JPH03215722A - Temperature sensor - Google Patents
Temperature sensorInfo
- Publication number
- JPH03215722A JPH03215722A JP1033390A JP1033390A JPH03215722A JP H03215722 A JPH03215722 A JP H03215722A JP 1033390 A JP1033390 A JP 1033390A JP 1033390 A JP1033390 A JP 1033390A JP H03215722 A JPH03215722 A JP H03215722A
- Authority
- JP
- Japan
- Prior art keywords
- measured
- temperature sensor
- thermocouple
- powder
- melting point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000843 powder Substances 0.000 claims abstract description 56
- 239000000919 ceramic Substances 0.000 claims abstract description 42
- 229910052751 metal Inorganic materials 0.000 claims abstract description 39
- 239000002184 metal Substances 0.000 claims abstract description 39
- 238000002844 melting Methods 0.000 claims abstract description 32
- 230000008018 melting Effects 0.000 claims abstract description 26
- 150000002739 metals Chemical class 0.000 claims abstract description 13
- 239000000463 material Substances 0.000 claims abstract description 9
- 230000035882 stress Effects 0.000 claims description 17
- 238000010304 firing Methods 0.000 claims description 8
- 238000005245 sintering Methods 0.000 claims description 3
- 230000008646 thermal stress Effects 0.000 claims description 2
- 239000007787 solid Substances 0.000 claims 1
- 238000005259 measurement Methods 0.000 abstract description 13
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 abstract description 13
- PXXKQOPKNFECSZ-UHFFFAOYSA-N platinum rhodium Chemical compound [Rh].[Pt] PXXKQOPKNFECSZ-UHFFFAOYSA-N 0.000 abstract description 7
- SMEGJBVQLJJKKX-HOTMZDKISA-N [(2R,3S,4S,5R,6R)-5-acetyloxy-3,4,6-trihydroxyoxan-2-yl]methyl acetate Chemical compound CC(=O)OC[C@@H]1[C@H]([C@@H]([C@H]([C@@H](O1)O)OC(=O)C)O)O SMEGJBVQLJJKKX-HOTMZDKISA-N 0.000 abstract description 3
- 229940081735 acetylcellulose Drugs 0.000 abstract description 3
- 229920002301 cellulose acetate Polymers 0.000 abstract description 3
- 229910020662 PbSiO3 Inorganic materials 0.000 abstract 1
- 238000001354 calcination Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 9
- 239000000203 mixture Substances 0.000 description 8
- 239000000853 adhesive Substances 0.000 description 7
- 230000001070 adhesive effect Effects 0.000 description 7
- 238000009529 body temperature measurement Methods 0.000 description 6
- 229910052697 platinum Inorganic materials 0.000 description 5
- 229910052703 rhodium Inorganic materials 0.000 description 4
- 239000010948 rhodium Substances 0.000 description 4
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 4
- 238000007650 screen-printing Methods 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- 239000012530 fluid Substances 0.000 description 3
- 229910052575 non-oxide ceramic Inorganic materials 0.000 description 3
- 239000011225 non-oxide ceramic Substances 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- WUOACPNHFRMFPN-SECBINFHSA-N (S)-(-)-alpha-terpineol Chemical compound CC1=CC[C@@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-SECBINFHSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- LIXXICXIKUPJBX-UHFFFAOYSA-N [Pt].[Rh].[Pt] Chemical compound [Pt].[Rh].[Pt] LIXXICXIKUPJBX-UHFFFAOYSA-N 0.000 description 2
- OVKDFILSBMEKLT-UHFFFAOYSA-N alpha-Terpineol Natural products CC(=C)C1(O)CCC(C)=CC1 OVKDFILSBMEKLT-UHFFFAOYSA-N 0.000 description 2
- 229940088601 alpha-terpineol Drugs 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 238000012827 research and development Methods 0.000 description 2
- 229910001006 Constantan Inorganic materials 0.000 description 1
- 229910000575 Ir alloy Inorganic materials 0.000 description 1
- 229910000629 Rh alloy Inorganic materials 0.000 description 1
- 229910005091 Si3N Inorganic materials 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910000323 aluminium silicate Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910001179 chromel Inorganic materials 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- HNPSIPDUKPIQMN-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Al]O[Al]=O HNPSIPDUKPIQMN-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000010970 precious metal Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は温度センサーに関し、特にセラミック部材等の
高温下での使用時における温度測定ができるセンサー、
及び温度測定と同時に熱応力をも測定することができる
センサーに関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a temperature sensor, and in particular to a sensor that can measure the temperature of ceramic members etc. when used at high temperatures.
and a sensor capable of measuring thermal stress at the same time as temperature measurement.
〔従来の技術及び発明が解決しようとする課題〕最近、
自動車や各種機械の部品で高温下で使用するものに、各
種のセラミックスが多く使用されるようになってきてお
り、各種セラミック部品の研究開発が活発に行われてい
る。そのようなセラミック部品の研究開発においては、
部材の温度や表面応力等の測定は必要欠くべからざるも
のであり、正確な測定値が特に必要とされる。[Problems to be solved by conventional techniques and inventions] Recently,
Various ceramics are increasingly being used in parts of automobiles and various machines that are used at high temperatures, and research and development of various ceramic parts is being actively conducted. In research and development of such ceramic parts,
Measuring the temperature, surface stress, etc. of a member is indispensable, and accurate measurement values are particularly required.
従来、高温下におかれたセラミックス等の物体の温度を
測定する方法としては、熱電対を用いる方法、及び熱放
射をパイ口メータ等により検知し測温する方法が主とし
て行われている。2. Description of the Related Art Conventionally, the main methods for measuring the temperature of objects such as ceramics placed under high temperatures include a method using a thermocouple and a method of measuring temperature by detecting heat radiation with a piemeter or the like.
熱電対による温度測定の場合、熱電対の先端を被測定物
の所望の部位に接着又は押し当てて測温するが、高温下
の測定では適当な接着剤が見当たらないので、通常は単
に熱電対の先端を被測定物表面に押し当てる方法がとら
れている。When measuring temperature with a thermocouple, the tip of the thermocouple is glued or pressed against the desired part of the object to be measured. A method is used in which the tip of the probe is pressed against the surface of the object to be measured.
しかし、たとえば複雑な形状の被測定物や、管状部材の
内壁面における測温では、熱電対の先端を被験部位にう
まく押し当てるのが難しい場合が多い。また、たとえば
高速高温流体が流れる管内壁の測温をする際に、従来の
素線式の熱電対を用いると、熱電対のリード部となる線
部分が管内の流体の流れに影響を及ぼし、問題となる場
合がある。However, when measuring the temperature of a complexly shaped object or the inner wall surface of a tubular member, it is often difficult to properly press the tip of the thermocouple against the test site. Furthermore, if a conventional wire thermocouple is used to measure the temperature on the inner wall of a pipe through which high-speed, high-temperature fluid flows, the wire portion that becomes the thermocouple lead will affect the flow of fluid inside the pipe. This may be a problem.
セラミック部材の測温をより正確なものとする熱電対と
して、特開昭５７− ９４６２２号は、セラミックグリ
ーンシ一ト上に耐酸化性高融点貴金属のペ一ストを塗布
し、この塗布面上にセラミックグリーンシ一トを圧着或
いはセラミックペーストをコーティングして一体化した
のち焼成してなる熱電対を開示している。しかしながら
、この熱電対の形成にはガラス質を全く含有しない純金
属ペーストを使用しているために、形成される熱電対の
セラミック部材に対する接着強度はそれほど高くならず
、タービンロータ等の高温にさらされる部位又は高速高
温流体が通る管内等の測温には適さない。As a thermocouple for more accurate temperature measurement of ceramic members, Japanese Patent Application Laid-Open No. 57-94622 discloses a method in which a paste of an oxidation-resistant high-melting point precious metal is applied to a ceramic green sheet, and A thermocouple is disclosed in which a ceramic green sheet is pressure-bonded or a ceramic paste is coated and integrated, and then fired. However, since a pure metal paste containing no glass is used to form this thermocouple, the adhesive strength of the formed thermocouple to the ceramic member is not very high, and it is exposed to high temperatures such as turbine rotors. It is not suitable for temperature measurement in areas where high-speed, high-temperature fluid passes or inside pipes.
一方、パイ口メータ等を用いた熱放射の検知による測温
では、複雉形状の被測定物や、管状部材内壁面の測温は
特に困難であり、また放射率の較正が必要となるので有
効ではない。On the other hand, when measuring temperature by detecting thermal radiation using a pie-shaped meter, etc., it is particularly difficult to measure the temperature of a complex pheasant-shaped object or the inner wall surface of a tubular member, and it is necessary to calibrate the emissivity. Not valid.
ところで、各種の部材の機械的強度を知るために、部材
各部の歪を測定することが広く行われているが、この歪
の測定には通常歪ゲージが使用されている。By the way, in order to know the mechanical strength of various members, it is widely practiced to measure the strain in each part of the member, and a strain gauge is usually used to measure this strain.
従来の歪ゲージは、プラスチック等の可撓性の高い材料
や、ステンレススチール等の高引張強度材等からなるベ
ース上に、歪ゲージパターンが形成されてなるものであ
り、このベースを被測定物に接着して歪測定（表面応力
測定）を行っている。Conventional strain gauges have a strain gauge pattern formed on a base made of a highly flexible material such as plastic or a high tensile strength material such as stainless steel. Strain measurement (surface stress measurement) is performed by adhering to the
しかしながら、このような従来の方式による歪測定では
、セラミック部材等の高温での使用条件（たとえば１０
００℃以上）での測定は、実際には不可能である。とい
うのは、上述の熱電対の場合と同様に、このような高温
下ではベースを被測定物表面に接着する適当な接着剤が
見当たらないからである。However, strain measurement using such a conventional method is difficult under high-temperature usage conditions (for example, 10
00°C or higher) is practically impossible. This is because, as in the case of the thermocouple mentioned above, no suitable adhesive has been found to bond the base to the surface of the object to be measured at such high temperatures.
また、これまでの歪ゲージには、ゲージパターンが形成
されているベース上に、熱電対が併設されたものもある
が、歪ゲージパターンと熱電対とは別々に形成されてお
り、目的とする測定点の歪みと温度とを同時に精度良く
計測できるとは限らなかった。In addition, some conventional strain gauges have a thermocouple attached to the base on which the gauge pattern is formed, but the strain gauge pattern and thermocouple are formed separately, and the It has not always been possible to accurately measure strain and temperature at a measurement point at the same time.
したがって本発明の目的は、上記問題点を克服し、セラ
ミック部材等の使用条件と同じ高温下で測温することが
できる温度センサーを提供することであり、さらには、
高温での温度測定に加えて表面応力をも同時に計測する
ことができる温度センサーを提供することである。Therefore, an object of the present invention is to overcome the above-mentioned problems and provide a temperature sensor that can measure temperature under the same high temperature conditions as the usage conditions of ceramic members, etc.
It is an object of the present invention to provide a temperature sensor capable of simultaneously measuring surface stress in addition to temperature measurement at high temperatures.
以上の目的に鑑み鋭意研究の結果、本発明者等は、（ａ
）熱電対を形成する二種類の高融点金属粉末の各々と、
セラミック粉末と、有機ビヒクルとからなる２種類のペ
ーストを用いて、２つの線状パターンを被測定物表面に
塗布して焼成すれば、熱電対を良好な接着強度をもって
被測定物表面に直接形成することができること、ら）熱
電対を構成する２つの線状パターンのうち一方を延長し
てジグザグ形状とすれば、そのジグザグ形状の線状パタ
ーンの両端子間における抵抗変化を測定することによっ
て表面応力をも測定できること、及び（Ｃ）応力センサ
ーに、異種金属からなる線状パターンを接合するように
形成することによって、応力と温度とを同時に測定でき
ることを発見し、本発明に想到した。As a result of intensive research in view of the above objectives, the present inventors have discovered (a
) Each of the two types of high melting point metal powder forming the thermocouple,
By applying two linear patterns on the surface of the object to be measured using two types of paste consisting of ceramic powder and an organic vehicle and firing them, thermocouples can be directly formed on the surface of the object to be measured with good adhesive strength. g) If one of the two linear patterns constituting the thermocouple is extended to form a zigzag shape, the surface resistance can be determined by measuring the resistance change between both terminals of the zigzag linear pattern. We discovered that stress can also be measured, and (C) that stress and temperature can be measured simultaneously by forming a linear pattern made of different metals on the stress sensor, and came up with the present invention.
すなわち本発明の第１の温度センサーは、熱電対を形成
する高融点金属の各々の粉末と、セラミック粉末と有機
ビヒクルとからなるペーストをそれぞれ被測定物に線状
に塗布して焼成することにより、前記被測定物表面に熱
電対を直接形成してなることを特徴とする。That is, the first temperature sensor of the present invention is produced by linearly applying a paste consisting of powders of high-melting point metals forming a thermocouple, ceramic powder, and an organic vehicle to an object to be measured and firing the paste. , characterized in that a thermocouple is directly formed on the surface of the object to be measured.
また本発明の第２の温度センサーは、応力センサーに異
種金属を接合することにより応力と温度を両方測定でき
ることを特徴とする。詳細には、高融点金属の粉末と、
セラミック粉末と、有機ビヒクルとからなるペーストを
、被測定物表面にジグザグ状部分を有する線状に塗布し
て焼成することにより、前記被測定物表面に直接形成し
てなる応力センサーに、前記高融点金属とは異なる高融
点金属の粉末と、セラミック粉末と、有機ビヒクルとか
らなるペーストを前記被測定物に線状に塗布して焼成す
ることによって得られる線状パターンを接合することに
より、温度センサーを設けたことを特徴とする。Further, the second temperature sensor of the present invention is characterized in that both stress and temperature can be measured by bonding different metals to the stress sensor. In detail, high melting point metal powder,
By applying a paste consisting of ceramic powder and an organic vehicle in a linear shape having a zigzag portion to the surface of the object to be measured and firing it, the stress sensor formed directly on the surface of the object to be measured is coated with the high temperature. By joining a linear pattern obtained by applying a paste consisting of a powder of a high-melting point metal different from the melting point metal, a ceramic powder, and an organic vehicle to the object to be measured in a linear manner and firing it, the temperature can be adjusted. It is characterized by being equipped with a sensor.
以下本発明を詳細に説明する。 The present invention will be explained in detail below.
まず本発明で用いるペーストは、高融点金属粉？と、セ
ラミック粉末と、有機ビヒクルとからなる。First, is the paste used in the present invention a high melting point metal powder? , a ceramic powder, and an organic vehicle.
高融点金属粉末の組合せとしては、白金／白金ロジウム
合金（ロジウム含有率１０重量％、１３重量％又は３０
重量％等） イリジウム／ロジウムイリジウム合金、パ
ラジウム系合金等の通常熱電対に使用する金属の粉末を
使用することができる。Combinations of high melting point metal powders include platinum/platinum rhodium alloys (rhodium content of 10% by weight, 13% by weight or 30% by weight).
Weight %, etc.) Metal powders commonly used in thermocouples, such as iridium/rhodium-iridium alloys and palladium-based alloys, can be used.
またセラミック粉末としては、被測定物と同一のセラミ
ック粉末、被測定物の焼結助剤、又は被測定物と濡れ性
の良いセラミックスの粉末であれば良く、被測定物に適
合するように適宜選択する。The ceramic powder may be the same ceramic powder as the object to be measured, a sintering aid for the object to be measured, or a ceramic powder that has good wettability with the object to be measured. select.
一般的には被測定物がセラミックからなる場合には、そ
の母材と同質材のセラミック粉末を用いるのが好ましい
。例えば、Ａｊ！ ２０３やＳｌＯ■を主成分とする酸
化物系のセラミックスからなる被測定物に対しては、Ｓ
１０２、ＰｂＳｉ０３等のＳｉｎ．を主成分とするセラ
ミック粉末やアルミノシリケート粉末等が使用できる。Generally, when the object to be measured is made of ceramic, it is preferable to use ceramic powder of the same material as the base material. For example, Aj! For objects to be measured made of oxide-based ceramics whose main components are
102, PbSi03, etc. Ceramic powder, aluminosilicate powder, etc. mainly composed of can be used.
また、Ｓｉ３Ｎ＝等の非酸化物セラミックスが被測定物
となる場合には、上述のＳｌＯ。系のセラミックスにイ
ットリア等の酸化物を焼結助剤として加えたセラミック
粉末を用いるのが良い。In addition, when the object to be measured is a non-oxide ceramic such as Si3N=, the above-mentioned SlO. It is preferable to use a ceramic powder made by adding an oxide such as yttria as a sintering aid to the ceramics.
なお、被測定物が非酸化物セラミックスの場合には、後
述するように、まず被測定物表面の酸化処理を行うのが
良い。In addition, when the object to be measured is a non-oxide ceramic, it is preferable to first oxidize the surface of the object to be measured, as described later.
有機ビヒクルとしては通常の厚膜印刷用の有機ビヒクル
が使用できる。このような有機ビヒクルとしては、たと
えばアセチルセルロースをαテルピネオールに溶解した
ものが挙げられる。As the organic vehicle, a conventional organic vehicle for thick film printing can be used. Such organic vehicles include, for example, acetylcellulose dissolved in alpha terpineol.
上記三成分の配合比は以下の通りとする。The blending ratio of the above three components is as follows.
まず高融点金属粉末とセラミック粉末との配合比は、高
融点金属粉末を５０〜９０重量％、セラミック粉末を５
０〜１０重量％とする。高融点金属粉末が５０重量％未
満であると、良好な高融点金属からなる線状パターンを
形成することができず、その電気抵抗が大きくなる。ま
た高融点金属粉末が９０重量％を超す量とすると、ペー
スト状の混合物を得ることができず、被測定物表面への
塗布の操作が難しくなる。さらに、相対的にセラミック
粉末が少なくなるために被測定物への接着強度が低下す
ることになり好ましくない。First, the blending ratio of high melting point metal powder and ceramic powder is 50 to 90% by weight of high melting point metal powder and 5% by weight of ceramic powder.
0 to 10% by weight. If the high melting point metal powder is less than 50% by weight, a good linear pattern made of the high melting point metal cannot be formed, and its electrical resistance increases. Furthermore, if the amount of the high melting point metal powder exceeds 90% by weight, it will not be possible to obtain a paste-like mixture, making it difficult to apply the powder onto the surface of the object to be measured. Furthermore, since the amount of ceramic powder is relatively reduced, the adhesive strength to the object to be measured decreases, which is undesirable.
また有機ビヒクルは、上記の高融点金属粉末とセラミッ
ク粉末との混合物１００重量部に対して１０〜５０重量
邪を加える。これにより得られるペースト状混合物の粘
度を５００〜５００， ０００センチボアズに調節する
ことができる。用いるペーストをこのような粘度に保つ
ことで、スクリーン印刷法等によるペーストの塗布の操
作を容易にすることができる。The organic vehicle is added in an amount of 10 to 50 parts by weight per 100 parts by weight of the above-mentioned mixture of high melting point metal powder and ceramic powder. The viscosity of the paste-like mixture thus obtained can be adjusted to between 500 and 500,000 centiboads. By maintaining the viscosity of the paste used, it is possible to facilitate the operation of applying the paste by screen printing or the like.
上述の構成のペーストを用い、被測定物表面に熱電対と
なる線状パターン（及び本発明の第２の温度センサーに
おいては応力測定用のジグザグ状パターン）を形成する
。このペーストの塗布にはスクリーン印刷法（ハケ刷り
法）を用いるのが好ましい。なお、被測定物がＳｉＪａ
等の非酸化物セラミックスの場合、まず被測定物をたと
えば大気中で８００〜１４００℃に加熱して被測定物表
面を酸化処理しておくのが良い。これによりペースト塗
布後の焼成で、高融点金属からなる線状パターンの接着
強度を高くすることができる。なお、この酸化処理は１
０００℃において３０分程度の場合、特に良好である。A linear pattern (and a zigzag pattern for stress measurement in the second temperature sensor of the present invention) serving as a thermocouple is formed on the surface of the object to be measured using the paste configured as described above. It is preferable to use a screen printing method (brush printing method) for applying this paste. Note that the object to be measured is SiJa
In the case of non-oxide ceramics such as, for example, it is preferable to heat the object to be measured in the atmosphere to 800 to 1400° C. to oxidize the surface of the object to be measured. Thereby, the adhesive strength of the linear pattern made of a high melting point metal can be increased by baking after applying the paste. Note that this oxidation treatment is 1
It is particularly good when the temperature is about 30 minutes at 000°C.
ペーストを被測定物表面に線状に塗布して乾燥後これを
焼成する。焼成の温度は、被測定物の組成及びペースト
に用いたセラミック粉末の組成により多少異なるが、８
００〜１０００℃で行うのが良い。The paste is applied linearly onto the surface of the object to be measured, dried, and then fired. The firing temperature varies somewhat depending on the composition of the object to be measured and the composition of the ceramic powder used in the paste, but
It is preferable to carry out the reaction at a temperature of 00 to 1000°C.
なお、高融点金属としてクロメル、コンスタンタン等の
金属を用いる場合には、この焼成の工程を中性又は還元
雰囲気中で行うのが好ましく、白金系の金属の場合は大
気中（酸化雰囲気中）で行うのが好ましい。In addition, when using metals such as chromel and constantan as high melting point metals, it is preferable to perform this firing process in a neutral or reducing atmosphere, and in the case of platinum-based metals, it is performed in the air (in an oxidizing atmosphere). It is preferable to do so.
第１図は本発明の一実施例による温度センサーの模式平
面図である。温度センサー１は、熱電対を形成する二種
類の高融点金属の一方を含有する線状パターン１１、及
び他方の高融点金属を含有する線状パターン１２が、両
端部で重なる構造を有する。両線状パターンの重なり部
分１３が測温部となり、その重なりは、各線状パターン
の幅を２〜３ｍｍ程度とすると、ｌ ｍｍ程度であれば
よい。なお、線状パターン１１及び１２において、リー
ド部（図示せず）を被測定物の比較的低温となる部分ま
で延長し、そこで新たにリード線をそれぞれ融着して測
定するのが良い。FIG. 1 is a schematic plan view of a temperature sensor according to an embodiment of the present invention. The temperature sensor 1 has a structure in which a linear pattern 11 containing one of two types of high melting point metals forming a thermocouple and a linear pattern 12 containing the other high melting point metal overlap at both ends. The overlapping portion 13 of both linear patterns serves as a temperature measuring section, and the overlap may be about 1 mm, assuming that the width of each linear pattern is about 2 to 3 mm. Note that in the linear patterns 11 and 12, it is preferable to extend the lead portions (not shown) to a relatively low-temperature portion of the object to be measured, and then newly fuse the lead wires there for measurement.
第２図は本発明のもう一つの実施例による温度センサー
の模式平面図である。温度センサー２は、一方の高融点
金属を含有する線状パターン２１と、他方の高融点金属
を含有する線状パターン２２とが、線状パターン２２の
端部２３で重なる熱電対部２ａを有している。また線状
パターン２１は、ジグザグ状の延長部２１ａを有してお
り、さらにリード部Ｃへと続いている。このジグザグ状
の延長部２１ａは通常の歪ゲージパターンと同様の形状
となっており、線状パターン２１からなるパターン全体
が歪ゲージ部２ｂとなる。FIG. 2 is a schematic plan view of a temperature sensor according to another embodiment of the present invention. The temperature sensor 2 has a thermocouple part 2a in which one linear pattern 21 containing a high melting point metal and the other linear pattern 22 containing a high melting point metal overlap at an end 23 of the linear pattern 22. are doing. Furthermore, the linear pattern 21 has a zigzag-like extension 21a, and continues to the lead portion C. This zigzag-shaped extension portion 21a has a shape similar to that of a normal strain gauge pattern, and the entire pattern consisting of the linear pattern 21 becomes the strain gauge portion 2b.
この温度センサー２による測温は、線状パターン２２の
リード部ａと、線状パターン２１の一方のリードｉｂと
の間に生ずる起電力を測定することによってなされる。The temperature measurement by the temperature sensor 2 is performed by measuring the electromotive force generated between the lead portion a of the linear pattern 22 and one lead ib of the linear pattern 21.
また線状パターン２１のジグザグ状延長部２１ａをはさ
む両端部（リード部ｂ及びリード部Ｃ）間の抵抗値の変
化により、被測定物表面における表面応力を測定できる
。Furthermore, the surface stress on the surface of the object to be measured can be measured by the change in the resistance value between both ends (lead part b and lead part C) of the linear pattern 21 that sandwich the zigzag-shaped extension part 21a.
なお、各線状パターンの幅は、第１図に示す温度センサ
ー１と同様に２〜３ ｍｍ程度で良いが、歪ゲージ１２
ｂのリード部ｂ及びＣの幅をジグザグ状パターン部（歪
測定部位）２１ａにおける幅よりも大きくしておくこと
で、リード部分における抵抗を小さくし、もってリード
部分の歪によるノイズ（抵抗値）を拾わなくする工夫を
するのが良い。Note that the width of each linear pattern may be approximately 2 to 3 mm as in the temperature sensor 1 shown in FIG.
By making the widths of the lead parts b and C of b larger than the width in the zigzag pattern part (strain measurement part) 21a, the resistance in the lead parts can be reduced, thereby reducing noise (resistance value) due to distortion in the lead parts. It is better to come up with a way to prevent them from being picked up.
また線状パターン２１と線状パターン２２との接点２３
（熱電対の測温部分）は、第１図に示す温度センサー１
における２つの線状パターンの重なり程度とすれば良い
。Also, a contact point 23 between the linear pattern 21 and the linear pattern 22
(The temperature measuring part of the thermocouple) is the temperature sensor 1 shown in Figure 1.
The degree of overlap between the two linear patterns may be sufficient.
第２図からわかるように、温度センサー２の温度測定邪
位と応力測定部位とは実質的に同一部位となるので、温
度と応力とを同時に精度良く計ることができる。As can be seen from FIG. 2, the temperature measurement position and the stress measurement part of the temperature sensor 2 are substantially the same part, so that temperature and stress can be measured simultaneously with high precision.
本発明を以下の具体的実施例によりさらに詳細に説明す
る。The present invention will be explained in more detail by the following specific examples.
実施例１
高融点金属粉末として白金粉末（平均粒径５μｍ，徳力
化学社製）又は白金ロジウム粉末（ロジウム１３重量％
含有、平均粒径５μｍ，徳力化学社製）を用い、またセ
ラミック粉末としてはＰｂＳｉＬ（平均粒径２μｍ、高
純度化学社製）を、有機ビヒクルとしてはアセチルセル
ロースをαテルピネオールに溶解したビヒクルを用い、
以下に示す配合の、二種類のペーストを調製した。Example 1 Platinum powder (average particle size 5 μm, manufactured by Tokuriki Kagaku Co., Ltd.) or platinum rhodium powder (rhodium 13% by weight) was used as a high melting point metal powder.
PbSiL (average particle size 2 μm, manufactured by Kojundo Kagaku Co., Ltd.) was used as the ceramic powder, and a vehicle prepared by dissolving acetylcellulose in α-terpineol was used as the organic vehicle. ,
Two types of pastes were prepared with the formulations shown below.
白金（又は白金ロジウム粉末）二８０重量部ＰｂＳ＋０
３： ２０重量部
有機ビヒクル ：２０重量部上記の組成
からなる２種のペーストを、スクリーン印刷法によりア
ルミナ部材表面に第１図に示す形状のパターンとなるよ
うに塗布した。Platinum (or platinum rhodium powder) 280 parts by weight PbS+0
3: 20 parts by weight Organic vehicle: 20 parts by weight Two types of pastes having the above compositions were applied to the surface of the alumina member by screen printing so as to form a pattern as shown in FIG. 1.
乾燥後、大気雰囲気中で９００℃にて３０分間焼成し、
白金／白金ロジウム系の温度センサーをアルミナ部材表
面に形成した。After drying, it is baked at 900°C for 30 minutes in an air atmosphere,
A platinum/platinum-rhodium temperature sensor was formed on the surface of the alumina member.
この温度センサーのリード部の端邪にリード線を融着し
た後、温度センサーを表面に形成したアルミナ部材を電
気炉内に設置し、室温から１５００℃まで加熱しながら
、温度センサーの起電力を測定した。結果を第３図に示
す。After fusing the lead wire to the end of the lead part of this temperature sensor, the alumina member with the temperature sensor formed on its surface was placed in an electric furnace, and while heating from room temperature to 1500 degrees Celsius, the electromotive force of the temperature sensor was increased. It was measured. The results are shown in Figure 3.
？３図からわかるように、この温度センサーが示す起電
力は、ＪＩＳ Ｃ １６０２による白金一白金ロジウム
（１３％ロジウム）の熱電対の起電力に非常に近い起電
力となっていた。? As can be seen from Figure 3, the electromotive force exhibited by this temperature sensor was very close to the electromotive force of a platinum-platinum-rhodium (13% rhodium) thermocouple according to JIS C 1602.
実施例２
下記組成の２種類のペーストを用い、窒化ケイ素部材表
面に実施例１と同様にして温度センサーを形成した。な
お窒化ケイ素部材はあらかじめ大気中で１０００℃にて
３０分加熱し、表面を酸化処理したものを用いた。Example 2 A temperature sensor was formed on the surface of a silicon nitride member in the same manner as in Example 1 using two types of pastes having the following compositions. Note that the silicon nitride member used was one whose surface had been oxidized by heating in advance at 1000° C. for 30 minutes in the air.
白金（又は白金ロジウム）粉末二８０重量部ＳｉＯ■粉
末 ：２０重量部有機ビヒクル
：１５重量部なお、白金粉末、白金ロジウ
ム粉末及び有機ビヒクルは実施例１と同一のものを使用
し、Ｓｉｎ２粉末は平均粒径２μｍ（和光純薬■製）の
ものを用いた。Platinum (or platinum rhodium) powder: 280 parts by weight SiO powder: 20 parts by weight Organic vehicle
: 15 parts by weight The platinum powder, platinum-rhodium powder, and organic vehicle used were the same as in Example 1, and the Sin2 powder used had an average particle size of 2 μm (manufactured by Wako Pure Chemical Industries, Ltd.).
温度センサーを表面に形成した窒化ケイ素部材を、実施
例１と同様に加熱して温度センサーの起電力を測定した
ところ、ＪＩＳ Ｃ １６０２による白金白金ロジウム
（１３％ロジウム）熱電対の起電力と良く一致していた
。When a silicon nitride member with a temperature sensor formed on its surface was heated in the same manner as in Example 1 and the electromotive force of the temperature sensor was measured, it was found to be similar to the electromotive force of a platinum platinum rhodium (13% rhodium) thermocouple according to JIS C 1602. It was a match.
本発明の温度センサーは、接着剤を介さずにセラミック
スからなる被測定物表面に直接形成されているので、５
００℃を超す高温での測定が可能となる。The temperature sensor of the present invention is formed directly on the surface of a ceramic object to be measured without using an adhesive.
Measurement at high temperatures exceeding 00°C becomes possible.
またセンサーの形成は、スクリーン印刷法（ハケ刷り）
等で容易に行うことができ、複雑形状の被測定物又は管
状部材内壁面等での測定も容易となる。Also, the sensor is formed using screen printing method (brush printing).
etc., and it is also easy to measure a complex-shaped object to be measured or the inner wall surface of a tubular member.
さらに本発明のセンサーは高融点金属粉末にセラミック
粉末及び有機ビヒクルを加えたペーストを用いてこれを
塗布後焼成して得られるので、被測定物への接着強度が
大となり、種々の測定に供することができる。Furthermore, since the sensor of the present invention is obtained by applying and baking a paste made by adding ceramic powder and an organic vehicle to high-melting point metal powder, the adhesive strength to the object to be measured is high and it can be used for various measurements. be able to.
また本発明の温度センサーでは、熱電対を形成する一方
の極線を延長して歪ゲージ部とするか、または、応力セ
ンサーパターンに、異種金属からなる線状パターンを接
合して熱電対部を形成することができ、これによって実
質的に同一地点の温度と表面応力とを同時に精度良く計
測することができる。In addition, in the temperature sensor of the present invention, one of the polar wires forming the thermocouple is extended to form the strain gauge part, or a linear pattern made of different metals is bonded to the stress sensor pattern to form the thermocouple part. This allows the temperature and surface stress at substantially the same point to be measured simultaneously with high precision.
第１図は本発明の一実施例による温度センサーの模式平
面図であり、
第２図は本発明のもう一つの実施例による温度力センサ
ーの模式平面図であり、
第３図は実施例１における温度センサーの示す起電力を
示すグラフである。
１、２ ・温度センサー
２ａ・・・熱電対部
２ｂ・ ・歪ゲージ部
１１、１２、２１、２２・・・線状パターンａ，ｂ，ｃ
・ リード部
出 願 人 本田技研工業株式会社
代 理 人 弁理士 高 石 橋
馬第１図
第２図
１
２
一〇
；皿
（゜こ）FIG. 1 is a schematic plan view of a temperature sensor according to one embodiment of the present invention, FIG. 2 is a schematic plan view of a temperature force sensor according to another embodiment of the present invention, and FIG. 3 is a schematic plan view of a temperature force sensor according to another embodiment of the present invention. It is a graph which shows the electromotive force shown by the temperature sensor in FIG. 1, 2 - Temperature sensor 2a...Thermocouple part 2b - Strain gauge part 11, 12, 21, 22... Linear patterns a, b, c
・Lead Department Applicant: Honda Motor Co., Ltd. Representative: Patent Attorney Taka Ishibashi
Horse Figure 1 Figure 2 1 2 10; Plate (゜ko)
Claims (6)
ラミック粉末と有機ビヒクルとからなるペーストをそれ
ぞれ被測定物に線状に塗布して焼成することにより、前
記被測定物表面に熱電対を直接形成してなることを特徴
とする温度センサー。(1) A paste consisting of powders of high-melting point metals forming a thermocouple, ceramic powder, and an organic vehicle is applied in a linear manner to the object to be measured and fired, thereby creating a thermoelectric charge on the surface of the object to be measured. A temperature sensor characterized by being formed by directly forming a pair.
ースト中の前記高融点金属粉末が５０〜９０重量％であ
り、前記セラミック粉末が５０〜１０重量％であり、前
記有機ビヒクルが固形分１００重量部に対して１０〜５
０重量部であることを特徴とする温度センサー。(2) The temperature sensor according to claim 1, wherein the high melting point metal powder in the paste is 50 to 90% by weight, the ceramic powder is 50 to 10% by weight, and the organic vehicle has a solid content of 100% by weight. 10-5 parts by weight
A temperature sensor characterized by having 0 parts by weight.
前記セラミック粉末が前記被測定物の母材と同一材質又
はその焼結助剤であることを特徴とする温度センサー。(3) In the temperature sensor according to claim 1 or 2,
A temperature sensor characterized in that the ceramic powder is made of the same material as the base material of the object to be measured or a sintering aid thereof.
ラミック粉末と、有機ビヒクルとからなるペーストをそ
れぞれ被測定物に線状に塗布して焼成することにより、
前記被測定物表面に熱電対を直接形成してなる温度セン
サーにおいて、前記熱電対を構成する２つの線状パター
ンのうち一方を延長してジグザグ状とし、もって前記ジ
グザグ状の線状パターンの両端子間における抵抗変化に
より歪を測定できる熱応力センサーとしていることを特
徴とする温度センサー。(4) By linearly applying a paste consisting of powders of high-melting point metals forming the thermocouple, ceramic powder, and an organic vehicle to the object to be measured and firing,
In the temperature sensor in which a thermocouple is directly formed on the surface of the object to be measured, one of the two linear patterns constituting the thermocouple is extended to form a zigzag shape, so that both ends of the zigzag linear pattern A temperature sensor characterized by being a thermal stress sensor that can measure strain based on resistance changes between sensors.
応力と温度を両方測定できることを特徴とするセンサー
。(5) By joining different metals to the stress sensor,
A sensor that can measure both stress and temperature.
ヒクルとからなるペーストを、被測定物表面にジグザグ
状部分を有する線状に塗布して焼成することにより、前
記被測定物表面に直接形成してなる応力センサーに、前
記高融点金属とは異なる高融点金属の粉末と、セラミッ
ク粉末と、有機ビヒクルとからなるペーストを前記被測
定物に線状に塗布して焼成することによって得られる線
状パターンを接合することにより、温度センサーを設け
たことを特徴とするセンサー。(6) A paste consisting of high melting point metal powder, ceramic powder, and organic vehicle is applied directly onto the surface of the object to be measured by applying it in a linear shape having a zigzag portion on the surface of the object to be measured and firing. A paste consisting of a powder of a high melting point metal different from the high melting point metal, a ceramic powder, and an organic vehicle is linearly applied to the object to be measured, and then fired. A sensor characterized by providing a temperature sensor by joining linear patterns.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010333A JP2537098B2 (en) | 1990-01-19 | 1990-01-19 | Temperature sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010333A JP2537098B2 (en) | 1990-01-19 | 1990-01-19 | Temperature sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03215722A true JPH03215722A (en) | 1991-09-20 |
| JP2537098B2 JP2537098B2 (en) | 1996-09-25 |
Family
ID=11747276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010333A Expired - Lifetime JP2537098B2 (en) | 1990-01-19 | 1990-01-19 | Temperature sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2537098B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019132790A (en) * | 2018-02-02 | 2019-08-08 | ミネベアミツミ株式会社 | Strain gauge |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007057260A (en) * | 2005-08-22 | 2007-03-08 | Osaka City | Temperature sensor element and method of manufacturing same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58132898A (en) * | 1982-02-02 | 1983-08-08 | 株式会社共和電業 | Converter with function of measuring temperature |
-
1990
- 1990-01-19 JP JP2010333A patent/JP2537098B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58132898A (en) * | 1982-02-02 | 1983-08-08 | 株式会社共和電業 | Converter with function of measuring temperature |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019132790A (en) * | 2018-02-02 | 2019-08-08 | ミネベアミツミ株式会社 | Strain gauge |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2537098B2 (en) | 1996-09-25 |
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