JPH03229140A - Surface inspection device - Google Patents
Surface inspection deviceInfo
- Publication number
- JPH03229140A JPH03229140A JP2561890A JP2561890A JPH03229140A JP H03229140 A JPH03229140 A JP H03229140A JP 2561890 A JP2561890 A JP 2561890A JP 2561890 A JP2561890 A JP 2561890A JP H03229140 A JPH03229140 A JP H03229140A
- Authority
- JP
- Japan
- Prior art keywords
- light
- inspected
- illumination
- photosensitive drum
- detect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007689 inspection Methods 0.000 title claims abstract description 19
- 238000005286 illumination Methods 0.000 claims abstract description 31
- 238000001514 detection method Methods 0.000 claims description 9
- 230000001678 irradiating effect Effects 0.000 abstract description 3
- 239000003086 colorant Substances 0.000 abstract description 2
- 230000007547 defect Effects 0.000 description 17
- 108091008695 photoreceptors Proteins 0.000 description 16
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明は電子写真用の感光体シートの表面状態を検査す
る場合等に使用される表面検査装置に関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a surface inspection device used for inspecting the surface condition of a photoreceptor sheet for electrophotography.
（従来の技術）
鋼板、アルミ板等の金属板あるいは樹脂板の表面に存在
するキズ等の欠陥を検査するため以下の表面検査方法が
開発されている。(Prior Art) The following surface inspection method has been developed to inspect defects such as scratches existing on the surface of metal plates such as steel plates and aluminum plates, or resin plates.
１、・オプティカルフラットを用いて、感光体ドラムと
の干渉縞で検査する方法（特開昭６２−５２４０８号公
報参照）４
２Ｉレーザー光をポリゴンミラーで走査して、ごみなど
の異物を検出する方法で、主として半導体焼付装置のレ
チクル面上に存在するごみを検出する方法（特開昭６１
−２４３３４７号公報参照）。1. Method of inspecting by interference fringes with the photoreceptor drum using an optical flat (see Japanese Patent Laid-Open No. 62-52408) 4 2I scanning a laser beam with a polygon mirror to detect foreign objects such as dust A method for detecting dust mainly on the reticle surface of a semiconductor printing device (Japanese Patent Laid-Open No. 61
(Refer to Publication No.-243347).
Ｃ■回転円板の表面にビームを照射し、反射光の空間的
強度分布を検出することにより検査する方法（特開昭６
３−４２４５３号公報参照）。C ■ Inspection method by irradiating the surface of a rotating disk with a beam and detecting the spatial intensity distribution of the reflected light (Japanese Patent Laid-Open No. 6
(See Publication No. 3-42453).
■テレビカメラで物体形状を入力し、画像処理によって
欠陥を検出する方法（特開昭６１−７４０６号公報参照
）。(2) A method of inputting the shape of an object using a television camera and detecting defects through image processing (see Japanese Patent Laid-Open No. 7406/1983).
これらはすべて被検査体表面の形状変化に由来する反射
光強度の変化から欠陥検出を行うものである。All of these detect defects from changes in reflected light intensity resulting from changes in the shape of the surface of the object to be inspected.
（発明が解決しようとする課題）
しかしながら電子写真作成のプロセスで用いられる感光
体シートなどの表面欠陥には表面の形状変化であるキズ
等の他、感光体の塗布むらなど単なる反射強度の変化か
らでは検出が困難な欠陥も多数存在する。(Problem to be solved by the invention) However, surface defects such as photoreceptor sheets used in the process of electrophotography include scratches, which are changes in surface shape, and simple changes in reflection intensity, such as uneven coating on the photoreceptor. However, there are many defects that are difficult to detect.
（課題を解決するための手段）
本発明は、上記従来の問題点を解決するためになされた
ものであり、
１、被検査体を照明する照明手段と、被検査体からの反
射光を受光し被検査体の表面状態を検出する検出手段と
を有する表面検出装置において、前記照明手段は被検査
体に対し単色光を照射するものである表面検査装置であ
る。(Means for Solving the Problems) The present invention has been made to solve the above-mentioned conventional problems, and includes: 1. An illumination means for illuminating an object to be inspected, and receiving light reflected from the object to be inspected. In the surface detection apparatus, the illumination means irradiates monochromatic light onto the object to be inspected.
２、照明手段は照明光の波長を変化させる機能を有する
請求項第１項記載の表面検査装置である。2. The surface inspection apparatus according to claim 1, wherein the illumination means has a function of changing the wavelength of the illumination light.
（作 用）
請求項第１項記載の発明によれば、照明手段によって被
検査体に対し単色光が照射され、その反射光を検出手段
が受け、被検査体の表面状態が検出される。(Function) According to the invention described in claim 1, the illumination means irradiates the object to be inspected with monochromatic light, the detection means receives the reflected light, and the surface condition of the object to be inspected is detected.
請求項第２項記載の発明によれば、照明手段によって被
検査体に対し単色光が照射され、その反射光を検出手段
が受け、被検査体の表面状態が検出され、さらに被検査
体に反射分光率の異なる複数の欠陥が存在する場合、検
出を目的とする欠陥を検出することができる波長の光を
選択して被検査体に照射する。。According to the invention set forth in claim 2, the illumination means irradiates the object to be inspected with monochromatic light, the detection means receives the reflected light, the surface state of the object to be inspected is detected, and the object to be inspected is further illuminated with monochromatic light. When a plurality of defects with different reflection spectral coefficients are present, light having a wavelength that can detect the target defect is selected and irradiated onto the object to be inspected. .
（実 施 例） 以下本発明の実施例を図面に基づいて説明する。(Example) Embodiments of the present invention will be described below based on the drawings.
第１図において符号１は照明ランプを示し、この照明ラ
ンプ１は被検査体としての感光体ドラム２に光を照射す
るようになっている。照明ランプ１と感光体ドラム２と
の間にはバンドパスフィルタ３が配置されている。この
バンドパスフィルタ３は照明ランプ１から照射された光
を所定の波長の単色光とする機能をもっている。これら
照明ランプ１とバントパスフィルタ３とによって照明手
段が構成されている。In FIG. 1, reference numeral 1 indicates an illumination lamp, and this illumination lamp 1 is adapted to irradiate light onto a photosensitive drum 2 as an object to be inspected. A bandpass filter 3 is arranged between the illumination lamp 1 and the photoreceptor drum 2. This bandpass filter 3 has a function of converting the light emitted from the illumination lamp 1 into monochromatic light of a predetermined wavelength. These illumination lamps 1 and bandpass filters 3 constitute illumination means.
符号４は検出手段としての検出器を示し、この検出器４
は感光体ドラムからの反射光を検知して、感光体ドラム
１の表面の状態を検出できるようになっている。Reference numeral 4 indicates a detector as a detection means, and this detector 4
Detects the reflected light from the photosensitive drum 1 to detect the state of the surface of the photosensitive drum 1.
次に第１実施例の表面検査装置の動作について説明する
。Next, the operation of the surface inspection apparatus of the first embodiment will be explained.
照明ランプ１から光が発せられ、この光はバントパスフ
ィルタ３を通過し、所定の波長の単色光とされた後、感
光体トラム１の表面に照射される。Light is emitted from the illumination lamp 1, passes through a bandpass filter 3, becomes monochromatic light of a predetermined wavelength, and is then irradiated onto the surface of the photoreceptor tram 1.
そして感光体ドラム１によって反射され、この反射光を
検出器４が受け、感光体トラム１の表面状態が検出され
る。The light is then reflected by the photoreceptor drum 1, and the detector 4 receives this reflected light to detect the surface condition of the photoreceptor tram 1.
上記検出動作を行うにあたってバンドパスフィルタ３を
適宜交換する。すなわち感光体ドラム１表面の欠陥には
所定の波長域の単色光を高いレベルで反射するもの、あ
るいはあまり反射しないものが存在するので、通過する
光を種々の波長とするフィルタを複数用意しておき、検
出しようとする欠陥に対応して感光体ドラム１に照射す
る単色光の波長を変化させることによって、複数色から
なる照明光の反射光を検出するのみでは発見することが
困難な欠陥を容易に発見することが可能となる。When performing the above detection operation, the bandpass filter 3 is replaced as appropriate. In other words, since there are defects on the surface of the photoreceptor drum 1 that reflect monochromatic light in a predetermined wavelength range at a high level, or that do not reflect it very much, a plurality of filters are prepared that allow various wavelengths of light to pass through. By changing the wavelength of the monochromatic light irradiated onto the photoreceptor drum 1 in accordance with the defect to be detected, defects that are difficult to detect by simply detecting the reflected light of illumination light consisting of multiple colors can be detected. It can be easily discovered.
第２図は第２実施例にかかる表面検査装置を示す。第２
実施例の表面検査装置は第１実施例に表面検査装置とそ
の構成を同様とする部分を有するので、共通部分につい
ては第１実施例と同し符号を付して、その説明は省略す
る。FIG. 2 shows a surface inspection device according to a second embodiment. Second
Since the surface inspection apparatus of this embodiment has parts having the same configuration as the surface inspection apparatus of the first embodiment, the common parts are given the same reference numerals as those of the first embodiment, and a description thereof will be omitted.
第２図において符号７は回折格子を示し、この回折格子
７は台座８上に設置されている６台座８は図示しないモ
ータによって回転するようになっている。このモータに
は回転制御装置９が接続されており、回転制御装置の制
御にしたがって台座７は回転するようになっている。こ
れら回折格子７、台座８、図示しないモータ、回転制御
装置９および照明ランプ１によって照明手段が構成され
ている。回折格子７と感光体ドラム２との間にはスリッ
ト１０ａを有するスリット板１０が配置されている。In FIG. 2, reference numeral 7 indicates a diffraction grating, and this diffraction grating 7 is installed on a pedestal 8. The pedestal 8 is rotated by a motor (not shown). A rotation control device 9 is connected to this motor, and the base 7 is rotated under the control of the rotation control device. The diffraction grating 7, the pedestal 8, a motor (not shown), the rotation control device 9, and the illumination lamp 1 constitute an illumination means. A slit plate 10 having slits 10a is arranged between the diffraction grating 7 and the photosensitive drum 2.
次に第２実施例の表面検査装置の動作について説明する
。Next, the operation of the surface inspection apparatus of the second embodiment will be explained.
照明ランプ１から光が発せられ、この光は回折格子７を
通過して単色光にされ、この単色光はスリット１０ａを
通って感光体ドラム２の表面に照射される。そして感光
体ドラム２によって反射され、この反射光を検出器４が
検出し、感光体ドラム２の表面状態を検出する。Light is emitted from the illumination lamp 1, this light passes through the diffraction grating 7 and becomes monochromatic light, and this monochromatic light passes through the slit 10a and is irradiated onto the surface of the photoreceptor drum 2. The light is then reflected by the photoreceptor drum 2, and the detector 4 detects this reflected light to detect the surface condition of the photoreceptor drum 2.
上記検出動作において回転制御手段９を操作し台座８を
回転させ、単色光の波長を適宜Ａ整する。In the above detection operation, the rotation control means 9 is operated to rotate the pedestal 8, and the wavelength of the monochromatic light is adjusted to A as appropriate.
なおスリット板１０をスリット１０ａの異なるものと交
換することによってハント幅を調整することも可能であ
る。Note that it is also possible to adjust the hunt width by replacing the slit plate 10 with one having a different slit 10a.
第３実施例はそれぞれ波長の異なる単色光を発する照明
ランプ１と２１を備え、この照明ランプ１と２１を選択
的に遮蔽するシャッター１１を設けた表面検査装置であ
る。The third embodiment is a surface inspection apparatus that includes illumination lamps 1 and 21 that emit monochromatic light of different wavelengths, and is provided with a shutter 11 that selectively blocks the illumination lamps 1 and 21.
この表面検査装置では検出しようとする欠陥の波長特性
に応じて、シャッター１１を移動させ、照明ランプ１と
２１のいずれかによって感光体ドラム２に光を照射し、
その反射光を検出器４によって検出して、感光体ドラム
２の表面欠陥を検出する。In this surface inspection device, the shutter 11 is moved according to the wavelength characteristics of the defect to be detected, and the photoreceptor drum 2 is irradiated with light using either the illumination lamps 1 or 21.
The reflected light is detected by a detector 4 to detect surface defects on the photoreceptor drum 2.
実施例では感光体シートの塗布むら髪検呂するための装
置を示しているが、本発明はこれに限られず１表面欠陥
の検出において波長特性を伴うものについてであれば、
いかなるものにも応用することが口丁能である。Although the embodiment shows an apparatus for detecting uneven coating of a photoreceptor sheet, the present invention is not limited to this, but can be applied to detection of surface defects that involves wavelength characteristics.
Kucho-noh is something that can be applied to anything.
（発明の効果）
以上のように請求項第１項記載の発明によれば、照明手
段を被検査体に対し単色光を照射するものとしたので、
当該所定の波長の単色光を高いレベルで反射する表面欠
陥あるいは比較的低いレベルで反射する表面欠陥を検出
することができるようになる。したがって従来検出が困
難だった表面欠陥を容易に検出することが可能となる。(Effects of the Invention) As described above, according to the invention described in claim 1, since the illumination means is configured to irradiate monochromatic light to the object to be inspected,
Surface defects that reflect monochromatic light of the predetermined wavelength at a high level or relatively low levels can now be detected. Therefore, it becomes possible to easily detect surface defects that were previously difficult to detect.
請求項第２項記載の発明によれば、照明手段を照明光の
波長を変化させる機能を有するものとしたので、反射分
光率が異なる複数の表面欠陥が存在する場合でも、効率
良く複数の表面欠陥を検出することが可能となる。According to the invention described in claim 2, since the illumination means has the function of changing the wavelength of the illumination light, even if there are a plurality of surface defects with different reflection spectral ratios, the illumination means can efficiently illuminate the plurality of surfaces. It becomes possible to detect defects.
第１図は第１実施例にかかる表面検査装置を示す図、第
２図は第２実施例にかかる表面検査装置を示す図、第３
図は第３実施例にかかる表面検査装置を示す図である。
１．２［・・・照明ランプ、２・・・感光体ドラム、３
・・・バンドパスフィルタ、４・・・検出器、７・・・
回折格子、８°・・台座、９・・・回転制御装置、１０
・・・スリット板、１０ａ・・・スリット
第
図
第
図1 is a diagram showing a surface inspection device according to a first embodiment, FIG. 2 is a diagram showing a surface inspection device according to a second embodiment, and FIG. 3 is a diagram showing a surface inspection device according to a second embodiment.
The figure shows a surface inspection device according to a third embodiment. 1.2 [... illumination lamp, 2... photosensitive drum, 3
... Bandpass filter, 4... Detector, 7...
Diffraction grating, 8°...Pedestal, 9...Rotation control device, 10
...Slit plate, 10a...Slit diagram diagram
Claims (1)
射光を受光し被検査体の表面状態を検出する検出手段と
を有する表面検出装置において、前記照明手段は被検査
体に対し単色光を照射するものであることを特徴とする
表面検査装置。 ２、照明手段は照明光の波長を変化させる機能を有する
請求項第１項記載の表面検査装置。[Scope of Claims] 1. A surface detection device having an illumination means for illuminating an object to be inspected, and a detection means for receiving reflected light from the object to be inspected and detecting a surface condition of the object to be inspected, wherein the illumination means A surface inspection device characterized in that it irradiates monochromatic light onto an object to be inspected. 2. The surface inspection apparatus according to claim 1, wherein the illumination means has a function of changing the wavelength of the illumination light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2561890A JPH03229140A (en) | 1990-02-05 | 1990-02-05 | Surface inspection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2561890A JPH03229140A (en) | 1990-02-05 | 1990-02-05 | Surface inspection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03229140A true JPH03229140A (en) | 1991-10-11 |
Family
ID=12170874
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2561890A Pending JPH03229140A (en) | 1990-02-05 | 1990-02-05 | Surface inspection device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03229140A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006313146A (en) * | 2005-04-08 | 2006-11-16 | Omron Corp | Defect inspection method, and defect inspection device using same |
-
1990
- 1990-02-05 JP JP2561890A patent/JPH03229140A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006313146A (en) * | 2005-04-08 | 2006-11-16 | Omron Corp | Defect inspection method, and defect inspection device using same |
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