JPH03256381A - Piezoelectric ceramics - Google Patents
Piezoelectric ceramicsInfo
- Publication number
- JPH03256381A JPH03256381A JP2056103A JP5610390A JPH03256381A JP H03256381 A JPH03256381 A JP H03256381A JP 2056103 A JP2056103 A JP 2056103A JP 5610390 A JP5610390 A JP 5610390A JP H03256381 A JPH03256381 A JP H03256381A
- Authority
- JP
- Japan
- Prior art keywords
- laminated
- mixture
- base body
- ternary material
- sheet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims description 14
- 239000000463 material Substances 0.000 claims abstract description 9
- 239000000758 substrate Substances 0.000 claims 2
- 239000011230 binding agent Substances 0.000 abstract description 6
- 239000002002 slurry Substances 0.000 abstract description 6
- 239000000203 mixture Substances 0.000 abstract description 5
- 239000000843 powder Substances 0.000 abstract description 4
- XGZVUEUWXADBQD-UHFFFAOYSA-L lithium carbonate Chemical compound [Li+].[Li+].[O-]C([O-])=O XGZVUEUWXADBQD-UHFFFAOYSA-L 0.000 abstract description 3
- 229910052808 lithium carbonate Inorganic materials 0.000 abstract description 3
- 238000000034 method Methods 0.000 abstract description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 abstract 2
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 abstract 2
- AYJRCSIUFZENHW-UHFFFAOYSA-L barium carbonate Chemical compound [Ba+2].[O-]C([O-])=O AYJRCSIUFZENHW-UHFFFAOYSA-L 0.000 abstract 2
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 abstract 2
- XMFOQHDPRMAJNU-UHFFFAOYSA-N lead(II,IV) oxide Inorganic materials O1[Pb]O[Pb]11O[Pb]O1 XMFOQHDPRMAJNU-UHFFFAOYSA-N 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 6
- 238000010304 firing Methods 0.000 description 5
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000002344 surface layer Substances 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 238000010494 dissociation reaction Methods 0.000 description 2
- 230000005593 dissociations Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000004873 anchoring Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
この発明は、圧電セラミックに関し、特に［Ｐｂ、Ｓ
ｒｂ Ｂａ、］ ［（Ｚｎｔ７ｉ Ｎｂ２／１ ）
ｔ Ｔｔｘ Ｚｒｙ］ ０３三元系圧電セラミックの改
良に関する。[Detailed Description of the Invention] [Industrial Application Field] This invention relates to piezoelectric ceramics, particularly [Pb, S
rb Ba,] [(Znt7i Nb2/1)
t Ttx Zry] 03 Regarding the improvement of ternary piezoelectric ceramics.
［従来の技術］
従来圧電セラミックとしてＰ ｂ ［Ｔ ｉｘ Ｚ ｒ
ｙＣＺｎ１ｙ＊ Ｎｂ２／３ ）ｚ ］ ０３よりなル
三元系圧電セラミックがあり、例えば、特公昭４４−１
７３４４号、特公昭４５−１９１０５号、特公昭４５−
２６１４３号、特公昭４５−２７１ｉ２２号、特公昭４
５−３９９７７号、特公昭４６−４２５４４号、特公昭
６０−２２５１４号の各公報に記載されている。[Prior art] As a conventional piezoelectric ceramic, P b [T ix Z r
yCZn1y*Nb2/3)z] There are ternary piezoelectric ceramics such as 03, for example,
No. 7344, Special Publication No. 19105, Special Publication No. 1973-
No. 26143, Special Publication No. 45-271i22, Special Publication No. 4
It is described in Japanese Patent Publication No. 5-39977, Japanese Patent Publication No. 46-42544, and Japanese Patent Publication No. 60-22514.
［発明が解決しようとする問題点］
圧電セラミックを音響変換器として使用する場合、電界
を加えた時の変位（出力）、すなわち圧電定数ｄが大き
いことが必要である。又当該圧電定数ｄは近似的にｄ＝
ＫＰ ・ε、１″で表されるので、前記電気機械結合係
数に、及び比誘電率ε、が大きいことが望ましい。[Problems to be Solved by the Invention] When using a piezoelectric ceramic as an acoustic transducer, it is necessary that the displacement (output) when an electric field is applied, that is, the piezoelectric constant d, be large. Also, the piezoelectric constant d is approximately d=
Since it is expressed as KP·ε,1″, it is desirable that the electromechanical coupling coefficient and relative dielectric constant ε are large.
又、圧電セラミック特有の急俊な共振を防止するには機
械的Ｑ（Ｑｆｆｌ）が小さいことが要求されている。Further, in order to prevent sudden resonance peculiar to piezoelectric ceramics, a small mechanical Q (Qffl) is required.
ところで、前記各公報に記載された技術はいずれも比誘
電率等の圧電特性を向上させることを目的としているに
も関わらず、音響変換器やアクチュエータとして要求さ
れる比誘電率（ε、）、電気機械結合係数（Ｋｐ、）に
は不十分である。又、特開昭６１−１２９８８８号公報
において、ｐｂの一部をＢａ及びＳｒで置換することに
より前記誘電率及び電気機械結合係数を向上した電セラ
ミックが開示されているが、Ｑイの高い欠点が解決され
ておらず、電気音響変換器として採用するにはいまだ不
充分であった。Incidentally, although the techniques described in the above publications are all aimed at improving piezoelectric properties such as relative permittivity, the relative permittivity (ε,) required for acoustic transducers and actuators, The electromechanical coupling coefficient (Kp, ) is insufficient. In addition, JP-A-61-129888 discloses an electroceramic in which the dielectric constant and electromechanical coupling coefficient are improved by replacing a part of PB with Ba and Sr, but it has the drawback of high Qi. has not been solved, and it is still insufficient to be used as an electroacoustic transducer.
［問題を解決するための手段］
この発明は、
［Ｐｂ、Ｓ ｒｂ Ｂａｃ］ ［（Ｚｎ０ＳＮｂ２
０５） ｚ Ｔ ｉｘ Ｚ ｒｙコ０３系を基体トシ、
当該基体の両面に前記三元系材料よりなり、微細空孔を
有する層が積層されている圧電セラミックであり、前記
微細空孔を形成するために、前記材料に０．５ｖｊ％以
下のＬｉ２ＣＯ３を添加して焼成してなる圧電セラミッ
クである。[Means for Solving the Problem] The present invention provides: [Pb, S rb Bac] [(Zn0SNb2
05) Z Tix Z ry 03 series as base material,
It is a piezoelectric ceramic in which layers made of the ternary material and having micropores are laminated on both sides of the base, and in order to form the micropores, 0.5vj% or less of Li2CO3 is added to the material. It is a piezoelectric ceramic made by adding and firing.
［実施例］ 以下この発明を実施例について説明する。[Example] This invention will be described below with reference to embodiments.
Ｐｂ、０４ 、Ｚｒｏ２、Ｚｎ０ＳＮｂ２０５、Ｂ ａ
ＣＯ３、Ｓ ｒ ＣＯ２を所定量坪量して混合し８２
０℃で２時間仮焼成した。その後粉砕して得た粉末に０
．５ｗｊ％のＬｉ２ＣＯ３を添加してＰｖＢを主体とし
たバインダーと混合してスラリーＡとする。一方前記粉
末に絶縁性を高めるために０．１ｗｔ％のＢ２０３を添
加してＰＶＢを主体としたバインダーと混合してスラリ
ーＢとする。そして、スラリーＡＳＢ、Ａの順に積層シ
ートを作製し、必要なら各層間の密着性を高める為に熱
間プレスを行なった後、所定形状に打ち抜き、脱バイン
ダー処理を行った後、焼成する。Pb, 04, Zro2, Zn0SNb205, B a
CO3, S r CO2 are mixed at a predetermined basis weight82
Temporary firing was performed at 0°C for 2 hours. After that, the powder obtained by crushing has 0
．． Slurry A is prepared by adding 5 wj% of Li2CO3 and mixing with a binder mainly composed of PvB. On the other hand, 0.1 wt% of B203 was added to the powder to improve the insulation properties, and the mixture was mixed with a binder mainly composed of PVB to obtain slurry B. Then, a laminated sheet is prepared in the order of slurries ASB and A, hot pressed if necessary to improve the adhesion between each layer, punched into a predetermined shape, subjected to binder removal treatment, and then fired.
上記成分によって得られセラミック板は、第１図に示す
ように表面層Ａがｐｂの３．７５ｍｏ１％がＢａに、８
ｍｏ１％がＳｒに置換されている、［Ｐｂ０．８８２５
Ｓ ｒＯ，０８Ｂａｏ、０３７ｓ］ ［（Ｚｎｌ／３
Ｎｂ２／３）ＺＴｉＸＺｒＹ］Ｏｖ ） ０．１２５
Ｔ １ ｏ、ａｏＺ Ｔｏ、ａ７．］ ０３を基体とし
、当該基体の両面に焼成時Ｌｉ２Ｏ３が蒸発（解離）す
ることにより形成された微細な空孔をもつセラミックで
形成される。一方基体ＮＩＢはｐｂの３．７５ｍｏ１％
がＢａに、ｌｌｍｏ １％がＳｒに置換されている、
［Ｐｂ０．８１１２５ＳｒＯ，０８Ｂａ０．０３？５］
［（Ｚｎｌ／３Ｎｂ２／３） ０．１２５ Ｔ ｆ
ｏ、ａｏＺ ｒｏ、ａ７５］ ０３にＢ、Ｏ，がＯ，
１ｗｔ％が含まれた緻密なセラミックで形成されている
。As shown in FIG. 1, the ceramic plate obtained with the above components has a surface layer A in which 3.75 mo1% of PB is Ba and 8 mo1% of PB is Ba.
mo1% is substituted with Sr, [Pb0.8825
S rO, 08Bao, 037s] [(Znl/3
Nb2/3)ZTiXZrY]Ov) 0.125
T 1 o, aoZ To, a7. ] 03 as a base, and is made of ceramic having fine pores formed by evaporation (dissociation) of Li2O3 during firing on both sides of the base. On the other hand, the base NIB is 3.75mol1% of pb
is replaced with Ba and 1% of llmo is replaced with Sr, [Pb0.81125SrO,08Ba0.03?5]
[(Znl/3Nb2/3) 0.125 T f
o, aoZ ro, a75] B, O, in 03 is O,
It is made of dense ceramic containing 1wt%.
この焼成体の両面にＡｇペーストを印刷し７００℃で焼
き付けた。Ag paste was printed on both sides of this fired body and baked at 700°C.
これを１００℃のＳｔ油中で２．５ｋＶ／ｍｍで３０分
間分極処理をし、２４時間二一ジングした後、ＩＲＥ標
準回路を使用して共振周波数（ｆ、）と***振周波数（
ｆ、）及び共振抵抗を測定することによりＱ６を得た。This was polarized in St oil at 100°C at 2.5 kV/mm for 30 minutes, and after 24 hours of polarization, the resonant frequency (f,) and anti-resonant frequency (
Q6 was obtained by measuring the f, ) and resonance resistance.
そしてＡ層の厚さｔとＢ層の厚さｔ′を変化しその時の
Ｑ、Ｒ値を第１表に示す。Table 1 shows the Q and R values obtained by changing the thickness t of layer A and the thickness t' of layer B.
第１表
比較例として市場に提供されている圧電セラミックのＱ
６値を第２表に示す。Table 1: Q of piezoelectric ceramics offered on the market as comparative examples
The six values are shown in Table 2.
第２表
第１表から明らかなように、ｔ／ｌ”の減少につれてＱ
ｏが低下する傾向にあるが、圧電特性の安定性、焼成時
のシートの収縮率、シートの絶縁性及び作業性等の品質
面の点からｔ／を一値はＯ０９〜０．７が好ましい。As is clear from Table 2 and Table 1, as t/l" decreases, Q
o tends to decrease, but from the viewpoint of quality such as stability of piezoelectric properties, shrinkage rate of the sheet during firing, sheet insulation and workability, the value of t/ is preferably O09 to 0.7. .
［発明の効果］
以上に説明したこの発明によれば、シート作成時にＬｉ
２ＣＯ３を含有する層を表面層としたので、焼成時にＬ
ｉ２Ｏ３が解離することにより形成される微細空孔の存
在によりＱ、値を下げることができ、再生周波数帯の広
い音響変換器を提供することができる。[Effect of the invention] According to the invention described above, when creating a sheet, Li
Since the layer containing 2CO3 was used as the surface layer, L during firing
Due to the presence of micropores formed by dissociation of i2O3, the Q value can be lowered, and an acoustic transducer with a wide reproduction frequency band can be provided.
又、表面層が原子レベルの微細空孔を有するので、この
面上に形成される電極の有効面積が増大し、素子の容量
を大きくすることができ、又アンカー効果により電極層
の密着力を増加せしめることができる。In addition, since the surface layer has atomic-level micropores, the effective area of the electrode formed on this surface increases, increasing the capacitance of the device, and the anchoring effect increases the adhesion of the electrode layer. can be increased.
第１図はこの発明実施例の断面図である。 FIG. 1 is a sectional view of an embodiment of this invention.
Claims (1)
Ｎｂ＿２＿／＿３）＿ＺＴｉ＿ＸＺｒ＿Ｙ］Ｏ＿３三元
系材料を基体とし、当該基体の両面に前記三元系材料よ
りなり、微細空孔を有する層が積層されていることを特
徴とする圧電セラミック。[Pb_aSr_bBa_c]・[(Zn_1_/_3
A piezoelectric ceramic characterized in that the substrate is made of a ternary material Nb_2_/_3)_ZTi_XZr_Y]O_3, and layers made of the ternary material and having micropores are laminated on both sides of the substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2056103A JPH03256381A (en) | 1990-03-06 | 1990-03-06 | Piezoelectric ceramics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2056103A JPH03256381A (en) | 1990-03-06 | 1990-03-06 | Piezoelectric ceramics |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03256381A true JPH03256381A (en) | 1991-11-15 |
Family
ID=13017767
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2056103A Pending JPH03256381A (en) | 1990-03-06 | 1990-03-06 | Piezoelectric ceramics |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03256381A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8590512B2 (en) | 2007-11-28 | 2013-11-26 | Kyocera Corporation | Multi-layer piezoelectric element, method for manufacturing the same, injection apparatus and fuel injection system |
-
1990
- 1990-03-06 JP JP2056103A patent/JPH03256381A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8590512B2 (en) | 2007-11-28 | 2013-11-26 | Kyocera Corporation | Multi-layer piezoelectric element, method for manufacturing the same, injection apparatus and fuel injection system |
| JP5398543B2 (en) * | 2007-11-28 | 2014-01-29 | 京セラ株式会社 | Multilayer piezoelectric element, method for manufacturing the same, injection device, and fuel injection system |
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