JPH03278319A - Perpendicular magnetic recording medium - Google Patents
Perpendicular magnetic recording mediumInfo
- Publication number
- JPH03278319A JPH03278319A JP7982390A JP7982390A JPH03278319A JP H03278319 A JPH03278319 A JP H03278319A JP 7982390 A JP7982390 A JP 7982390A JP 7982390 A JP7982390 A JP 7982390A JP H03278319 A JPH03278319 A JP H03278319A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- film
- thickness
- cocr
- recording
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010410 layer Substances 0.000 claims abstract description 59
- 229910000684 Cobalt-chrome Inorganic materials 0.000 claims abstract description 26
- 239000010952 cobalt-chrome Substances 0.000 claims abstract description 26
- 239000002344 surface layer Substances 0.000 claims abstract description 20
- 229910002546 FeCo Inorganic materials 0.000 claims abstract description 12
- 229920006254 polymer film Polymers 0.000 claims abstract description 11
- 238000007733 ion plating Methods 0.000 claims description 2
- 230000005389 magnetism Effects 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims description 2
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 230000004907 flux Effects 0.000 abstract description 4
- 239000000696 magnetic material Substances 0.000 abstract description 3
- 239000010408 film Substances 0.000 description 26
- 230000000052 comparative effect Effects 0.000 description 20
- 238000000034 method Methods 0.000 description 11
- 239000002356 single layer Substances 0.000 description 10
- 230000005415 magnetization Effects 0.000 description 9
- 238000010586 diagram Methods 0.000 description 6
- 230000000694 effects Effects 0.000 description 4
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 3
- 229910052731 fluorine Inorganic materials 0.000 description 3
- 239000011737 fluorine Substances 0.000 description 3
- 239000010687 lubricating oil Substances 0.000 description 3
- 238000001755 magnetron sputter deposition Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000011230 binding agent Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000005347 demagnetization Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- AJCDFVKYMIUXCR-UHFFFAOYSA-N oxobarium;oxo(oxoferriooxy)iron Chemical compound [Ba]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O.O=[Fe]O[Fe]=O AJCDFVKYMIUXCR-UHFFFAOYSA-N 0.000 description 1
- 230000002250 progressing effect Effects 0.000 description 1
Landscapes
- Compositions Of Macromolecular Compounds (AREA)
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Abstract
Description
【発明の詳細な説明】
イ１発明の目的
〔産業上の利用分野〕
本発明は、パーソナルコンピュータの外部記憶装置等に
用いる垂直磁気記録媒体に関する。DETAILED DESCRIPTION OF THE INVENTION A1.Object of the invention [Field of industrial application] The present invention relates to a perpendicular magnetic recording medium used in external storage devices of personal computers and the like.
近年、パーソナル・コンピュータなどに使用される外部
記憶装置の小型化および大容量化の要求に伴い、フロッ
ピーディスク型磁気記録装置の高密度記録化が進められ
ている。In recent years, with the demand for smaller size and larger capacity of external storage devices used in personal computers and the like, floppy disk type magnetic recording devices are being made to have higher recording density.
この高密度化の方法には、記録周波数を高めてｌトラッ
クの記録量を増やすｒ線記録密度の増加」と、トラック
ピッチ・トラック幅を狭くすることによりディスク１枚
あたりのトラック数を増やす「トラック密度の増加」の
２通りがある。このうち、［線記録密度の増加Ｊについ
て垂直磁気記録媒体の利用が検討され、バリウムフェラ
イトによる塗布型ディスクが一部実用化されている。こ
れは、従来の長手記録方式による媒体に比べ、原理的に
反磁界がないため高密度記録になればなる程磁化が安定
するため、従来に比べ数倍の記録密度が簡単に行える。Methods for increasing density include increasing the R-line recording density by increasing the recording frequency and increasing the recording amount per L track, and increasing the number of tracks per disk by narrowing the track pitch and track width. There are two ways to increase track density. Among these, the use of perpendicular magnetic recording media has been studied to increase the linear recording density, and some coated disks made of barium ferrite have been put into practical use. This is because, compared to conventional longitudinal recording media, there is no demagnetizing field in principle, so the higher the recording density, the more stable the magnetization becomes, making it easier to achieve recording densities several times higher than in the past.
ここで更に線記録密度を増加させるため、塗布型で用い
るバインダーなどの非磁性体を含まない、ＣｏＣｒ膜に
代表される金属薄膜による垂直磁気記録媒体の検討が進
められている。In order to further increase the linear recording density, studies are underway on perpendicular magnetic recording media that do not contain a non-magnetic material such as a binder used in a coating type and are made of a metal thin film, typified by a CoCr film.
一方、「トラック密度の増加」については、３．５イン
チフロッピーディスクにおいて２００ＴＰＩを越えると
サーボが必要とされており、従来より、第４図の磁気記
録媒体の平面概略図に示すように、磁気記録媒体表面の
磁気記録層８において、トラック中のデータ領域５の一
部にサーボ領域６を設け、定期的にサーボ信号を取り込
んでヘッドの位置を調整する「セクター・サーボ方式」
が採用され、４００〜５００ＴＰＩが実用化されつつあ
る。On the other hand, regarding "increase in track density," servo is required when the 3.5-inch floppy disk exceeds 200 TPI. In the magnetic recording layer 8 on the surface of the recording medium, a servo area 6 is provided in a part of the data area 5 in the track, and servo signals are periodically read in to adjust the head position using the "sector servo method."
has been adopted, and 400 to 500 TPI is being put into practical use.
更に、第５図の磁気記録媒体の一部拡大断面概略図に示
すように、磁気記録媒体の高分子フィルム４上の磁気記
録層の中で、データを記録する所定厚さの表層９より深
い深層１０にサーボ信号を記録する「埋め込みサーボ方
式」を採用すれば、サーボ信号のためにデータ領域が縮
小されることもなくなるため、大量のデータを記録でき
、長手記録方式についてではあるが検討が進められてい
る。Furthermore, as shown in the partially enlarged cross-sectional schematic diagram of the magnetic recording medium in FIG. If we adopt the "embedded servo method" that records servo signals in the deep layer 10, the data area will not be reduced due to the servo signals, so a large amount of data can be recorded. It is progressing.
データの記録再生は磁気ヘッド７により行なう。Recording and reproduction of data is performed by a magnetic head 7.
従って、金属薄膜による垂直磁気記録媒体（以下垂直媒
体と称す）による線記録密度の向上と、 「埋め込みサ
ーボ方式Ｊによるトラック密度の向上を実現できれば、
−挙に土数倍の記憶容量が達成できる。Therefore, if it is possible to improve the linear recording density using a perpendicular magnetic recording medium (hereinafter referred to as perpendicular medium) made of a metal thin film, and to improve the track density using the embedded servo method J, then
- It is possible to achieve a storage capacity that is twice as large as that of Earth.
一般には、上記「埋め込みサーボ方式」のサーボ信号の
記録には低周波を、データ信号の記録には高周波を使用
し、読み出し信号をフィルタで分離する。この分離され
たサーボ信号を取り込み、ヘッド位置の調整が行なわれ
る。Generally, in the above-mentioned "embedded servo method", a low frequency is used to record a servo signal, a high frequency is used to record a data signal, and the read signal is separated by a filter. This separated servo signal is taken in to adjust the head position.
ここで、塗布型の長手記録の場合、第５図の深層１０に
は保持力（Ｈｃ）の大きな層を、表層９にはＨｃの小さ
な層を形成することで、表Ｍ９のデータ信号のオーバー
ライド特性を向上し、深層１０のオーバーライド特性を
逆に悪くさせることにより、安定なデータ信号およびサ
ーボ信号が得られることが知られている。これは、磁気
ヘッド７が発生する磁力線の届く深さが、高周波になる
程浅くなるため、表層９ではＨｃを小さくすることによ
り、周波数の高いデータ信号を十分に記録させ、深層１
０ではＨｃを大きくすることにより、データ信号の記録
を繰り返してもサーボ信号の記録が変化しないようにし
たものである。In the case of coating-type longitudinal recording, a layer with a large coercive force (Hc) is formed in the deep layer 10 of FIG. 5, and a layer with a small Hc is formed in the surface layer 9, thereby overriding the data signal in Table M9. It is known that stable data signals and servo signals can be obtained by improving the characteristics and conversely worsening the override characteristics of the deep layer 10. This is because the depth that the magnetic field lines generated by the magnetic head 7 reach becomes shallower as the frequency increases, so by reducing Hc in the surface layer 9, high frequency data signals can be sufficiently recorded, and
0, by increasing Hc, the recording of the servo signal does not change even if the recording of the data signal is repeated.
しかしながら、垂直磁気記録方式では、ヘッドが発生す
る磁力線が長手記録方式に比べ比較的深くまで届き、サ
ーボ信号の記録を消去し易くしてしまう。更に、第５図
の深層１０をＨｃが３０００Ｏｅ程度の高保持力にし、
表層９を１５００Ｏｅ程度の低保持力の二層構造にした
垂直媒体の場合、再生出力が、深層１０を付けない単層
構造ものに比べ小さくなるということが起こった。However, in the perpendicular magnetic recording method, the lines of magnetic force generated by the head reach relatively deeper than in the longitudinal recording method, making it easier to erase the servo signal recording. Furthermore, the deep layer 10 in Fig. 5 is made to have a high retention force of about 3000 Oe,
In the case of a vertical medium in which the surface layer 9 has a two-layer structure with a low coercive force of about 1500 Oe, the reproduction output is smaller than that of a single-layer structure without the deep layer 10.
即ち、単層構造のＣｏＣｒ垂直媒体と、深層１０として
Ｈｃの大きなＣｏＣｒ膜を形成した、二層構造のＣｏＣ
ｒ垂直媒体についての再生出力の記録密度特性を第６図
に示す。ここで、記録電流はそれぞれの垂直媒体で１０
０ＫＦＲＰＩでの飽和記録電流とした。That is, a CoCr vertical medium with a single layer structure and a CoCr film with a double layer structure in which a CoCr film with a large Hc is formed as the deep layer 10.
FIG. 6 shows the recording density characteristics of the reproduction output for the r-perpendicular medium. Here, the recording current is 10
The saturation recording current was taken as 0KFRPI.
第６図より、二層構造垂直媒体の記録密度特性１２が、
低記録密度領域での再生出力が大きいものの、データ信
号として使用される高記録密度領域では、単層垂直媒体
の記録密度特性１１に比べて小さいことが分かる。From FIG. 6, the recording density characteristics 12 of the two-layer vertical medium are:
It can be seen that although the reproduction output is large in the low recording density area, it is small in the high recording density area used as a data signal compared to the recording density characteristic 11 of the single layer perpendicular medium.
本発明はかかる問題を解決し、データの再生出力を大き
くし得て、且つサーボ信号の記録を変化せず保持し得る
垂直磁気記録媒体を提供しようとするものである。The present invention aims to solve these problems and provide a perpendicular magnetic recording medium that can increase the data reproduction output and maintain the recording of servo signals without change.
口０発明の構成
〔課題を解決するための手段〕
本発明は、高分子フィルム上にスパッタ法、蒸着法、イ
オンプレーティング法などにより磁気記録層を形成する
垂直磁気記録媒体において、前記高分子フィルム上の深
層を厚さ０．３μｍ以上でＨｃが３０００Ｏｅ以上のＣ
ｏＣｒ膜とし、その上の中間層を厚さ１００〜５００オ
ングストロームのＦｅＣｏ膜とし、更にその上の表層を
厚さ０．２ＡＬｍ以下のＣｏＣｒ膜としたことを特徴と
する埋め込みサーボ方式用の垂直磁気記録媒体である。Structure of the Invention [Means for Solving the Problems] The present invention provides a perpendicular magnetic recording medium in which a magnetic recording layer is formed on a polymer film by sputtering, vapor deposition, ion plating, or the like. The deep layer on the film is C with a thickness of 0.3 μm or more and an Hc of 3000 Oe or more.
Perpendicular magnetism for a buried servo system, characterized in that an oCr film is used, an intermediate layer thereon is a FeCo film with a thickness of 100 to 500 angstroms, and a surface layer thereon is a CoCr film with a thickness of 0.2 ALm or less. It is a recording medium.
本発明者は鋭意検討の結果、二層構造の垂直媒体の再生
出力が高記録密度領域において小さくなる原因は、表層
におけるＣｏＣｒ膜の初期配向層の厚さが極めて薄いた
めによるものであることを見出した。As a result of extensive studies, the inventor of the present invention found that the reason why the reproduction output of a two-layer perpendicular medium decreases in the high recording density region is that the thickness of the initial orientation layer of the CoCr film in the surface layer is extremely thin. I found it.
通常のＣｏＣｒ単層垂直媒体の場合には、高分子フィル
ムとＣｏＣｒ膜との境界からある厚さにおいて、垂直方
向の磁化成分が少なく、面内方向の磁化成分の多い初期
配向層が形成され、これが再生出力を大きくしているこ
とが知られている。これは、初期配向層の面内磁化成分
によって、垂直媒体に記録された磁化モードが隣接磁化
領域と連続する馬蹄形に形成されることにより、磁性層
の高分子フィルム側での反磁界が低減され、磁束の発生
を大きくしているためとされている。In the case of a normal CoCr single-layer perpendicular medium, an initial orientation layer is formed at a certain thickness from the boundary between the polymer film and the CoCr film, with a small magnetization component in the perpendicular direction and a large magnetization component in the in-plane direction. It is known that this increases the playback output. This is because the magnetization mode recorded in the perpendicular medium is formed into a horseshoe shape that is continuous with the adjacent magnetization region due to the in-plane magnetization component of the initial orientation layer, which reduces the demagnetizing field on the polymer film side of the magnetic layer. This is said to be due to the increased generation of magnetic flux.
従って、深層と表層との間に面内成分の磁化を持った中
間層を形成すれば、表層と中間層とで上と同様に反磁界
が低減され、再生出力を増大することが想定される。Therefore, if an intermediate layer with in-plane component magnetization is formed between the deep layer and the surface layer, the demagnetizing field will be reduced between the surface layer and the intermediate layer in the same way as above, and the reproduction output will be increased. .
ここで、中間層の条件としては、表層の高密度記録を妨
げるものであってはならないため、中間層のＨｃは表層
に影響を与えない６００Ｏｅ以下である必要があり、Ｅ
ｃが１０Ｏｅ以下では容易に減磁による隣接磁化領域と
の磁化の不連続が発生し、出力低下を招くため良くない
、また、表層の垂直配向性を妨げない程度の薄さである
５００オングストローム以下が必要となり、また隣接磁
化領域との磁化の連続を保つ１００オングストローム以
上が必要となり、このため高磁束密度材料であることが
必要となる。Here, the conditions for the intermediate layer are that it must not interfere with high-density recording in the surface layer, so the Hc of the intermediate layer must be 600 Oe or less, which does not affect the surface layer, and the E
If c is less than 10 Oe, discontinuity of magnetization with adjacent magnetized regions will easily occur due to demagnetization, which is not good, resulting in a decrease in output.Also, it is less than 500 angstroms, which is thin enough not to interfere with the vertical orientation of the surface layer. In addition, a thickness of 100 angstroms or more is required to maintain continuity of magnetization with adjacent magnetized regions, and therefore a high magnetic flux density material is required.
これらの条件より、中間層としては半硬磁性で磁性体中
最大の飽和磁束密度を持っＦｅＣｏ膜が最適である。Under these conditions, an FeCo film, which is semi-hard magnetic and has the highest saturation magnetic flux density among magnetic materials, is optimal as the intermediate layer.
以下に本発明の実施例と、従来の比較例との実験結果を
図を参照して詳しく説明する。Below, experimental results of an example of the present invention and a conventional comparative example will be explained in detail with reference to the drawings.
第１図は本発明の実施例を示す垂直媒体の一部拡大断面
概略図である。高分子フィルム４上に深層３としてＣｏ
ＣｒＭを形成し、その上に中間層２としてＦｅＣｏ膜を
形成し、その上に表層１のＣｏＣｒ膜を形成した垂直媒
体である。第１図に示す垂直媒体による実施例と、第４
図に示した単層構造、及び第５図に示した二層構造のＣ
ｏＣｒ膜からなる垂直媒体による比較例とを、それぞれ
試作し試験したので以下に述べる。FIG. 1 is a partially enlarged sectional schematic diagram of a vertical medium showing an embodiment of the present invention. Co as the deep layer 3 on the polymer film 4
This is a vertical medium in which CrM is formed, a FeCo film is formed thereon as an intermediate layer 2, and a CoCr film as a surface layer 1 is formed thereon. The embodiment with vertical media shown in FIG.
C of the single-layer structure shown in the figure and the double-layer structure shown in Fig. 5.
A comparative example using a vertical medium made of an oCr film was prototyped and tested, and will be described below.
比較例１
厚さ３０μ墓のポリイミドフィルム製の高分子フィルム
上に、マグネトロンスパッタ法により０．１μ票厚単層
のＣｏＣｒ膜の垂直磁気記録層を形成し、さらに厚さ５
０人のフッソ系液体潤滑剤をスピンコード法により塗布
した。このときのＣｏＣｒターゲットはＣｒ ： １８
．５ｗｔ％のものを使用した。また、作製されたＣｏＣ
ｒの垂直方向のｔｉｃは１５００Ｏｅとなるように作製
した。Comparative Example 1 A perpendicular magnetic recording layer of a single layer of CoCr film with a thickness of 5 μm was formed by magnetron sputtering on a polymer film made of polyimide film with a thickness of 30 μm.
A fluorine-based liquid lubricant was applied by a spin cord method. The CoCr target at this time was Cr: 18
．． 5 wt% was used. In addition, the prepared CoC
The tic in the vertical direction of r was manufactured to be 1500 Oe.
比較例２
比較例１のターゲットを使用して、第５図に示す如く厚
さ３０μｍのポリイミドフィルム製の高分子フィルム４
上に、マグネトロンスパッタ法により、０．４μ層厚の
ＣｏＣｒ膜をＢｅが３０００Ｏｅとなるように深層１０
を形成し、更にその上に厚さ０．１μｍ、Ｈｃ１５００
ＯｅのＣｏＣｒ膜を表層９として形成し、さらに５０人
のフッソ系液体潤滑剤をスピンコード法により塗布した
。Comparative Example 2 Using the target of Comparative Example 1, a polymer film 4 made of polyimide film with a thickness of 30 μm was prepared as shown in FIG.
On top, a CoCr film with a thickness of 0.4 μm was deposited at a depth of 10 μm using magnetron sputtering so that Be was 3000 Oe.
is formed, and furthermore, a layer of Hc1500 with a thickness of 0.1 μm is formed on it.
A CoCr film of Oe was formed as the surface layer 9, and a 50% fluorine-based liquid lubricant was further applied by a spin code method.
実施例１
第１図に示す如く、深層３のＣｏＣｒ膜と表層１のＣｏ
Ｃｒ膜とを比較例２と同じに形威し、その間に中間層２
としてＦ ｅＣｏ膜を５０人の厚さにマグネトロンスパ
ッタ法により形成した。ここで、ＦｅＣｏの組成を５０
： ５０ｗｔ％とじた。表面へのフッ素系液体潤滑剤
の塗布は比較例１，２と同じである。Example 1 As shown in FIG. 1, the CoCr film in the deep layer 3 and the Co in the surface layer 1
The Cr film was formed in the same manner as in Comparative Example 2, and the intermediate layer 2 was
A FeCo film was formed to a thickness of 50 mm by magnetron sputtering. Here, the composition of FeCo is 50
: 50wt% binding. The application of the fluorine-based liquid lubricant to the surface was the same as in Comparative Examples 1 and 2.
実施例２
実施例１において、中間層２のＦｅＣｏ膜の厚さを１０
０人とした。Example 2 In Example 1, the thickness of the FeCo film of intermediate layer 2 was changed to 10
There were 0 people.
実施例３
実施例１において、中間層２のｐｅＣｏ膜の厚さを３０
０人とした。Example 3 In Example 1, the thickness of the peCo film of intermediate layer 2 was set to 30
There were 0 people.
実施例４
実施例１において、中間層２のＦｅＣｏ膜の厚さを５０
０人とした。Example 4 In Example 1, the thickness of the FeCo film of intermediate layer 2 was set to 50
There were 0 people.
実施例５
実施例１において、中間層２のＦｅＣｏ膜の厚さを７０
０人とした。Example 5 In Example 1, the thickness of the FeCo film of intermediate layer 2 was set to 70
There were 0 people.
以上の比較例１．２および実施例１，２，３，４．５に
ついて３．５＃７レキシブル磁気デイスクを形成し、３
０ＫＦＲＰＩ以上の再生出力の記録密度特性を測定した
結果を第２図に示す。このときの磁気ヘッドはトラック
幅６０μｍ、ギャップ長０．２μｍのＭＩＧヘッドを使
用した。A 3.5#7 flexible magnetic disk was formed for the above Comparative Example 1.2 and Examples 1, 2, 3, and 4.5.
FIG. 2 shows the results of measuring recording density characteristics for reproduction outputs of 0KFRPI or more. The magnetic head used at this time was an MIG head with a track width of 60 μm and a gap length of 0.2 μm.
比較例１の媒体は通常のＣｏＣｒ単層垂直媒体であり、
比較例２は中間層を持たない二層構造のＣｏＣｒ垂直媒
体である。The medium of Comparative Example 1 is a normal CoCr single-layer vertical medium,
Comparative Example 2 is a two-layer CoCr vertical medium without an intermediate layer.
二層構造の比較例２の特性１４の方が、単層構造の比較
例１の特性１３より再生出力が小さいことが分かる。It can be seen that characteristic 14 of Comparative Example 2 with a two-layer structure has a smaller reproduction output than characteristic 13 of Comparative Example 1 with a single-layer structure.
一方、実施例２，３．４の特性１６．１７．１８は、比
較例１．２の特性１３．１４に比べて再生出力が大きく
なっているが、実施例１．５の特性１５．１９は比較例
２の特性１４とあまり変化はない。On the other hand, characteristics 16, 17, and 18 of Examples 2 and 3.4 have larger reproduction outputs than characteristics 13, 14 of Comparative Example 1.2, but characteristics 15, 19 of Example 1.5 is not much different from characteristic 14 of comparative example 2.
更に、比較例１，２および実施例１，２，３，４．５に
ついて、５ ＫＦＲＰＩを記録した後に、１００ＫＦＲ
ＰＩを記録し、そのときの５ ＫＦＲＰＩの再生出力を
第３図に示す。これは低密度記録（サーボ信号）に対す
る高密度記録（データ信号）のオーバーライド特性を示
すもので、比較例１，２および実施例１についてオーバ
ーライド特性が良くないことが分かる。従って。Furthermore, for Comparative Examples 1 and 2 and Examples 1, 2, 3, and 4.5, after recording 5 KFRPI, 100 KFRPI was recorded.
PI was recorded, and the playback output of 5 KFRPI at that time is shown in FIG. This shows the override characteristics of high-density recording (data signal) with respect to low-density recording (servo signal), and it can be seen that the override characteristics of Comparative Examples 1 and 2 and Example 1 are not good. Therefore.
「埋め込みサーボ方式」用垂直磁気記録用媒体は、中間
層として１００〜５００オングストロームの厚さのＦｅ
Ｃｏ膜を形成すれば良い。The perpendicular magnetic recording medium for the "embedded servo method" has a Fe layer with a thickness of 100 to 500 angstroms as an intermediate layer.
A Co film may be formed.
なお、本発明の実施例において、ＣｏＣｒ層の厚さを深
層で０，４μ層５表層で０．１μ脂としたが、ＦｅＣｏ
Ｍを中間層として形成する効果は、ＣｏＣｒ膜の影響を
受けないため、ＣｏＣｒ膜の厚さは本発明の実施例に制
限されない。In the examples of the present invention, the thickness of the CoCr layer was 0.4μ in the deep layer and 0.1μ in the surface layer.
Since the effect of forming M as an intermediate layer is not affected by the CoCr film, the thickness of the CoCr film is not limited to the embodiments of the present invention.
ハ９発明の効果
〔発明の効果〕
以上述べたように本発明によれば、 「埋め込みサーボ
方式」により、安定したサーボ信号およびデータ信号を
得ることができる垂直磁気記録媒体を提供することが出
来る。C.9 Effects of the Invention [Effects of the Invention] As described above, according to the present invention, it is possible to provide a perpendicular magnetic recording medium that can obtain stable servo signals and data signals using the "embedded servo method". .
第１図は、本発明の実施例を示す垂直磁気記録媒体の一
部拡大断面概略図。
第２図は、本発明の実施例と比較例の記録密度特性図。
第３図は５本発明の実施例と比較例のオーバーライド特
性図。
第４図は、セクターサーボ方式を示す磁気記録媒体の平
面概略図。
第５図は、埋め込みサーボ方式を示す磁気記録媒体の一
部拡大断面概略図。
第６図は、ＣｏＣｒ単層垂直媒体とＣｏＣｒ二層構造垂
直媒体の記録密度特性図ある。
１．９・・・表層、２・・・中間層、３．１０・・・深
層、４・・・高分子フィルム、５・・・データ領域、６
・・・サーボ領域、７・・・磁気ヘッド、８・・・磁気
記録層、１１・・・単層垂直媒体の記録密度特性、１２
・・・二層構造垂直媒体の記録密度特性、１３・・・比
較例１の特性、１４・・・比較例２の特性、１５・・・
実施例１の特性、１６・・・実施例２の特性、１７・・
・実施例３の特性、１８・・・実施例４の特性、１９・
・・実施例５の特性。FIG. 1 is a partially enlarged schematic cross-sectional view of a perpendicular magnetic recording medium showing an embodiment of the present invention. FIG. 2 is a recording density characteristic diagram of an example of the present invention and a comparative example. FIG. 3 is an override characteristic diagram of five embodiments of the present invention and a comparative example. FIG. 4 is a schematic plan view of a magnetic recording medium showing a sector servo system. FIG. 5 is a partially enlarged cross-sectional schematic diagram of a magnetic recording medium showing an embedded servo system. FIG. 6 is a recording density characteristic diagram of a CoCr single-layer vertical medium and a CoCr double-layer vertical medium. 1.9... Surface layer, 2... Intermediate layer, 3.10... Deep layer, 4... Polymer film, 5... Data area, 6
... Servo area, 7... Magnetic head, 8... Magnetic recording layer, 11... Recording density characteristics of single layer perpendicular medium, 12
...Recording density characteristics of two-layer vertical medium, 13...Characteristics of Comparative Example 1, 14...Characteristics of Comparative Example 2, 15...
Characteristics of Example 1, 16... Characteristics of Example 2, 17...
・Characteristics of Example 3, 18...Characteristics of Example 4, 19.
...Characteristics of Example 5.
Claims (1)
プレーティング法などにより磁気記録層を形成する垂直
磁気記録媒体において、前記高分子フィルム上の深層を
厚さ０．３μｍ以上でＨｃが３０００Ｏｅ以上のＣｏＣ
ｒ膜とし、その上の中間層を厚さ１００〜５００オング
ストロームのＦｅＣｏ膜とし、更にその上の表層を厚さ
０．２μｍ以下のＣｏＣｒ膜としたことを特徴とする埋
め込みサーボ方式用の垂直磁気記録媒体。1. In a perpendicular magnetic recording medium in which a magnetic recording layer is formed on a polymer film by sputtering, vapor deposition, ion plating, etc., the deep layer on the polymer film has a thickness of 0.3 μm or more and an Hc of 3000 Oe. CoC of more than
perpendicular magnetism for an embedded servo system, characterized in that the intermediate layer thereon is a FeCo film with a thickness of 100 to 500 angstroms, and the surface layer thereon is a CoCr film with a thickness of 0.2 μm or less. recoding media.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7982390A JPH03278319A (en) | 1990-03-27 | 1990-03-27 | Perpendicular magnetic recording medium |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7982390A JPH03278319A (en) | 1990-03-27 | 1990-03-27 | Perpendicular magnetic recording medium |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03278319A true JPH03278319A (en) | 1991-12-10 |
Family
ID=13700929
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7982390A Pending JPH03278319A (en) | 1990-03-27 | 1990-03-27 | Perpendicular magnetic recording medium |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03278319A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8380114B2 (en) | 2009-03-12 | 2013-02-19 | Ricoh Company, Ltd. | Image forming apparatus and method |
-
1990
- 1990-03-27 JP JP7982390A patent/JPH03278319A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8380114B2 (en) | 2009-03-12 | 2013-02-19 | Ricoh Company, Ltd. | Image forming apparatus and method |
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