JPH0318029U - - Google Patents
Info
- Publication number
- JPH0318029U JPH0318029U JP7735589U JP7735589U JPH0318029U JP H0318029 U JPH0318029 U JP H0318029U JP 7735589 U JP7735589 U JP 7735589U JP 7735589 U JP7735589 U JP 7735589U JP H0318029 U JPH0318029 U JP H0318029U
- Authority
- JP
- Japan
- Prior art keywords
- rail
- substrate
- transfer device
- substrate transfer
- fixing pin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 11
Landscapes
- Framework For Endless Conveyors (AREA)
Description
第１図Ａは本考案の基板搬送装置を示す断面図
、第１図Ｂは本考案の基板搬送装置を示す要部斜
視図、第２図は本考案の基板搬送装置の動作を示
す側面図、第３図は従来の基板搬送を示す斜視図
である。
１……基板搬送装置、１１……第１のレール（
基板搬送レール）、１２……第２のレール（基板
固定ピン搬送レール）、１３……基板固定ピン。
FIG. 1A is a cross-sectional view showing the substrate transfer device of the present invention, FIG. 1B is a perspective view of essential parts of the substrate transfer device of the present invention, and FIG. 2 is a side view showing the operation of the substrate transfer device of the present invention. , FIG. 3 is a perspective view showing conventional substrate conveyance. 1... Board transfer device, 11... First rail (
board transfer rail), 12... second rail (board fixing pin transfer rail), 13... board fixing pin.
Claims (1)
２本の第１のレールと、 この第１のレールと同方向に配置した第２のレ
ールと、 一端がこの第２のレールに搬送可能に設けられ
、他端は前記基板を両面より固定する基板固定ピ
ンとを具備することを特徴とする基板搬送装置。 (2) 前記第１のレールは基板搬送レールであり
、前記第２のレールは基板固定ピン搬送レールで
あることを特徴とする請求項１記載の基板搬送装
置。[Claims for Utility Model Registration] (1) At least two first rails parallel to each other for conveying a board, a second rail arranged in the same direction as the first rail, and one end of which 1. A substrate transfer device, characterized in that the substrate transfer device is provided on two rails so as to be transferable, and the other end is provided with a substrate fixing pin for fixing the substrate from both sides. (2) The substrate transfer device according to claim 1, wherein the first rail is a substrate transfer rail, and the second rail is a substrate fixing pin transfer rail.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7735589U JPH0318029U (en) | 1989-06-30 | 1989-06-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7735589U JPH0318029U (en) | 1989-06-30 | 1989-06-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0318029U true JPH0318029U (en) | 1991-02-22 |
Family
ID=31619665
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7735589U Pending JPH0318029U (en) | 1989-06-30 | 1989-06-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0318029U (en) |
-
1989
- 1989-06-30 JP JP7735589U patent/JPH0318029U/ja active Pending
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