JPH03209608A - Magnetic head - Google Patents
Magnetic headInfo
- Publication number
- JPH03209608A JPH03209608A JP582590A JP582590A JPH03209608A JP H03209608 A JPH03209608 A JP H03209608A JP 582590 A JP582590 A JP 582590A JP 582590 A JP582590 A JP 582590A JP H03209608 A JPH03209608 A JP H03209608A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- hard carbon
- working gap
- magnetic head
- head
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910021385 hard carbon Inorganic materials 0.000 claims abstract description 43
- 239000002184 metal Substances 0.000 claims description 32
- 230000004907 flux Effects 0.000 claims description 6
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 5
- 229910052799 carbon Inorganic materials 0.000 claims description 5
- 229910003460 diamond Inorganic materials 0.000 claims description 4
- 239000010432 diamond Substances 0.000 claims description 4
- 229910002804 graphite Inorganic materials 0.000 claims description 3
- 239000010439 graphite Substances 0.000 claims description 3
- 229910000859 α-Fe Inorganic materials 0.000 abstract description 15
- 239000011521 glass Substances 0.000 abstract description 8
- 238000004804 winding Methods 0.000 abstract description 7
- 238000005299 abrasion Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 5
- 238000005520 cutting process Methods 0.000 abstract description 4
- 230000001105 regulatory effect Effects 0.000 abstract description 3
- 230000002194 synthesizing effect Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 69
- 239000000758 substrate Substances 0.000 description 18
- 239000000853 adhesive Substances 0.000 description 7
- 230000001070 adhesive effect Effects 0.000 description 7
- 125000006850 spacer group Chemical group 0.000 description 6
- 239000010409 thin film Substances 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 4
- 239000000696 magnetic material Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 238000001308 synthesis method Methods 0.000 description 2
- 239000012808 vapor phase Substances 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 230000001050 lubricating effect Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
Abstract
Description
【発明の詳細な説明】
産業上の利用分野
本発明は磁気ヘッドに関し、詳しくは耐摩耗性に優れた
磁気ヘッドに関するものである。DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a magnetic head, and more particularly to a magnetic head with excellent wear resistance.
従来の技術
磁気記録密度の向上への要求に対して、磁気記録媒体は
従来の塗布型の媒体よりも薄膜型の媒体が磁性体の充填
密度が高く高密度記録に適している。反面、薄膜型の磁
気記録媒体は塗布型のように媒体中に潤滑剤を十分にし
かも長期に亘って安定して含有させることは困難である
。従って磁気ヘッドとの摩擦が大きくなるので磁気ヘッ
ドが早く摩耗するという問題がある。磁気記録再生に多
用されているリング形磁気ヘッドの作動ギャップ部は、
通常は例えば特開昭６４−５３３０８号公報に示されて
いるようにＳｉＯ□膜が用いられている。2. Description of the Related Art In response to the demand for increased magnetic recording density, thin film type magnetic recording media have a higher packing density of magnetic material than conventional coated type media and are suitable for high density recording. On the other hand, it is difficult for thin film type magnetic recording media to contain lubricant sufficiently and stably over a long period of time, unlike coating type magnetic recording media. Therefore, since the friction with the magnetic head increases, there is a problem that the magnetic head wears out quickly. The operating gap of the ring-shaped magnetic head, which is often used for magnetic recording and reproduction, is
Usually, a SiO□ film is used, as shown in, for example, Japanese Patent Application Laid-Open No. 64-53308.
発明が解決しようとする課題
しかし、従来の磁気ヘッドの作動ギヤ、ツブ部を構成す
るＳｉＯ□膜は、前記摩擦に対して十分な耐摩耗性を有
するものではなく、作動ギャップ部およびその近傍のコ
アも早く摩耗するという問題は依然として未解決である
。Problems to be Solved by the Invention However, the SiO□ film constituting the operating gear and knob portion of the conventional magnetic head does not have sufficient wear resistance against the friction, and the SiO□ film that constitutes the operating gear and knob portion of the conventional magnetic head does not have sufficient wear resistance against the friction, and The problem that the core also wears out quickly remains unresolved.
本発明は、耐摩耗性に優れた寿命の長い磁気へ・ンドを
提供することを目的とするものである。SUMMARY OF THE INVENTION An object of the present invention is to provide a magnetic lead with excellent wear resistance and long life.
課題を解決するための手段
上記課題を解決するための本願の第１発明は、少なくと
もコアの作動ギャップ面に硬質炭素膜を形成した磁気ヘ
ッドに係るものである。Means for Solving the Problems A first invention of the present application for solving the above problems relates to a magnetic head in which a hard carbon film is formed at least on the working gap surface of the core.
第２発明は、コアの作動ギャップ部に軟磁性メタル膜を
設け、そのメタル膜に作動ギャプ面を形成し、少なくと
もその作動ギャップ面に硬質炭素膜を形成した磁気ヘッ
ドに係るものである。A second invention relates to a magnetic head in which a soft magnetic metal film is provided in the working gap portion of the core, a working gap surface is formed on the metal film, and a hard carbon film is formed on at least the working gap surface.
第３発明は、作動ギャップ面を有するコアを軟磁性メタ
ル膜と硬質炭素膜を交互に積層した構成とした磁気ヘッ
ドに係るものである。A third aspect of the present invention relates to a magnetic head in which a core having a working gap surface has a structure in which soft magnetic metal films and hard carbon films are alternately laminated.
第４発明は、作動ギャップ部に、軟磁性メタル膜と硬質
炭素膜を交互に積層した積層メタル層を設け、そのメタ
ル層に作動ギャップ面を形成した磁気ヘッドに係るもの
である。A fourth invention relates to a magnetic head in which a laminated metal layer in which a soft magnetic metal film and a hard carbon film are alternately laminated is provided in the working gap portion, and a working gap surface is formed in the metal layer.
第５発明は、単磁極形磁気ヘッドに構成された磁気へン
ドにおいて、主磁極の磁束出入り口を囲む面のうちの少
なくともトラック幅方向の面に、硬質炭素膜を形成した
ことを特徴とするものである。A fifth invention is a magnetic head configured as a single-pole magnetic head, characterized in that a hard carbon film is formed on at least the surface in the track width direction of the surfaces surrounding the magnetic flux entrance/exit of the main pole. It is.
作用
上記構成により、磁気ヘッドの作動ギャップ部に形成さ
れる硬質炭素膜は、硬度が高く耐摩耗性に優れているの
で、磁気特性を損なうことなく磁気媒体と摺動接触する
作動ギャップ部の長寿命化が成される。硬質炭素膜はプ
ラズマＣＶＤ等の気相合成法によって、フェライトコア
等の基板材の上に形成される。本構成は、フェライトコ
アのみで成るリング形磁気ヘッドだけでなく、磁気特性
に優れる軟磁性メタル膜形成のメタルインギャップ構造
の磁気ヘッド、高周波特性に優れる積層形磁気ヘッド、
および前記の両者の特性を兼ね備える積層形メタルイン
ギャップ構造の磁気ヘッド、更には単磁極磁気ヘッドの
それぞれの作動ギャップ部にも硬質炭素膜を形成させる
ことができ、耐摩耗性に優れた磁気ヘッドを実現する。Effect With the above configuration, the hard carbon film formed in the working gap of the magnetic head has high hardness and excellent wear resistance, so the length of the working gap can be reduced to make sliding contact with the magnetic medium without impairing magnetic properties. Life expectancy is achieved. The hard carbon film is formed on a substrate material such as a ferrite core by a vapor phase synthesis method such as plasma CVD. This configuration includes not only a ring-shaped magnetic head consisting only of a ferrite core, but also a magnetic head with a metal-in-gap structure formed with a soft magnetic metal film with excellent magnetic properties, a laminated magnetic head with excellent high-frequency properties,
A magnetic head with a laminated metal-in-gap structure that combines the characteristics of both of the above, and a magnetic head with excellent wear resistance that can also form a hard carbon film on each operating gap of a single-pole magnetic head. Realize.
実施例 以下、本発明の実施例を図面に基づいて説明する。Example Embodiments of the present invention will be described below based on the drawings.
第１図は第１実施例のリング形磁気ヘッドであり、フェ
ライトコア１とフエイトコア２を接着ガラス３で接合し
て磁気回路を形成し、巻線穴４には図示しないが公知の
コイルが巻かれる。磁気記録媒体との摺動面５には作動
ギャップ部６が形成されており、第２図に作動ギャップ
部６の近傍を拡大して示す。FIG. 1 shows a ring-shaped magnetic head of the first embodiment, in which a ferrite core 1 and a fate core 2 are bonded together with adhesive glass 3 to form a magnetic circuit, and a known coil (not shown) is wound in a winding hole 4. It will be destroyed. An operating gap portion 6 is formed in the sliding surface 5 against the magnetic recording medium, and FIG. 2 shows an enlarged view of the vicinity of the operating gap portion 6.
硬質炭素膜７が両フェライトコア１、２の作動ギャップ
面８．１１と傾斜面９．１２とに形成されている。A hard carbon film 7 is formed on the working gap surface 8.11 and on the inclined surface 9.12 of both ferrite cores 1, 2.
ＧＬは作動ギャップ長、Ｗはトラック幅、θはアジマス
角を示している。GL is the working gap length, W is the track width, and θ is the azimuth angle.
第３図によって前記リング形磁気ヘッドの加工工程の概
略を説明する。尚、図中の矢印は加工の流れを示すもの
である。第３図（ａ）において、フェライト基板（以下
基板と略す）２０およびフェライト基板２１に作動ギャ
ップ面２２．２３の鏡面加工と、トラック幅規制溝２４
および２５の加工を行う。そして基板２０に巻線穴とな
る溝２６の加工を行う。次に第３図（ｂ）に示すように
両基板２０．２１の作動ギャップ面２２．２３に硬質炭
素膜２７．２８を公知の気相合成法、例えばプラズマＣ
ＶＤ等によって作動ギャップ長ＧＬの約１７２の厚みに
形成する。尚、硬質炭素膜はいずれか一方の作動ギャッ
プ面にのみ作動ギャップ長ＧＬと略等しい厚みに形成す
ることもできる。このようにすると片側のコアのみに硬
質炭素膜を形成することになるので工程を簡略化するこ
とができる。次に、第３図（Ｃ）に示すように両基板２
０．２１を接着ガラス２９で接合し、次いで仮想線で示
すようにＲ面３０の加工を行った後、図示するようにス
ライスすると単体のへラドチップ３２が切り代３１で分
離された状態で得られる。このヘッドチップ３２の摺動
面３３を最終仕上げし、図示しないが巻線を巻くとヘッ
ドが完成する。硬質炭素膜は耐摩耗性にすぐれているの
で、以上の構成にすることにより、作動ギャップ部の摩
耗が抑制され、ヘッドの長寿命化を実現することができ
る。An outline of the manufacturing process of the ring-shaped magnetic head will be explained with reference to FIG. Note that the arrows in the figure indicate the flow of processing. In FIG. 3(a), a ferrite substrate (hereinafter abbreviated as substrate) 20 and a ferrite substrate 21 are mirror-finished with working gap surfaces 22 and 23, and track width regulating grooves 24 are formed.
and 25 processing. Then, a groove 26 that will become a winding hole is formed in the substrate 20. Next, as shown in FIG. 3(b), a hard carbon film 27.28 is formed on the working gap surfaces 22.23 of both substrates 20.21 using a known vapor phase synthesis method, for example, plasma carbon.
It is formed to have a thickness of about 172 mm, which is the working gap length GL, by VD or the like. Incidentally, the hard carbon film may be formed only on one of the working gap surfaces to have a thickness substantially equal to the working gap length GL. In this way, the hard carbon film is formed only on one side of the core, so the process can be simplified. Next, as shown in FIG. 3(C), both substrates 2
0.21 is bonded with adhesive glass 29, and then the R surface 30 is processed as shown by the imaginary line, and then sliced as shown in the figure to obtain a single Herad chip 32 separated by a cutting margin 31. It will be done. The sliding surface 33 of this head chip 32 is finally finished, and a winding wire (not shown) is wound to complete the head. Since the hard carbon film has excellent abrasion resistance, the above configuration suppresses abrasion of the operating gap portion and makes it possible to extend the life of the head.
記録密度を上げるため抗磁力Ｈｃを高くした磁気記録媒
体に対応するためには、飽和磁束密度の大きな軟磁性膜
である例えばセンダストのようなメタル膜をフェライト
コアのギャップ近傍に設けた、いわゆるメタルインギャ
ップ構造のヘッド（以下ＭＩＧヘッドと略す）が用いら
れる。このＭＩＧヘッドに本発明を適用した例を第２実
施例として説明する。In order to support magnetic recording media with a high coercive force Hc to increase the recording density, a so-called metal film in which a metal film such as sendust, which is a soft magnetic film with a high saturation magnetic flux density, is provided near the gap of the ferrite core. A head with an in-gap structure (hereinafter abbreviated as MIG head) is used. An example in which the present invention is applied to this MIG head will be described as a second embodiment.
ＭＩＧヘッドの作動ギャップ部の第４図に示し、第１実
施例と同一の構成要素には同一の符号を付して、その説
明は省略する。The operating gap portion of the MIG head is shown in FIG. 4, and the same components as in the first embodiment are given the same reference numerals, and their explanation will be omitted.
第４図に示す断面Ｘ字状に形成された部分が軟磁性メタ
ル膜４０および４１である。この構造のヘッドを実現す
るには、第５図に示すようにフェライト基板４５に断面
が三角形の山条４６を形成した上に軟磁性メタル膜４７
をスパッタ蒸着などの手段により形成し、その後メタル
膜４７の山頂部４８を平面に加工して作動ギャップ面４
９とする（２つの基板の加工工程は同じであるので、基
板の一方のみを示す）。以降の加工工程は第３図に示し
た場合と同じである。The portions formed to have an X-shaped cross section shown in FIG. 4 are soft magnetic metal films 40 and 41. In order to realize a head with this structure, as shown in FIG.
is formed by means such as sputter deposition, and then the peak portion 48 of the metal film 47 is processed into a flat surface to form the working gap surface 4.
9 (the processing steps for the two substrates are the same, so only one of the substrates is shown). The subsequent processing steps are the same as those shown in FIG.
尚、ＭＩＧヘッドの作動ギャップ部に表れる軟磁性メタ
ル膜の形状は第４図に示すＸ形に限るものではなく、公
知の斜め形、平行形であっても同様に本発明を通用でき
る。Note that the shape of the soft magnetic metal film appearing in the working gap portion of the MIG head is not limited to the X-shape shown in FIG. 4, and the present invention can be applied to any known oblique or parallel shape.
以上の構成とすることにより、フェライトコアよりも磁
気特性に優れるが、耐摩耗性に劣るメタル膜の摩耗が抑
制され、磁気特性に優れしかも長寿命のＭＩＧヘッドを
実現することができる。With the above configuration, abrasion of the metal film, which has better magnetic properties than a ferrite core but is inferior in wear resistance, is suppressed, and an MIG head with excellent magnetic properties and long life can be realized.
次に第３実施例として、記録再生信号の高周波化に対応
するためにメタルの渦電流損失を小さくできる積層形磁
気ヘッドに本発明を適用した例を第６図に示す。Next, as a third embodiment, FIG. 6 shows an example in which the present invention is applied to a laminated magnetic head that can reduce metal eddy current loss in order to cope with higher frequencies of recording and reproducing signals.
５０．５２および５１．５３は硬質非磁性基板であり、
その作動ギャップ位置に、例えばＣｏ基合金から成るア
モルファスの軟磁性体のメタル膜５５．５６と絶縁体で
ある硬質炭素膜５７．５８を交互に積層してコア５９．
６０を形成し、作動ギャップ長ＣＬを隔てて作動ギャッ
プ面６１．６２に図示しないが従来のＳｉＯ□膜を挟ん
で対向する構造である。50.52 and 51.53 are hard nonmagnetic substrates,
At the operating gap position, amorphous soft magnetic metal films 55 and 56 made of, for example, a Co-based alloy and hard carbon films 57 and 58 which are insulators are alternately laminated to form a core 59.
60, and are opposed to each other with a conventional SiO□ film (not shown) sandwiched between the working gap surfaces 61 and 62 across the working gap length CL.
第７図は作動ギャップ面６１．６２にも硬質炭素膜６３
．６４を構成した例であり、耐摩耗性はより優れたもの
となる。要求される耐摩耗性によって作動ギャップ面の
硬質炭素膜６３．６４の要不要を選択すればよい。FIG. 7 shows a hard carbon film 63 also on the working gap surfaces 61 and 62.
．． 64, and the wear resistance is even better. Depending on the required wear resistance, whether or not to provide the hard carbon films 63, 64 on the working gap surface may be selected.
この構造のヘッドを実現するには、第８図に示すように
硬質非磁性基板７０の片側に前記メタル膜５５と硬質炭
素膜５７を交互に積層してコア７１を形成し、それを複
数枚重ねて互いに接着ガラスで接合し、その後アジマス
角θを付けて切り代Ｃ５にて切断し、仕上げ加工を行っ
た後、同様に加工された対面と合わせることで硬質炭素
膜による積層形磁気ヘッドが完成する。この時、作動ギ
ャップ面７５にＳｉＯ□膜を形成すれば第６図の構造と
なり、硬質炭素膜を形成すれば第７図に示す構造となる
。To realize a head with this structure, as shown in FIG. 8, the metal film 55 and the hard carbon film 57 are alternately laminated on one side of the hard non-magnetic substrate 70 to form a core 71, and a plurality of cores 71 are formed. They are stacked and bonded to each other with adhesive glass, then cut at an azimuth angle of θ at cutting width C5, finished, and then combined with the opposite surface processed in the same manner to create a laminated magnetic head made of hard carbon films. Complete. At this time, if a SiO□ film is formed on the working gap surface 75, the structure shown in FIG. 6 will be obtained, and if a hard carbon film is formed, the structure shown in FIG. 7 will be obtained.
以上の構成とすることにより、磁気特性に優れるが、耐
摩耗性に劣るメタル膜から成るコアの摩耗が抑制され、
長寿命の積層ヘッドを実現することができる。With the above configuration, wear of the core made of a metal film that has excellent magnetic properties but poor wear resistance is suppressed.
A long-life lamination head can be realized.
次に前記したＭＩＧヘッドの特性に、前記積層形ヘッド
の構成を加味させた積層形ＭＩＧヘッドとした構成を第
４実施例として説明する。Next, a configuration of a stacked MIG head in which the configuration of the stacked head described above is added to the characteristics of the MIG head described above will be described as a fourth embodiment.
積層形ＭＩＧヘッドは、ＭＩＧヘッドのメタル膜と硬質
炭素膜を積層構造としたものであり、ＭＩＧヘッドと積
層ヘッドの特徴を合わせ持つものである。The laminated MIG head has a laminated structure of the metal film and hard carbon film of the MIG head, and has the characteristics of both the MIG head and the laminated head.
第９図に示す７１および７２は、それぞれフェライトコ
アで、その対面部にメタル膜７５．７６と硬質炭素膜７
７．７８を交互に積層して形成した積層メタル膜７３．
７４を形成し、その表面の作動ギャップ面および傾斜面
に硬質炭素膜７９．８０を形成し、接着ガラス８１で接
合している。硬質炭素膜７９．８０は、要求される耐摩
耗性によって要不要を選択できる。71 and 72 shown in FIG. 9 are respectively ferrite cores, and metal films 75 and 76 and hard carbon films 7 are provided on the opposing parts.
A laminated metal film 73.78 formed by alternately laminating 7.78.
74, hard carbon films 79 and 80 are formed on the working gap surface and the inclined surface of the surface, and are bonded with adhesive glass 81. Whether or not the hard carbon films 79 and 80 are necessary can be selected depending on the required wear resistance.
次に本発明の第５実施例について説明する。Next, a fifth embodiment of the present invention will be described.
磁気記録密度の向上への要求に対して、従来の長手方向
記録方式よりも原理的に高密度記録特性に優れた垂直方
向記録方式が有望視されている。この垂直記録方式に適
用できる片側アクセス型単磁極磁気ヘッドに本発明を適
用した例を第１０図〜第１２図に示す。第１０図におい
て、例えばＣｏ基合金からなる飽和磁束密度の高いアモ
ルファスの軟磁性体のメタル膜で構成された主磁極８５
は、硬質非磁性基板８６に形成されている。その主磁極
８５は第１１図に示すように、磁気記録媒体との摺動面
９１における厚さＴ１よりもその内側における厚さＴ２
を厚（し、磁路抵抗が小さくなるようにしである。８７
はフェライトで構成された補助磁極で、１０７は硬質非
磁性基板８６と補助磁極８７を接合する接着ガラスであ
る。８８は主磁極８５と補助磁極８７が磁気的に短絡し
ないようにするための非磁性の第１スペーサ、８９は補
助磁極の磁気記録媒体との対向面１０８が直接磁気記録
媒体と接触して疑領信号を発生させないようにするため
の非磁性の第２スペーサである。９０は巻線穴で、図示
しないが公知のコイルが巻かれる。In response to the demand for increased magnetic recording density, perpendicular recording systems are viewed as promising, as they are theoretically superior in high-density recording characteristics to conventional longitudinal recording systems. An example in which the present invention is applied to a single-side access single-pole magnetic head applicable to this perpendicular recording method is shown in FIGS. 10 to 12. In FIG. 10, the main magnetic pole 85 is made of a metal film of an amorphous soft magnetic material with high saturation magnetic flux density made of a Co-based alloy, for example.
is formed on a hard non-magnetic substrate 86. As shown in FIG. 11, the main magnetic pole 85 has a thickness T2 on the inner side than a thickness T1 at the sliding surface 91 with the magnetic recording medium.
The thickness is such that the magnetic path resistance is small.87
107 is an auxiliary magnetic pole made of ferrite, and 107 is adhesive glass for bonding the hard non-magnetic substrate 86 and the auxiliary magnetic pole 87. 88 is a non-magnetic first spacer for preventing magnetic short circuit between the main magnetic pole 85 and the auxiliary magnetic pole 87, and 89 is a non-magnetic first spacer for preventing magnetic short circuit between the main magnetic pole 85 and the auxiliary magnetic pole 87; This is a non-magnetic second spacer for preventing the generation of magnetic signals. 90 is a winding hole in which a known coil (not shown) is wound.
記録再生時に磁束は、主磁極８５から出入りして図示し
ない磁気記録媒体と、補助磁極８７を通る閉磁路を形成
することになる。摺動面９１に開口する主磁極８５の近
傍を拡大して示す第１２図において、９２は硬質炭素膜
であり、Ｗはトラック幅、θはアジマス角である。主磁
極厚さＴ１は前記リングヘッドにおける作動ギャップ長
ＧＬの約１／２〜ｌ／３に相当する。During recording and reproduction, magnetic flux enters and exits from the main magnetic pole 85 and forms a closed magnetic path passing through the auxiliary magnetic pole 87 and a magnetic recording medium (not shown). In FIG. 12, which shows an enlarged view of the vicinity of the main pole 85 opening in the sliding surface 91, 92 is a hard carbon film, W is the track width, and θ is the azimuth angle. The main pole thickness T1 corresponds to about 1/2 to 1/3 of the working gap length GL in the ring head.
次に第１３図によって単磁極磁気ヘッドの加工工程の概
略を説明する。図中の矢印は加工の流れを示すものであ
る。第１３図（ａ）において、フェライト基板９３に前
記第１スペーサ８８のための段差Ｓ１と、巻線穴９０と
なる溝９４の加工を行う。次に第１スペーサ８８となる
非磁性体９５を接着あるいは、スパッタ等の薄膜形成プ
ロセスで形成し８面９６の加工を行う。次に第１３図（
ｂ）に示すようにこの８面９６に、第２スペーサ８９と
なる非磁性体９７を前記と同様に接着あるいは、スパッ
タ等の薄膜形成プロセスで形成する。−力筒１３図（ａ
）において、もう一方の硬質非磁性基板９８に段差Ｓ２
加工を行った後、メタル膜９９をスパッタ蒸着などによ
り形成し、次にトラック幅規制溝１００の加工を行う。Next, an outline of the manufacturing process of a single pole magnetic head will be explained with reference to FIG. The arrows in the figure indicate the flow of processing. In FIG. 13(a), a step S1 for the first spacer 88 and a groove 94 that will become the winding hole 90 are formed on the ferrite substrate 93. Next, a nonmagnetic material 95 that will become the first spacer 88 is formed by adhesion or by a thin film forming process such as sputtering, and eight surfaces 96 are processed. Next, Figure 13 (
As shown in b), a non-magnetic material 97 that will become the second spacer 89 is formed on these eight surfaces 96 by adhesion or a thin film forming process such as sputtering in the same manner as described above. -Image cylinder 13 (a
), there is a step S2 on the other hard non-magnetic substrate 98.
After processing, a metal film 99 is formed by sputter deposition or the like, and then track width regulating grooves 100 are processed.
メタル膜９９を膜厚ＴｌとＴ２で形成するには、例えば
寸法りの領域をマスクして膜を段差Ｓ２と略略同−の厚
さ、すなわちＴ２−Ｔｌの厚さに形成し、次にそのマス
クを除去して全面に膜厚Ｔ１で形成すればよい。次に第
１３図（ｂ）に示すように硬質炭素膜１０１を形成する
。次いでフェライト基板９３と硬質非磁性基板９８を、
第１３図（Ｃ）に示す様に接着ガラス１０２で接合し、
Ｒ面１０４の加工を行い、切り代１０４でスライスする
と単体のへラドチップ１０５ができる。このヘッドチッ
プ１０５の摺動面を最終仕上げし、図示しないが巻線を
巻くとヘッドが完成する。To form the metal film 99 with film thicknesses Tl and T2, for example, mask a dimensioned area and form the film to a thickness that is approximately the same as that of the step S2, that is, T2 - Tl, and then It is sufficient to remove the mask and form the film with a thickness T1 over the entire surface. Next, as shown in FIG. 13(b), a hard carbon film 101 is formed. Next, the ferrite substrate 93 and the hard non-magnetic substrate 98 are
Bonded with adhesive glass 102 as shown in FIG. 13(C),
By processing the rounded surface 104 and slicing at the cutting margin 104, a single Herad chip 105 is produced. The head is completed by final finishing the sliding surface of this head chip 105 and winding a wire (not shown).
また、前記第１２図の硬質非磁性基板９１とメタル膜８
５との間にも図示しないが硬質炭素膜を形成すれば、耐
摩耗性はより優れたものとなる。Furthermore, the hard non-magnetic substrate 91 and the metal film 8 in FIG.
If a hard carbon film (not shown) is also formed between the contact point 5 and the contact point 5, the wear resistance will be even better.
以上の構成により、主磁極の摩耗が抑制され、ヘッドの
長寿命化を実現することができる。With the above configuration, wear of the main pole can be suppressed and the life of the head can be extended.
片側アクセス型単磁極磁気ヘッドの一例とて第１０図に
示すように、主磁極８５の片側に補助磁極８７を設ける
構成を示したが、その構成に限るものではなく、図示し
ないが主磁極の両側に補助磁極を設ける構成としてもよ
い。磁気ヘッドの構造は複雑となるが主磁極からでた磁
束の対称性は良好となる。As shown in FIG. 10 as an example of a single-sided access type single-pole magnetic head, an auxiliary magnetic pole 87 is provided on one side of the main magnetic pole 85. However, the configuration is not limited to this; A structure in which auxiliary magnetic poles are provided on both sides may also be used. Although the structure of the magnetic head is complicated, the symmetry of the magnetic flux emitted from the main pole is good.
以上本発明の第１実施例から第５実施例に用いる硬質炭
素膜は、適用する磁気記録媒体の性質に合うように、そ
の特性を選択して形成することができる。As described above, the hard carbon films used in the first to fifth embodiments of the present invention can be formed by selecting properties that match the properties of the magnetic recording medium to which they are applied.
例えば比較的潤滑性に優れた磁気記録媒体に適用させる
場合は、硬質炭素膜を最も耐摩耗性に優れたダイヤモン
ド結合を有する炭素膜で構成すれば、磁気ヘッドの寿命
を最大限に延ばすことができる。For example, when applying to a magnetic recording medium with relatively excellent lubricity, the life of the magnetic head can be extended to the maximum by configuring the hard carbon film with a carbon film with diamond bonds, which has the highest wear resistance. can.
一方、潤滑性があまり期待できない磁気記録媒体に適用
させる場合、その磁気記録媒体が損傷する恐れのあると
きは、硬質炭素膜をダイヤモンド結合とグラファイト結
合が混在した結合を有する炭素膜で構成すると、グラフ
ァイト結合は潤滑性を有するので磁気記録媒体を損傷せ
ずしかも長寿命の磁気ヘッドを構成することができる。On the other hand, when applying it to a magnetic recording medium for which lubricity is not expected to be very high, if there is a risk of damage to the magnetic recording medium, it is possible to configure the hard carbon film with a carbon film having a mixture of diamond bonds and graphite bonds. Since graphite bonding has lubricating properties, it is possible to construct a magnetic head that does not damage the magnetic recording medium and has a long life.
前記結合状態は、例えばプラズマＣＶＤの原料ガスの種
類や濃度比、あるいは成膜条件を変えることにより制御
することができる。The bonding state can be controlled, for example, by changing the type and concentration ratio of raw material gas in plasma CVD, or the film forming conditions.
また、以上すべてフェライトコアあるいはメタル膜に直
接硬質炭素膜を形成し、硬質炭素膜に接着ガラスを直付
けする構成としたが、必要に応じて硬質炭素膜との密着
性向上などのためにＣｒ等の中間膜を設ける構成として
もよい。In addition, in all of the above configurations, the hard carbon film is formed directly on the ferrite core or metal film, and the adhesive glass is directly attached to the hard carbon film. It is also possible to provide a structure in which an intermediate film such as the like is provided.
発明の効果
本発明によれば、磁気ヘッドの作動ギャップ部に形成す
る硬質炭素膜は、硬度が高く耐摩耗性に優れているので
、磁気特性を損なうことな（磁気媒体と摺動接触する作
動ギャップ部の長寿命化を図ることができ、磁気記録密
度の向上への要求を満たすための薄膜型の磁気記録媒体
に適応する磁気ヘッドを提供することができる。また本
構成は、フェライトコアのみで成るリング形磁気ヘッド
だけでなく、磁気特性に優れる軟磁性メタル膜形成のメ
タルインギャップ構造の磁気ヘッド、高薗波特性に優れ
る積層形磁気ヘッド、および前記両者の特性を兼ね備え
る積層形メタルインギャップ構造の磁気ヘッド、更には
単磁極磁気ヘッドのそれぞれの作動ギャップ部にも硬質
炭素膜を形成させることができ、磁気記録再生装置の長
寿命化にも貢献できるものである。Effects of the Invention According to the present invention, the hard carbon film formed in the operating gap portion of the magnetic head has high hardness and excellent wear resistance, so that it does not impair magnetic properties (operation that makes sliding contact with the magnetic medium). It is possible to prolong the life of the gap part, and to provide a magnetic head that is compatible with thin-film magnetic recording media to meet the demand for increased magnetic recording density.In addition, this configuration has only a ferrite core. In addition to ring-shaped magnetic heads, we also offer metal-in-gap structure magnetic heads with a soft magnetic metal film with excellent magnetic properties, laminated magnetic heads with excellent Takasono wave characteristics, and laminated metal-in magnetic heads that combine the above characteristics. A hard carbon film can be formed on the operating gap portion of a magnetic head having a gap structure, and furthermore, of a single-pole magnetic head, which can also contribute to extending the life of the magnetic recording/reproducing device.
第１図は本発明の第１実施例における磁気ヘッドの斜視
図、第２図は第１図の作動ギャップ部の拡大斜視図、第
３図は第１図の磁気ヘッドの加工工程の概略説明図、第
４図は本発明の第２実施例における磁気ヘッドの作動ギ
ャップ部を拡大して示す斜視図、第５図は第４図の磁気
ヘッドの加工工程の一部を説明する説明図、第６図は本
発明の第３実施例における磁気ヘッドの作動ギャップ部
を拡大して示す斜視図、第７図は前記作動ギャップ部を
拡大して示す斜視図、第８図は第７図の磁気ヘッドの加
工工程の一部を説明するための説明図、第９図は本発明
の第４実施例における磁気ヘッドの作動ギャップ部を拡
大して示す斜視図、第１０図は本発明の第５実施例にお
ける磁気ヘッドの斜視図、第１１図は第１０図の磁気ヘ
ッドをその厚みの中央部で断面にして示す斜視図、第１
２図は第１０図の作動ギャップ部の拡大斜視図、第１３
図は第１０図の磁気ヘッドの加工工程の概略を説明する
説明図である。FIG. 1 is a perspective view of a magnetic head according to a first embodiment of the present invention, FIG. 2 is an enlarged perspective view of the operating gap portion of FIG. 1, and FIG. 3 is a schematic explanation of the processing steps of the magnetic head of FIG. 1. 4 is an enlarged perspective view showing the working gap portion of the magnetic head in the second embodiment of the present invention, and FIG. FIG. 6 is an enlarged perspective view of the working gap of a magnetic head according to a third embodiment of the present invention, FIG. 7 is an enlarged perspective view of the working gap, and FIG. 8 is the same as that of FIG. An explanatory view for explaining a part of the manufacturing process of the magnetic head, FIG. 9 is a perspective view showing an enlarged working gap portion of the magnetic head in the fourth embodiment of the present invention, and FIG. 11 is a perspective view of the magnetic head in Example 5; FIG. 11 is a perspective view showing the magnetic head of FIG. 10 in cross section at the center of its thickness;
Figure 2 is an enlarged perspective view of the operating gap in Figure 10;
The figure is an explanatory diagram illustrating the outline of the processing steps for the magnetic head shown in FIG. 10.
Claims (7)
とを特徴とする磁気ヘッド。(1) A magnetic head characterized in that a hard carbon film is formed on the operating gap surface of the core.
そのメタル膜に作動ギャプ面を形成し、その作動ギャッ
プ面に硬質炭素膜を形成したことを特徴とする磁気ヘッ
ド。(2) A soft magnetic metal film is provided in the operating gap of the core,
A magnetic head characterized in that a working gap surface is formed on the metal film, and a hard carbon film is formed on the working gap surface.
硬質炭素膜を交互に積層した構成としたことを特徴とす
る磁気ヘッド。(3) A magnetic head characterized in that the core having a working gap surface has a structure in which soft magnetic metal films and hard carbon films are alternately laminated.
を交互に積層した積層メタル層を設け、前記メタル層に
作動ギャップ面を形成したことを特徴とする磁気ヘッド
。(4) A magnetic head characterized in that a laminated metal layer in which soft magnetic metal films and hard carbon films are alternately laminated is provided in the working gap portion, and a working gap surface is formed in the metal layer.
極の磁束出入り口を囲む面のうちの少なくともトラック
幅方向の面に、硬質炭素膜を形成したことを特徴とする
磁気ヘッド。(5) A magnetic head configured as a single magnetic pole, characterized in that a hard carbon film is formed on at least the surface in the track width direction of the surfaces surrounding the magnetic flux entrance/exit of the main pole.
で構成したことを特徴とする請求項１、請求項２、請求
項３、請求項４または請求項５記載の磁気ヘッド。(6) The magnetic head according to claim 1, 2, 3, 4, or 5, wherein the hard carbon film is a carbon film having diamond bonds.
結合が混在した結合を有する炭素膜で構成したことを特
徴とする請求項１、請求項２、請求項３、請求項４また
は請求項５記載記載の磁気ヘッド。(7) Claim 1, Claim 2, Claim 3, Claim 4, or Claim 5, characterized in that the hard carbon film is composed of a carbon film having bonds in which diamond bonds and graphite bonds are mixed. magnetic head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP582590A JPH03209608A (en) | 1990-01-11 | 1990-01-11 | Magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP582590A JPH03209608A (en) | 1990-01-11 | 1990-01-11 | Magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03209608A true JPH03209608A (en) | 1991-09-12 |
Family
ID=11621843
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP582590A Pending JPH03209608A (en) | 1990-01-11 | 1990-01-11 | Magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03209608A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0644528A (en) * | 1991-12-03 | 1994-02-18 | Nec Corp | Thin-film magnetic head and its production |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53143206A (en) * | 1977-05-18 | 1978-12-13 | Nec Corp | Magnetic disc |
| JPH01232510A (en) * | 1988-03-14 | 1989-09-18 | Teijin Ltd | Space for gap formation of magnetic head |
| JPH0395712A (en) * | 1989-09-07 | 1991-04-22 | Fuji Elelctrochem Co Ltd | Magnetic head |
-
1990
- 1990-01-11 JP JP582590A patent/JPH03209608A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53143206A (en) * | 1977-05-18 | 1978-12-13 | Nec Corp | Magnetic disc |
| JPH01232510A (en) * | 1988-03-14 | 1989-09-18 | Teijin Ltd | Space for gap formation of magnetic head |
| JPH0395712A (en) * | 1989-09-07 | 1991-04-22 | Fuji Elelctrochem Co Ltd | Magnetic head |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0644528A (en) * | 1991-12-03 | 1994-02-18 | Nec Corp | Thin-film magnetic head and its production |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH03209608A (en) | Magnetic head | |
| JPH06150236A (en) | Magnetic head | |
| JPS6015807A (en) | Magnetic head | |
| JPH03225610A (en) | Thin-film magnetic head | |
| JPH05325129A (en) | Magnetic head | |
| JPH0721513A (en) | Magnetic head | |
| JPH05282619A (en) | Magnetic head | |
| JPH0765316A (en) | Magnetic head | |
| JPH02105309A (en) | Thin film magnetic head | |
| JPH01185811A (en) | Magnetic head | |
| JPH06251322A (en) | Magnetic head | |
| JPH07210810A (en) | Magnetic head | |
| JPH06223314A (en) | Magnetic head | |
| JPH11213318A (en) | Production of magnetic head | |
| JPH1153709A (en) | Magnetic head, its manufacture and magnetic recording and reproducing device using the same | |
| JPH05234030A (en) | Magnetic head for hdd | |
| JPH06338023A (en) | Magnetic head | |
| JPH11203617A (en) | Magnetic head | |
| JPH02172007A (en) | Multitrack magnetic head | |
| JPH07307008A (en) | Magnetic head and its production | |
| JPH01137414A (en) | Magnetic head | |
| JPH06338016A (en) | Magnetic head | |
| JPH08138205A (en) | Magnetic head and its production | |
| JPH05151523A (en) | Magnetic head and production thereof | |
| JPH07282414A (en) | Magnetic head and its production |