JPH03251800A - X-ray window of x-ray irradiation device and its manufacturing method - Google Patents
X-ray window of x-ray irradiation device and its manufacturing methodInfo
- Publication number
- JPH03251800A JPH03251800A JP5012990A JP5012990A JPH03251800A JP H03251800 A JPH03251800 A JP H03251800A JP 5012990 A JP5012990 A JP 5012990A JP 5012990 A JP5012990 A JP 5012990A JP H03251800 A JPH03251800 A JP H03251800A
- Authority
- JP
- Japan
- Prior art keywords
- window
- ray
- frame member
- window material
- beryllium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 239000000463 material Substances 0.000 claims abstract description 90
- 229910052790 beryllium Inorganic materials 0.000 claims abstract description 32
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 claims abstract description 32
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims abstract description 19
- 238000009792 diffusion process Methods 0.000 claims abstract description 15
- 229910052709 silver Inorganic materials 0.000 claims abstract description 11
- 239000004332 silver Substances 0.000 claims abstract description 11
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052802 copper Inorganic materials 0.000 claims abstract description 10
- 239000010949 copper Substances 0.000 claims abstract description 10
- 229910052759 nickel Inorganic materials 0.000 claims abstract description 9
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 8
- 229910052737 gold Inorganic materials 0.000 claims abstract description 8
- 239000010931 gold Substances 0.000 claims abstract description 8
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 4
- 239000010935 stainless steel Substances 0.000 claims abstract description 4
- 238000000034 method Methods 0.000 claims description 18
- 238000000605 extraction Methods 0.000 claims description 14
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 abstract description 5
- 238000003825 pressing Methods 0.000 abstract description 4
- 239000000470 constituent Substances 0.000 abstract 3
- 239000010409 thin film Substances 0.000 description 5
- 230000008018 melting Effects 0.000 description 4
- 238000002844 melting Methods 0.000 description 4
- 239000012808 vapor phase Substances 0.000 description 4
- 238000010894 electron beam technology Methods 0.000 description 3
- 239000011888 foil Substances 0.000 description 3
- 230000003685 thermal hair damage Effects 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000005219 brazing Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 238000003466 welding Methods 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 239000006096 absorbing agent Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000284 extract Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
Landscapes
- X-Ray Techniques (AREA)
Abstract
Description
【発明の詳細な説明】
「産業上の利用分野」
この発明は、Ｘ線照射装置のＸ線発生部からＸ線を導出
するための窓およびその製造方法に関し、接合材層とし
て特定の成分を一種以上含むものを用いることにより、
またこの接合材層を形成したあと拡散接合することによ
り、ベリリウム製窓材の強度や形状を損なわずに、耐熱
性に優れたＸ線導出窓を製造できるようにしたものであ
る。Detailed Description of the Invention "Field of Industrial Application" The present invention relates to a window for extracting X-rays from an X-ray generating section of an X-ray irradiation device and a method for manufacturing the same. By using one that contains more than one type,
Further, by performing diffusion bonding after forming this bonding material layer, it is possible to manufacture an X-ray extraction window with excellent heat resistance without impairing the strength or shape of the beryllium window material.
「従来の技術」
高密度集積回路のパターンを露光させる装置としてＸ線
照射装置が提供されている。一般にこのＸ線照射装置は
、真空に保たれたＸ線発生部で発生させたＸ線をＸ線導
出窓から取り出し、この導出されたＸ線を所定の吸収体
パターンが形成されたマスクを介して試料に照射するよ
うに構成されている。このＸ線照射装置のＸ線導出窓を
形成する材料としては、Ｘ線透過率の点およびＸ線発生
部の真空度維持の点で、ベリリウム薄膜が最適であるこ
とが知られている。"Prior Art" An X-ray irradiation device is provided as a device for exposing patterns of high-density integrated circuits. Generally, this X-ray irradiation device extracts X-rays generated in an X-ray generating section kept in a vacuum from an X-ray extraction window, and passes the derived X-rays through a mask on which a predetermined absorber pattern is formed. It is configured to irradiate the sample with the It is known that beryllium thin film is the most suitable material for forming the X-ray exit window of this X-ray irradiation device in terms of X-ray transmittance and maintaining the degree of vacuum in the X-ray generating section.
ところで、ベリリウム薄膜自体を直接装置本体に取り付
けることはできないので、ベリリウム薄膜からなる窓材
は補強および固定用の枠部材を介して装置本体に取り付
けられている。By the way, since the beryllium thin film itself cannot be directly attached to the device main body, the window material made of the beryllium thin film is attached to the device main body via a reinforcing and fixing frame member.
そしてベリリウム薄膜と枠部材との接合は、従来、接着
剤を用いた接合やロウ付は法、電子ビーム溶接法によっ
て行なわれていた。Conventionally, the beryllium thin film and the frame member have been bonded using an adhesive, a brazing method, or an electron beam welding method.
「発明が解決しようとする課題」
ところがベリリウム製窓材と枠部材との接合を、前記の
ように行うと次のような問題があった。``Problems to be Solved by the Invention'' However, when the beryllium window material and the frame member are joined as described above, the following problems occur.
■ 接着剤を用いた接合方法においては、製造されたＸ
線導出窓の耐熱性が不十分となり、２００〜４００℃程
度で行なわれる真空ベーキング処理にＸ線導出窓が耐え
られられない。■ In the bonding method using adhesive, the manufactured
The heat resistance of the X-ray exit window becomes insufficient, and the X-ray exit window cannot withstand vacuum baking treatment performed at about 200 to 400°C.
■ ロウ付は法を採用すると、接合時にベリリウム製窓
材が８００〜１０００℃程度の高温にさらされるため、
ベリリウム製の窓材の強度が劣化する。このため窓材を
薄くすることが難しく、窓材の薄膜化によるＸ線透過率
の向上が困難になる。■ If the brazing method is used, the beryllium window material will be exposed to high temperatures of about 800 to 1000 degrees Celsius during bonding.
The strength of beryllium window materials deteriorates. For this reason, it is difficult to make the window material thinner, and it becomes difficult to improve the X-ray transmittance by making the window material thinner.
■ 電子ビーム溶接法においては、強力な電子ビームを
使用する為に、ベリリウム製窓材が熱変形し易い。また
窓材を薄くするとさらにこの問題が多発する。■ Because electron beam welding uses a powerful electron beam, beryllium window materials are easily deformed by heat. Furthermore, if the window material is made thinner, this problem will occur even more frequently.
この発明は前記事情に鑑みてなされたもので、ベリリウ
ム製窓材が薄いものであってもその強度や形状を損なわ
ずに、耐熱性に優れたＸ線導出窓を製造できるようにす
ることを目的とする。This invention was made in view of the above circumstances, and aims to make it possible to manufacture an X-ray extraction window with excellent heat resistance without impairing its strength or shape even if the beryllium window material is thin. purpose.
「課題を解決するための手段」
この発明のＸ線照射装置のＸ線導出窓では、窓材と枠部
材とを銀、金、ニッケル、銅から選ばれる成分を一種以
上含む接合材層を介して拡散接合することとにより、前
記目的を達成した。"Means for Solving the Problems" In the X-ray emitting window of the X-ray irradiation device of the present invention, the window material and the frame member are connected through a bonding material layer containing one or more components selected from silver, gold, nickel, and copper. The above objective was achieved by performing diffusion bonding.
接合材層の厚さは１〜２００μｍ程度であることが望ま
しい。この範囲よりし接合材層が薄く形成されると、接
合を行えないという不都合が生じる。The thickness of the bonding material layer is preferably about 1 to 200 μm. If the bonding material layer is formed thinner than this range, there will be a problem that bonding cannot be performed.
また接合層の厚さがこの範囲を越えると、やはり十分な
接合を行えないという不都合が生じる。Furthermore, if the thickness of the bonding layer exceeds this range, there will still be the problem that sufficient bonding cannot be achieved.
このＸ線照射装置のＸ線導出窓の製造方法としては、銀
、金、ニッケル、銅から選ばれる成分を一種以上含む接
合材からなる層を気相法によって形成し、ついで窓材と
枠部材を重ね合わせて加熱加圧処理する方法が好適であ
る。The method for manufacturing the X-ray exit window of this X-ray irradiation device is to form a layer of a bonding material containing one or more components selected from silver, gold, nickel, and copper by a vapor phase method, and then combine the window material and the frame member. A method of superimposing them and subjecting them to heat and pressure treatment is suitable.
ここで気相法とは、広い概念で、真空蒸着法等の物理的
蒸着法および化学的気相成長法等の化学的蒸着法を含む
。接合材層を形成する際に気相法を採用すると、比較的
低温で処理できるので、ベリリウム製窓材の熱的な損傷
を避けることができる。Here, the vapor phase method is a broad concept and includes physical vapor deposition methods such as vacuum evaporation method and chemical vapor deposition methods such as chemical vapor deposition method. If a vapor phase method is used to form the bonding material layer, the process can be performed at a relatively low temperature, thereby avoiding thermal damage to the beryllium window material.
窓材と枠部材を重ね合わせた後に行う加熱加圧処理は、
圧力１ ＝ １００ ｋｇ／ ｃｍ”の範囲で行なわれ
ることが望ましい。圧力がこの範囲未満になると、拡散
接合が起こらないという不都合が生じる。The heat and pressure treatment performed after the window material and frame members are stacked is
It is desirable that the bonding be carried out within the range of pressure 1 = 100 kg/cm. If the pressure is less than this range, there will be an inconvenience that diffusion bonding will not occur.
また圧力のこの範囲を超えると、接合部及びその周辺部
の変形が生じ始めるという不都合が生じる。Moreover, if the pressure exceeds this range, there is the disadvantage that deformation of the joint and its surroundings begins to occur.
また加熱加圧処理の温度は３００〜９００℃の範囲で設
定されることが望ましい。温度がこの範囲未満になると
、拡散接合が十分に起こらないという不都合が生じる。Further, the temperature of the heating and pressurizing treatment is desirably set in the range of 300 to 900°C. If the temperature falls below this range, a disadvantage arises in that diffusion bonding does not occur sufficiently.
また温度がこの範囲を超えると、拡散接合が進み過ぎて
強度が落ちるという不都合が生じる。Moreover, if the temperature exceeds this range, diffusion bonding will proceed too much and the strength will drop.
さらに加熱加圧処理を行う時間は、３０〜１２０分の範
囲で設定されることが望ましい。処理時間が短いと、接
合材を窓材および枠部材中に十分拡散させることができ
ない。また処理時間がこの範囲を超えると、それ以上の
接合強度の向上がほとんど望めず不経済である。Furthermore, the time for performing the heating and pressurizing treatment is desirably set within a range of 30 to 120 minutes. If the processing time is short, the bonding material cannot be sufficiently diffused into the window material and frame member. Furthermore, if the processing time exceeds this range, no further improvement in bonding strength can be expected, which is uneconomical.
加えてこの加熱加圧処理は、ｔｏ−”〜１０−’Ｔｏｒ
ｒ程度の真空雰囲気下で行なわれることが望ましい。In addition, this heating and pressure treatment
It is desirable that the process be carried out under a vacuum atmosphere of about r.
真空度がこの範囲未満になると、Ｂｅ箔および接合材層
の表面が酸化して、拡散接合が止まるという不都合が生
じる。また真空度がこの範囲を超えると、より高価な真
空システムを必要として不経済になるという不都合が生
じる。If the degree of vacuum falls below this range, the surfaces of the Be foil and the bonding material layer will be oxidized, resulting in the inconvenience that diffusion bonding will stop. Moreover, if the degree of vacuum exceeds this range, a more expensive vacuum system is required, resulting in an uneconomical situation.
なお、前記接合層を形成する位置は、窓材、枠部材のい
ずれの側に行なわれても良い。The bonding layer may be formed on either side of the window material or the frame member.
「作用」
この発明のＸ線照射装置のＸ線導出窓において接合材に
用いられた銀、金、ニッケル、銅は、ベリリウム内に拡
散し易いので、ベリリウムを主成分とする窓材とステン
レス鋼製の枠部材とを確実に拡散接合することができる
。またこれらの接合材は、真空ベーキング時の温度（約
３００℃〜４００℃）以上の融点を有しているので、こ
の発明のＸ線導出窓は実用上必要な耐熱性を十分満足で
きるものとなる。"Function" Silver, gold, nickel, and copper used as bonding materials in the X-ray exit window of the X-ray irradiation device of this invention easily diffuse into beryllium. can be reliably diffusion bonded to a frame member made of aluminum. Furthermore, since these bonding materials have a melting point higher than the temperature during vacuum baking (approximately 300°C to 400°C), the X-ray extraction window of the present invention can sufficiently satisfy the practically required heat resistance. Become.
接合材層を形成したあと、窓材と枠部材を重ね合わせて
加熱加圧処理すると、薄膜接合材層の金属原子が窓材お
よび枠部材中に拡散してこれらを接合する。After forming the bonding material layer, when the window material and the frame member are placed one on top of the other and subjected to heat and pressure treatment, the metal atoms in the thin film bonding material layer diffuse into the window material and the frame member, thereby bonding them together.
「実施例」
第１図および第２図はこの発明のＸ線照射装置のＸ線導
出窓の実施例を示すもので、ベリリウムを主成分とする
厚さ２５μｍの窓材１１と、この窓材１１の周囲を囲む
ステンレス鋼（Ｓ Ｕ ８３０４又は４８Ｇ）製の枠部
材１２とによって構成されている。``Example'' Figures 1 and 2 show an example of the X-ray emitting window of the X-ray irradiation device of the present invention, including a window material 11 with a thickness of 25 μm containing beryllium as a main component, and a window material 11 with a thickness of 25 μm and a 11 and a frame member 12 made of stainless steel (SU 8304 or 48G).
枠部材１２はリング状のもので、その内周には段部１３
が形成されている。窓材１１は枠部材Ｉ２の段部１３上
に配置されており、枠部材＋２の内周にはめ込まれた押
さえ部材１４とこの段部Ｉ３とによって挟持されている
。The frame member 12 is ring-shaped and has a stepped portion 13 on its inner periphery.
is formed. The window material 11 is placed on the step 13 of the frame member I2, and is held between the step I3 and a pressing member 14 fitted into the inner periphery of the frame member +2.
これら窓材１１と枠部材１２との間には、厚さ約ｌＯμ
肩の接合層１５が設けられている。この接合層１５をな
す接合材には、ニッケルが用いられている。そしてこの
接合層１５によって、窓材１１と枠部材１２とが一体化
されている。There is a thickness of approximately lOμ between the window material 11 and the frame member 12.
A shoulder bonding layer 15 is provided. The bonding material forming this bonding layer 15 is nickel. The window material 11 and the frame member 12 are integrated by this bonding layer 15.
つぎにこのＸ線導出窓の製造方法を説明する。Next, a method of manufacturing this X-ray guiding window will be explained.
このＸ線導出窓を製造するに当たって、まず窓材１１と
なるベリリウム箔を作成した。ベリリウム箔の製作は、
銅製の円板の表面にベリリウムを真空蒸着した後、硝酸
溶液中て銅板を溶融することによって行った。In manufacturing this X-ray emitting window, first, a beryllium foil serving as the window material 11 was created. The production of beryllium foil is
This was done by vacuum-depositing beryllium on the surface of a copper disk and then melting the copper plate in a nitric acid solution.
次にこのように作成した窓材ＩＩの中央部をマスク材で
覆い、周囲に銀を２０μｍ真空蒸着して接合層１５を形
成した。Next, the central part of window material II thus produced was covered with a mask material, and silver was vacuum-deposited to a thickness of 20 μm around the periphery to form a bonding layer 15.
この後窓材１１を枠部材１２の段部１３に置いて、Ｉ
０−５Ｔｏｒｒ、６５０℃の真空雰囲気下で枠部材１２
の段部Ｉ３と窓材ＩＩの周囲との間に１０ｋｇ／ｃｍ”
の圧力を３０分間加え、窓材１１の周囲に蒸着した接合
層！５のニッケル原子を窓材１１および枠部材１２中に
拡散させた。After this, place the window material 11 on the step part 13 of the frame member 12,
The frame member 12 was removed under a vacuum atmosphere of 0-5 Torr and 650°C.
10kg/cm” between the stepped portion I3 and the periphery of the window material II.
The bonding layer was deposited around the window material 11 by applying pressure for 30 minutes! The nickel atoms of No. 5 were diffused into the window material 11 and the frame member 12.
このようにして窓材１１と枠部材１２とを接合層１５を
介して接合一体化したあと、窓材１１を挟むように枠部
材１２に押さえ部材１４をはめ込み、第１図に示したＸ
線導出窓を完成した。After the window material 11 and the frame member 12 are bonded and integrated through the bonding layer 15 in this way, the holding member 14 is fitted into the frame member 12 so as to sandwich the window material 11, and the X shown in FIG.
Completed the line leading window.
この例のＸ線導出窓にあっては、接合層１５を銀によっ
て形成したので、ベリリウム製窓材ＩＩ内に接合層Ｉ５
の銀原子が速やかに拡散して窓材１１と枠部材１２とを
確実に接合する。このＸ線導出窓で接合材として用いた
銀の融点は９６０℃なので、このＸ線導出窓は、２００
〜４００℃で行なわれるベーキング処理に充分耐える得
るものとなる。In the X-ray extraction window of this example, since the bonding layer 15 was formed of silver, the bonding layer I5 was formed in the beryllium window material II.
The silver atoms diffuse quickly and reliably join the window material 11 and the frame member 12. Since the melting point of silver used as a bonding material in this X-ray extraction window is 960℃, this X-ray extraction window has a temperature of 200℃.
It can sufficiently withstand baking treatment performed at ~400°C.
さらにこのＸ線導出窓は、窓材ＩＩと枠部材１２が拡散
接合されたものなので、低温で、また熱的衝撃を与えず
にベリリウム製窓材１１と枠部材１２とを一体化できる
。従ってこのＸ線導出窓は、ベリリウム製窓材１１の強
度や形状を損なわすに製造できるものとなる。Furthermore, since this X-ray extraction window is made by diffusion bonding the window material II and the frame member 12, the beryllium window material 11 and the frame member 12 can be integrated at low temperatures and without thermal shock. Therefore, this X-ray guiding window can be manufactured without impairing the strength or shape of the window material 11 made of beryllium.
またこのＸ線導出窓を製造する際に、接合材を気相法で
ベリリウム製窓材１１に積層すると、比較的低温て処理
てきるのて、ベリリウム製窓材の熱的な損傷を避けるこ
とができる。Furthermore, when manufacturing this X-ray extraction window, if the bonding material is laminated on the beryllium window material 11 using a vapor phase method, the process can be performed at a relatively low temperature, thereby avoiding thermal damage to the beryllium window material. I can do it.
このようにこのＸ線導出窓およびその製造方法によれば
、窓材１１と枠部材１２とを接合する際に、ベリリウム
製の窓材１１を傷めることがないので、窓材１１の薄膜
化を図ることができる。As described above, according to this X-ray emitting window and its manufacturing method, the window material 11 made of beryllium is not damaged when the window material 11 and the frame member 12 are joined, so that the window material 11 can be made thinner. can be achieved.
「発明の効果」
以上説明しｌこようにこの発明のＸ線照射装置のＸ線導
出窓は、ベリリウム製窓材と枠部材とか、銀、金、ニッ
ケル、銅から選ばれる成分を一種以上含む接合材層を介
して拡散接合されたものなので、ヘリリウム製窓村内に
接合材層をなす接合材の原子が速やかに拡散して窓材と
枠部材とが確実に接合される。またこの発明のＸ線導出
窓で接合材層をなす前記金属の融点はベーキング時の温
度よりも充分高い。従ってこの発明のＸ線導出窓は、ベ
ーキングにも充分耐える得る実用上充分な耐熱性を有す
るものとなる。"Effects of the Invention" As explained above, the X-ray exit window of the X-ray irradiation device of the present invention includes beryllium window material and frame member, and one or more components selected from silver, gold, nickel, and copper. Since the bonding material is diffusion bonded through the bonding material layer, the atoms of the bonding material forming the bonding material layer quickly diffuse into the helium window frame, and the window material and the frame member are reliably bonded. Further, the melting point of the metal forming the bonding material layer in the X-ray extraction window of the present invention is sufficiently higher than the temperature during baking. Therefore, the X-ray extraction window of the present invention has practically sufficient heat resistance to withstand baking.
さらにこの発明のＸ線導出窓は、窓材と枠部材が拡散接
合されたものなので、熱的衝撃を与えずに低温でベリリ
ウム製窓材と枠部材とを一体化することができる。従っ
てこの発明のＸ線導出窓は、ベリリウム製窓材の強度や
形状を損なわずに製造できるものとなる。Further, in the X-ray extraction window of the present invention, since the window material and the frame member are diffusion bonded, the beryllium window material and the frame member can be integrated at low temperature without applying thermal shock. Therefore, the X-ray extraction window of the present invention can be manufactured without impairing the strength or shape of the beryllium window material.
さらにまたこの発明のＸ線導出窓の製造方法として、接
合材層を形成した後、窓材と枠部材とを重ね合わせ加熱
加圧処理して拡散接合する方法を採用することにより、
ベリリウム製窓材に全く熱的損傷を与えずにＸ線導出窓
を製造することかできる。Furthermore, as a method of manufacturing the X-ray emitting window of the present invention, after forming a bonding material layer, the window material and the frame member are stacked and heated and pressurized to perform diffusion bonding.
It is possible to manufacture an X-ray emitting window without causing any thermal damage to the beryllium window material.
従ってこの発明のＸ線照射装置のＸ線導出窓およびその
製造方法によれば、窓材と枠部材とを接合する際に、ベ
リリウム製の窓材を傷めることがなく、窓材の薄膜化を
図ることができる。Therefore, according to the X-ray emitting window of the X-ray irradiation device and the manufacturing method thereof of the present invention, the beryllium window material is not damaged when the window material and the frame member are joined, and the window material can be thinned. can be achieved.
第１図はこの発明のＸ線照射装置のＸ線導出窓の一実施
例を示す断面図、第２図は同平面図であ・・・窓材、
２ ・・
枠部材、
５・・・接合層。Fig. 1 is a sectional view showing an embodiment of the X-ray emitting window of the X-ray irradiation device of the present invention, and Fig. 2 is a plan view thereof... window material, 2... frame member, 5... bonding layer.
Claims (2)
囲を囲むステンレス鋼製の枠部材とからなるＸ線照射装
置のＸ線導出窓であって、 銀、金、ニッケル、銅から選ばれる成分を一種以上含む
接合材層を介して前記窓材と枠部材とが拡散接合されて
いることを特徴とするＸ線照射装置のＸ線導出窓。(1) An X-ray extraction window for an X-ray irradiation device consisting of a window material whose main component is beryllium and a frame member made of stainless steel surrounding the window material, which is made of silver, gold, nickel, or copper. An X-ray emitting window for an X-ray irradiation device, characterized in that the window material and the frame member are diffusion bonded via a bonding material layer containing one or more selected components.
囲を囲むステンレス鋼製の枠部材とからなるＸ線照射装
置のＸ線導出窓の製造方法であって、窓材と枠部材とを
接合する部分に銀、金、ニッケル、銅から選ばれる成分
を一種以上含む接合材層を形成し、この後窓材と枠部材
を重ね合わせて加熱加圧処理することにより両者を拡散
接合することを特徴とするＸ線照射装置のＸ線導出窓の
製造方法。(2) A method for manufacturing an X-ray emitting window for an X-ray irradiation device comprising a window material containing beryllium as a main component and a frame member made of stainless steel surrounding the window material, the window material and the frame member A bonding material layer containing one or more components selected from silver, gold, nickel, and copper is formed on the part where the window and frame members are bonded, and then the window material and frame member are overlapped and heated and pressurized to bond them together by diffusion bonding. A method of manufacturing an X-ray guiding window for an X-ray irradiation device.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2050129A JP2503710B2 (en) | 1990-03-01 | 1990-03-01 | X-ray deriving window of X-ray irradiator and manufacturing method thereof |
| US07/661,135 US5161179A (en) | 1990-03-01 | 1991-02-27 | Beryllium window incorporated in X-ray radiation system and process of fabrication thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2050129A JP2503710B2 (en) | 1990-03-01 | 1990-03-01 | X-ray deriving window of X-ray irradiator and manufacturing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03251800A true JPH03251800A (en) | 1991-11-11 |
| JP2503710B2 JP2503710B2 (en) | 1996-06-05 |
Family
ID=12850527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2050129A Expired - Fee Related JP2503710B2 (en) | 1990-03-01 | 1990-03-01 | X-ray deriving window of X-ray irradiator and manufacturing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2503710B2 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5317618A (en) * | 1992-01-17 | 1994-05-31 | Mitsubishi Denki Kabushiki Kaisha | Light transmission type vacuum separating window and soft X-ray transmitting window |
| WO1998033620A1 (en) * | 1997-02-03 | 1998-08-06 | Ngk Insulators, Ltd. | Composite bonding material of beryllium, copper alloy and stainless steel and composite bonding method |
| JP2011212706A (en) * | 2010-03-31 | 2011-10-27 | Ngk Insulators Ltd | Ultrathin film beryllium foil and method for producing the same |
| JP2013148478A (en) * | 2012-01-19 | 2013-08-01 | Jfe Engineering Corp | Particle beam transmission window and particle beam irradiation device having the same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6364253A (en) * | 1986-09-04 | 1988-03-22 | Nec Corp | Soft x-ray pickup window |
-
1990
- 1990-03-01 JP JP2050129A patent/JP2503710B2/en not_active Expired - Fee Related
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6364253A (en) * | 1986-09-04 | 1988-03-22 | Nec Corp | Soft x-ray pickup window |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5317618A (en) * | 1992-01-17 | 1994-05-31 | Mitsubishi Denki Kabushiki Kaisha | Light transmission type vacuum separating window and soft X-ray transmitting window |
| WO1998033620A1 (en) * | 1997-02-03 | 1998-08-06 | Ngk Insulators, Ltd. | Composite bonding material of beryllium, copper alloy and stainless steel and composite bonding method |
| US6176418B1 (en) | 1997-02-03 | 2001-01-23 | Ngk Insulators, Ltd. | Composite bonding material of beryllium, copper alloy and stainless steel and composite bonding method |
| JP2011212706A (en) * | 2010-03-31 | 2011-10-27 | Ngk Insulators Ltd | Ultrathin film beryllium foil and method for producing the same |
| JP2013148478A (en) * | 2012-01-19 | 2013-08-01 | Jfe Engineering Corp | Particle beam transmission window and particle beam irradiation device having the same |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2503710B2 (en) | 1996-06-05 |
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