JPH03200109A - Lens with metal frame - Google Patents
Lens with metal frameInfo
- Publication number
- JPH03200109A JPH03200109A JP33810689A JP33810689A JPH03200109A JP H03200109 A JPH03200109 A JP H03200109A JP 33810689 A JP33810689 A JP 33810689A JP 33810689 A JP33810689 A JP 33810689A JP H03200109 A JPH03200109 A JP H03200109A
- Authority
- JP
- Japan
- Prior art keywords
- lens
- metal frame
- pieces
- rings
- balls
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 title claims abstract description 48
- 230000003287 optical effect Effects 0.000 abstract description 12
- 238000003754 machining Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 5
- 238000000227 grinding Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000004323 axial length Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000007822 coupling agent Substances 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000003801 milling Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Lens Barrels (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
本発明は、比較的大形の組立レンズに用いられる金枠付
レンズに関するもので、より詳しくは半導体デバイス露
光装置に用いることのできる投影レンズ用金枠付レンズ
に関するものである。Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a lens with a metal frame used in a relatively large assembled lens, and more specifically to a projection lens that can be used in a semiconductor device exposure apparatus. This invention relates to a lens with a metal frame.
(従来の技術)
半導体デバイス用露光装置に用いる投影レンズには極め
て収差の小さいことが要求されるので、20枚程度の球
面レンズで構成されたものが多く、レンズ球面の精度と
してλ/20程度が要求されるとともに、各レンズの光
軸からのずれであるチルト、シフトおよびレンズ相互の
間隔の誤差を数μm以内におさえる高い組立精度が要求
される。(Prior art) Projection lenses used in exposure equipment for semiconductor devices are required to have extremely small aberrations, so they are often composed of about 20 spherical lenses, and the accuracy of the lens spherical surface is about λ/20. In addition, high assembly accuracy is required to suppress errors in tilt and shift, which are the deviations of each lens from the optical axis, and in the distance between the lenses to within several μm.
従来、複数のレンズを光軸を合致させるように組立てる
方法には、例えば第3図に示す部分断面図の方法がある
。鏡筒3にはレンズ球面外周部を受ける段差30を設け
これにレンズ1をリング状押しねじ4で締付ける。この
方法では、レンズ1の嵌込みが可能なようにレンズ外周
円筒面1cと鏡筒内面34の間に隙間をもたせ、レンズ
1自身の両側の球面1a、lbによる案内効果、即ち段
差エツジ30aと押しねじのエツジ4aの間隔が最少に
なるよう固定される。この場合には、m筒内径部の段差
加工の精度はあまり高く加工できないので、押しねじで
強く締めるとレンズ球面1a。Conventionally, as a method for assembling a plurality of lenses so that their optical axes coincide with each other, there is, for example, a method shown in a partial cross-sectional view shown in FIG. The lens barrel 3 is provided with a step 30 for receiving the spherical outer circumferential portion of the lens, and the lens 1 is tightened thereon with a ring-shaped set screw 4. In this method, a gap is provided between the lens outer circumferential cylindrical surface 1c and the lens barrel inner surface 34 so that the lens 1 can be fitted, and the guiding effect by the spherical surfaces 1a and lb on both sides of the lens 1 itself, that is, the step edge 30a. The set screw edges 4a are fixed so that the distance between them is minimized. In this case, the accuracy of machining the step on the inner diameter part of the m cylinder cannot be very high, so if you tighten it strongly with the set screw, the lens spherical surface 1a will be formed.
コbと段差エツジ30aとの接触の不均一のためレンズ
]が歪む問題がある。締めか弱すぎるとレンズ球面1.
a、lbと段差エツジ30aと押しねじのエツジ4aと
のJ9擦のため正しい位置に位置決めされない。上記の
従来方法に代わる従来の第2の方法は、第4図に部分断
面図を示すように、図5に示ずような金枠付レンズAを
鏡筒3の内面34に密接に嵌合する方法がある。この場
合レンズ1は金枠5内に接管剤51で固定され、この状
況で金枠5の外周円筒面22はレンズ1の光軸]00に
対して真円に、端面23,24は垂直になるようまたそ
の外径が鏡筒3の内径より極僅か小さくなるように追加
工し、鏡筒3の内径に嵌合させて組立てる方法である。There is a problem that the lens is distorted due to non-uniform contact between the cover b and the stepped edge 30a. If the tightening is too weak, the spherical surface of the lens 1.
Due to the J9 friction between a and lb, the step edge 30a, and the push screw edge 4a, it cannot be positioned at the correct position. A second conventional method, which replaces the above-mentioned conventional method, is to closely fit a lens A with a metal frame as shown in FIG. There is a way to do it. In this case, the lens 1 is fixed in the metal frame 5 with a coupling agent 51, and in this situation, the outer cylindrical surface 22 of the metal frame 5 is perfectly circular with respect to the optical axis ]00 of the lens 1, and the end surfaces 23 and 24 are perpendicular. In this method, additional machining is performed so that the outer diameter of the lens barrel 3 is slightly smaller than the inner diameter of the lens barrel 3, and the lens barrel 3 is fitted into the inner diameter of the lens barrel 3 to be assembled.
隣接するレンズとの間隔は間隔環71.72で位置決め
する。この場合には接着剤51の熱変形によるレンズ位
置の変位と、金伜付レンズの鏡筒内への組込み作業の困
難が問題である。The distance between adjacent lenses is determined by spacing rings 71 and 72. In this case, problems include displacement of the lens position due to thermal deformation of the adhesive 51 and difficulty in assembling the metal lens into the lens barrel.
(発明が解決しようとする課題)
本発明の目的は高い組立精度を有し追加工を必要とせず
さらに分解再組立容品の金枠付レンズを提(!(するこ
とにある。(Problems to be Solved by the Invention) An object of the present invention is to provide a lens with a metal frame that has high assembly accuracy, does not require additional machining, and can be disassembled and reassembled.
(課題を解決するための手段)
本発明は、レンズと保持金枠とを一体的に組立てた金枠
付レンズにおいて、円板状レンズとこれに隙間をもって
はめ合う内外円筒を極めて高い真円度同心度に仕上げら
れ、それら円筒母線と垂直な両端面を有する金枠と、該
金枠に内接嵌合し前記レンズ球面を挟むように配置され
た矩形断面と平行な端面をもつ2個のリングと、該リン
グの端面と前記レンズ球面と前記金枠内円筒の王者に接
するように配置された少なくとも3個以上を1組となす
等径の球2組と、前記レンズと前記2個のJングと前記
2組の球とを挟みつけるように前記金枠の両端面に固定
された2個の中空円板とを一体化してなることを特徴と
する金枠付レンズである。(Means for Solving the Problems) The present invention provides a lens with a metal frame in which a lens and a holding metal frame are integrally assembled, in which a disc-shaped lens and inner and outer cylinders that fit into the lens with a gap have extremely high roundness. A metal frame finished concentrically and having both end faces perpendicular to the cylindrical generatrix, and two metal frames having end faces parallel to a rectangular cross section that are internally fitted into the metal frame and arranged to sandwich the lens spherical surface. a ring, two sets of equal diameter balls each consisting of at least three balls arranged so as to be in contact with the end face of the ring, the spherical surface of the lens, and the king of the cylinder within the metal frame; the lens and the two balls; This is a lens with a metal frame, characterized in that it is formed by integrating two hollow discs fixed to both end surfaces of the metal frame so as to sandwich the two sets of balls.
(作用)
本発明の金枠付レンズは、同一平面上に円状に配置され
た等径複数の球に接するようにレンズ球面を置けば上記
内の中心の垂線は、その点におけるレンズ球面の垂線と
合致するということから、レンズ球面の両面において同
時に成立つように構成したもので、高精度加工の容易な
球体、直円筒の部品を組合せ、組立後の追加工なしにレ
ンズ光軸、!:全金枠軸心とを合致させることが可能と
なる。(Function) In the lens with a metal frame of the present invention, if the lens spherical surface is placed so as to touch a plurality of spheres of equal diameter arranged circularly on the same plane, the perpendicular line at the center of the above will be the same as that of the lens spherical surface at that point. Since it coincides with the perpendicular line, it is constructed so that both sides of the lens's spherical surface can be formed at the same time, and by combining spherical and right cylindrical parts that can be easily machined with high precision, the optical axis of the lens can be set without any additional machining after assembly! : It is possible to match the axis of the all-metal frame.
(実1i!1例)
第1図は本発明の実施例を示す図である。端面fN50
4をねじ506によって外円筒501に締結し、その中
に矩形断面をもつリング502を挿入する。リング50
2の上に3ヶ以上の球体511を配置しレンズ1を載せ
、その上に球体512゜リング503.端面板505を
載せ、端面板505が端面板504と平行になるように
固定する。(Actual 1i! 1 Example) FIG. 1 is a diagram showing an embodiment of the present invention. End face fN50
4 is fastened to the outer cylinder 501 with a screw 506, and a ring 502 with a rectangular cross section is inserted therein. ring 50
2, three or more spheres 511 are placed on top of the lens 1, and a sphere 512 and a ring 503 are placed on top of the lens 1. The end plate 505 is placed and fixed so that the end plate 505 is parallel to the end plate 504.
第2図に、高精度組立が可能である原理について説明す
る。第2図において外円筒501の内径は極めて真円度
が良く、平面板504の上に置かれた両端面平行平面リ
ング502の上端面上にあり、外円筒501の内径に接
する球511(少なくとも円周上に3個以上均等配置さ
れている)とレンズ1の球面1aが接する場合、外円筒
501の中心線101と球面1aはこの部分で垂直に交
わる。しかし、レンズ外周は一般に必ずしも光軸を中心
として加工されておらず、くさびと呼ばれる円周方向に
沿った厚さの偏りをもっているため光軸は図の102に
ずれている。このことは、レンズ球面1bの外周部に外
円筒501の内径に接するように均等に配置いた少なく
とも3個以上の球体512の上に平行平面リング503
の基準而からの高さを測定することによって、All+
ll所定との高さの差(傾き)として知ることができる
。FIG. 2 explains the principle by which high-precision assembly is possible. In FIG. 2, the inner diameter of the outer cylinder 501 has a very good roundness, and the ball 511 (at least When the spherical surface 1a of the lens 1 contacts the spherical surface 1a of the lens 1, the center line 101 of the outer cylinder 501 and the spherical surface 1a intersect perpendicularly at this portion. However, the outer periphery of the lens is generally not necessarily processed around the optical axis, but has a thickness deviation along the circumferential direction called a wedge, so the optical axis is shifted to 102 in the figure. This means that the parallel plane ring 503 is placed on at least three or more spheres 512 evenly arranged on the outer circumference of the lens spherical surface 1b so as to be in contact with the inner diameter of the outer cylinder 501.
By measuring the height from the reference point, All+
It can be known as the difference (inclination) in height from a predetermined height.
そこで、この高さの差が生じないようにレンズまたけを
外円筒501の内部で横移動(第2図の場合にはレンズ
を左方へ)させることによって調整し外円筒の中心軸1
01とレンズの光軸(レンズ1の球面1aと1bのそれ
ぞれの中心を結ぶ線)〕02を合致させることができる
。輔101は、内外径同心精度をよく仕上げであるので
、外円筒501の内径の軸であると同時に外径の軸でも
ある。したがって、レンズ]は組立の基僧面である外円
筒5の外径および端面に対し正しい位置に組込まれたこ
とになる。第1図は、この完成図である。なお、レンズ
の軸方向の押え代は、第2図において外円筒501およ
びリング503の高さの差をapl定して知ることがで
き、これら両者のいずれかを追加工して寸法を減少させ
ることにより調整することができる。押し代は大きすぎ
るとレンズの破損や歪みを生じ、O以下ではガタを生じ
てレンズがずれるため、適宜に設定しなければならない
。このことは、分解1部品追加工、再組立のサイクルに
よって容易に実施することが可能である。Therefore, in order to avoid this difference in height, the lens straddle is adjusted by moving the lens laterally inside the outer cylinder 501 (in the case of Fig. 2, the lens is moved to the left).
01 and the optical axis of the lens (the line connecting the centers of the spherical surfaces 1a and 1b of the lens 1)]02 can be made to match. Since the support 101 is finished with good concentric precision of the inner and outer diameters, it serves as the axis of the inner diameter of the outer cylinder 501 as well as the axis of the outer diameter. Therefore, the lens is assembled in the correct position relative to the outer diameter and end surface of the outer cylinder 5, which is the base surface for assembly. Figure 1 shows this completed diagram. Note that the pressing allowance in the axial direction of the lens can be determined by determining the height difference between the outer cylinder 501 and the ring 503 in FIG. 2, and the dimension can be reduced by additionally machining one of these two. It can be adjusted by If the pushing distance is too large, the lens will be damaged or distorted, and if it is less than 0, play will occur and the lens will shift, so it must be set appropriately. This can be easily accomplished through a cycle of disassembly, additional machining of one part, and reassembly.
以下、これらの部の加工精度について述べる。The machining accuracy of these parts will be described below.
外円筒501は内・外径を高い同心度と真円度に仕上げ
られその両端面は円筒軸心に垂直に平行平面加工されて
いる。単純な直円筒であり直径が比較的大きく軸方向長
さが短いので、例えば円筒1[削で外径を、内面研削で
内径を高い真円度で仕上げ加工することができる。両端
面の平行平面は研削、ラッピングによって仕上げること
が可能である。リング502,503も薄肉ながら外円
筒501と同じ形状をしており加工が容易である。この
リング502,503では、内外径の同心度。The outer cylinder 501 has inner and outer diameters finished with high concentricity and roundness, and both end faces are machined to be parallel planes perpendicular to the cylinder axis. Since it is a simple right cylinder with a relatively large diameter and short axial length, the outer diameter of the cylinder can be finished by milling, and the inner diameter can be finished with high roundness by internal grinding. The parallel planes on both end faces can be finished by grinding or lapping. Although the rings 502 and 503 are thin, they have the same shape as the outer cylinder 501 and are easy to process. In these rings 502 and 503, the concentricity of the inner and outer diameters.
真円度については特段の高精度は必要とせず、両端面の
高い平面度、平行度を必要とする。この特段に高い精度
を必要とする平行平面については、外円筒501と同じ
研削、ラッピングによって達成できる。端面板504,
505についても特段精度を必要とするのは、両面の平
行平面であって、研削、ラッピングによって実現できる
。球体5]1.5]2はたとえば転がり軸受は用鋼球で
あって、直径寸法のばらつき、真球度はサブミクロンで
ある。また、レンズ球面1.a、1.bはもとよりλ/
20の精度に研磨された高精度面である。しかしながら
、レンズ外周面は必ずしも光軸を中心として正しく加工
されている必要はない。Regarding the roundness, a particularly high precision is not required, but high flatness and parallelism of both end faces are required. This parallel plane, which requires particularly high precision, can be achieved by the same grinding and lapping as the outer cylinder 501. end plate 504,
505 also requires special precision because it has parallel planes on both sides, which can be achieved by grinding or lapping. The spheres 5]1.5]2 are, for example, steel balls for use in rolling bearings, and have submicron diameter variations and sphericity. In addition, lens spherical surface 1. a.1. Not only b but also λ/
It is a high-precision surface polished to an accuracy of .20. However, the outer circumferential surface of the lens does not necessarily have to be processed correctly around the optical axis.
(発明の効果)
以上述べたように、本発明によれば、外周が必ずしも光
軸を中心とする真円加工が行われていないレンズであっ
ても、その両面の球面外周部を基中とした金枠中心とレ
ンズ光軸の合致精度の高い金枠付レンズを得ることがで
きる。金枠に組立後は追加工は不要である。レンズ押え
の強弱は分解した部品個片(外円筒またはリング)の追
加工によって適宜調整できるので、レンズの破損の危険
がなく、洗浄の必要もない。この金枠付レンズを第6図
に示すように鏡枠との間に球体を介して組立てれば高精
度の組立レンズを得ることができる。(Effects of the Invention) As described above, according to the present invention, even if the outer periphery of the lens is not necessarily rounded around the optical axis, the spherical outer periphery of both surfaces can be used as the base. It is possible to obtain a lens with a metal frame in which the center of the metal frame and the lens optical axis are aligned with high accuracy. No additional work is required after assembly to the metal frame. The strength of the lens holder can be adjusted as appropriate by additional machining of the disassembled individual parts (outer cylinder or ring), so there is no risk of lens damage and there is no need for cleaning. If this lens with a metal frame is assembled with a lens frame via a sphere as shown in FIG. 6, a highly accurate assembled lens can be obtained.
第1図は本発明の金枠付レンズの実施例を示す断面図で
ある。
第2図は本発明の金枠付レンズの組立精度の原理を説明
した図である
第3図、第4図は従来の組立レンズの部品を示す断面図
である。
第5図は従来の金枠付レンズを示す断面図である。
第6図は本発明の金枠付レンズを用いて組み立てた組立
レンズの部分を示す断面図である。
1・・・レンズ
la、’lb・・・レンズ球面
IC・・・レンズ外周円筒面
3・・・鏡筒
4・・・リング状押しねじ
4a・・・押しねじのエツジ
5・・・金枠
5a、5b・・・金枠平坦部
21・・・金枠の段差エッジ
22・・・金枠外周円筒面
23.24・・・金枠端面
30・・・鏡筒内面の段差
30a・・・段差エツジ
34・・・鏡筒内面
51・・・接着剤
61〜63・・・球体
71〜73・・・間隔環
100〜102・・・光軸
101・・・外円筒の軸心
501・・・外円筒
502.503・・・リング
504.505・・・端面板
506.507・・・ねじ
51]、512・・・球体FIG. 1 is a sectional view showing an embodiment of the lens with a metal frame of the present invention. FIG. 2 is a diagram illustrating the principle of assembly accuracy of the lens with a metal frame of the present invention. FIGS. 3 and 4 are sectional views showing parts of a conventional assembled lens. FIG. 5 is a sectional view showing a conventional lens with a metal frame. FIG. 6 is a sectional view showing a portion of an assembled lens assembled using the lens with a metal frame of the present invention. 1... Lens la, 'lb... Lens spherical surface IC... Lens outer periphery cylindrical surface 3... Lens barrel 4... Ring-shaped push screw 4a... Push screw edge 5... Metal frame 5a, 5b...metal frame flat part 21...metal frame step edge 22...metal frame outer cylindrical surface 23.24...metal frame end face 30...lens barrel inner surface level difference 30a... Step edge 34... Lens barrel inner surface 51... Adhesive 61-63... Spheres 71-73... Spacing rings 100-102... Optical axis 101... Outer cylinder axis 501...・Outer cylinder 502.503...Ring 504.505...End plate 506.507...Screw 51], 512...Sphere
Claims (1)
ンズにおいて、円板状レンズとこれに隙間をもってはめ
合う内外円筒を極めて高い真円度同心度に仕上げられ、
それら円筒母線と垂直な両端面を有する金枠と、該金枠
に内接嵌合し前記レンズ球面を挟むように配置された矩
形断面と平行な端面をもつ2個のリングと、該リングの
端面と前記レンズ球面と前記金枠内円筒の三者に接する
ように配置された少なくとも3個以上を1組となす等径
の球2組と、前記レンズと前記2個のリングと前記2組
の球とを挟みつけるように前記金枠の両端面に固定され
た2個の中空円板とを一体化してなることを特徴とする
金枠付レンズ。(1) In a lens with a metal frame in which the lens and the holding metal frame are integrally assembled, the disc-shaped lens and the inner and outer cylinders that fit into the lens with a gap are finished with extremely high roundness and concentricity,
A metal frame having both end surfaces perpendicular to the cylinder generatrix, two rings having end surfaces parallel to a rectangular cross section that are internally fitted into the metal frame and arranged to sandwich the lens spherical surface; two sets of equal-diameter balls each consisting of at least three balls arranged so as to be in contact with the end face, the spherical surface of the lens, and the cylinder within the metal frame; the lens, the two rings, and the two sets; A lens with a metal frame, characterized in that it is formed by integrating two hollow disks fixed to both end surfaces of the metal frame so as to sandwich the sphere between the metal frame and the metal frame.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33810689A JPH03200109A (en) | 1989-12-28 | 1989-12-28 | Lens with metal frame |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP33810689A JPH03200109A (en) | 1989-12-28 | 1989-12-28 | Lens with metal frame |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03200109A true JPH03200109A (en) | 1991-09-02 |
Family
ID=18314971
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP33810689A Pending JPH03200109A (en) | 1989-12-28 | 1989-12-28 | Lens with metal frame |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03200109A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013116006A1 (en) * | 2012-01-31 | 2013-08-08 | Siemens Energy, Inc. | System and method for online inspection of turbines including temperature and vibration compensating lens mount |
US9217852B2 (en) | 2012-01-31 | 2015-12-22 | Siemens Energy, Inc. | System and method for online inspection of turbines using an optical tube with broadspectrum mirrors |
US9366855B2 (en) | 2012-01-31 | 2016-06-14 | Siemens Energy, Inc. | System and method for online inspection of turbines including temperature and vibration compensating lens mount |
-
1989
- 1989-12-28 JP JP33810689A patent/JPH03200109A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2013116006A1 (en) * | 2012-01-31 | 2013-08-08 | Siemens Energy, Inc. | System and method for online inspection of turbines including temperature and vibration compensating lens mount |
CN104204885A (en) * | 2012-01-31 | 2014-12-10 | 西门子能量股份有限公司 | System and method for online inspection of turbines including temperature and vibration compensating lens mount |
US9217852B2 (en) | 2012-01-31 | 2015-12-22 | Siemens Energy, Inc. | System and method for online inspection of turbines using an optical tube with broadspectrum mirrors |
US9366855B2 (en) | 2012-01-31 | 2016-06-14 | Siemens Energy, Inc. | System and method for online inspection of turbines including temperature and vibration compensating lens mount |
CN104204885B (en) * | 2012-01-31 | 2017-09-29 | 西门子能量股份有限公司 | Include temperature and the system and method for vibration compensation lenses bearing for on-line checking turbine |
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