JPH0316417A - Pulse generator - Google Patents
Pulse generatorInfo
- Publication number
- JPH0316417A JPH0316417A JP15193889A JP15193889A JPH0316417A JP H0316417 A JPH0316417 A JP H0316417A JP 15193889 A JP15193889 A JP 15193889A JP 15193889 A JP15193889 A JP 15193889A JP H0316417 A JPH0316417 A JP H0316417A
- Authority
- JP
- Japan
- Prior art keywords
- current
- capacitance
- discharge tube
- discharge
- switch means
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000003990 capacitor Substances 0.000 claims abstract description 26
- 206010011878 Deafness Diseases 0.000 abstract 1
- 238000007599 discharging Methods 0.000 description 12
- 238000010586 diagram Methods 0.000 description 6
- 239000007787 solid Substances 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
- Generation Of Surge Voltage And Current (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は例えばパルスレーザー等に使用されるパルス
発生装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a pulse generator used in, for example, a pulse laser.
第６図は，例えばコツパ バッポア レーザスカム オ
ブエージイ（Ｃ：ＯＰＰＥＲ ＶＡＰＯＲ ＬＡＳ
ＥＲＳ ＣＯＭＥ ＯＦ ＡＧＥ）レーザ フォ
ーカス ジュライ １９８２（ＬＡＳＥＲ ＦＯＣＵ
Ｓ，ＪＵＬＹ，１９８２）に記載された従来の銅蒸気レ
ーザ用のパルス発生装置を示す図であり、第６図におい
て、１は高圧電源、２は充電用リアクトル、３は充電用
ダイオード，４は充放電を行う主コンデンサ、５は充電
用抵抗，６はサイラトロンスイッチ，７はガス放電によ
って内部に収容した金属（例えば銅〉を加熱、気化させ
てレーザ出力を得る放電管（レーザＴＵＢＥ）である。Figure 6 shows, for example, OPPER VAPOR LAS
ERS COME OF AGE) Laser Focus July 1982 (LASER FOCU
6 is a diagram showing a conventional pulse generator for a copper vapor laser described in J.S., JULY, 1982). In FIG. 6, 1 is a high-voltage power supply, 2 is a charging reactor, 3 is a charging diode, and 4 is a The main capacitor for charging and discharging, 5 is a charging resistor, 6 is a thyratron switch, and 7 is a discharge tube (laser TUBE) that heats and vaporizes the metal (e.g., copper) housed inside by gas discharge to obtain laser output. .
次に動作について説明する。高圧電源ｌから発生される
高圧電圧（数ＫＶ〜数＋ＫＶ）は，リアクトル２、ダイ
オード３、充電用抵抗５を介してコンデンサ４に充電さ
れる。Next, the operation will be explained. A high voltage (several KV to several +KV) generated from a high voltage power supply 1 is charged to a capacitor 4 via a reactor 2, a diode 3, and a charging resistor 5.
この充電状態において、サイラトロンスイッチ６が導通
すると、主コンデンサ４に蓄えられていた電荷は、サイ
ラトロンスイッチ６を通り放電管７に印加され、放電管
７の中にガス放電を形或する．その際、放電管７のイン
ピーダンスは充電用抵抗５の抵抗値より大幅に小さくな
るため、サイラトロンスイッチ６に流れる電流ｉは主と
して放電管７に流れることで、放電管７は励起されてレ
ーザ発振を生ずる．
〔発明が解決しようとする課題〕
従来のパルス発生装置は以上のように構成されているの
で、放電管７に流れる電流波形は，コンデンサ４，放電
管７のインピーダンスおよび放電回路のインダクタンス
により決定される。そのため、一般的には第７図に示さ
れるような山なりの波形となり、レーザ効率を向上させ
るための電流波形の選択が不可能であるという問題点が
あった。In this charged state, when the thyratron switch 6 is turned on, the charge stored in the main capacitor 4 passes through the thyratron switch 6 and is applied to the discharge tube 7, forming a gas discharge in the discharge tube 7. At this time, the impedance of the discharge tube 7 becomes significantly smaller than the resistance value of the charging resistor 5, so the current i flowing through the thyratron switch 6 mainly flows through the discharge tube 7, and the discharge tube 7 is excited to emit laser oscillation. arise. [Problems to be Solved by the Invention] Since the conventional pulse generator is configured as described above, the current waveform flowing through the discharge tube 7 is determined by the impedance of the capacitor 4 and the discharge tube 7, and the inductance of the discharge circuit. Ru. Therefore, the current waveform generally becomes a mountain as shown in FIG. 7, and there is a problem in that it is impossible to select a current waveform to improve laser efficiency.
この発明は上記のような問題点を解消するためになされ
たもので、任意の電流波形を選択できるパルス発生装置
を得ることを目的とする。The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a pulse generator capable of selecting an arbitrary current waveform.
〔課題を解決するための手段〕
この発明に係るパルス発生装置は、多数の固体スイッチ
ング素子を直並列接続して構成したスイッチ手段および
インダクタンスを介して放電管に並列接続した複数の充
放電コンデンサと、クロック信号を受けて所定時期に前
記スイッチ手段に導通信号を供給するように該スイッチ
手段のそれぞれに対応して設けられた複数の遅延回路と
、前記各充放電コンデンサを異なる電圧に充電するよう
に該充放電コンデンサのそれぞれに対応して設けられた
複数の高圧電源とを具備したものである。[Means for Solving the Problems] A pulse generator according to the present invention includes a switch means configured by connecting a large number of solid state switching elements in series and parallel, and a plurality of charging/discharging capacitors connected in parallel to a discharge tube via an inductance. , a plurality of delay circuits provided corresponding to each of the switch means so as to receive a clock signal and supply a conductive signal to the switch means at a predetermined time; and a plurality of high voltage power supplies provided corresponding to each of the charge/discharge capacitors.
この発明におけるスイッチ手段は、多数の固体スイッチ
ング素子を直並列接続して構戊したことにより、回路を
急峻に開閉することができる。そして、その複数のスイ
ッチ手段の導通タイミングをそれぞれ対応する遅延回路
で独立に制御することにより、各スイッチ手段と接続さ
れた複数の充放電コンデンサの充電電圧を放電管に重畳
印加することができ、この放電管に流れる電流波形をレ
ーザ効率が最も高い電流波形に選択することを可能とす
る。The switching means in the present invention is constructed by connecting a large number of solid-state switching elements in series and parallel, so that the circuit can be abruptly opened and closed. By independently controlling the conduction timing of the plurality of switch means with corresponding delay circuits, the charging voltages of the plurality of charge/discharge capacitors connected to each switch means can be superimposed and applied to the discharge tube, This makes it possible to select the current waveform flowing through the discharge tube as the current waveform with the highest laser efficiency.
以下、この発明の一実施例を図について説明する．第ｌ
図において、ｌｌａ，ｌｌｂはそれぞれ電圧を異にする
高圧電源、１２ａ，１２ｂは充電用リアクトル．１３ａ
，１３ｂは充電用ダイオード、１４ａ，１４ｂは充放電
コンデンサ，１５は充電用抵抗、１６は充電用抵抗１５
と並列に接続された放電管、１７ａ，１７ｂは第２図に
示すように多数の固体スイッチング素子１８を直並列接
続して構成したスイッチ手段であり、このスイッチ手段
１７ａ，１７ｂは、その一端が充放電コンデンサ１４ａ
，１４ｂを介して放電管１６の一端に接続され、他端が
インダクタンス１８ａ，１８ｂを介して放電管１６の他
端に接続されている。An embodiment of this invention will be explained below with reference to the drawings. No.l
In the figure, lla and llb are high-voltage power supplies with different voltages, and 12a and 12b are charging reactors. 13a
, 13b are charging diodes, 14a and 14b are charging/discharging capacitors, 15 is a charging resistor, and 16 is a charging resistor 15.
The discharge tubes 17a and 17b connected in parallel with the switch means 17a and 17b are switch means constructed by connecting a large number of solid state switching elements 18 in series and parallel, as shown in FIG. Charge/discharge capacitor 14a
, 14b, and the other end is connected to the other end of the discharge tube 16 via inductances 18a, 18b.
１９はクロック信号を出力する発振器、２０ａ，２０ｂ
はクロック信号を受けて所定時期に対応するスイッチ手
段１７ａ，１７ｂに導通信号を供給する遅延回路であり
、この遅延回路２０ａ，２０ｂは第３図に示すように、
抵抗２１、コンデンサ２２、バッファ２３とで構成され
ている。19 is an oscillator that outputs a clock signal, 20a, 20b
is a delay circuit which receives a clock signal and supplies a conductive signal to the switch means 17a, 17b corresponding to a predetermined time, and these delay circuits 20a, 20b, as shown in FIG.
It is composed of a resistor 21, a capacitor 22, and a buffer 23.
次に上記実施例の動作について説明する。いま、充放電
コンデンサ１４ａ，１４ｂが高圧電源１１ａ，ｌｌｂの
電圧に充電された状態において、発振器１９からクロッ
ク信号Ｃが出力されると、このクロック信号Ｃを受けた
遅延回路２０ａ，２０ｂは例えば第４図，第５図に示す
ように、クロック信号Ｃの出力時点から時刻τａ，τｂ
後にスイッチ手段１７ａ，１７ｂに導通信号Ｇａ，Ｇｂ
を供給して導通させる。Next, the operation of the above embodiment will be explained. Now, when the clock signal C is output from the oscillator 19 in a state where the charge/discharge capacitors 14a, 14b are charged to the voltage of the high voltage power supply 11a, llb, the delay circuits 20a, 20b receiving this clock signal C, for example, As shown in FIGS. 4 and 5, the times τa and τb change from the output point of the clock signal C.
Afterwards, the conductive signals Ga, Gb are sent to the switch means 17a, 17b.
supply and conduction.
この導通により、充放電コンデンサ１４ａ，１４ｂに充
電された高圧電圧はインダクタンス１８ａ，１８ｂを介
して放電管１６に印加され、このとき、放電管↓６のイ
ンピーダンスは充電用抵抗■５の抵抗値より大幅に小さ
くなるため，充放電コンデンサ１４ａ，１４ｂからの放
電電流は主として放電管ｌ６に流れ，この放電管１６に
レーザ発振を生じさせる。Due to this conduction, the high voltage charged in the charge/discharge capacitors 14a, 14b is applied to the discharge tube 16 via the inductances 18a, 18b, and at this time, the impedance of the discharge tube ↓6 is greater than the resistance value of the charging resistor ■5. Since it becomes significantly smaller, the discharge current from the charging/discharging capacitors 14a and 14b mainly flows through the discharge tube 16, causing the discharge tube 16 to generate laser oscillation.
この場合，高圧電源１１ａの電圧Ｅ１が高圧電源１ｌｂ
の電圧Ｅ２より高く、充放電コンデンサ１４ａの容量Ｃ
ａが充放電コンデンサ１４ｂの容量ｃｂより小さいと、
第４図に示すように放電管１６には、充放電コンデンサ
１４ａ，１４ｂの放電電流１ａ，ｌｂが重畳し、中間部
で大電流が流れる電流波形となる。In this case, the voltage E1 of the high voltage power supply 11a is
voltage E2, and the capacitance C of the charging/discharging capacitor 14a
If a is smaller than the capacitance cb of the charging/discharging capacitor 14b,
As shown in FIG. 4, the discharge currents 1a and lb of the charging and discharging capacitors 14a and 14b are superimposed on the discharge tube 16, resulting in a current waveform in which a large current flows in the intermediate portion.
また、上記とは反対に、電圧Ｅエが電圧Ｅよより低く、
容量Ｃａが容量ｃｂより大きいと，第５図に示すように
放電管１６には、充放電コンデンサ１４ａ，１４ｂの放
電電流１ａ＋ｌｂが重畳し、後半部で大電流の流れる電
流波形となる．従って、充放電コンデンサ１４ａ，１４
ｂの容量，スイッチ手段１７ａ，１７ｂの導通タイミン
グτａｒ τｂ，高圧電ｉ［１１ａ，ｌｌｂの電圧Ｅａ
，Ｅｂ等を選択組合せることにより，放電管１６に流れ
る電流波形をレーザ効率が高い波形に制御することがで
きる。Also, contrary to the above, voltage E is lower than voltage E,
When the capacitance Ca is larger than the capacitance cb, as shown in FIG. 5, the discharge current 1a+lb of the charging/discharging capacitors 14a and 14b is superimposed on the discharge tube 16, resulting in a current waveform in which a large current flows in the latter half. Therefore, the charging/discharging capacitors 14a, 14
capacitance of b, conduction timing τar τb of switch means 17a, 17b, voltage Ea of high-voltage electric current i [11a, llb
, Eb, etc., the current waveform flowing through the discharge tube 16 can be controlled to a waveform with high laser efficiency.
なお、固体スイッチング素子としては、ＦＥＴ，ＳＩＴ
，ＩＧＢＴ，ＳＩサイリスタ、トランジスタ、サイリス
タ等を用いる．
〔発明の効果〕
以上のように，この発明によれば，多数の固体スイッチ
ング素子を直並列接続してスイッチ手段を構或したので
、スイッチング動作の信頼性が向上し、寿命が長く頻繁
な交換を要しない．そして、別個独立の高圧電源で任意
の電圧に充電される複数の充放電コンデンサの放電回路
を、別個独立に設定される導通タイミングで導通制御さ
れる上記スイッチ手段で急峻に開閉するようにｎ或した
ので、上記複数の充放電コンデンサからの放電電流の波
形を，レーザ効率を向上させる波形に制御することが容
易である等の効果がある。In addition, as solid state switching elements, FET, SIT
, IGBT, SI thyristor, transistor, thyristor, etc. are used. [Effects of the Invention] As described above, according to the present invention, the switching means is constructed by connecting a large number of solid-state switching elements in series and parallel, so the reliability of the switching operation is improved, and the lifespan is long and frequent replacement is not required. is not required. Then, the discharging circuits of the plurality of charging/discharging capacitors that are charged to arbitrary voltages by separate high-voltage power supplies are abruptly opened and closed by the switch means whose conduction is controlled at conduction timings that are independently set. Therefore, it is possible to easily control the waveform of the discharge current from the plurality of charge/discharge capacitors to a waveform that improves laser efficiency.
第ｌ図はこの発明の一実施例によるパルス発生装置を示
す回路図，第２図はスイッチ手段の構或図、第３図は遅
延回路の回路図、第４図，第５図は第１図装置の動作を
説明するタイムチャート図，第６図は従来のパルス発生
装置の回路図、第７図は従来装置による放電管の放電電
流波形図である。
１１ａ，ｌｌｂは高圧電源、１４ａ，１４ｂは充放電コ
ンデンサ、１６は放電管、１７ａ，１７ｂはスイッチ手
段、１８ａ，１８ｂはインダクタンス，１９は発振器、
２０ａ，２０ｂは遅延回路．なお、図中、同一符号は同
一または相当部分を示す。FIG. 1 is a circuit diagram showing a pulse generator according to an embodiment of the present invention, FIG. 2 is a configuration diagram of a switch means, FIG. 3 is a circuit diagram of a delay circuit, and FIGS. 6 is a circuit diagram of a conventional pulse generator, and FIG. 7 is a discharge current waveform diagram of a discharge tube according to the conventional device. 11a and llb are high voltage power supplies, 14a and 14b are charging and discharging capacitors, 16 is a discharge tube, 17a and 17b are switch means, 18a and 18b are inductances, 19 is an oscillator,
20a and 20b are delay circuits. In addition, in the figures, the same reference numerals indicate the same or corresponding parts.
Claims (1)
た複数のスイッチ手段と、前記スイッチ手段およびイン
ダクタンスを介して放電管に並列接続した複数の充放電
コンデンサと、発振器からのクロック信号を受けて所定
時期に前記スイッチ手段に導通信号を供給するように該
スイッチ手段のそれぞれに対応して設けられた複数の遅
延回路と、前記各充放電コンデンサを異なる電圧に充電
するように該充放電コンデンサのそれぞれに対応して設
けられた複数の高圧電源とを備えたパルス発生装置。A plurality of switch means configured by connecting a large number of solid-state switching elements in series and parallel, a plurality of charge/discharge capacitors connected in parallel to the discharge tube via the switch means and an inductance, a plurality of delay circuits provided corresponding to each of the switch means so as to supply a conductive signal to the switch means; A pulse generator comprising a plurality of correspondingly provided high voltage power supplies.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15193889A JPH0316417A (en) | 1989-06-14 | 1989-06-14 | Pulse generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15193889A JPH0316417A (en) | 1989-06-14 | 1989-06-14 | Pulse generator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0316417A true JPH0316417A (en) | 1991-01-24 |
Family
ID=15529489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15193889A Pending JPH0316417A (en) | 1989-06-14 | 1989-06-14 | Pulse generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0316417A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999034502A1 (en) * | 1997-12-25 | 1999-07-08 | Mitsubishi Denki Kabushiki Kaisha | Pulse power source apparatus |
| JP2008028346A (en) * | 2006-07-25 | 2008-02-07 | Shibuya Kogyo Co Ltd | Pulsed gas laser oscillator |
| JP2009276154A (en) * | 2008-05-13 | 2009-11-26 | Shindengen Electric Mfg Co Ltd | Lightning surge simulator and control method |
-
1989
- 1989-06-14 JP JP15193889A patent/JPH0316417A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999034502A1 (en) * | 1997-12-25 | 1999-07-08 | Mitsubishi Denki Kabushiki Kaisha | Pulse power source apparatus |
| US6184662B1 (en) * | 1997-12-25 | 2001-02-06 | Mitsubishi Denki Kabushiki Kaisha | Pulsed power supply device |
| JP2008028346A (en) * | 2006-07-25 | 2008-02-07 | Shibuya Kogyo Co Ltd | Pulsed gas laser oscillator |
| JP2009276154A (en) * | 2008-05-13 | 2009-11-26 | Shindengen Electric Mfg Co Ltd | Lightning surge simulator and control method |
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