JPH03270881A - Lapping roll - Google Patents
Lapping rollInfo
- Publication number
- JPH03270881A JPH03270881A JP2066161A JP6616190A JPH03270881A JP H03270881 A JPH03270881 A JP H03270881A JP 2066161 A JP2066161 A JP 2066161A JP 6616190 A JP6616190 A JP 6616190A JP H03270881 A JPH03270881 A JP H03270881A
- Authority
- JP
- Japan
- Prior art keywords
- base material
- roll
- processing
- fluid
- contact
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 claims abstract description 32
- 239000012530 fluid Substances 0.000 claims abstract description 9
- 239000007788 liquid Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 description 3
- 239000010408 film Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000007779 soft material Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は加工面の微小な突起取り、異物除去を行うため
のラッピング用ロールに関する。DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a lapping roll for removing minute protrusions and foreign matter from a processed surface.
［従来の技術］
例えば、液晶表示素子用基板には、配向膜形成前の下地
材として、カラーフィルタ、絶縁膜、薄膜トランジスタ
等が塗布されている。これらの下地材の表面は、数ＩＬ
ｍ程度の微小な突起または異物が付着しているので、こ
れを除去する加工を必要とする。[Prior Art] For example, a color filter, an insulating film, a thin film transistor, etc. are coated on a substrate for a liquid crystal display element as a base material before forming an alignment film. The surface of these base materials is several IL
Since microscopic protrusions or foreign matter of about m size are attached, processing is required to remove them.
従来、かかる面加工用として、表面にパフまたはラッピ
ング材を貼付けたゴムローラを用い、このゴムローラを
回転させて基板の下地材に当てて加工している。Conventionally, for such surface processing, a rubber roller with a puff or wrapping material pasted on the surface is used, and the rubber roller is rotated and applied to the base material of the substrate for processing.
［発明が解決しようとする課題］
上記従来技術は、数Ｊｉｍ程度の突起を除去するために
、ゴムローラを加工面にソフトに当ててデリケートな加
工を行うことが困難であった。また加工面のうねりに追
従できなく、傷及び削り過ぎが発生するという問題があ
った。[Problems to be Solved by the Invention] In the above-mentioned conventional technology, it is difficult to perform delicate processing by softly applying a rubber roller to the processing surface in order to remove protrusions of about several Jim. Further, there was a problem in that it could not follow the undulations of the machined surface, resulting in scratches and over-shaving.
本発明の目的は、デリケートな加工が可能なラッピング
用ロールを提供することにある。An object of the present invention is to provide a wrapping roll that can be delicately processed.
［ａｌｌを解決するための手段］
上記目的は、流体でふくらませた筒状体と、この筒状体
の表面に設けられたラッピング材とでロールを構成する
ことにより達成される。[Means for Solving All] The above object is achieved by constructing a roll with a cylindrical body inflated with fluid and a wrapping material provided on the surface of this cylindrical body.
［作用］
ロールを回転させて加工材の加工面に当て、加工材また
はロールを往復運動させて加工する。この場合、ラッピ
ング材は流体の圧力によって下地材の表面に当るので、
下地材の表面に部分的にうねりがある場合には、それに
応じてロールの下地材への当接面が容易に変化する。従
って、削り過ぎることなく数ＩＬｍ程度の微小な突起を
容易に除去できる。また下地材のうねりにも容易に追従
できると共に、下地材にソフトに当てることもできる。[Operation] The roll is rotated and applied to the processing surface of the workpiece, and the workpiece or roll is reciprocated and processed. In this case, the wrapping material hits the surface of the base material due to the pressure of the fluid, so
When the surface of the base material is partially undulated, the contact surface of the roll to the base material changes easily accordingly. Therefore, minute protrusions of about several ILm can be easily removed without excessive cutting. In addition, it can easily follow the undulations of the base material and can also be applied softly to the base material.
［実施例］ 以下、本発明の一実施例を図により説明する。[Example] Hereinafter, one embodiment of the present invention will be described with reference to the drawings.
内部が中空で軟質材よりなる筒状体１には、表面にパフ
またはラフピングテープ等のラッピング材２が貼付けら
れており、内部には、流体３が封入されて筒状体ｌはふ
くらまされている。このように形成されたロール４は、
中心部が回転軸５に固定されている。A cylindrical body 1 having a hollow interior and made of a soft material has a wrapping material 2 such as puff or rough wrapping tape affixed to its surface, and a fluid 3 is sealed inside to inflate the cylindrical body 1. has been done. The roll 4 formed in this way is
The center portion is fixed to a rotating shaft 5.
今、ガラス基板等よりなる基材６上に下地材７が設けら
れた加工材８の前記下地材７の表面を加工する場合につ
いて説明する９回転軸５を回転させた状態で加工材８の
下地材７の表面をａ−ル４に当て、加工材８を往復運動
させて加工する。この場合、ラッピング材２ば流体３の
圧力によって下地材７の表面に当るので、下地材７の表
面に部分的にうねりがある場合には、それに応じてロー
ル４の下地材７への当接面が容易に変化する。Now, we will explain the case of processing the surface of the base material 7 of the workpiece 8 in which the base material 7 is provided on the base material 6 made of a glass substrate or the like. The surface of the base material 7 is applied to the a-rule 4, and the workpiece 8 is reciprocated and processed. In this case, the wrapping material 2 hits the surface of the base material 7 due to the pressure of the fluid 3, so if the surface of the base material 7 is partially undulated, the roll 4 will contact the base material 7 accordingly. Surface changes easily.
従って、削り過ぎることなく数Ｂｍ程度の微小な突起を
容易に除去できる。また下地材７のうねりにも容易に追
従できると共に、下地材７にソフトに当てることもでき
る。このため、非常にデリケートな加工が可能である。Therefore, minute protrusions of several Bm can be easily removed without excessive cutting. Moreover, it can easily follow the undulations of the base material 7, and can also be softly applied to the base material 7. Therefore, very delicate processing is possible.
［発明の効果］
以上の説明から明らかなように、本発明によれば、流体
でふくらませた筒状体と、この筒状体の表面に設けられ
たラッピング材とからなるので、非常にデリケートな加
工が可能である。[Effects of the Invention] As is clear from the above description, the present invention consists of a cylindrical body inflated with fluid and a wrapping material provided on the surface of this cylindrical body, so it is very delicate. Processing is possible.
図は本発明の一実施例を示し、第１図は斜視図、第２図
は断面図である。
ｌ二筒状体、 ２：ラッピング材。
３：流体、 ４：ロール、
５：＠転軸。
目面Ｕ’ｒ 浄’７’ｊ （内容に変更なし）第１図
第２図
手続補正書Ｃ目発）
平成２年３月２６日The figures show one embodiment of the present invention, with FIG. 1 being a perspective view and FIG. 2 being a sectional view. l Two cylindrical bodies, 2: Wrapping material. 3: Fluid, 4: Roll, 5: @Rotating axis. (No change in content) Figure 1 Figure 2 Procedural Amendment C Item) March 26, 1990
Claims (1)
に設けられたラッピング材とからなることを特徴とする
ラッピング用ロール。(1) A wrapping roll comprising a cylindrical body inflated with fluid and a wrapping material provided on the surface of the cylindrical body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2066161A JPH03270881A (en) | 1990-03-16 | 1990-03-16 | Lapping roll |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2066161A JPH03270881A (en) | 1990-03-16 | 1990-03-16 | Lapping roll |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03270881A true JPH03270881A (en) | 1991-12-03 |
Family
ID=13307854
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2066161A Pending JPH03270881A (en) | 1990-03-16 | 1990-03-16 | Lapping roll |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03270881A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9656910B2 (en) | 2012-11-29 | 2017-05-23 | Corning Incorporated | Methods of fabricating glass articles by laser damage and etching |
-
1990
- 1990-03-16 JP JP2066161A patent/JPH03270881A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9656910B2 (en) | 2012-11-29 | 2017-05-23 | Corning Incorporated | Methods of fabricating glass articles by laser damage and etching |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR920000051A (en) | Double-sided optical disc and its production method | |
| JPS588488B2 (en) | Manufacturing method of liquid crystal display | |
| JPH03270881A (en) | Lapping roll | |
| JPH05197134A (en) | Apparatus and method for controllably separating working region having thin film frame from other part of thin film | |
| JPS60101520A (en) | Liquid-crystal cell | |
| JPH046030U (en) | ||
| JPS6262331A (en) | Manufacture of liquid crystal display unit | |
| JPS63253920A (en) | Orientation processing method for oriented film | |
| JPS5598723A (en) | Production of multilayer liquid crystal display device | |
| JPH0236929B2 (en) | ||
| KR960043006A (en) | Mirror polishing method and mirror polishing device in the outer peripheral part of the wafer | |
| KR950011957B1 (en) | Rubbing method of lcd elements | |
| JPH04214392A (en) | Method for transfer to spectacles frame | |
| JP2868132B2 (en) | Method for manufacturing color liquid crystal display element | |
| JP2005300879A (en) | Method and device for rubbing, and method for manufacturing optical anisotropic sheet | |
| JPS59187321A (en) | Manufacture of liquid crystal display device | |
| JPS6260685B2 (en) | ||
| JPS6350685B2 (en) | ||
| JPS5854869B2 (en) | Method of forming resin film | |
| JPH04153916A (en) | Production of magnetic disk medium | |
| JPS62156265A (en) | Formation of crystalline thin film | |
| JPH10123551A (en) | Liquid crystal display device | |
| JPS6131426Y2 (en) | ||
| JPS61232418A (en) | Polishing method for liquid crystal display element substrate | |
| JPH03126917A (en) | Production of liquid crystal display device |