JPH03207811A - Vacuum furnace - Google Patents
Vacuum furnaceInfo
- Publication number
- JPH03207811A JPH03207811A JP137690A JP137690A JPH03207811A JP H03207811 A JPH03207811 A JP H03207811A JP 137690 A JP137690 A JP 137690A JP 137690 A JP137690 A JP 137690A JP H03207811 A JPH03207811 A JP H03207811A
- Authority
- JP
- Japan
- Prior art keywords
- continuous material
- vacuum
- chamber
- heating chamber
- feeding
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010438 heat treatment Methods 0.000 claims abstract description 46
- 239000000109 continuous material Substances 0.000 claims abstract description 42
- 238000010926 purge Methods 0.000 claims abstract description 12
- 238000004804 winding Methods 0.000 claims description 16
- 238000000034 method Methods 0.000 abstract description 2
- 238000007599 discharging Methods 0.000 abstract 5
- 230000007547 defect Effects 0.000 abstract 1
- 230000000694 effects Effects 0.000 description 5
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 230000003647 oxidation Effects 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910001200 Ferrotitanium Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
Landscapes
- Heat Treatment Of Strip Materials And Filament Materials (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
この発明は線材あるいは帯材等の連続材に対し・それを
連続的に真空加＃！室に逼し・ながら熱処理を施すよう
にした真空炉に間する．
［従来の技術コ
上記のような真空炉は通常次のように構成し・てあ；Ｓ
．内部を通過させる連続材を加熱する為の加熱手段を鑵
えている真空加熱室には、連続材の導入口と連続材の導
出口とを備えさせ、更に導入口の前段側には連続材の送
り装置を配設し、導出口の後段側には連続材の巻取装置
を配設している．上記導入口と導出口はシールロールで
シールし・上記送り装置や巻取装置は真空容器の外に配
置している．
［発明が解決しようとする！！！Ｉ］
この従来の真空炉では上記のようなシールロールその池
のシール装置が必須的に必要である．しかしそのような
シール装置の使用は、そこを通る連続材に傷を付けて製
品品質を損なう可能性があるという問題点があった・
本発明は上記従来技術の問題点（技術的課題）を解沃す
る為になされたもので、透り装置から真空加納室への連
続材の８勤及び真空加＃Ｖ室から巻取装置への連続材の
移動をいずれも同条件の真空下で行なうことができるよ
うにすることによって、真空加熱室の導入口及び導出口
でのシールの必要性が輝く、もって上記従来技術の如き
傷の発生の可能性を固より無くして良質の製品の提供を
可能にてきるようにした真空炉を提洪することを目的と
するものである。[Detailed Description of the Invention] [Industrial Application Field] This invention applies vacuum continuously to continuous materials such as wire rods or strips! The material is placed in a vacuum furnace where heat treatment is performed while the product is kept in a chamber. [Conventional technology] The vacuum furnace as described above is usually constructed as follows;
．． The vacuum heating chamber equipped with a heating means for heating the continuous material passing through the chamber is equipped with an inlet for the continuous material and an outlet for the continuous material. A feeding device is installed, and a continuous material winding device is installed downstream of the outlet. The inlet and outlet are sealed with a seal roll, and the feeder and take-up device are located outside the vacuum container. [Invention tries to solve! ! ! I] This conventional vacuum furnace absolutely requires a sealing device for the sealing roll and pond as described above. However, the use of such a sealing device has the problem of damaging the continuous material passing through it and potentially impairing product quality.The present invention solves the problems (technical issues) of the prior art described above. This was done for defertilization, and the movement of continuous material from the clearing device to the vacuum processing chamber and the movement of continuous material from the vacuum processing #V chamber to the winding device are both carried out under the same vacuum conditions. By making it possible to do this, the necessity of sealing at the inlet and outlet of the vacuum heating chamber is highlighted, thereby eliminating the possibility of occurrence of scratches as in the above-mentioned conventional technology and providing high-quality products. The purpose is to provide a vacuum furnace that has been made possible.
［ｆｆａを解決する為の手段コ
上記目的を達成する為に、本願発明は前記請求の範囲記
載の通りの手段を講したものであって、その作用は次の
逼りてある。[Means for solving ffa] In order to achieve the above object, the present invention takes the measures as described in the claims above, and its effects are as follows.
［作用コ 連続材は送り装置から真空加熱室へ送られる。[Action Co. The continuous material is sent from a feeding device to a vacuum heating chamber.
連続材は真空加熱室を通過しながら所定の加μを受ける
，ざら２こ連ａｔ才は真空加熱室から巻取装置へ至り巻
き取られる。これらは包囲壁で囲まれた内部において同
条沖の真空下で行われろ。The continuous material is subjected to a predetermined load while passing through a vacuum heating chamber, and the two-stranded material is passed from the vacuum heating chamber to a winding device and wound up. These must be carried out in a vacuum off the coast of the same area, inside the surrounding wall.
［実施例コ 以下本願の実施例を示す図面について説明する。[Example code] The drawings showing the embodiments of the present application will be described below.
ｌは包囲璧として例示する真空チャンハーで５中空に形
成されかつ内部の密閉が可＃εに陳成してある。２はチ
ャンハ−１内の中央部に定めた真空加熱室で、断熱壁３
て取り囲まれている．４，５は夫々断＃壁３に形成した
真空加熱室２の導入口、導出口である．６は真空加熱室
２に備えられている加熱手段で、例えば電熱ヒータてあ
る。1 is a vacuum chamber exemplified as an enclosing wall, which is formed hollow and whose interior is sealed tightly. 2 is a vacuum heating chamber located in the center of the chamber 1, with a heat insulating wall 3
It is surrounded by people. 4 and 5 are the inlet and outlet of the vacuum heating chamber 2 formed in the section wall 3, respectively. Reference numeral 6 denotes heating means provided in the vacuum heating chamber 2, such as an electric heater.
次に７は真空加熱室２における導入０４の前段側ζこ定
めたｉｆ７室で、上記包囲壁のうち断＃！ｕ３よりも前
側の前包囲壁１ａて取囲まれている。８は前室における
送入口で、開閉装置１０によって開閉されるようにした
辱９により閉ざされている。１１は前室に備えた送り装
置である。次にＩ３は前室７に連設した送入用パージ室
で、送入口８を通して連通ずるようになっている。Ｉ４
はパージ室１３における連続材の搬入口で、開閉自在の
扉１５により閉ざされている。ｌ６は連続材の送大装置
で、シリンダｌ７とそのピストンロフトに取付けた受台
１８とにより構成し・である。Next, 7 is the if7 chamber determined on the front stage side of the introduction 04 in the vacuum heating chamber 2, and the surrounding wall is cut #! It is surrounded by a front surrounding wall 1a on the front side of u3. Reference numeral 8 denotes an inlet port in the front chamber, which is closed by an opening 9 which is opened and closed by an opening/closing device 10. 11 is a feeding device provided in the front chamber. Next, I3 is an inlet purge chamber connected to the front chamber 7, and is communicated through an inlet port 8. I4
is an entrance for carrying continuous material into the purge chamber 13, which is closed by a door 15 that can be opened and closed. 16 is a continuous material feeding device, which is composed of a cylinder 17 and a pedestal 18 attached to its piston loft.
次に２０は真空加熱室２における導出口５の漫段刷に定
めた後室、２日は後Ｍ２０に連設した取出用パージ室を
夫々示す。これら及びその各々に関連するｌ１ｌ或は前
記前室７及び送入用パージ室１３と均等であるので、そ
れらζこついては以下に符号と各々の名称のみを列記し
て各々に間する重複する説明を省略する。即ち． ｌｂ
ｉよ後包悄壁、２Ｉは取出口、２２は扉、２３は開Ｗｉ
装置、２４はｔｌ取装置、２７は搬出口、２８は扉、２
９は取出装置、３０はシリンダ、３１は受台である。Next, reference numeral 20 indicates a rear chamber defined in multiple stages of the outlet port 5 in the vacuum heating chamber 2, and 2 indicates a purge chamber for extraction connected to the rear M20. Since these and the l1l related to each of them are equivalent to the antechamber 7 and the inlet purge chamber 13, only the reference numerals and respective names will be listed below to avoid redundant explanations for each. omitted. That is. lb
i is the rear wall, 2I is the outlet, 22 is the door, 23 is the opening Wi
device, 24 is a TL removal device, 27 is an outlet, 28 is a door, 2
9 is a take-out device, 30 is a cylinder, and 31 is a pedestal.
次に、３２， ３３． ３４は夫々真空チャンバー１、
送入用パージ室１３．取出用バーシ室２６内を真空排気
する為のボンブ、３５は送り装ｆｕｌｌと巻取装ｆｆｉ
２４との間の各所において連続材を支える為のロールを
夫々示す。Next, 32, 33. 34 are vacuum chambers 1,
Inlet purge chamber 13. A bomb is used to evacuate the inside of the take-out Versi chamber 26, and 35 is a feeding device full and a winding device ffi.
Rolls for supporting the continuous material are shown at various locations between 24 and 24.
次に上記Ｉｌ１成の真空炉による連続材の熱処理につい
て説明する。真空チャ冫ハ−１内がボンブ３２によって
真空排気される。従って、送り装置１１と真空加熱室２
と巻取装（ｌ２４とは同条件の真空下におかれろ。連続
材は例えばロールに巻かれた状態：こおいて、扉ｌ５を
開けて速人用ハーン室１３内に搬入され、受台１８の上
に置かれろ。連続材としては銅、アルミニウム、チタン
、ステンレスなとの帯ｔ才あるいは線材がある。１１１
５を閉し・た後バーシ室１３内はボンブ３３によって真
空排気ざれる。次に盾９が間かれ、受台ｌ８が上昇ざれ
て上記ロールに巻かれた状態の連続材：ｉ送り装置１１
に装填ざれる。Next, heat treatment of a continuous material using the above-mentioned Il1 vacuum furnace will be explained. The inside of the vacuum chamber 1 is evacuated by a bomb 32. Therefore, the feeding device 11 and the vacuum heating chamber 2
and the winding device (l24) should be placed under vacuum under the same conditions.The continuous material is wound into a roll, for example.Then, the door l5 is opened and it is carried into the Hearn chamber 13 for fasteners. Place it on the stand 18. Continuous materials include strips or wires of copper, aluminum, titanium, and stainless steel.111
5 is closed, the inside of the versi chamber 13 is evacuated by the bomb 33. Next, the shield 9 is removed, the pedestal l8 is raised, and the continuous material is wound around the roll: i feeding device 11
It is loaded into.
装填後受台１８は下降し扉９が閉しられる。After loading, the cradle 18 is lowered and the door 9 is closed.
次に送り！！ｆｆｉｌｔｌｌから上記連続争才が符号３
６て示す如く真空加熱室２に通され，その先端が巻取Ｂ
ｔｌ ２４に巻かれる。該通板あるいは通線は周知の
手法で行なわれる。上記の状態において加熱手段６が作
動され、連続材３６は送り装置１１から送り出され、真
空加熱室２を通過する過程で所定の加熱を受げ、然る後
巻取装置２４に巻き取られる。尚この作業中において送
入用パージ室１３においては復圧、吹の連続材の搬入、
再減圧が行なわれる。Send it next! ! From ffiltll, the above continuous talent is code 3
6, it is passed through the vacuum heating chamber 2, and its tip is connected to the winding B.
It is wound on tl 24. The board threading or wire threading is performed by a well-known method. In the above state, the heating means 6 is operated, and the continuous material 36 is sent out from the feeding device 11, receives a predetermined heating while passing through the vacuum heating chamber 2, and is then wound up by the winding device 24. During this work, the inlet purge chamber 13 is depressurized, the blown continuous material is brought in,
Re-depressurization is performed.
上記のように連続材３６を真空加熱室２に連続的に通過
させなから１テなう加熱が完了し・て一回の連続ｔオ３
６の全長が巻取装置２４に巻取られてしまうと、予め取
出用ハーノ室２６がボンブ３４によって真空排気ざれた
状態：こおいて１２２が開かれ、受台３１が上昇して加
坤が完了した連続社のロールを受け、取出用バーノ室２
６に降ろされろ。そして＄２２が閉しられろ。その後真
空チャンハ−１及び送入用バーン室１３においては前記
と同様の操作が繰り返される。上記取出用ハーシ室２６
に降ろされた連続材は、それが高４状態で空スに触れる
と酸］ヒされ易いものの場合、その温度が酸化が生し難
くなる例えば２００℃以下になるまて取出用バーン室２
６に置かれる。その１董パージ室２６が復圧され廓２８
が間かれて、熱処理の完了した連続材が搬出される。As mentioned above, since the continuous material 36 is not continuously passed through the vacuum heating chamber 2, one continuous heating period is completed and one continuous heating period is completed.
6 is wound up by the winding device 24, the take-out harness chamber 26 is evacuated by the bomb 34: then the holder 122 is opened, the pedestal 31 is raised, and the load is lifted. Receive the completed continuous roll and take out the burner chamber 2.
Get off at 6. And $22 will be closed. Thereafter, the same operations as described above are repeated in the vacuum chamber 1 and the feeding burn chamber 13. Hershey chamber 26 for taking out the above
If the continuous material unloaded into the burn chamber 2 is easily exposed to acid heat when it comes into contact with the empty gas in the high temperature state, the temperature will be lower than 200°C, where oxidation is difficult to occur.
placed at 6. Part 1: The purge chamber 26 is re-pressurized and the chamber 28
After that, the heat-treated continuous material is transported out.
上記の如き構成の真空炉では真空チャンバー１内を完全
密閉できるので、真空加熱室２の到達真空度は例えばｔ
ｏ−６Ｔｏｒｒ程度の高真空を達成できる。In the vacuum furnace configured as described above, the inside of the vacuum chamber 1 can be completely sealed, so the ultimate vacuum degree of the vacuum heating chamber 2 is, for example, t.
A high vacuum of about o-6 Torr can be achieved.
また本装置は長期間の操業によってもシールに間しての
劣化を生ずる箇所が無いから、上記の如き高真空を長間
に渡って安定に達成できる。尚前記従来構成のものの場
合は真空加熱室の到達真空度：よＩＱ−’Ｔｏｒｒ程度
が限界であった。また長間間の操業によって例えばシー
ルロールに劣化が生ずる可能性がある為、その安定性に
不安があった。本装置では上記の如くそのような限界を
大幅にクリアーし、その上充分な安定性が得られる。Furthermore, since this device does not have any parts where the seal deteriorates even after long-term operation, it is possible to stably achieve the above-mentioned high vacuum over a long period of time. In the case of the conventional structure described above, the ultimate vacuum degree of the vacuum heating chamber was approximately IQ-'Torr. Furthermore, there is a possibility that the seal roll, for example, may deteriorate due to long-term operation, so there are concerns about its stability. As mentioned above, the present device largely overcomes these limitations and also provides sufficient stability.
また上記装置では不良品発生（連続ナ才表面の着色）率
を前記従来の構成のものに比へて大幅に低下させられる
。例えは真空加熱室内がＩＯＴｏｒｒの窒素雰囲気の条
件のもとて処理を行なったところ、前記従来の構成のも
のでは５％の不良品発生があったのに対し・、本装置で
は０．１％以下であった。In addition, the above-mentioned apparatus can significantly reduce the rate of defective products (coloring of the continuous cut surface) compared to the above-mentioned conventional structure. For example, when processing was performed under the condition of IOTorr nitrogen atmosphere in the vacuum heating chamber, 5% of defective products were generated with the conventional configuration, but 0.1% with this device. It was below.
［発明の効果］
以上のように本願発明にあっては、連続材３６を熱処理
する場合、送り装ｌＦｌｌｂ）ら送り出す連続材３６を
真空加熱室２に通し、巻取装置２４て巻取ることによっ
て、連続的に熱処理できる効果があるは勿論のこと、
送り装置１１と真空加熱室２と巻取Ｈ置２４とは同条件
の真空下におくことのできる構成たから、送り装置ｌ１
と真空加熱室２との間においても、また、真空加熱室２
と巻取装置２４との間においても共にノールを必要とせ
ぬ特長がある。このことは、真空加熱室二二おける導入
口と導出口とにおいて夫々ンール装置を必要としていた
前記従来技術のものては、それらの場所においてンール
装置により連続けに傷が１寸く可能性があったのに対し
、本願発明て：ｉそのような可能性を固より排除する二
とかできて、良質の製品の提供を可能にてきる効果があ
る。[Effects of the Invention] As described above, in the present invention, when heat treating the continuous material 36, the continuous material 36 fed from the feeding device 1Fllb) is passed through the vacuum heating chamber 2 and wound up by the winding device 24. Not only does it have the effect of allowing continuous heat treatment, but also the feeding device 11, the vacuum heating chamber 2, and the winding place 24 can be placed under vacuum under the same conditions.
Also between the vacuum heating chamber 2 and the vacuum heating chamber 2
Also, there is no need for a knurl between the winding device 24 and the winding device 24. This means that in the conventional technology described above, which requires a coil device at each of the inlet and outlet of the vacuum heating chamber 22, there is a possibility that the coil device will cause continuous scratches at those locations. However, the present invention has the effect of firmly eliminating such a possibility and making it possible to provide high-quality products.
ざらに本願発明にあって取出用パージ室２６を設けた場
合には、次の連続材を上記の如く連続的に熱処理する作
業を継続させたままで、上記のような熱処理を終えた連
続材を取出用パージ室において体ませることによって、
それを酸化が起きない７二度まで充分に低温１ヒさせる
ことができ、能率良くシ・かも製品の酸化をもたらす二
となく熱処理作業を進められる効果がある。Roughly speaking, in the case where the removal purge chamber 26 is provided in the present invention, the continuous material that has been heat-treated as described above can be removed while continuing the work of continuously heat-treating the next continuous material as described above. By placing it in the removal purge chamber,
It is possible to heat the product at a sufficiently low temperature of 7 degrees Celsius, at which no oxidation occurs, and it has the effect of efficiently proceeding with the heat treatment work, which brings about oxidation of the product.
図面は本願の実施例を示すもので、第１図は縦断面図。
１・・・包囲璧、２・・・真空加熱室、１１・・・送り
装置、２４・・・巻取装置。The drawings show an embodiment of the present application, and FIG. 1 is a longitudinal sectional view. DESCRIPTION OF SYMBOLS 1... Surrounding wall, 2... Vacuum heating chamber, 11... Feeding device, 24... Winding device.
Claims (1)
備えている真空加熱室には、連続材の導入口と連続材の
導出口とを備えさせ、更に導入口の前段側には連続材の
送り装置を配設し、導出口の後段側には連続材の巻取装
置を配設している真空炉において、上記真空加熱室、送
り装置及び巻取装置は、送り装置から真空加熱室への連
続材の移動及び真空加熱室から巻取装置への連続材の移
動をいずれも同条件の真空下で行ない得るようにする為
の包囲壁で包囲したことを特徴とする真空炉。 ２、包囲壁において送り装置を包囲する前包囲壁には送
入用パージ室を連設し、巻取装置を包囲する後包囲壁に
は取出用パージ室を連設したことを特徴とする請求項１
記載の真空炉。[Claims] 1. A vacuum heating chamber equipped with a heating means for heating the continuous material passing through the chamber is provided with an inlet for the continuous material and an outlet for the continuous material, and further includes an inlet for the continuous material and an outlet for the continuous material. In a vacuum furnace, a continuous material feeding device is disposed on the front side of the outlet, and a continuous material winding device is disposed on the downstream side of the outlet. , the continuous material is surrounded by an enclosing wall so that the movement of the continuous material from the feeding device to the vacuum heating chamber and the movement of the continuous material from the vacuum heating chamber to the winding device can be carried out under the same vacuum conditions. Characteristic vacuum furnace. 2. A claim characterized in that in the surrounding wall, a feeding purge chamber is connected to the front surrounding wall that surrounds the feeding device, and a take-out purge chamber is connected to the rear surrounding wall that surrounds the winding device. Item 1
Vacuum furnace as described.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP137690A JPH03207811A (en) | 1990-01-08 | 1990-01-08 | Vacuum furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP137690A JPH03207811A (en) | 1990-01-08 | 1990-01-08 | Vacuum furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03207811A true JPH03207811A (en) | 1991-09-11 |
Family
ID=11499768
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP137690A Pending JPH03207811A (en) | 1990-01-08 | 1990-01-08 | Vacuum furnace |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03207811A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104204232A (en) * | 2012-03-28 | 2014-12-10 | 中央发条株式会社 | Heating device and heating method |
| WO2021106439A1 (en) * | 2019-11-27 | 2021-06-03 | 株式会社神戸製鋼所 | Vacuum heat treatment device for foil base materials and heat treatment method for foil base materials |
-
1990
- 1990-01-08 JP JP137690A patent/JPH03207811A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104204232A (en) * | 2012-03-28 | 2014-12-10 | 中央发条株式会社 | Heating device and heating method |
| WO2021106439A1 (en) * | 2019-11-27 | 2021-06-03 | 株式会社神戸製鋼所 | Vacuum heat treatment device for foil base materials and heat treatment method for foil base materials |
| JP2021085066A (en) * | 2019-11-27 | 2021-06-03 | 株式会社神戸製鋼所 | Vacuum heat treatment apparatus for foil base material and heat treatment method for foil base material |
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