JPH03264821A - Method for processing output signal of composite sensor - Google Patents
Method for processing output signal of composite sensorInfo
- Publication number
- JPH03264821A JPH03264821A JP2062619A JP6261990A JPH03264821A JP H03264821 A JPH03264821 A JP H03264821A JP 2062619 A JP2062619 A JP 2062619A JP 6261990 A JP6261990 A JP 6261990A JP H03264821 A JPH03264821 A JP H03264821A
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- 239000002131 composite material Substances 0.000 title claims description 11
- 238000000034 method Methods 0.000 title description 9
- 239000004065 semiconductor Substances 0.000 claims abstract description 24
- 238000003672 processing method Methods 0.000 claims description 10
- 238000005259 measurement Methods 0.000 abstract description 28
- 230000035945 sensitivity Effects 0.000 abstract description 5
- 230000000694 effects Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 235000016499 Oxalis corniculata Nutrition 0.000 description 1
- 240000007019 Oxalis corniculata Species 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 150000002466 imines Chemical class 0.000 description 1
- 230000001915 proofreading effect Effects 0.000 description 1
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Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、２種類の流量センサを使用して測定精度を向
上させる複合センサ出力信号処理方法に関するものであ
る。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a composite sensor output signal processing method that uses two types of flow rate sensors to improve measurement accuracy.
フルイブインク流量センサを気体流量針に使用すると、
低流量域で感度が急激に低下し、満足に測定できないと
いう欠点がある。そこで、低流量域１で測定可能な異な
った方式によるセンサたとえば熱式の半導体流量センサ
と上記フルイブインク流量センサとを組み合わせ、低流
量域から高流量域筐で測定を可能にするような方法が提
案されている。フルイブインク流量センサを気体流量計
に使用したときの特性を第４図（ａ）に、熱式半導体流
量センサを気体流量針に使用したときの特性を第４図（
ｂ）に示す。第４図において、横軸は流量、縦軸はセン
サ出力である。When a full ink flow sensor is used as a gas flow needle,
The disadvantage is that the sensitivity rapidly decreases in the low flow rate range, making it impossible to measure satisfactorily. Therefore, there is a method that combines a sensor using a different method that can measure in the low flow rate region 1, such as a thermal type semiconductor flow rate sensor, and the above-mentioned full-ink flow rate sensor, and makes it possible to measure from the low flow rate area to the high flow rate area. is proposed. Figure 4(a) shows the characteristics when a full-ink flow sensor is used as a gas flow meter, and Figure 4(a) shows the characteristics when a thermal semiconductor flow sensor is used as a gas flow needle.
Shown in b). In FIG. 4, the horizontal axis is the flow rate, and the vertical axis is the sensor output.
フルイブインク流量センサが気体の体積流量を測定する
のに対して、熱式半導体流量センサは気体の質量流量を
測定するため、気体の温度、密度、気体混合比が変化す
ると当然両者の測定値に差が生じる。これを第５図に示
す。第５図において、横軸は体積流量、縦軸はセンサ出
力でｓｂ、８１は温度変化等があるときのフルイブイン
ク流量センサの出力、Ｓ２は温度変化等があるときの熱
式半導体流量センサの出力を示す。熱式半導体流量セン
サは第５図に示すように温度変化等により異なる特性を
示すので、温度によっては、熱式半導体流量センサから
フルイブインク流量センサへの切換え、あるいはフルイ
ブインク流量センサから熱式半導体流量センサへの切換
えにおいて、流量測定値の飛びすなわち流量測定値の急
激な変化を生じる。While a full-ink flow sensor measures the volumetric flow rate of gas, a thermal semiconductor flow sensor measures the mass flow rate of gas, so if the temperature, density, or gas mixture ratio of the gas changes, the measured values of both will naturally change. There will be a difference. This is shown in FIG. In Fig. 5, the horizontal axis is the volumetric flow rate, the vertical axis is the sensor output sb, 81 is the output of the full ink flow sensor when there is a temperature change, etc., and S2 is the thermal semiconductor flow sensor when there is a temperature change, etc. shows the output of As shown in Figure 5, thermal semiconductor flow sensors exhibit different characteristics depending on temperature changes, so depending on the temperature, switching from a thermal semiconductor flow sensor to a full ink flow sensor, or switching from a full ink flow sensor to a thermal Switching to a type semiconductor flow sensor results in jumps in flow rate measurements, that is, rapid changes in flow rate measurements.
本発明はこのような点に鑑みてなされたものであシ、そ
の目的とするところは、２種類の流量センサを使用した
場合のセンサ切換えにかける流量測定値のずれをなくし
、かつ測定精度上同上させる信号処理方法を提供するこ
とにある。The present invention has been made in view of these points, and its purpose is to eliminate the difference in flow rate measurement values caused by sensor switching when two types of flow rate sensors are used, and to improve measurement accuracy. An object of the present invention is to provide a signal processing method that does the same as the above.
このような目的を達成するために本発明は、第１の所定
流量以下においては流量値を第１の流量センサによって
測定表示し、第２の所定流量以上にかいては流ｆ値を第
２の流量センサによって測定表示する複合センサ出力信
号処理方法において、測定対象流量が第１の所定流量と
第２の所定流量との間の値であるとき２つの流量センサ
のうち高い精度の流量センサにより低い精度の流量セン
サのデータ校正を自動的に行なうようにしたものである
。In order to achieve such an object, the present invention measures and displays the flow rate value using a first flow sensor when the flow rate is below a first predetermined flow rate, and displays the flow f value using a second flow rate when the flow rate is above a second predetermined flow rate. In a composite sensor output signal processing method in which the flow rate to be measured is a value between a first predetermined flow rate and a second predetermined flow rate, a flow rate sensor having a higher accuracy among the two flow rate sensors is used. This system automatically calibrates the data of a flow rate sensor with low accuracy.
本発明による複合センサ出力信号処理方法においては、
流量測定値は流量センサ切換えにおいて急激な変化がな
く、滑らかな値となる。In the composite sensor output signal processing method according to the present invention,
The flow rate measurement value does not change abruptly when the flow rate sensor is switched, and becomes a smooth value.
壕ず、本発明の概要について述べる。２個の流量センサ
の切換点付近に両センサが同時に動作する範囲を設け、
測定値がこの範囲に入ったとき見られた２つのデータの
うち予め定められた高精度センサのデータで低精度セン
サのデータを校正する。この校正に使った補正係数は次
に校正を行なう１で低精度センサのデータ補正に使用す
る。Without further ado, an overview of the present invention will be described. A range is provided near the switching point of the two flow rate sensors in which both sensors operate simultaneously.
Of the two data observed when the measured value falls within this range, the predetermined data from the high precision sensor is used to calibrate the data from the low precision sensor. The correction coefficient used in this calibration is used to correct the data of the low precision sensor in the next calibration.
第３図は第１の流量センサとしての熱式半導体流量セン
サ１と′ｉ４２の流量センサとしてのフルイブインク流
量センサ２とを使用した気体流量針を示す系統図で、３
シよび４は流量値ＦＡおよびＦＢを出力する信号処理回
路、５は流量値ＦＡ、ＦＢを入力して処理を行なうマイ
クロコンピュータ、Ｇは気体である。第１図においては
、フルイブインク流量センサ２が高精度センサ、熱式半
導体流量センサ１が低精度センサでルシ、フルイブイン
ク流量センサ２の流量測定値のある範囲で熱式半導体流
量センサ１のデータ校正を行なう。FIG. 3 is a system diagram showing a gas flow rate needle using a thermal type semiconductor flow rate sensor 1 as a first flow rate sensor and a full ink flow rate sensor 2 as an 'i42 flow rate sensor.
5 and 4 are signal processing circuits that output the flow values FA and FB, 5 is a microcomputer that inputs and processes the flow values FA and FB, and G is a gas. In FIG. 1, the full ink flow sensor 2 is a high precision sensor, the thermal semiconductor flow sensor 1 is a low precision sensor, and the thermal semiconductor flow sensor 1 is within a certain range of the flow rate measurement value of the full ink flow sensor 2. Perform data calibration.
第１図は本発明による複合センサ出力信号ひ理方法の一
実施例を説明するためのフローチャート、第２図は２種
類のセン？（熱式半導体流量センサｐ：びフルイデイン
ク＊ｉ−センサ）の特性を示すグラフでるる。第２図に
分いて横軸は流量、縦軸ｄセンサ出力値で、ＳＦＡ ｒ
ｉ熱熱式半導泥流１センサ１待吐を示す曲縁、ｓｒｓは
フルイブインク流量センサ２の詩性を示す曲線である。FIG. 1 is a flowchart for explaining one embodiment of the method for analyzing composite sensor output signals according to the present invention, and FIG. 2 shows two types of sensor output signals. This is a graph showing the characteristics of (Thermal Semiconductor Flow Sensor P: and Fluid Ink*i-sensor). In Figure 2, the horizontal axis is the flow rate, and the vertical axis is the d sensor output value.
The curved edge indicating the i-thermal semi-conducting mudflow 1 sensor 1 standby discharge, and srs are the curves indicating the poetry of the full ink flow rate sensor 2.
！た５ｒａＣはデータ校正後の熱式半導体流量センサ１
の出力測定値である。! 5raC is the thermal semiconductor flow sensor 1 after data calibration.
is the output measurement value.
次に、データ校正の方法について第１図〜第３図を用い
て説明する。センサ１，２の測定出力値の誤差がセンサ
の梠度変化に起因するものと考え、実際の流量をＦ、セ
ンサ１，２の各々の所定の感度からの変化分ｔ−ＪｓＡ
、ＪＳＢとすれば、ＦＡ＝Ｆ（１−＋−ＪＳＡ） ・・
・・・（１）ＦＢ ＝Ｆ （１＋、ｊｓＢ） ・・・
・・（２）とたる。なお、センサの感度変化は周囲温度
の変化や、測定気体成力の違い、経時変化などによって
生じる。Next, a method of data calibration will be explained using FIGS. 1 to 3. Assuming that the error in the measured output values of sensors 1 and 2 is due to changes in the sensitivity of the sensors, the actual flow rate is F, and the change from the predetermined sensitivity of each of sensors 1 and 2 is t-JsA.
, JSB, then FA=F(1-+-JSA)...
... (1) FB = F (1+, jsB) ...
...(2) Taru. Note that changes in sensor sensitivity occur due to changes in ambient temperature, differences in measured gas composition, changes over time, and the like.
センサの特性から１−１３ＡＩ＞＞ＩＪＳＢＩ と考Ｌ
、フルイブインク流量センサ２による流量測定値ＦＢが
第１図のセンサ出力値Ｆｌ （第１の所定流量）とＦ２
（第２の所定流量）との間に入ったとき（第１図の
ステップ１１〜１３）、フルイブインク流量センサ２の
測定値ＦＢの値を使って熱式半導体流量センサ１の測定
値ＦＡの値を校正する。すなわち、次式の補正係数にの
値を決定する（第１図のステップ１５）。Considering the characteristics of the sensor, 1-13AI>>IJSBI
, the flow rate measurement value FB by the full ink flow rate sensor 2 is the sensor output value Fl (first predetermined flow rate) in FIG. 1 and F2
(second predetermined flow rate) (steps 11 to 13 in FIG. 1), the measured value FB of the full-live ink flow sensor 2 is used to calculate the measured value FA of the thermal semiconductor flow sensor 1. Calibrate the value of. That is, the value of the correction coefficient of the following equation is determined (step 15 in FIG. 1).
ｋ＠Ｆ（１＋ＪＳＡ）＝ＦＢ ・・・・・（３）以降、
次に流量測定値ＦＢが第１図のセンサ出力値Ｆ１とＦ２
との間に入るまで、センサ１の測定値ＦＡＫｋを掛けて
表示する。センサ１の測定値ＦＡにｋを掛けたものをＦ
ＡＣと表わすと、ＦＡＣ＝に＠ＦＡ＝に＠Ｆ（１−１−
ＪＳＡ）・・・・・（４）このようにすれば、熱式半導
体流量センサ１の表示精度が向上し、筐た、フルイブイ
ンク流量センサ２の測定値ＦＢとの切換時のずれもなく
すことができる。k@F(1+JSA)=FB ・・・・・・(3) onwards,
Next, the flow rate measurement value FB is the sensor output value F1 and F2 in Fig. 1.
The measured value FAKk of sensor 1 is multiplied and displayed until the value falls between . F is the measurement value FA of sensor 1 multiplied by k.
When expressed as AC, FAC=, @FA=, @F(1-1-
JSA) ... (4) In this way, the display accuracy of the thermal semiconductor flow sensor 1 is improved, and the deviation between the casing and the measured value FB of the full ink flow sensor 2 is also eliminated. be able to.
フルイブインク流量センサ２では瞬時に流量値が得られ
ず、精度よく測定するには成る程度以上の測定時間が必
要である。このため、校正を行なう際、一定時間流量を
測定し、その間の平均流量をもって、測定値ＦＢとする
。熱式半導体流量センサ１は連続測定可能であるが、校
正時にはフルイブインク流量センサ２と同時間内に測定
を継続して行ない、その間の平均流量をもって流ｌｔ値
ＦＡとする。この処理は第１図のステップ１４．１５に
示す処理であるが、この処理については後述する。With the full ink flow rate sensor 2, the flow rate value cannot be obtained instantaneously, and a long measurement time is required for accurate measurement. Therefore, when performing calibration, the flow rate is measured for a certain period of time, and the average flow rate during that period is taken as the measured value FB. The thermal type semiconductor flow rate sensor 1 is capable of continuous measurement, but during calibration, measurement is performed continuously within the same time as the full-ink flow rate sensor 2, and the average flow rate during that time is taken as the flow lt value FA. This process is the process shown in step 14.15 in FIG. 1, and will be described later.
このような処理を行なうことにより、測定時間内に流量
変動を生じてもその影響を受けず、筐た高精度の校正が
可能となる。なか、この同時測定中にはフルイブインク
流量センサ２の出力値ＦＢを積算する（第１図のステッ
プ１３，１４．２（１）。By performing such processing, even if the flow rate fluctuates during the measurement time, it will not be affected by it, and highly accurate calibration can be performed. During this simultaneous measurement, the output value FB of the full ink flow rate sensor 2 is integrated (steps 13, 14.2(1) in FIG. 1).
筐た、同時測定中に流量が変化して第２図に示す出力値
Ｆ１〜Ｆ２の範囲を外れた場合には校正演算は中止し、
通常の測定に戻る。なお、アルイブインク流量センサ２
の出力値ＦＢが出力値Ｆ１ よシ小さい場合は熱式半導
体流量センサ１の出力値ＦＡを補正して積算する（第１
図のステップ１２゜１１〜１９）。If the flow rate changes during simultaneous measurement and falls out of the range of output values F1 to F2 shown in Figure 2, the calibration calculation will be stopped.
Return to normal measurement. In addition, Alive ink flow rate sensor 2
If the output value FB is smaller than the output value F1, the output value FA of the thermal semiconductor flow sensor 1 is corrected and integrated (first
Step 12°11-19 in the figure).
データ校正範囲を定めるセンサ出力値Ｆｌ、 Ｆ２の
値の決定は次のように行なう。フルイブインク流量セン
サ２で満足できる測定の行なえる下限値ｔＦＯとし、熱
式半導体流量センサ１で満足できる測定の行なえる上限
値をＦ３とすれば、ＦＯ≦Ｆｌ（Ｆ２≦Ｆ３ ・・・・
・（５）のように出力値Ｆｌ、Ｆ２を選ぶ。The sensor output values Fl and F2 that define the data calibration range are determined as follows. If the lower limit value tFO that allows satisfactory measurement with the full ink flow sensor 2 is taken as F3, and the upper limit value that allows satisfactory measurement with the thermal semiconductor flow sensor 1 is taken as F3, then FO≦Fl (F2≦F3...
-Select the output values Fl and F2 as shown in (5).
熱式半導体流量センサ１は連続測定可能でらるが、フル
イブインク流量センサ２は間欠的にしか測定結果が得ら
れないため、気体Ｇの流量変化が急激に生じた場合、Ｆ
ｌ〜Ｆ２０区関がせ筐いと、測定を行なわないうちにこ
の区間を通過してし１い、先に述べた補正演算が行なわ
れない可能性がある。また、Ｆｌ−Ｆ２の区間が広いと
、この区間に測定値が入る確率は高く々るが、ここでは
二重に測定を行なうため消費電力が増大し、電池駆動の
気体流量計では好筐しくない。このため、Ｆｌ。Thermal semiconductor flow rate sensor 1 is capable of continuous measurement, but the full ink flow rate sensor 2 can only obtain measurement results intermittently, so if a sudden change in the gas flow rate occurs, F
If this section is passed before measurement is performed, there is a possibility that the above-mentioned correction calculation will not be performed. Additionally, if the Fl-F2 interval is wide, there is a high probability that a measured value will fall in this interval, but since double measurements are performed here, power consumption increases, making it difficult to use a battery-powered gas flow meter. do not have. For this reason, Fl.
Ｆ２は上に示した式（５）の範囲で実際の使用条件を考
慮しながら決定する。例えば、Ｐ Ｏ＝１００１７’
ｈ 。F2 is determined within the range of equation (5) shown above, taking into consideration the actual usage conditions. For example, P O=10017'
h.
Ｆ３＝３００ｚ／ｈの場合、Ｆ’１＝１５０ ｔ／ｈ、
Ｆ２＝ｉ ｓ ｏ ｔ７ｈ のように選ぶ。When F3=300z/h, F'1=150t/h,
Choose as F2=is o t7h.
先に述べたデータ校正時の消費電力を防ぐには次のよう
な方法がるる。演算装置内にタイマを設け、データ校正
を行なう毎にタイマをリセットする（第１図のステップ
１６）。その後、測定値がＦ１〜Ｆ２の間に入ってもタ
イマにあらかじめセントした時間ＴＩが経過する１では
データ校正を行なわず（第１図のステップ１３，１４．
２（１）、時１１５Ｔ１を過ぎてから初めてデータ校正
を行なうようにする（第１図のステップ１４．１５）。The following methods can be used to prevent the power consumption during data calibration mentioned above. A timer is provided in the arithmetic unit, and the timer is reset every time data is calibrated (step 16 in FIG. 1). Thereafter, even if the measured value falls between F1 and F2, data calibration is not performed at 1 when the time TI set in advance in the timer has elapsed (steps 13 and 14 in FIG. 1).
2(1), data calibration is performed only after time 115T1 (step 14.15 in FIG. 1).
時間Ｔ１は気体の温度変化の速度や気体威勺変化の速度
に応じて決定する。すなわち変化の速い測定条件では時
間Ｔ１を短く、遅い条件では時間ＴＩは長く選ぶ。この
ようにすることにより、必要以上の頻度でデータ校正し
ないようになり、無駄な電力の消費を防ぐことができる
。The time T1 is determined depending on the rate of change in gas temperature and the rate of change in gas pressure. That is, the time T1 is selected to be short under measurement conditions where the change is fast, and the time TI is selected to be long under conditions where the change is slow. By doing this, data proofreading is not performed more frequently than necessary, and wasteful power consumption can be prevented.
以上説明したように本発明は、測定対象流量が第１の所
定流量を一定量越えた流量範囲にあるとき第１と第２の
２つの流量センサで同時に測定し、２つの流量センサの
うち安定性の高い流量センサにより経時的なドリフトが
発生しやすい流量センサのデータ校正を自動的に行なう
ことにより５経時的なドリフトを発生しやすい流量セン
サの安定性を高めることができるとともに、２種類の流
量センサを使用した場合のセンサ切換えにおける流量測
定値のずれをなくすことができる効果がるる。As explained above, the present invention measures the flow rate at the same time using the first and second flow sensors when the flow rate to be measured is in a flow range exceeding the first predetermined flow rate by a certain amount. By automatically calibrating the data of flow sensors that are prone to drift over time, it is possible to improve the stability of flow sensors that are prone to drift over time. This has the effect of eliminating deviations in flow rate measurements when switching sensors when a flow rate sensor is used.
第１図は本発明による複合センサ出力信号処理方法の一
実施例を説明するためのフローチャート、第２図は２１
１類の流量センサの特性を示すグラフ、第３図は本発明
による複合センサ出力信号処理方法の一実施例が適用さ
れる気体流量計を示す系統図、第４図はフルイブインク
流量センサと熱式半導体流量センサの特性を示すグラフ
、Ｗｃ５図はフルイブイック流量センサと熱式半導体流
量センサの温度変化等による出力値変化を示すグラフで
るる。
１・・・−熱式半導体流量センサ、２・・・・フルイブ
インク流量センサ、３，４・・・・信号処理回路、５・
・・・マイクロコンピュータ、Ｇ・・・・気体。
第
図
第
図
（ａ）
（ｂ）
イ峯４シλこ」Ｉヒ。FIG. 1 is a flowchart for explaining an embodiment of the composite sensor output signal processing method according to the present invention, and FIG.
A graph showing the characteristics of a type 1 flow rate sensor, Fig. 3 is a system diagram showing a gas flow meter to which an embodiment of the composite sensor output signal processing method according to the present invention is applied, and Fig. 4 shows a graph showing the characteristics of a full-ink flow rate sensor. Figure Wc5, which is a graph showing the characteristics of the thermal semiconductor flow sensor, is a graph showing changes in output values due to temperature changes, etc. of the full-volume semiconductor flow sensor and the thermal semiconductor flow sensor. DESCRIPTION OF SYMBOLS 1...-Thermal semiconductor flow rate sensor, 2...Full ink flow rate sensor, 3, 4...Signal processing circuit, 5...
...Microcomputer, G...Gas. (a) (b) Imine 4shiλko' Ihi.
Claims (3)
量センサによつて測定表示し、第２の所定流量以上にお
いては流量値を第２の流量センサによつて測定表示する
複合センサ出力信号処理方法において、第１の流量セン
サは第１の所定流量を一定量越えた流量範囲でも第２の
流量センサと同時に測定できるようにしておき、その第
１の流量センサと第２の流量センサが同時に測定する流
量範囲に測定対象流量があるとき前記２つの流量センサ
のうち安定性の高い流量センサにより経時的なドリフト
が発生しやすい流量センサのデータ校正を自動的に行な
う複合センサ出力信号処理方法。(1) A composite sensor that measures and displays the flow rate value with the first flow rate sensor when the flow rate is below the first predetermined flow rate, and measures and displays the flow rate value with the second flow rate sensor when the flow rate is above the second predetermined flow rate. In the output signal processing method, the first flow rate sensor is configured to be able to measure simultaneously with the second flow rate sensor even in a flow rate range exceeding the first predetermined flow rate by a certain amount, and the first flow rate sensor and the second flow rate are When the flow rate to be measured is within the flow rate range that the sensors simultaneously measure, a composite sensor output signal that automatically calibrates the data of the flow rate sensor that is more likely to drift over time by using the more stable flow rate sensor among the two flow rate sensors. Processing method.
熱式半導体センサとを用い、演算装置によりデータ校正
を行なう請求項１記載の複合センサ出力信号処理方法。(2) The composite sensor output signal processing method according to claim 1, wherein a fluidic sensor and a thermal semiconductor sensor are used as the two flow rate sensors, and data calibration is performed by a calculation device.
経過するまでは校正を行なわないようにする請求項２記
載の複合センサ出力信号処理方法。(3) The composite sensor output signal processing method according to claim 2, wherein a timer is added to the arithmetic unit, and the calibration is not performed until the timer set time has elapsed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2062619A JPH07109376B2 (en) | 1990-03-15 | 1990-03-15 | Composite sensor output signal processing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2062619A JPH07109376B2 (en) | 1990-03-15 | 1990-03-15 | Composite sensor output signal processing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03264821A true JPH03264821A (en) | 1991-11-26 |
| JPH07109376B2 JPH07109376B2 (en) | 1995-11-22 |
Family
ID=13205516
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2062619A Expired - Lifetime JPH07109376B2 (en) | 1990-03-15 | 1990-03-15 | Composite sensor output signal processing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07109376B2 (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002533721A (en) * | 1998-12-23 | 2002-10-08 | イメージ・ガイディッド・テクノロジーズ・インコーポレイテッド | Hybrid 3D probe tracked by multiple sensors |
| CN100360911C (en) * | 2001-05-03 | 2008-01-09 | 安德斯+豪斯有限公司 | Flow metering operating method |
| JP2008175631A (en) * | 2007-01-17 | 2008-07-31 | Furukawa Electric Co Ltd:The | Flow velocity measuring system |
| JP2013033026A (en) * | 2011-06-03 | 2013-02-14 | Berkin Bv | Flow meter for determining flow of medium and use thereof, and quantitative method |
| US8608306B2 (en) | 2009-03-06 | 2013-12-17 | Ricoh Company, Ltd. | Inkjet recording ink, ink cartridge, inkjet recording apparatus, and ink recorded matter |
| WO2014065116A1 (en) * | 2012-10-24 | 2014-05-01 | 独立行政法人産業技術総合研究所 | Mass flowmeter |
-
1990
- 1990-03-15 JP JP2062619A patent/JPH07109376B2/en not_active Expired - Lifetime
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002533721A (en) * | 1998-12-23 | 2002-10-08 | イメージ・ガイディッド・テクノロジーズ・インコーポレイテッド | Hybrid 3D probe tracked by multiple sensors |
| CN100360911C (en) * | 2001-05-03 | 2008-01-09 | 安德斯+豪斯有限公司 | Flow metering operating method |
| JP2008175631A (en) * | 2007-01-17 | 2008-07-31 | Furukawa Electric Co Ltd:The | Flow velocity measuring system |
| US8608306B2 (en) | 2009-03-06 | 2013-12-17 | Ricoh Company, Ltd. | Inkjet recording ink, ink cartridge, inkjet recording apparatus, and ink recorded matter |
| JP2013033026A (en) * | 2011-06-03 | 2013-02-14 | Berkin Bv | Flow meter for determining flow of medium and use thereof, and quantitative method |
| WO2014065116A1 (en) * | 2012-10-24 | 2014-05-01 | 独立行政法人産業技術総合研究所 | Mass flowmeter |
| JPWO2014065116A1 (en) * | 2012-10-24 | 2016-09-08 | 国立研究開発法人産業技術総合研究所 | Mass flow meter |
| US9689729B2 (en) | 2012-10-24 | 2017-06-27 | National Institute Of Advanced Industrial Science And Technology | Zero point drift compensating flowmeter |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07109376B2 (en) | 1995-11-22 |
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