JPH0322400U - - Google Patents
Info
- Publication number
- JPH0322400U JPH0322400U JP8283889U JP8283889U JPH0322400U JP H0322400 U JPH0322400 U JP H0322400U JP 8283889 U JP8283889 U JP 8283889U JP 8283889 U JP8283889 U JP 8283889U JP H0322400 U JPH0322400 U JP H0322400U
- Authority
- JP
- Japan
- Prior art keywords
- cooling
- partition plate
- chamber
- exhaust pipe
- partition plates
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005192 partition Methods 0.000 claims description 8
- 238000001816 cooling Methods 0.000 claims description 6
- 239000000498 cooling water Substances 0.000 claims 1
- 238000007599 discharging Methods 0.000 claims 1
- 239000002470 thermal conductor Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Description
第１図は本考案に係るプラズマ応用装置におけ
る排出ガスの冷却構造の一例を示す概略図、第２
図は第１図のＡＡ拡大断面図である。
１……トーチ、２……ガス供給ノズル、３……
高周波コイル、４……孔、５……チヤンバー、６
……材料、７……油回転ポンプ、８……排出管、
９ａ乃至９ｆ……仕切板、１０ａ乃至１０ｆ……
切欠、１１……冷却パイプ。
Fig. 1 is a schematic diagram showing an example of an exhaust gas cooling structure in a plasma application device according to the present invention;
The figure is an enlarged sectional view taken along line AA in FIG. 1. 1...Torch, 2...Gas supply nozzle, 3...
High frequency coil, 4...hole, 5...chamber, 6
...Material, 7...Oil rotary pump, 8...Discharge pipe,
9a to 9f... partition plate, 10a to 10f...
Notch, 11...Cooling pipe.
Claims (1)
トーチに連通するように設けられたチヤンバーと
、該チヤンバー内の高温ガスを外部に排出する排
出管とを備え、前記排出管内を少なくとも２枚の
熱良導体製仕切板にて仕切ると共にこの各仕切板
を冷却パイプにて互いに一体化し、各隣り合う仕
切板について切欠部が該各仕切板外周部の互いに
反対側に位置するように夫々仕切板に切欠部を形
成し、前記冷却パイプに冷却水を流して各仕切板
を冷却することにより排出管内を流れるチヤンバ
ーからの高温ガスを冷却するように構成したこと
を特徴とする誘導プラズマ応用装置における排出
ガス冷却構造。 A torch for generating induced plasma, a chamber provided to communicate with the torch, and an exhaust pipe for discharging high-temperature gas in the chamber to the outside, and at least two sheets of good thermal conductor are provided inside the exhaust pipe. The partition plates are partitioned by manufactured partition plates, and the partition plates are integrated with each other by cooling pipes, and cutouts are provided in each partition plate so that the cutouts are located on opposite sides of the outer periphery of each partition plate for each adjacent partition plate. Exhaust gas cooling in an induced plasma application device, characterized in that the high temperature gas from the chamber flowing in the exhaust pipe is cooled by cooling each partition plate by flowing cooling water through the cooling pipe. structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8283889U JPH079358Y2 (en) | 1989-07-14 | 1989-07-14 | Exhaust gas cooling structure in induction plasma application equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8283889U JPH079358Y2 (en) | 1989-07-14 | 1989-07-14 | Exhaust gas cooling structure in induction plasma application equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0322400U true JPH0322400U (en) | 1991-03-07 |
| JPH079358Y2 JPH079358Y2 (en) | 1995-03-06 |
Family
ID=31630000
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8283889U Expired - Lifetime JPH079358Y2 (en) | 1989-07-14 | 1989-07-14 | Exhaust gas cooling structure in induction plasma application equipment |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH079358Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113993264A (en) * | 2021-11-05 | 2022-01-28 | 北京环境特性研究所 | Plasma torch and cooling method thereof |
-
1989
- 1989-07-14 JP JP8283889U patent/JPH079358Y2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113993264A (en) * | 2021-11-05 | 2022-01-28 | 北京环境特性研究所 | Plasma torch and cooling method thereof |
| CN113993264B (en) * | 2021-11-05 | 2023-11-14 | 北京环境特性研究所 | Plasma torch and cooling method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH079358Y2 (en) | 1995-03-06 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |