JPH0314420U - - Google Patents
Info
- Publication number
- JPH0314420U JPH0314420U JP7354089U JP7354089U JPH0314420U JP H0314420 U JPH0314420 U JP H0314420U JP 7354089 U JP7354089 U JP 7354089U JP 7354089 U JP7354089 U JP 7354089U JP H0314420 U JPH0314420 U JP H0314420U
- Authority
- JP
- Japan
- Prior art keywords
- light receiving
- receiving section
- gratings
- predetermined pitch
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 238000006073 displacement reaction Methods 0.000 claims description 4
- 230000003287 optical effect Effects 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 3
- 238000005286 illumination Methods 0.000 description 1
Landscapes
- Optical Transform (AREA)
Description
第１図は本考案の第１実施例を示す平面図、第
２図は同実施例の受光部における受光素子のパタ
ーンを示す図、第３図及び第４図は同受光部にお
ける受光素子の他のパターン例を示す図、第５図
は本考案の第２実施例を示す平面図、第６図は２
格子システムの従来の光学式変位検出装置を示す
平面図、第７図は従来の３格子システムの光学式
変位検出装置を示す模式的平面図、第８図は従来
の３格子システムの光学式変位検出装置を示す平
面図である。
２０……光源としての照明系、２１，４１……
第２格子、２３，４０……第１格子、２５，２５
ａ，２５ｂ，３０，３１……受光素子２６……受
光部、４２……透光性基板としてのメインスケー
ル。
FIG. 1 is a plan view showing the first embodiment of the present invention, FIG. 2 is a diagram showing the pattern of the light receiving element in the light receiving section of the same embodiment, and FIGS. 3 and 4 are diagrams showing the pattern of the light receiving element in the light receiving section of the same embodiment. 5 is a plan view showing the second embodiment of the present invention, and FIG. 6 is a diagram showing other pattern examples.
A plan view showing a conventional optical displacement detection device for a grating system, FIG. 7 is a schematic plan view showing a conventional optical displacement detection device for a three-grating system, and FIG. 8 shows an optical displacement detection device for a conventional three-grating system. It is a top view showing a detection device. 20...Illumination system as a light source, 21, 41...
2nd lattice, 23, 40... 1st lattice, 25, 25
a, 25b, 30, 31... Light receiving element 26... Light receiving portion, 42... Main scale as a transparent substrate.
Claims (1)
の受光素子を有する受光部と、前記光源と前記受
光部の間に配設され、それぞれ所定のピツチを有
し、少なくとも一方が前記受光部に対して相対移
動可能な２つの格子とを備えて成る光学式変位検
出装置。 ２ 前記２つの格子は、透光性基板の各面に形成
されていることを特徴とする請求項１記載の光学
式変位検出装置。[Claims for Utility Model Registration] 1. A light source, a light receiving section having two sets of light receiving elements arranged in a grid pattern at a predetermined pitch, and a light receiving section disposed between the light source and the light receiving section, each having a predetermined pitch. and two gratings, at least one of which is movable relative to the light receiving section. 2. The optical displacement detection device according to claim 1, wherein the two gratings are formed on each surface of a transparent substrate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989073540U JPH0733134Y2 (en) | 1989-06-26 | 1989-06-26 | Optical displacement detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1989073540U JPH0733134Y2 (en) | 1989-06-26 | 1989-06-26 | Optical displacement detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0314420U true JPH0314420U (en) | 1991-02-14 |
| JPH0733134Y2 JPH0733134Y2 (en) | 1995-07-31 |
Family
ID=31612442
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1989073540U Expired - Lifetime JPH0733134Y2 (en) | 1989-06-26 | 1989-06-26 | Optical displacement detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0733134Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001289674A (en) * | 2000-02-03 | 2001-10-19 | Mitsutoyo Corp | Displacement measuring device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6224315U (en) * | 1985-07-26 | 1987-02-14 | ||
| JPS63249015A (en) * | 1987-04-03 | 1988-10-17 | Mitsutoyo Corp | Optical displacement detector |
-
1989
- 1989-06-26 JP JP1989073540U patent/JPH0733134Y2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6224315U (en) * | 1985-07-26 | 1987-02-14 | ||
| JPS63249015A (en) * | 1987-04-03 | 1988-10-17 | Mitsutoyo Corp | Optical displacement detector |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001289674A (en) * | 2000-02-03 | 2001-10-19 | Mitsutoyo Corp | Displacement measuring device |
| JP4588227B2 (en) * | 2000-02-03 | 2010-11-24 | 株式会社ミツトヨ | Displacement measuring device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0733134Y2 (en) | 1995-07-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |