect to the center line of the length and a symmetrical connecting beam part connecting both ends of the parallel beam part with the same thickness as the parallel beam parts, and each of the parallel beam parts. A fixed plate member or a displacement plate member is connected to the lower end of the parallel column part, and a piezo element is connected to the fixed plate at the center of each connecting beam part. The member or the displacement plate member and the frame are arranged parallel to each other so as to be pressed together, and the displacement plate member or the fixed plate member is placed on the upper surface of the frame at the center of each connecting beam or at an equal distance from the center. A micro-parallel displacement drive device characterized by being connected via a spacer section.
縮方向の弾性圧力を加えるように圧接した弾性変形部材
を介して平行に連結されていて、ピエゾ素子への電圧の
印加に応じて固定板部材に対し変位板部材が平行に変位
する微小平行変位駆動装置において、弾性変形部材が、
それぞれ長さの中央から等分の中間部分２ケ所に扁平四
角断面の上層と下層とで繋がって四角断面の中層の抜け
た上下層平行撓み部分のある基本断面四角の対称的な平
行梁部と、長さの中心線に対し対称的な平面形状と平行
梁部に等しい厚さでそれぞれ平行梁部の両端部を連結す
る対称的な連結梁部とから成る枠部と、各連結梁部の中
央部分から枠部の下面に直角に伸びる平行支柱部とから
成り、固定板部材または変位板部材が平行支柱部の下端
に連結され、ピエゾ素子が各平行梁部の中実な中央位置
で固定板部材または変位板部材と枠部とによって挟圧さ
れるように平行に配設されて、変位板部材または固定板
部材が各平行梁部の中実な中央位置で枠部の上面にスペ
ーサ部を介し連結されていることを特徴とする微小平行
変位駆動装置。(2) The fixed plate member and the displacement plate member are connected in parallel via an elastically deformable member that is pressed against the piezo element so as to apply elastic pressure in the direction of expansion and contraction of the piezo element, and when a voltage is applied to the piezo element, In a minute parallel displacement drive device in which a displacement plate member is displaced parallel to a fixed plate member, the elastic deformation member is
A symmetrical parallel beam part with a basic cross section of square, with parallel bending parts of the upper and lower layers where the middle layer of the square cross section is missing, connected by the upper and lower layers of the flat square cross section at two intermediate parts equally divided from the center of the length, respectively. , a frame part consisting of a planar shape symmetrical with respect to the center line of the length and symmetrical connecting beam parts connecting both ends of the parallel beam parts with the same thickness as the parallel beam parts, and each connecting beam part. It consists of a parallel support section extending from the center part at right angles to the lower surface of the frame, a fixed plate member or a displacement plate member is connected to the lower end of the parallel support section, and a piezo element is fixed at the solid center position of each parallel beam section. The plate member or the displacement plate member and the frame are arranged in parallel so as to be pressed together, and the displacement plate member or the fixed plate member has a spacer portion on the upper surface of the frame at the solid center position of each parallel beam. A micro-parallel displacement drive device, characterized in that the micro-parallel displacement drive device is connected via.
平行梁を成している特許請求の範囲第１項または第２項
記載の微小平行変位駆動装置。(3) The minute parallel displacement drive device according to claim 1 or 2, wherein the connecting beam portion of the frame portion of the elastically deformable member forms a parallel beam with a uniform square cross section.
ている部分よりも内側の中央部に孔が設けられていて、
変位板部材の孔が円孔であり、変位板部材に光学素子保
持枠が一体または取り付けで設けられている特許請求の
範囲第１項または第２項記載の微小平行変位駆動装置。(4) A hole is provided in the central part of the fixed plate member and the displacement plate member, which is inside the part connected to the elastic deformation member,
3. The minute parallel displacement drive device according to claim 1, wherein the hole in the displacement plate member is a circular hole, and the optical element holding frame is provided integrally or attached to the displacement plate member.
れ別体から成っていて、それらの連結がねじによる締付
でなされている特許請求の範囲第１項または第２項に記
載の微小平行変位駆動装置。(5) The microscopic device according to claim 1 or 2, wherein the fixed plate member, the displacement plate member, and the elastically deformable member are each made of separate bodies, and their connection is made by tightening with screws. Parallel displacement drive.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9123290A JP2847560B2 (en) | 1990-04-05 | 1990-04-05 | Small parallel displacement drive |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9123290A JP2847560B2 (en) | 1990-04-05 | 1990-04-05 | Small parallel displacement drive |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03294137A true JPH03294137A (en) | 1991-12-25 |
| JP2847560B2 JP2847560B2 (en) | 1999-01-20 |
Family
ID=14020674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9123290A Expired - Lifetime JP2847560B2 (en) | 1990-04-05 | 1990-04-05 | Small parallel displacement drive |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2847560B2 (en) |
-
1990
- 1990-04-05 JP JP9123290A patent/JP2847560B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JP2847560B2 (en) | 1999-01-20 |
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