JPH0319456B2 - - Google Patents
Info
- Publication number
- JPH0319456B2 JPH0319456B2 JP61046808A JP4680886A JPH0319456B2 JP H0319456 B2 JPH0319456 B2 JP H0319456B2 JP 61046808 A JP61046808 A JP 61046808A JP 4680886 A JP4680886 A JP 4680886A JP H0319456 B2 JPH0319456 B2 JP H0319456B2
- Authority
- JP
- Japan
- Prior art keywords
- space
- clean
- unit
- clean unit
- cleanliness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003749 cleanliness Effects 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 description 27
- 238000005192 partition Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 239000003566 sealing material Substances 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/163—Clean air work stations, i.e. selected areas within a space which filtered air is passed
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F24—HEATING; RANGES; VENTILATING
- F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
- F24F3/00—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems
- F24F3/12—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling
- F24F3/16—Air-conditioning systems in which conditioned primary air is supplied from one or more central stations to distributing units in the rooms or spaces where it may receive secondary treatment; Apparatus specially designed for such systems characterised by the treatment of the air otherwise than by heating and cooling by purification, e.g. by filtering; by sterilisation; by ozonisation
- F24F3/167—Clean rooms, i.e. enclosed spaces in which a uniform flow of filtered air is distributed
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61046808A JPS62202949A (ja) | 1986-03-03 | 1986-03-03 | クリ−ンユニツトの拡張方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP61046808A JPS62202949A (ja) | 1986-03-03 | 1986-03-03 | クリ−ンユニツトの拡張方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62202949A JPS62202949A (ja) | 1987-09-07 |
JPH0319456B2 true JPH0319456B2 (fr) | 1991-03-15 |
Family
ID=12757629
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP61046808A Granted JPS62202949A (ja) | 1986-03-03 | 1986-03-03 | クリ−ンユニツトの拡張方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62202949A (fr) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6668565B1 (en) | 2002-04-12 | 2003-12-30 | American Power Conversion | Rack-mounted equipment cooling |
US7046514B2 (en) | 2003-03-19 | 2006-05-16 | American Power Conversion Corporation | Data center cooling |
US6859366B2 (en) | 2003-03-19 | 2005-02-22 | American Power Conversion | Data center cooling system |
US7259963B2 (en) | 2004-12-29 | 2007-08-21 | American Power Conversion Corp. | Rack height cooling |
US7841199B2 (en) | 2005-05-17 | 2010-11-30 | American Power Conversion Corporation | Cold aisle isolation |
WO2009054116A1 (fr) * | 2007-10-26 | 2009-04-30 | Panasonic Corporation | Salle blanche |
-
1986
- 1986-03-03 JP JP61046808A patent/JPS62202949A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS62202949A (ja) | 1987-09-07 |
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