JPH03142353A - Oxygen sensor - Google Patents
Oxygen sensorInfo
- Publication number
- JPH03142353A JPH03142353A JP1282485A JP28248589A JPH03142353A JP H03142353 A JPH03142353 A JP H03142353A JP 1282485 A JP1282485 A JP 1282485A JP 28248589 A JP28248589 A JP 28248589A JP H03142353 A JPH03142353 A JP H03142353A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- solid electrolyte
- insulating layer
- electrodes
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 229910052760 oxygen Inorganic materials 0.000 title claims description 31
- 239000001301 oxygen Substances 0.000 title claims description 31
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 title claims description 30
- 239000007784 solid electrolyte Substances 0.000 claims abstract description 29
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims abstract description 22
- 229910052839 forsterite Inorganic materials 0.000 claims abstract description 11
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 claims abstract description 11
- 238000005259 measurement Methods 0.000 abstract description 8
- 239000000919 ceramic Substances 0.000 abstract description 7
- 239000003792 electrolyte Substances 0.000 abstract 2
- 238000001354 calcination Methods 0.000 abstract 1
- 238000000605 extraction Methods 0.000 description 17
- 238000010304 firing Methods 0.000 description 12
- 239000007789 gas Substances 0.000 description 7
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 6
- 239000000203 mixture Substances 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 238000007606 doctor blade method Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 150000002926 oxygen Chemical class 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4071—Cells and probes with solid electrolytes for investigating or analysing gases using sensor elements of laminated structure
Abstract
Description
【発明の詳細な説明】
（発明の利用分野）
本発明は、内燃機関等の排気ガス中の酸素濃度等を測定
する酸素センサに関する。DETAILED DESCRIPTION OF THE INVENTION (Field of Application of the Invention) The present invention relates to an oxygen sensor that measures oxygen concentration, etc. in exhaust gas from an internal combustion engine or the like.
（従来技術）
従来から、ジルコニア焼結体等の固体電解質（イオン伝
導固体質）の表面に一対の電極を設け、１つの電極には
被測定ガス中の酸素分圧を、他方の電極には大気中の酸
素分圧を印加し、これら被測定ガス中の酸素分圧と基準
となる大気中の酸素分圧との差によって生しる起電力を
検出し、これによって酸素濃度を測定する酸素センサが
一般に広く利用されている。(Prior art) Conventionally, a pair of electrodes is provided on the surface of a solid electrolyte (ion-conducting solid material) such as a zirconia sintered body, and one electrode measures the oxygen partial pressure in the gas to be measured, and the other electrode measures the oxygen partial pressure in the gas to be measured. The oxygen concentration is measured by applying the oxygen partial pressure in the atmosphere and detecting the electromotive force generated by the difference between the oxygen partial pressure in the gas being measured and the reference oxygen partial pressure in the atmosphere. Sensors are generally widely used.
また、上記の如き酸素センサにおいて固体電解質表面や
電極近傍には排気ガス中に存在するカーボンや未燃焼粒
子等が付着し易く、測定誤差を生じたり、特性の劣化を
招くことから、酸素センサ自体を８００°Ｃ程度に加熱
するためのヒータを併設したものも広く使用されている
。In addition, in oxygen sensors such as those mentioned above, carbon and unburned particles present in the exhaust gas tend to adhere to the solid electrolyte surface and near the electrodes, causing measurement errors and deterioration of characteristics, so the oxygen sensor itself Those equipped with a heater for heating the water to about 800°C are also widely used.
そこで、従来の酸素センサの一部切欠斜視図を第３図に
示す。第３図によれば、酸素センサＡは、ジルコニア質
固体電解質板ｌと、該固体電解質板ｌの両面に被着形成
されたセンサ電極、即ち、測定用電極２と基準用電極３
とを具備したセンサセル部と、前記センサ電極２．３と
それぞれ電気的に接続された一対の引き出し電極２ａ、
３ａとから構成される。また、固体電解質板１にはその
内部に片側が開放された大気導入孔４が形成されている
。FIG. 3 shows a partially cutaway perspective view of a conventional oxygen sensor. According to FIG. 3, the oxygen sensor A includes a zirconia solid electrolyte plate 1 and sensor electrodes formed on both sides of the solid electrolyte plate 1, that is, a measurement electrode 2 and a reference electrode 3.
a pair of extraction electrodes 2a each electrically connected to the sensor electrode 2.3;
3a. Further, the solid electrolyte plate 1 is provided with an atmosphere introduction hole 4 that is open on one side.
この酸素センサは、作動時、測定用電極２に被測定ガス
が、基準用電極３には前記大気導入孔４を通して大気が
接触するよう構成されており、両ガスの酸素分圧差によ
り電極間に起電力が生し、この起電力は引き出し電極２
ａ、３ａを経由して端子２ｂ、３ｂより取り出される。During operation, this oxygen sensor is configured so that the measurement electrode 2 is in contact with the gas to be measured, and the reference electrode 3 is in contact with the atmosphere through the atmosphere introduction hole 4.The oxygen partial pressure difference between the two gases causes a gap between the electrodes. An electromotive force is generated, and this electromotive force is applied to the extraction electrode 2.
It is taken out from terminals 2b and 3b via terminals a and 3a.
（発明が解決しようとする問題点）
ところが、上記構成の酸素センサによれば、作動時にセ
ンサセル部の測定用電極２と基準電極３との間に起重力
が発生し、その電圧が引き出し電極２ａ、３ａを経由し
て端子２ｂ、３ｂから取り出される際、引き出し電極形
成部もセル部と同様に、固体電解質板の両側に電極が形
成された構造であることから、この引き出し電極形成部
が素子として作動し、端子２ｂ、３ｂから取り出される
起重力に誤差が生しるという問題があった。(Problems to be Solved by the Invention) However, according to the oxygen sensor having the above configuration, an electromotive force is generated between the measurement electrode 2 and the reference electrode 3 in the sensor cell portion during operation, and the voltage is applied to the extraction electrode 2a. , 3a from the terminals 2b and 3b, the extraction electrode formation part has a structure in which electrodes are formed on both sides of the solid electrolyte plate, similar to the cell part. There was a problem in that an error occurred in the movable force taken out from the terminals 2b and 3b.
そこで、引き出し電極と固体電解質との間に絶縁層を介
在させ、引き出し電極間の電圧リークを阻止しようとす
る試みがなされている。ところが絶縁層を形成する場合
、絶縁層は固体電解質並びに電極と同時に焼成可能であ
ることが要求され、さらに絶縁層が介在する場合、焼成
時や作動時に画材質問の熱膨張差に起因する応力の発生
を極力避ける必要があることから、絶縁層自体の熱膨張
率が固体電解質や電極と近似していることが要求される
。Therefore, attempts have been made to interpose an insulating layer between the extraction electrode and the solid electrolyte to prevent voltage leakage between the extraction electrodes. However, when forming an insulating layer, it is required that the insulating layer can be fired at the same time as the solid electrolyte and the electrode, and furthermore, if the insulating layer is interposed, stress caused by the difference in thermal expansion of the art material during firing and operation can be reduced. Since it is necessary to avoid this occurrence as much as possible, it is required that the coefficient of thermal expansion of the insulating layer itself is similar to that of the solid electrolyte or electrode.
しかし、絶縁層の材料として上記の要求を十分に満たす
ものが得られておらず、上記の要求を満足する材料の開
発が望まれている。However, a material for the insulating layer that fully satisfies the above requirements has not been obtained, and there is a desire to develop a material that satisfies the above requirements.
（問題を解決するための手段）
本発明者等は、上記の問題点に対し、検討を重ねた結果
、一対の引き出し電極のうち少なくとも一方の電極と固
体電解質との間にフォルステライトを主成分とする電気
絶縁層を介在させることによって、作動時何ら問題なく
引き出し電極部からの起重力リークの発生を未然に防止
することができるとともに製造上も十分に同時焼成がで
きることを知見した。(Means for Solving the Problem) As a result of repeated studies regarding the above-mentioned problems, the present inventors have discovered that forsterite is the main component between at least one of a pair of extraction electrodes and a solid electrolyte. It has been found that by interposing an electrically insulating layer, it is possible to prevent the occurrence of electromotive force leakage from the extraction electrode part without any problems during operation, and it is also possible to perform simultaneous firing to a sufficient extent in terms of manufacturing.
以下、本発明を第１図及び第２図を参照して説明する。The present invention will be explained below with reference to FIGS. 1 and 2.
図中、従来の酸素センサを示す第３図の構成中、同一の
機能を有する部分には同一の符号を付与した。In the figure, parts having the same functions in the configuration of FIG. 3 showing the conventional oxygen sensor are given the same reference numerals.
第１図によれば、本発明の酸素センサは、Ｙ２Ｏ３等の
安定化剤を含むジルコニア質固体電解質板１の両面にセ
ンサ電極、即ち、測定用電極２と基準用電極３とを被着
形成され、センサセル部が形成される。また、センサセ
ル部のセンサ電極２．３は一対の引き出し電極２ａ、３
ａを経由して端子２ｂ、３ｂと電気的に接続される。固
体電解質板１ａにはその内部にはセンサセル部形成側が
封止され、端子形成側が開放される大気導入孔４が嵌設
され、作動時、測定用電極２に被測定ガスが、基準用電
極３には前記大気導入孔４を通して大気が接触するよう
構成される。According to FIG. 1, the oxygen sensor of the present invention has sensor electrodes, that is, a measurement electrode 2 and a reference electrode 3, adhered to both sides of a zirconia solid electrolyte plate 1 containing a stabilizer such as Y2O3. Then, a sensor cell portion is formed. Moreover, the sensor electrode 2.3 of the sensor cell part is a pair of extraction electrodes 2a, 3.
It is electrically connected to terminals 2b and 3b via a. The solid electrolyte plate 1a is fitted with an air inlet hole 4 in which the sensor cell forming side is sealed and the terminal forming side is open. is configured so that the atmosphere comes into contact with it through the atmosphere introduction hole 4.
本発明における特徴は、第１図並びに第１図におけるＸ
−Ｙ線断面図である第２図に示すように弓き出し電極部
における引き出し電極２ａ、３ａと固体電解質板ｌとの
間にフォルステライトを主成分とする霊気絶縁層５を介
在させることにある。The features of the present invention are as shown in FIG.
As shown in FIG. 2, which is a sectional view taken along the -Y line, an aether insulating layer 5 containing forsterite as a main component is interposed between the extraction electrodes 2a, 3a and the solid electrolyte plate l in the bowed electrode portion. be.
この絶縁層５は一対の引き出し電極２ａ、３ａのうちい
ずれか一方にのみ形成されることで足りるが、特にいず
れか片方の引き出し電極の全長に亘って形成されること
が望ましい。また、この電気絶縁層５は引き出し電極と
固体電解質ｌとの間に５〜１００μｍの厚みで設けられ
ることが望ましく、厚みが薄い場合、絶縁層形成時にプ
リントムラの生成により引き出し電極形成部における起
電力リークの発生を充分に防止できない恐れがある。Although it is sufficient that this insulating layer 5 is formed only on one of the pair of extraction electrodes 2a and 3a, it is particularly desirable that it be formed over the entire length of either one of the extraction electrodes. Further, it is desirable that this electrical insulating layer 5 is provided between the extraction electrode and the solid electrolyte 1 with a thickness of 5 to 100 μm. If the thickness is thin, printing unevenness may occur at the extraction electrode forming part when forming the insulation layer. There is a possibility that the occurrence of power leakage cannot be sufficiently prevented.
また、本発明によれば、電気絶縁層としてフォルステラ
イトを主成分とするセラミックを用いることも大きな特
徴である。即ち、フォルステライトはそれ自体、２Ｍｇ
０・ＳｉＯ□で表される組成では１００ＸＩＯ−’の熱
膨張率を有し、ジルコニアセラミックスの熱膨張率であ
る１１０ Ｘｌ０−’に非常に近似する。よって、酸素
センサ作動時に固体電解質板１と霊気絶縁層５間に熱膨
張差に起因する応力の発生を極力抑えることができ、セ
ンサの破損はほとんど解消される。さらに、焼成時の収
縮率が１２〜１８％とジルコニアセラミックスの収縮率
とほぼ同程度であることから、焼成時の収縮率の差によ
る応力及びソリの発生をも小さくすることができる。Another major feature of the present invention is that a ceramic containing forsterite as a main component is used as the electrical insulating layer. That is, forsterite itself contains 2Mg
The composition represented by 0.SiO□ has a coefficient of thermal expansion of 100XIO-', which is very close to the coefficient of thermal expansion of zirconia ceramics, 110XIO-'. Therefore, during the operation of the oxygen sensor, the generation of stress due to the difference in thermal expansion between the solid electrolyte plate 1 and the aether insulating layer 5 can be suppressed as much as possible, and damage to the sensor is almost eliminated. Furthermore, since the shrinkage rate during firing is 12 to 18%, which is approximately the same as the shrinkage rate of zirconia ceramics, it is possible to reduce the stress and warp caused by the difference in shrinkage rate during firing.
本発明で用いるフォルステライトの特に望ましい組成は
ＳｉＯ□４２．３〜３９．４重量％、Ｍｇ０５１．２〜
５５．９重量％、Ａｈ０３２．８〜３．０重量％、Ｂａ
０１．４〜３゜０重量％、Ｃａ００．５重量％以下であ
り、このような組成に設定することにより固体電解質で
あるジルコニアセラミックスに対する熱膨張差を４×１
０７以内に抑えることができる。A particularly desirable composition of forsterite used in the present invention is SiO□42.3-39.4% by weight, Mg051.2-39.4% by weight.
55.9% by weight, Ah032.8-3.0% by weight, Ba
By setting this composition, the thermal expansion difference with respect to zirconia ceramics, which is a solid electrolyte, is 4×1.
It can be kept within 0.07.
また、このフォルステライトを主成分とする電気絶縁層
は、その焼成温度が１３００−１４００°Ｃであり、固
体電解質であるジルコニアの焼成温度とほぼ同レベルで
あることから、ジルコニアと同時に焼成することができ
る。In addition, the firing temperature of this electrical insulating layer mainly composed of forsterite is 1300-1400°C, which is approximately the same level as the firing temperature of zirconia, which is a solid electrolyte, so it can be fired at the same time as zirconia. Can be done.
よって、 本発明の酸素センサを製造する場合は、ドク
ターブレード法等の成形手段によって作製された酸素セ
ンサ本体用成形体に対し、前記の組成からなるフォルス
テライトを主成分とするセラミックペーストを引き出し
電極２ａ、３ａが形成される部位に先に塗布し、乾燥す
る。次に、周知の厚膜手法によって第１図におけるセル
部電極２．３、引き出し電極２ａ、３ａ、端子２ｂ、３
ｂとして白金微粉末を含有する電極形成用ペーストを塗
布形成する。その後、ペーストが塗布されたシート状成
形体１ａに第１図における大気導入孔４等を形成する孔
が中心部に設けられたシーＩ・状戒形体１ｂ及び他のシ
ート状成形体１Ｃを積層し、大気中で１３００〜１４０
０°Ｃの温度で焼成することによって容易に得ることが
できる。Therefore, when manufacturing the oxygen sensor of the present invention, a ceramic paste containing forsterite as a main component having the above-mentioned composition is extracted from a molded body for the oxygen sensor body produced by a molding method such as a doctor blade method, and then used as an electrode. It is first applied to the areas where 2a and 3a are to be formed and dried. Next, by using a well-known thick film method, the cell part electrode 2.3, the extraction electrodes 2a, 3a, and the terminals 2b, 3 in FIG.
As b, an electrode forming paste containing fine platinum powder is applied and formed. After that, on the sheet-like molded body 1a coated with the paste, a sheet I-shaped body 1b having holes in the center that form the air introduction holes 4, etc. in FIG. 1, and another sheet-like molded body 1C are laminated. 1300-140 in the atmosphere
It can be easily obtained by firing at a temperature of 0°C.
以下、本発明を次の例で説明する。The invention will now be explained with the following examples.
（実施例）
Ｙ２Ｏ２を８モル％の割合で含むジルコニア（ＺｒＯ□
）質共沈原料を用いて、ドクターブレード法によって厚
さ２００μｍのシート状成形体１ａを作成した。(Example) Zirconia (ZrO□
) A sheet-like molded body 1a having a thickness of 200 μm was prepared using a coprecipitated raw material by a doctor blade method.
この成形体１ａの表面のうち、引き出し電極が形成され
る第１図及び第２図に示す部分に第１表の組成からなる
絶縁層ペーストを焼成後の厚みが１０μｍとなるように
塗布した。次に、粒径０．８μｍの白金微粉末と適量の
２ｒＯ□、バインダー等からなる白金ペーストを用いて
絶縁ペースト上の第１．２図に示すような部位に測定用
電極と基準用電極をスクリーン印刷した。その後、その
中心に大気導入孔を有する成形体１ｂを先に作成した厚
さ２００μｍの成形体１ａを積層し、酸素センサ用成形
体を作成した。An insulating layer paste having the composition shown in Table 1 was applied to the surface of the molded body 1a on the portion shown in FIGS. 1 and 2 where the extraction electrodes were formed so that the thickness after firing was 10 μm. Next, using platinum paste consisting of fine platinum powder with a particle size of 0.8 μm, an appropriate amount of 2rO□, a binder, etc., measurement electrodes and reference electrodes were placed on the insulating paste at the locations shown in Figure 1.2. Screen printed. Thereafter, the molded body 1b having an air introduction hole in the center and the previously produced molded body 1a having a thickness of 200 μm were laminated to form a molded body for an oxygen sensor.
このようにして得られたセンサ成形体を第１表に示す条
件で焼成した。なお、各サンプルについて２００個作成
し、その良品率を算出した。The sensor molded body thus obtained was fired under the conditions shown in Table 1. Note that 200 pieces of each sample were prepared, and the non-defective rate was calculated.
結果は第１表に示した。The results are shown in Table 1.
また、比較例として絶縁層としてアルミナを用いたもの
を焼威し、同様に評価した。In addition, as a comparative example, a product using alumina as an insulating layer was burned and evaluated in the same manner.
（以下余白）
第１表の結果によれば、フォルステライトを主成分とす
る絶縁層を有する本発明の酸素センサはいずれのサンプ
ルも１２００〜１４００°Ｃで同時焼成が可能であり、
且つ焼成時の割れは何ら認められず、生産外に優れるこ
とがわかった。(Left below) According to the results in Table 1, all samples of the oxygen sensor of the present invention having an insulating layer mainly composed of forsterite can be fired at 1200 to 1400°C.
Moreover, no cracks were observed during firing, and it was found that the product was excellent in production.
これに対し、アルミナを絶縁層として用いたものは、焼
成時に固体電解質の割れが認められ、しかもその焼成温
度は１５００〜１６００°Ｃが最適焼成温度であり、そ
れより低いと焼結しなかった。On the other hand, in those using alumina as an insulating layer, cracks in the solid electrolyte were observed during firing, and the optimal firing temperature was 1500 to 1600°C, and sintering did not occur at lower temperatures. .
（発明の効果）
以」二述べた通り、本発明の酸素センサは、引き出し電
極と固体電解質との間に形成される絶縁層としてフォル
ステライトを主成分とするセラミックを選択することに
よって、製造上において他の固体電解質や白金電極との
同時焼成が可能であり、またその熱膨張率が固体電解質
や電極と近似することから、焼成時や作動時に熱膨張差
に起因する応力の発生が低減され、十分に絶縁層として
の役割を果たすことができ、酸素センサを提供すること
ができる。(Effects of the Invention) As described above, the oxygen sensor of the present invention has manufacturing advantages by selecting a ceramic containing forsterite as the main component for the insulating layer formed between the extraction electrode and the solid electrolyte. It can be fired simultaneously with other solid electrolytes and platinum electrodes, and because its coefficient of thermal expansion is similar to that of solid electrolytes and electrodes, stress caused by differences in thermal expansion during firing and operation is reduced. , can sufficiently serve as an insulating layer and provide an oxygen sensor.
安価で且つ量産性ならびに測定精度に優れた酸素センサ
を提供できる。It is possible to provide an oxygen sensor that is inexpensive and has excellent mass productivity and measurement accuracy.
第１図は本発明の酸素センサの構造を説明するための一
部切欠斜視図であり、第２図は第１図におけるＸ−Ｙ線
断面図、第３図は従来の酸素センサの一部切欠斜視図で
ある。
Ａ ・・・酸素センサ
ｌ ・・・固体電解質
２．３・・・センサ電極
２ａ、３ａ・・・引き出し電極
４ ・・・大気導入孔
５ ・・・電気絶縁層Fig. 1 is a partially cutaway perspective view for explaining the structure of the oxygen sensor of the present invention, Fig. 2 is a sectional view taken along the X-Y line in Fig. 1, and Fig. 3 is a part of a conventional oxygen sensor. FIG. 3 is a cutaway perspective view. A...Oxygen sensor l...Solid electrolyte 2.3...Sensor electrodes 2a, 3a...Extractor electrode 4...Atmosphere introduction hole 5...Electrical insulating layer
Claims (1)
両面に形成された一対のセンサ電極とからなるセンサセ
ル部と、前記固体電解質板の両面にそれぞれ各センサ電
極と電気的に接続するようにして形成された一対の引き
出し電極とを具備する酸素センサにおいて、前記一対の
引き出し電極の少なくとも一方と前記固体電解質板との
間にフォルステライトを主成分とする電気絶縁層が介在
することを特徴とする酸素センサ。(1) A sensor cell portion consisting of a zirconia solid electrolyte plate and a pair of sensor electrodes formed on both sides of the solid electrolyte plate, and electrically connected to each sensor electrode on both sides of the solid electrolyte plate, respectively. An oxygen sensor comprising a pair of lead-out electrodes formed by using an electrically insulating layer comprising forsterite as a main component is interposed between at least one of the pair of lead-out electrodes and the solid electrolyte plate. oxygen sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1282485A JPH03142353A (en) | 1989-10-30 | 1989-10-30 | Oxygen sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1282485A JPH03142353A (en) | 1989-10-30 | 1989-10-30 | Oxygen sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03142353A true JPH03142353A (en) | 1991-06-18 |
Family
ID=17653053
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1282485A Pending JPH03142353A (en) | 1989-10-30 | 1989-10-30 | Oxygen sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03142353A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994018553A1 (en) * | 1993-02-09 | 1994-08-18 | Robert Bosch Gmbh | Solid electrolyte sensor with integrated heater |
| WO1995016199A1 (en) * | 1993-12-09 | 1995-06-15 | Robert Bosch Gmbh | Insulating layer system for gavanically separating circuits |
| EP1760461A1 (en) * | 2005-09-01 | 2007-03-07 | Delphi Technologies, Inc. | Gas sensor and method for forming same |
| WO2016002807A1 (en) * | 2014-06-30 | 2016-01-07 | 株式会社デンソー | Gas sensor element and production method therefor |
-
1989
- 1989-10-30 JP JP1282485A patent/JPH03142353A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1994018553A1 (en) * | 1993-02-09 | 1994-08-18 | Robert Bosch Gmbh | Solid electrolyte sensor with integrated heater |
| WO1995016199A1 (en) * | 1993-12-09 | 1995-06-15 | Robert Bosch Gmbh | Insulating layer system for gavanically separating circuits |
| EP1760461A1 (en) * | 2005-09-01 | 2007-03-07 | Delphi Technologies, Inc. | Gas sensor and method for forming same |
| US7722749B2 (en) | 2005-09-01 | 2010-05-25 | Delphi Technologies, Inc. | Gas sensor and method for forming same |
| WO2016002807A1 (en) * | 2014-06-30 | 2016-01-07 | 株式会社デンソー | Gas sensor element and production method therefor |
| JP2016011884A (en) * | 2014-06-30 | 2016-01-21 | 株式会社デンソー | Gas sensor element and gas sensor element manufacturing method |
| US10591438B2 (en) | 2014-06-30 | 2020-03-17 | Denso Corporation | Gas sensor element and manufacturing method thereof |
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