JPH03213688A - Screw vacuum pump - Google Patents
Screw vacuum pumpInfo
- Publication number
- JPH03213688A JPH03213688A JP610590A JP610590A JPH03213688A JP H03213688 A JPH03213688 A JP H03213688A JP 610590 A JP610590 A JP 610590A JP 610590 A JP610590 A JP 610590A JP H03213688 A JPH03213688 A JP H03213688A
- Authority
- JP
- Japan
- Prior art keywords
- casing
- screw rotor
- screw
- face
- vacuum pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000000498 cooling water Substances 0.000 abstract description 24
- 238000001816 cooling Methods 0.000 abstract description 17
- 230000006835 compression Effects 0.000 abstract description 2
- 238000007906 compression Methods 0.000 abstract description 2
- 238000004140 cleaning Methods 0.000 description 5
- 239000007795 chemical reaction product Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000007689 inspection Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000013021 overheating Methods 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000010687 lubricating oil Substances 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910001285 shape-memory alloy Inorganic materials 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
- F04C29/04—Heating; Cooling; Heat insulation
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、真空槽の排気装置に係り、特に、半導体製造
に用いる真空槽から反応生成物の混入した気体を排出す
るのに好適なスクリュー真空ポンプに関する。[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to an exhaust system for a vacuum chamber, and in particular to a screwdriver suitable for exhausting gas mixed with reaction products from a vacuum chamber used in semiconductor manufacturing. Regarding vacuum pumps.
従来の装置は、特開昭６０−２１６０８９号公報に記載
のように、スクリューロータの回転支持方法は特に示さ
れておらず、実施例でも両端支持にしている。また、ケ
ーシングの中央部から吐出側端へかけてウォータジャケ
ットが広くボアを包む構造となっている。In the conventional device, as described in Japanese Unexamined Patent Publication No. 60-216089, there is no particular disclosure of a method for supporting the rotation of the screw rotor, and even in the embodiments, both ends are supported. In addition, the water jacket is structured to broadly wrap around the bore from the center of the casing to the discharge side end.
さらに、ウォータジャケットに流す冷却水の水温や流量
についても考慮されていない。Furthermore, the temperature and flow rate of the cooling water flowing into the water jacket are not taken into account.
上記従来技術は装置の分解及び組立ての簡素化について
考慮がされておらず、装置の製造時や分解掃除、あるい
は、故障修理の際に時間と手間がかかるという問題があ
った。The above-mentioned conventional technology does not take into account the simplification of disassembling and assembling the device, and there is a problem in that it takes time and effort when manufacturing the device, disassembling and cleaning the device, or repairing a malfunction.
また、ウォータジャケット内部の冷却水の温度について
考慮がされておらず、過熱によるスクリューロータの焼
付き、あるいは、過冷却による性能の低下や反応生成物
の付着を招くという問題があった。In addition, no consideration was given to the temperature of the cooling water inside the water jacket, resulting in problems such as seizure of the screw rotor due to overheating, deterioration of performance due to overcooling, and adhesion of reaction products.
本発明の目的は分解及び組立てを容易に行うことのでき
るスクリュー真空ポンプを提供することにある。An object of the present invention is to provide a screw vacuum pump that can be easily disassembled and assembled.
上記の目的を達成するためにスクリュー真空ポンプを下
記に示す構造とする。In order to achieve the above object, a screw vacuum pump has the structure shown below.
一組のスクリューロータは吐出側を回転支持される片持
ち構造とし、吸入側は自由端にする。吐出側の回転軸の
延長上には各軸に同期歯車を備え、そ九らを噛み合わせ
る。A set of screw rotors has a cantilever structure that is rotatably supported on the discharge side, and a free end on the suction side. A synchronous gear is provided on each shaft on the extension of the rotating shaft on the discharge side, and these gears are meshed together.
スクリューロータを収容するケーシングは少なくとも二
つの部分に分割できる構造とする。The casing housing the screw rotor has a structure that can be divided into at least two parts.
この部分の一方はスクリューロータの外周部は微小なす
きまをはさんで面するボア壁をもち、ボア部と呼ぶこと
にする。他方はスクリューロータの歯切りされた部分の
端面と微小なすきまをはさんで面するボア端をもち、端
面部と呼ぶことにする。ボア部と端面部はｙ）元急’＞
門Ｔｏあるいはピン等を用いることによって十分に高い
精度で脱着が可能な構造とする。One of these parts has a bore wall facing the outer periphery of the screw rotor with a minute gap in between, and will be referred to as the bore part. The other end has a bore end that faces the end face of the geared portion of the screw rotor with a small gap in between, and will be referred to as the end face part. The bore part and end face part are y) Genkyu'＞
The structure is such that it can be attached and detached with sufficiently high precision by using a gate To or a pin.
端面部にはスクリューロータを回転支持する軸受構造を
備える。The end face portion is provided with a bearing structure that rotatably supports the screw rotor.
さらに、端面部の内部には、スクリューロータ端面と面
する位置にウォータジャケットを備える。Furthermore, a water jacket is provided inside the end face portion at a position facing the end face of the screw rotor.
上記目的をさらに良く達成するために、上記構造に次に
述べる構造を付与できる。In order to achieve the above object even better, the structure described below can be added to the above structure.
まずスクリューロータの歯切りされた部分の吐出側端に
吸入側方向へ深さを持つ穴を設ける。First, a hole having a depth toward the suction side is provided at the discharge side end of the toothed portion of the screw rotor.
該穴の内部にはケーシング軸端部の一部分が位置し、同
時に該部の内部に冷却水の流路を備える。A part of the casing shaft end is located inside the hole, and at the same time, a cooling water flow path is provided inside the part.
ケーシングのボア部は端面部との結合を除くと他の部材
とは接触していないので着脱が容易である。そのためス
クリューロータを露出させて点検掃除する時にはケーシ
ングのボア部をはずすだけですむ。これは軸受、軸封、
同期歯車も同時に着脱せねばならなかった従来例に比較
して非常に簡単である。The bore part of the casing is not in contact with any other member except for connection with the end face part, so it is easy to attach and detach. Therefore, when exposing the screw rotor for inspection and cleaning, it is only necessary to remove the bore part of the casing. This includes bearings, shaft seals,
This is very simple compared to the conventional example in which the synchronous gear also had to be attached and detached at the same time.
ウォータジャケットはケーシングの端面部にあるが、気
体の圧縮熱はスクリューロータの吐出側端付近で最も多
く発生するので、冷却能力は十分である。ただし、排気
する気体が多い場合や冷却水温度が高い場合には冷却能
力が不足する事もあるので、冷却水流路をスクリューロ
ータの内側にも備えた手段により冷却能力を増強させる
ことができる。Although the water jacket is located at the end of the casing, the cooling capacity is sufficient because the most heat of compression of the gas is generated near the discharge end of the screw rotor. However, if there is a large amount of gas to be exhausted or the temperature of the cooling water is high, the cooling capacity may be insufficient, so the cooling capacity can be increased by providing a cooling water flow path also inside the screw rotor.
本装置に備えられる冷却水の流量増減機構は、温度セン
サによって測られた値が前もって与えられている規定値
よりも高い場合には流量を増加させる。また、逆に規定
値よりも低い場合には流量を減少させる。The cooling water flow rate increase/decrease mechanism provided in this device increases the flow rate when the value measured by the temperature sensor is higher than a predetermined value. Conversely, if the flow rate is lower than the specified value, the flow rate is decreased.
なお、増減させる流量は連続、不連続を問わない。Note that the flow rate to be increased or decreased does not matter whether it is continuous or discontinuous.
以下、本発明の一実施例を第１図並びに第２図を用いて
説明する。An embodiment of the present invention will be described below with reference to FIGS. 1 and 2.
スクリューロータｌは回転軸２に固定されており、両者
が一体になって回転する。スクリューロータ１′と回転
軸２′も同様である。スクリューロータ１及び１′には
各々左、右ねじれの歯が切られており、互いに噛み合っ
て回転する。回転軸２と２′には同期歯車５，５′が備
えられており、二つの軸の回転位相を保つ。動力はモー
タなどの動力源（図示せず）から回転として動力入力軸
６を経て供給される。スクリューロータ２，２′の外周
は微小なすきまをはさんでケーシングのボア部３のボア
壁と面する。ケーシングのボア部３の外側には冷却フィ
ン１２が付けられる。ケーシングのボア部３とケーシン
グの端面部４はいんろう門ア、あるいは、金金洟６ｅシ
によって固定位置を高精度に決定される。ケーシングの
端面部４は回転軸２，２′を軸受７を介して軸支する。The screw rotor 1 is fixed to the rotating shaft 2, and both rotate together. The same applies to the screw rotor 1' and the rotating shaft 2'. The screw rotors 1 and 1' have left-handed and right-handed helical teeth, respectively, and rotate by meshing with each other. The rotating shafts 2 and 2' are provided with synchronous gears 5 and 5' to maintain the rotational phase of the two shafts. Power is supplied as rotation from a power source (not shown) such as a motor through the power input shaft 6. The outer circumferences of the screw rotors 2, 2' face the bore wall of the bore portion 3 of the casing with a small gap in between. Cooling fins 12 are attached to the outside of the bore 3 of the casing. The fixing positions of the casing bore portion 3 and the casing end surface portion 4 are determined with high precision by a dowel gate or a metal fitting 6e. The end face portion 4 of the casing supports the rotating shafts 2, 2' via bearings 7.
また、潤滑油の漏れを防ぐ目的で軸シール８も備えられ
る。ケーシングの端面部４のボア端面はスクリューロー
タ１，１′の端面と微小なすきまを保つ。A shaft seal 8 is also provided for the purpose of preventing leakage of lubricating oil. The bore end face of the end face portion 4 of the casing maintains a small clearance from the end face of the screw rotors 1, 1'.
そして、ケーシングの端面部４の内部にはウォータジャ
ケット９が設けられており、冷却水が本装置の外部から
出入りする。A water jacket 9 is provided inside the end face portion 4 of the casing, and cooling water enters and exits from the outside of the device.
スクリューロータ１，１′ を回転させると、方のスク
リューロータの歯溝が他方のスクリューロータの歯とボ
ア壁とによって囲まれて形成される作動室１３と呼ばれ
る空間が軸方向下向きに移動する。気体は吸入口１０か
らポンプ内部に入り、作動室１３に閉じ込められて作動
室１３と共に運ばれ、吐出口１１からポンプ外部へ出さ
れる。When the screw rotors 1, 1' are rotated, a space called a working chamber 13, which is formed by the tooth spaces of one screw rotor surrounded by the teeth of the other screw rotor and the bore wall, moves downward in the axial direction. Gas enters the inside of the pump from the suction port 10, is confined in the working chamber 13, is carried along with the working chamber 13, and is discharged to the outside of the pump from the discharge port 11.
定常状態では、作動室の移動によって運ばれる気体と、
作動室から別の作動室へすきまを通って漏れる気体の量
が均衡するので、作動室内部の圧力は吸入側から吐出側
へ向って次第に高くなる。In steady state, the gas carried by the movement of the working chamber and
Since the amount of gas leaking from one working chamber to another through the gap is balanced, the pressure inside the working chamber gradually increases from the suction side to the discharge side.
作動室１３の内部の気体は圧縮作用を受けるので、発熱
する。そして、その量は吐出側はど多い。Since the gas inside the working chamber 13 is compressed, it generates heat. And the amount is much larger on the discharge side.
発生した熱はウォータジャケット９によって除去され、
過熱が防止される。また、冷却フィン１２も放熱を行い
ウォータジャケット９による冷却を補助する。The generated heat is removed by the water jacket 9,
Overheating is prevented. Further, the cooling fins 12 also radiate heat and assist the cooling by the water jacket 9.
真空ポンプは、特に、半導体製造設備として用いる場合
には定期的な分解掃除と点検が必要である。その主たる
理由は真空ポンプの内部に真空で副産物として生じる反
応生成物が付着してしまい。Vacuum pumps require periodic disassembly and cleaning, especially when used as semiconductor manufacturing equipment. The main reason for this is that reaction products generated as by-products due to vacuum adhere to the inside of the vacuum pump.
これを除去する必要があるからである。This is because it is necessary to remove this.
本発明によれば、簡単な作業でケーシングのボア部３を
はずしてスクリューロータ１，１′ を露出させて、分
解掃除と点検を行うことができる。According to the present invention, the bore portion 3 of the casing can be removed and the screw rotors 1, 1' exposed with a simple operation for disassembly and cleaning and inspection.
なせならば、ケーシングのボア部３はケーシングの端面
部４と締結されている以外は他の部材とは結合されてお
らず、この締結を解くのみでケーシングのボア部３をは
ずすことができるからである。If this is the case, the bore part 3 of the casing is not connected to any other member except that it is fastened to the end face part 4 of the casing, and the bore part 3 of the casing can be removed simply by unfastening this fastening. It is.
なお、ケーシングのボア部３には補助的な冷却装置とし
て冷却フィン１２が備えられてはいるが、外部との配管
を必要とするウォータジャケットは備えられていない。Note that although the bore portion 3 of the casing is provided with cooling fins 12 as an auxiliary cooling device, it is not provided with a water jacket that requires piping to the outside.
以下、本発明の第二の実施例を第３図並びに第４図を用
いて説明する。A second embodiment of the present invention will be described below with reference to FIGS. 3 and 4.
本実施例の構造は第１図および第２図の実施例と比較し
て、冷却水がウォータジャケットに直接入らずにスクリ
ューロータの内側を経由するようにし、冷却フィン１２
を省いた。Compared to the embodiments shown in FIGS. 1 and 2, the structure of this embodiment is such that the cooling water does not directly enter the water jacket but passes through the inside of the screw rotor, and the cooling fins 12
omitted.
冷却水は本装置の外部より供給され、ケーシングの端面
部４に開けられた冷却水流路１４を通ってスクリューロ
ータの内側に入り込む。ケーシングの端面部４に固定さ
れた軸受押え板１５には固定された側面に溝１６が切ら
れており、冷却水はそこを通って流れる。冷却水はさら
に流路１４′を通ってウォータジャケットに注がれる。Cooling water is supplied from outside the device and enters the inside of the screw rotor through a cooling water flow path 14 opened in the end face 4 of the casing. A bearing holding plate 15 fixed to the end face 4 of the casing has a groove 16 cut in the fixed side surface, through which the cooling water flows. The cooling water is further poured into the water jacket through the channel 14'.
本実施例によれば、第一の実施例の効果に加えて、冷却
水路が長く内部に入り込んでいるので、冷却能力が高い
。特に、軸受７と軸封装置８は近傍に冷却水流路１４．
１４’があることから、十分に冷却されて過熱を防止す
ることができ、信頼性も向上する。According to this embodiment, in addition to the effects of the first embodiment, since the cooling water channel extends into the interior for a long time, the cooling capacity is high. In particular, the bearing 7 and the shaft sealing device 8 are located in the vicinity of the cooling water flow path 14.
14', it can be sufficiently cooled to prevent overheating and improve reliability.
なお、第４図は第３図における冷却水流路１４の位置を
回転軸を中心として開いた展開図である。Note that FIG. 4 is a developed view of the position of the cooling water flow path 14 in FIG. 3 opened around the rotation axis.
以下、本発明の第三の実施例を第５図を用いて説する。A third embodiment of the present invention will be described below with reference to FIG.
本実施例において、真空ポンプ本体は第二の実施例と同
一であるものとし、それ以外の部分ついて構造を述べる
。In this embodiment, the vacuum pump main body is assumed to be the same as that in the second embodiment, and the structure of the other parts will be described.
ウォータジャケット９から排出された冷却水は温度セン
サ２４によって温度を測られた後に、屋外の冷却塔２１
へ送られる。冷却塔２１によって空気中に熱を放出した
冷却水は、再び、ポンプによって送られ、温度センサ２
５．バルブ２２を経て冷却水流路１４から真空ポンプ内
部へ導入される。After the temperature of the cooling water discharged from the water jacket 9 is measured by a temperature sensor 24, it is sent to an outdoor cooling tower 21.
sent to. The cooling water, which has released heat into the air by the cooling tower 21, is sent again by the pump to the temperature sensor 2.
5. The cooling water is introduced into the vacuum pump from the cooling water passage 14 via the valve 22 .
また、本実施例では軸受７の外輪の温度を温度センサ２
３で読み取っている。そして三つの温度センサ２３〜２
５から得られた温度情報を基にしてバルブ２２の開閉を
指令する制御装置２０が設けられる。指令装置２０は温
度センサ２３、もしくは、２４のいずれかが規定された
よりも高い値を示す時に、温度センサ２５の出力値に応
じてバルブ２２を開き、冷却水の流量を増加させる。バ
ルブ２２を全開しても温度が高過ぎる場合には緊急停止
、あるいは、警告ランプ点灯等の作動をする。また、逆
に、温度が規定値に達しない時にはバルブ２２を閉じて
冷却能力を減じる。Further, in this embodiment, the temperature of the outer ring of the bearing 7 is measured by the temperature sensor 2.
It is being read at 3. and three temperature sensors 23-2
A control device 20 is provided that commands the opening and closing of the valve 22 based on the temperature information obtained from the temperature information obtained from the control device 5. When either the temperature sensor 23 or 24 indicates a value higher than a prescribed value, the command device 20 opens the valve 22 in accordance with the output value of the temperature sensor 25 to increase the flow rate of the cooling water. If the temperature is too high even when the valve 22 is fully opened, an emergency stop is performed or a warning lamp is lit. Conversely, when the temperature does not reach the specified value, the valve 22 is closed to reduce the cooling capacity.
本実施例によれば、スクリュー真空ポンプ各部の温度を
ほぼ一定に保つことができるので、高い性能と信頼性を
向上させることができる。According to this embodiment, since the temperature of each part of the screw vacuum pump can be kept substantially constant, high performance and reliability can be improved.
なぜならば、温度が設計値よりも高過ぎると、スクリュ
ーロータ１が熱膨張してケーシングのボア部３と接触し
て焼き付きを起こしてしまう心配がある。また、軸受の
寿命が短くなってしまうという心配も生じるからである
。This is because if the temperature is too high than the design value, there is a risk that the screw rotor 1 will thermally expand and come into contact with the bore 3 of the casing, causing seizure. This is also because there is a concern that the life of the bearing will be shortened.
一方、温度が設計値よりも低過ぎると、スクリューロー
タ相互間、あるいは、スクリューロータとボア壁との間
のすきまが大きくなってしまい、そこを通って漏れる気
体の量が増加するので真空ポンプの到達圧力や排気量等
の性能を低くしてしまい、また、前述した反応生成物が
スクリューロータに付着しゃすくな心配もあるからであ
る。On the other hand, if the temperature is too low than the design value, the gap between the screw rotors or between the screw rotor and the bore wall will increase, and the amount of gas leaking through the gap will increase. This is because performance such as ultimate pressure and displacement may be lowered, and there is also a fear that the aforementioned reaction products may easily adhere to the screw rotor.
本実施例では温度センサを三ヶ使用したが、ケ所で代表
できればそれでもさしつかえない。また、電気、あるい
は、電子式による制御装置によらずに、バイメタルや形
状記憶合金を用いて温度センサとバルブを一体化したも
のであってもよい。In this embodiment, three temperature sensors are used, but it is acceptable if only one representative temperature sensor is used. Furthermore, instead of using an electric or electronic control device, the temperature sensor and the valve may be integrated using bimetal or shape memory alloy.
冷却塔２１に代えて、真空ポンプに付属するラジェータ
を設けてもよく、水が豊富な場合には冷却水を循環させ
ずに使い捨てでもかまわない。また、冷却水の送水用ポ
ンプを能力可変形として、これをバルブ２２の代りとし
てもよい。Instead of the cooling tower 21, a radiator attached to a vacuum pump may be provided, and if water is abundant, the cooling water may be disposable without being circulated. Further, the pump for feeding the cooling water may be of a variable capacity type, and this may be used in place of the valve 22.
本発明によれば、ケーシングのボア部を簡単に取りはず
すことができるので、スクリュー真空ポンプの分解、掃
除ならびに点検作業が容易になる。According to the present invention, since the bore portion of the casing can be easily removed, disassembly, cleaning, and inspection of the screw vacuum pump are facilitated.
また、動作中の温度をほぼ一定に保つことができるので
、高い性能と信頼性を両立することができる。Furthermore, since the temperature during operation can be kept almost constant, high performance and reliability can be achieved at the same time.
第１図は本発明の一実施例・の正面断面図、第２図は本
発明の一実施例の側面断面図、第３図は本発明の第二の
実施例の正面断面図、第４図は第３図の部分展開図、第
５図は本発明の第三の実施例の系統図である。
１・・・スクリューロータ （左ねじれ）、１′・・・
スクリューロータ（右ねじれ）、２．２’・・・回転軸
、３・・・ケーシングのボア部、４・・・ケーシングの
端面第１
０
２
第３
困
＃４ｍ
ｔFIG. 1 is a front sectional view of an embodiment of the present invention, FIG. 2 is a side sectional view of an embodiment of the invention, FIG. 3 is a front sectional view of a second embodiment of the invention, and FIG. The figure is a partial exploded view of FIG. 3, and FIG. 5 is a system diagram of a third embodiment of the present invention. 1...Screw rotor (left-handed twist), 1'...
Screw rotor (right-handed twist), 2.2'... Rotating shaft, 3... Bore part of casing, 4... End face of casing No. 1 0 2 3 No. 4 m t
Claims (1)
に同期して回転し、互いにねじれの向きが逆である歯が
刻まれている二つのスクリューロータと、軸方向に離れ
た吸入口と吐出口をもち、かつ、互いに共有する空間を
持ち、前記二つのスクリューロータをそれぞれ収容する
一組のボアをもつケーシングを備えたスクリュー真空ポ
ンプにおいて、 前記一組のスクリューロータはどちらも吐出側を回転支
持される片持ち構造をしており、前記ケーシングは前記
スクリューロータの外周と微小なすきまをはさんで面す
るボア部と、前記スクリューロータの歯切りされた部分
の端面と微小なすきまをはさんで面する端面部の、少な
くとも二つに分割できる構造を持ち、前記スクリューロ
ータを回転支持する軸受構造は前記ケーシング端面部に
設けられており、前記ケーシング端面部の前記スクリュ
ーロータの端面と面する部分の内部にはウォータジャケ
ットが備えられていることを特徴とするスクリュー真空
ポンプ。[Claims] 1. Two screw rotors that mesh with each other and rotate synchronously in opposite directions around two parallel axes, each having teeth with opposite twisting directions, and a shaft. In a screw vacuum pump, the screw vacuum pump includes a casing having a suction port and a discharge port spaced apart from each other in a direction, a space shared with each other, and a set of bores that accommodate the two screw rotors, respectively. Both rotors have a cantilever structure in which the discharge side is rotatably supported, and the casing has a bore portion facing the outer periphery of the screw rotor with a small gap in between, and a geared portion of the screw rotor. A bearing structure that rotatably supports the screw rotor is provided on the casing end surface, and has a structure that can be divided into at least two parts, the end surface facing the end surface with a small gap between A screw vacuum pump characterized in that a water jacket is provided inside the portion facing the end surface of the screw rotor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP610590A JPH03213688A (en) | 1990-01-17 | 1990-01-17 | Screw vacuum pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP610590A JPH03213688A (en) | 1990-01-17 | 1990-01-17 | Screw vacuum pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03213688A true JPH03213688A (en) | 1991-09-19 |
Family
ID=11629224
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP610590A Pending JPH03213688A (en) | 1990-01-17 | 1990-01-17 | Screw vacuum pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03213688A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2002012726A1 (en) * | 2000-08-10 | 2002-02-14 | Leybold Vakuum Gmbh | Two-shaft vacuum pump |
| EP1108893A3 (en) * | 1999-12-17 | 2002-05-02 | The BOC Group plc | Temperature control system for vacuum pumps |
| US6537049B2 (en) * | 1999-06-16 | 2003-03-25 | The Boc Group, Plc | Screw pump having a thermal shield |
| KR100438496B1 (en) * | 2002-02-26 | 2004-07-03 | 대한민국 (창원대학 공작기계기술연구센터) | Device For Cooling The Rotor For The Air-conditioner |
| KR101065288B1 (en) * | 2008-09-11 | 2011-09-16 | 주식회사 에스백 | Vacuum pump of cooling |
| WO2020120746A1 (en) * | 2018-12-13 | 2020-06-18 | Vogelsang Gmbh & Co. Kg | Lobe pump with inner bearing |
-
1990
- 1990-01-17 JP JP610590A patent/JPH03213688A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6537049B2 (en) * | 1999-06-16 | 2003-03-25 | The Boc Group, Plc | Screw pump having a thermal shield |
| EP1108893A3 (en) * | 1999-12-17 | 2002-05-02 | The BOC Group plc | Temperature control system for vacuum pumps |
| WO2002012726A1 (en) * | 2000-08-10 | 2002-02-14 | Leybold Vakuum Gmbh | Two-shaft vacuum pump |
| US6863511B2 (en) | 2000-08-10 | 2005-03-08 | Leybold Vakuum Gmbh | Two-shaft vacuum pump |
| KR100438496B1 (en) * | 2002-02-26 | 2004-07-03 | 대한민국 (창원대학 공작기계기술연구센터) | Device For Cooling The Rotor For The Air-conditioner |
| KR101065288B1 (en) * | 2008-09-11 | 2011-09-16 | 주식회사 에스백 | Vacuum pump of cooling |
| WO2020120746A1 (en) * | 2018-12-13 | 2020-06-18 | Vogelsang Gmbh & Co. Kg | Lobe pump with inner bearing |
| JP2022512237A (en) * | 2018-12-13 | 2022-02-02 | フォーゲルザンク・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング・ウント・コムパニー・コマンディットゲゼルシャフト | Rotary lobe pump with internal bearings |
| US11953007B2 (en) | 2018-12-13 | 2024-04-09 | Vogelsang Gmbh & Co Kg | Rotary lobe pump with internal bearing |
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