JPH03138549A - Fluorescent x-ray analyzer - Google Patents
Fluorescent x-ray analyzerInfo
- Publication number
- JPH03138549A JPH03138549A JP1278096A JP27809689A JPH03138549A JP H03138549 A JPH03138549 A JP H03138549A JP 1278096 A JP1278096 A JP 1278096A JP 27809689 A JP27809689 A JP 27809689A JP H03138549 A JPH03138549 A JP H03138549A
- Authority
- JP
- Japan
- Prior art keywords
- filter
- filters
- inclination
- wavelength
- rays
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002834 transmittance Methods 0.000 claims description 9
- 238000001514 detection method Methods 0.000 claims description 6
- 238000005259 measurement Methods 0.000 abstract description 13
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 238000010521 absorption reaction Methods 0.000 description 7
- 229910052742 iron Inorganic materials 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000011088 calibration curve Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
Description
本発明は、バランスドフィルター法による蛍光Ｘ線分析
装置に関する。The present invention relates to a fluorescent X-ray analyzer using a balanced filter method.
元素には、夫々固有の吸収端波長があり、Ｘ線の短波長
側から長波長側にかけて、吸収が次第に増加し、吸収端
波長を越すと急に吸収が減る。この元素毎の吸収端波長
の違いを利用して、成る波長λ０のＸ線を測定しようと
する場合に、第２図に示すような、λ１が吸収端波長と
なるフィルターＦｌとλ２が吸収端波長となるフィルタ
ーＦ２にＸ線を透過させ、透過したＸ線の強度１１．Ｉ
２を測定し、■１−１２を求めると、第２図の透過率曲
線を見ても分かるように、λ１とλ２の間は透過率の差
が大きいが、それ以外の区間では透過率の差が殆どない
ので、１ｌ−Ｉ２で求められた値は、波長λｌとλ２と
の間に存在する波長のＸ線の強度を測定したことになる
。測定しないＸ線の波長λ０はλ、とλ２との間に存在
するから、結果として波長λ。の特性Ｘ線を測定したこ
とになる。このように測定したいＸ線の波長の前後の波
長で最小透過率となる２つのフィルターを用いて、特性
Ｘ線を測定する方法をバランスドフィルター法と云う。
本発明はこのバランスドフィルター法に関するものであ
る。このバランスドフィルター法の測定精度は、２つの
フィルターの透過率をλｌとλ２の間以外の区間におい
てどれだけ同じ値に近づけ得るかにかかっている。この
透過率の調節はフィルターの厚みによって行っているが
、その厚みの差は計算を非常に小さい値になる。
例えば、フィルターＦ１．．Ｆ２にＣｕとＮｉのフィル
ターを用いた場合、フィルターＦｌ、Ｆ２の厚みを１．
．１２とすれば、λ〉λ２の領域で■１＝Ｊ２にするた
めには、ｔ ２ ／ ｔ ｌ＝ １ 、０９１６であり
、λくλ１の領域で１．＝１２にするためにはｔｚ ／
ｌｔ ＝１．０９９３である。フィルターの所要厚さを
１μｍ程度とすると、この厚みの差は約０．１μｍ、フ
ィルターの厚さを１０μｍとしても差は１μｍ程度とな
り、このような微妙な厚みの差を加工によって得ること
は非常に難しいと云う問題があった。Each element has its own absorption edge wavelength, and absorption gradually increases from the short wavelength side to the long wavelength side of X-rays, and suddenly decreases when the absorption edge wavelength is exceeded. When trying to measure X-rays with a wavelength of λ0 using this difference in absorption edge wavelength for each element, filters Fl and λ2 with absorption edge wavelengths of λ1 and λ2 are used as shown in Figure 2. X-rays are transmitted through the filter F2, which corresponds to the wavelength, and the intensity of the transmitted X-rays is 11. I
2 and find ■1-12. As can be seen from the transmittance curve in Figure 2, there is a large difference in transmittance between λ1 and λ2, but in other sections, the transmittance is small. Since there is almost no difference, the value determined by 1l-I2 is a measurement of the intensity of X-rays with wavelengths between λl and λ2. Since the wavelength λ0 of the X-ray that is not measured exists between λ and λ2, the wavelength λ0 is the result. This means that the characteristic X-rays of This method of measuring characteristic X-rays using two filters that have minimum transmittance at wavelengths before and after the wavelength of the X-rays to be measured is called the balanced filter method. The present invention relates to this balanced filter method. The measurement accuracy of this balanced filter method depends on how close the transmittances of the two filters can be to the same value in the interval other than between λl and λ2. This transmittance is adjusted by changing the thickness of the filter, but the difference in thickness makes the calculation a very small value. For example, filter F1. ．． When using Cu and Ni filters for F2, the thicknesses of filters Fl and F2 are set to 1.
．． 12, in order to make 1=J2 in the region λ>λ2, t 2 /t l= 1,0916, and 1. To make =12, tz /
lt=1.0993. If the required thickness of the filter is about 1 μm, the difference in thickness is about 0.1 μm, and even if the thickness of the filter is 10 μm, the difference is about 1 μm, and it is extremely difficult to obtain such a subtle difference in thickness through processing. There was a problem that was difficult.
本発明は、バランス１−フィルター法による蛍光Ｘ線分
析装置において、高精度のフィルター加工を要しないで
測定精度の向上を図ることを目的とする。An object of the present invention is to improve measurement accuracy in a fluorescent X-ray analyzer using a balanced one-filter method without requiring high-precision filter processing.
【課題を解決するための手段】
蛍光Ｘ線分析装置において、最小透過率の波長が異なる
２種のフィルターを前面に配置した２つのＸ線検出器と
、上記２つのフィルターの円安なくともどちらか一方の
フィルターの傾きを調節する手段と、上記２つのＸ線検
出器の検出出力の差を演算する演算手段とを備えた。[Means for solving the problem] In a fluorescent X-ray analyzer, two X-ray detectors are arranged in front of two types of filters having different minimum transmittance wavelengths, and at least one of the above two filters is used. The apparatus includes means for adjusting the slope of one of the filters, and a calculation means for calculating the difference between the detection outputs of the two X-ray detectors.
本発明によれば、フィルターの傾きを変えることにより
、フィルターのＸ線の透過長さを微調整することができ
る点に着目し、一方のフィルターを保持している保持台
に傾きを変える手段を設け、同手段によりフィルターの
傾きを変えることにより、２つのフィルターの厚さを夫
々厳密に計算通りにしておかなくても、２つのフィルタ
ーの設定波長区間以外の波長のＸ線の透過率を、同じに
することができるようになったことで、高精度のフィル
ター加工を要しないで測定精度を向上させることが可能
になった。According to the present invention, focusing on the fact that the length of X-ray transmission through the filter can be finely adjusted by changing the inclination of the filter, a means for changing the inclination is provided on the holding stand holding one of the filters. By using the same means to change the inclination of the filters, it is possible to increase the transmittance of X-rays at wavelengths outside the set wavelength range of the two filters, without having to make the thicknesses of the two filters exactly as calculated. By making it possible to make them the same, it has become possible to improve measurement accuracy without requiring high-precision filter processing.
第１図に本発明を亜鉛メツキ板の被膜測定に用いた一実
施例を示す。第１図において、Ｓは亜鉛メツキ板である
試料板、１はＸ線管、ＦｌはＣｕフィルターで吸収端波
長は１．３８０人である。
Ｆ２はＮｉフィルターで吸収端波長は１．４８８人であ
る。上記２つのフィルターＦｌ、Ｆ２の厚みは約８〜１
０ノｚｍである。２はＮｉフィルターＦ２の傾きを調節
する調節手段で、第３図に詳細図を示す。第３図におい
て、２ＡはフィルターＦ２の傾きを調節する回転台、２
Ｂは回転台２人を回転させるウオームギア機構である。
第１図に戻り、３はＣｕフィルターＦ１を透過したＸ線
を検出するＸ線検出器、４はＮｉフィルターＦ２を透過
したＸ線を検出するＸ線検出器、５はＸ線検出器３の検
出信号■ｌからＸ線検出器４の検出信号■２を引算する
演算部、６は演算部５で求められた結果を表示する表示
部である。
フィルターＦ２の傾き調節手段２の調節方法について説
明を行う。本実施例では、亜鉛メツキ板の被膜測定であ
るから、測定波長λ０は１．４３５人であり、亜鉛メツ
キ板の基板には、主として鉄が使用されている関係から
、測定されるＸ線の中には、鉄（Ｆｅ）による蛍光Ｘ線
が多く含まれており、鉄による蛍光Ｘ線の検出信号を除
去することが、測定精度を向上させることとなるので、
試料板Ｓを鉄（Ｆｅ）板とし、検出器３，４でフィルタ
ーＦｌ、Ｆ２を透過してくるＸ線強度工ＩＩ２を測定し
、演算部５でＩ、−Ｉ２を求め、Ｉｆ −Ｉ２ ＝Ｏと
なるように、傾斜手段２によりフィルターＦ２の傾斜角
度を調節する。このフィルターの傾き調整により、鉄に
よる蛍光Ｘ線の検出信号が測定値から完全に除去される
と共に、測定波長λ。以外のＸ線も殆ど除去されること
になる。
フィルターＦ２の傾斜角度の調節が終了すれば、測定し
たい試料板Ｓをセットし測定を行う。測定結果■□−■
２の値から、予め測定しておいた検量線図を用いて、亜
鉛メツキの被膜の厚さを測定する。FIG. 1 shows an example in which the present invention is used to measure a coating on a galvanized plate. In FIG. 1, S is a sample plate which is a galvanized plate, 1 is an X-ray tube, and Fl is a Cu filter with an absorption edge wavelength of 1.380 nm. F2 is a Ni filter and the absorption edge wavelength is 1.488. The thickness of the above two filters Fl and F2 is approximately 8 to 1
It is 0 nozm. 2 is an adjusting means for adjusting the inclination of the Ni filter F2, a detailed view of which is shown in FIG. In FIG. 3, 2A is a rotary table for adjusting the inclination of the filter F2;
B is a worm gear mechanism that rotates the two rotating tables. Returning to FIG. 1, 3 is an X-ray detector that detects the X-rays that have passed through the Cu filter F1, 4 is an X-ray detector that detects the X-rays that have passed through the Ni filter F2, and 5 is the X-ray detector that detects the X-rays that have passed through the Ni filter F2. A calculation section 6 subtracts the detection signal (2) of the X-ray detector 4 from the detection signal (1), and a display section 6 displays the result obtained by the calculation section 5. A method of adjusting the inclination adjusting means 2 of the filter F2 will be explained. In this example, since the film is measured on a galvanized plate, the measurement wavelength λ0 is 1.435, and since iron is mainly used for the galvanized plate substrate, the X-rays to be measured are It contains many fluorescent X-rays due to iron (Fe), and removing the detection signal of fluorescent X-rays due to iron will improve measurement accuracy.
Using an iron (Fe) plate as the sample plate S, the detectors 3 and 4 measure the X-ray intensity II2 transmitted through the filters Fl and F2, and the calculation unit 5 calculates I and -I2, If -I2 = The inclination angle of the filter F2 is adjusted by the inclination means 2 so that the angle of inclination becomes O. By adjusting the slope of this filter, the detection signal of fluorescent X-rays due to iron is completely removed from the measurement value, and the measurement wavelength λ is also adjusted. Almost all other X-rays are also removed. When the adjustment of the inclination angle of the filter F2 is completed, the sample plate S to be measured is set and the measurement is performed. Measurement results ■□−■
From the value of 2, the thickness of the galvanized film is measured using a calibration curve that has been measured in advance.
本発明によ°れば、バランスドフィルター法によるＸ線
測定装置において、簡単な装置でＸ線のフィルターの透
過長さの調整可能になったことで、安価な装置で測定精
度を一段と向」ニさせることが可能になった。According to the present invention, in an X-ray measurement device using the balanced filter method, the transmission length of the X-ray filter can be adjusted with a simple device, which further improves measurement accuracy with an inexpensive device. It is now possible to
第１図は本発明の一実施例の構成図、 第２図は Ｆ２・・Ｎｉフィルター、 ２・・・フィルター傾き調 節手段、 ３・・Ｘ線検出器、 Ｘ線検出器、 演算部、 ６・・・表示部。 FIG. 1 is a configuration diagram of an embodiment of the present invention, Figure 2 is F2...Ni filter, 2...Filter tilt tone knot means, 3...X-ray detector, X-ray detector, arithmetic section, 6...Display section.
Claims (1)
置した２つのＸ線検出器と、上記２つのフィルターの内
少なくともどちらか一方のフィルターの傾きを調節する
手段と、上記２つのＸ線検出器の検出出力の差を演算す
る演算手段とを備えたことを特徴とする蛍光Ｘ線分析装
置。two X-ray detectors in which two types of filters having different minimum transmittance wavelengths are arranged in front; means for adjusting the inclination of at least one of the two filters; and two X-ray detectors. 1. A fluorescent X-ray analyzer, comprising: a calculation means for calculating a difference between detection outputs of the detectors.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1278096A JPH03138549A (en) | 1989-10-24 | 1989-10-24 | Fluorescent x-ray analyzer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1278096A JPH03138549A (en) | 1989-10-24 | 1989-10-24 | Fluorescent x-ray analyzer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03138549A true JPH03138549A (en) | 1991-06-12 |
Family
ID=17592581
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1278096A Pending JPH03138549A (en) | 1989-10-24 | 1989-10-24 | Fluorescent x-ray analyzer |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03138549A (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5812851B2 (en) * | 1977-01-12 | 1983-03-10 | 三井化学株式会社 | How to manufacture pipes |
-
1989
- 1989-10-24 JP JP1278096A patent/JPH03138549A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5812851B2 (en) * | 1977-01-12 | 1983-03-10 | 三井化学株式会社 | How to manufacture pipes |
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