JPH03137067A - Production of suction pad made of ceramics - Google Patents
Production of suction pad made of ceramicsInfo
- Publication number
- JPH03137067A JPH03137067A JP1273588A JP27358889A JPH03137067A JP H03137067 A JPH03137067 A JP H03137067A JP 1273588 A JP1273588 A JP 1273588A JP 27358889 A JP27358889 A JP 27358889A JP H03137067 A JPH03137067 A JP H03137067A
- Authority
- JP
- Japan
- Prior art keywords
- shaped bodies
- bar
- rod
- spaces
- holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 22
- 238000004519 manufacturing process Methods 0.000 title claims description 18
- 239000011148 porous material Substances 0.000 claims abstract description 13
- 239000002994 raw material Substances 0.000 claims abstract description 12
- 238000003825 pressing Methods 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims description 33
- 238000010304 firing Methods 0.000 claims description 5
- 238000002788 crimping Methods 0.000 claims 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 8
- 238000012856 packing Methods 0.000 abstract description 2
- 238000003466 welding Methods 0.000 abstract 2
- 239000011362 coarse particle Substances 0.000 description 5
- 239000002245 particle Substances 0.000 description 5
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 4
- 238000003754 machining Methods 0.000 description 4
- 238000000465 moulding Methods 0.000 description 4
- 239000000843 powder Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 238000005192 partition Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 2
- 238000009694 cold isostatic pressing Methods 0.000 description 2
- 238000001125 extrusion Methods 0.000 description 2
- 235000011187 glycerol Nutrition 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 239000004014 plasticizer Substances 0.000 description 1
- 238000004663 powder metallurgy Methods 0.000 description 1
- 239000011164 primary particle Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B38/00—Porous mortars, concrete, artificial stone or ceramic ware; Preparation thereof
- C04B38/008—Bodies obtained by assembling separate elements having such a configuration that the final product is porous or by spirally winding one or more corrugated sheets
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Ceramic Products (AREA)
- Supply And Installment Of Electrical Components (AREA)
Abstract
Description
【発明の詳細な説明】
ａ、 産業上の利用分野
本発明は、セラミックス製吸着盤の製造方法、特に板体
に形成された複数の貫通孔を利用して真空引きする方式
のセラミックス製吸着盤の製造方法に関する。[Detailed Description of the Invention] a. Field of Industrial Application The present invention relates to a method for manufacturing a ceramic suction cup, particularly a ceramic suction cup that uses a plurality of through holes formed in a plate to perform vacuuming. Relating to a manufacturing method.
ｂ、 従来の技術及びその課題
従来の主な吸着盤の設計思想及びその製造方法に関し、
以下説明する。b. Conventional technology and its problems Regarding the design concept of conventional main suction cups and their manufacturing method,
This will be explained below.
（１）吸着溝方式
吸着溝方式は、厚板表面にらせん状の溝、または径の異
なる複数の同心円状の溝あるいは放射状に配置された直
線状の溝を刻設し、これらの溝から裏面に通ずる吸引口
を通じて真空引きすることにより、ワークを吸着する方
式である。(1) Suction groove method The suction groove method involves carving a spiral groove, multiple concentric grooves with different diameters, or linear grooves arranged radially on the surface of a thick plate, and from these grooves This method attracts the workpiece by drawing a vacuum through the suction port leading to the workpiece.
しかし、このような吸着溝方式では、例えば半導体ウェ
ハー等の薄物ワークを吸着する場合には、その吸着部（
溝部）と非吸着部（溝のない部分）との間で、吸引力の
差による応力の分布が生じ易く、薄物ワークに変形を生
じさせるという課題がある。However, with this suction groove method, when suctioning a thin workpiece such as a semiconductor wafer, the suction part (
There is a problem in that stress distribution is likely to occur due to the difference in suction force between the groove (groove) and the non-suction part (portion without groove), causing deformation of the thin workpiece.
（２）多孔質方式
一方、多孔質方式は、３次元的に表面から裏面まで貫通
した多数の孔を利用してワークを吸着する方式である。(2) Porous method On the other hand, the porous method is a method in which a workpiece is adsorbed using a large number of holes that penetrate three-dimensionally from the front surface to the back surface.
かかる多孔質方式に用いられているセラミックス材料は
、通常の緻密質セラミックス焼結体に用いているものよ
りも粗い粒子、例えば１０μ−〜２１程度のセラミック
ス粒子を原料として製造されることが多い。Ceramic materials used in such porous systems are often manufactured from coarser particles than those used in normal dense ceramic sintered bodies, for example, ceramic particles of about 10 μm to 21 μm in diameter.
多孔質方式では、前述した吸着溝方式、あるいは後述す
る機械的手段による小孔方式に比較して、吸着盤上にお
ける吸着力の差はなく、薄物ワークの変形が生じにくい
という長所がある。The porous method has the advantage that there is no difference in suction force on the suction cup, and thin workpieces are less likely to deform, compared to the suction groove method described above or the small hole method using mechanical means described later.
しかし、多孔質方式では、もともと粒子の結合強度が弱
く、特に比較的微細な粒子を用いた場合には、焼結体か
らの脱落、あるいは欠損が生じやすいという課題がある
。However, in the porous method, the bonding strength of the particles is inherently weak, and particularly when relatively fine particles are used, there is a problem that they tend to fall off or break from the sintered body.
また、脱落した粒子は、吸着盤とワークの間にはさまっ
て薄物ワークの局部的な変形を招き、加工精度を悪くす
るというＲ１３がある。In addition, there is R13 that the fallen particles are caught between the suction cup and the workpiece, causing local deformation of the thin workpiece and impairing machining accuracy.
なお、１〜２履程度の比較的粗い粒子で吸着盤の全部、
または一部を構成して表面粒子の脱落を防止し、かつ吸
着性能のバラツキを少なくすることを意図した多孔質方
式の製法もある。In addition, the entire suction cup is covered with relatively coarse particles of about 1 to 2 shoes.
Alternatively, there is also a porous manufacturing method in which a part of the adsorbent is formed to prevent surface particles from falling off and to reduce variations in adsorption performance.
しかし、この粗粒を用いた多孔質方式では、セラミック
ス原料の一次粒子をそのまま粗粒として用いることは形
成される孔が不均一となることから困難であり、あらか
じめある程度粒径のそろった粗粒（球状が一般的である
）を造粒粉として調製成形しておく必要がある。However, in this porous method using coarse particles, it is difficult to use the primary particles of ceramic raw materials as coarse particles as they are because the pores that are formed become uneven. (generally spherical) must be prepared and molded into granulated powder.
また、この方式では、吸着盤成形時に粗粒がずれたり、
あるいは抜けるときわめて大きな脱落孔が生じることか
ら、脱落孔を生じないよう手作業で注意深く粗粒を１個
ずつ並べていく作業が必要であり、多くの手間を要し、
量産性に限界がある。In addition, with this method, coarse particles may shift during suction cup forming,
Otherwise, if they fall out, extremely large holes will be created, so it is necessary to carefully line up the coarse particles one by one by hand to avoid forming holes, which requires a lot of effort.
There are limits to mass production.
さらに、−船釣に多孔質方式では、３次元的な多孔質構
造を有しているため、表面から裏面への完全な１次元的
なエアの流れはなり、技分かれした細孔を通じて横方向
からのエアの流入、あるいは流出が生じる。Furthermore, since the porous method for boat fishing has a three-dimensional porous structure, there is no complete one-dimensional air flow from the front surface to the back surface, and the air flows laterally through divided pores. Air flows in or out from the
このため径の異なる薄板ワークを吸着する場合には、エ
ア漏れを少なくして吸着部の径を制御してやる必要があ
り、緻密質のセラミックス部分を所々に同心円状に配列
する必要が生じる。Therefore, when suctioning thin plate workpieces with different diameters, it is necessary to reduce air leakage and control the diameter of the suction part, and it is necessary to arrange dense ceramic parts concentrically in places.
また、外縁部からのエア漏れによる吸着力の低下を防ぐ
ため、外縁を通気性のない金属または合成樹脂、あるい
は多孔質部分と同材質でありながら緻密化したセラミッ
クス材質で包囲した構造にしてやる必要がある。In addition, in order to prevent the adsorption power from decreasing due to air leakage from the outer edge, it is necessary to surround the outer edge with non-permeable metal or synthetic resin, or a ceramic material that is made of the same material as the porous part but is denser. There is.
このようなことから、かかる多孔質方式では、その製法
と工程をさらに複雑化し、量産性を悪くしているという
課題がある。For this reason, such a porous method has the problem of further complicating the manufacturing method and process and impairing mass production.
（３） 機械的手段による小孔方式
上述した他、セラミックス厚板に機械加工により小孔（
φ０．２−程度）を多数設ける小孔方式がある。(3) Small hole method using mechanical means In addition to the above, small holes (
There is a small hole method in which a large number of holes (about 0.2 mm in diameter) are provided.
この小孔方式では、横方向の通気性がないため多孔質方
式のようにわざわざ隔壁を設ける必要はない。In this small hole method, there is no lateral ventilation, so there is no need to take the trouble of providing partitions as in the porous method.
しかし、均一で良好な吸着力を得るためには、極めて多
数の小孔を高い寸法精度で設ける必要があり、機械加工
では困難な面がある。However, in order to obtain a uniform and good suction force, it is necessary to provide a very large number of small holes with high dimensional accuracy, which is difficult to do with machining.
また、小孔を機械加工することから、その設備費及び作
業時間から高コストとなるといった課題が生じる。Further, since the small holes are machined, there arises a problem that the cost becomes high due to the equipment cost and working time.
一方、小孔数を少なくすれば、機械加工にかかるコスト
を下げることができるが、吸着性能のバラツキが大きく
なるという課題がある。On the other hand, if the number of small holes is reduced, the cost of machining can be lowered, but there is a problem in that the variation in suction performance increases.
本発明は、上述した従来の吸着盤の製造方法が有する種
々の課題に鑑みなされたものであって、その目的は、
（１） 細孔の大きさは、多孔質方式のように微細化
できること、
（２） 細孔の形状特性は、小孔方式のように枝分か
れなく一次元的であって、特別に隔壁を設けてやる必要
がないこと、
（３）細孔を形成する手段は、多孔質方式のように成形
後に既に出来上っており、その製造工程自体に量産性が
あること、
といったすべての条件を満足し得るセラミックス製吸着
盤の製造方法を提供することにある。The present invention was made in view of the various problems that the conventional suction cup manufacturing method described above has, and its objectives are: (1) The size of the pores can be made finer as in the porous method. (2) The shape characteristics of the pores are one-dimensional without branching unlike the small pore method, and there is no need to provide special partition walls; (3) The means for forming the pores is The object of the present invention is to provide a method for manufacturing a ceramic suction cup that satisfies all of the following conditions: the ceramic suction cup is already completed after molding, and the manufacturing process itself is mass-producible, as in the quality method.
Ｃ０課題を解決するための手段
本発明は、上述したｌＩＮを解決するため、その要旨は
、未焼成のセラミックス原料を同一断面形状の長尺な棒
状体に成形し、該棒状体を複数本束ね、該棒状体同士の
間隙あるいは該棒状体中に形成した間隙を完全にはつぶ
さない程度の押圧力により互いに圧着させ、その後焼成
することにより前記圧着部において棒状体同士を結合し
、かつ長手方向に貫通した同一断面形状の細孔を複数、
規則正しく形成したセラミックス製吸着盤の製造方法に
ある。Means for solving the C0 problem In order to solve the above-mentioned IN, the gist of the present invention is to form an unfired ceramic raw material into a long rod-like body with the same cross-sectional shape, and to bundle a plurality of the rod-like bodies. , the rod-shaped bodies are crimped together with a pressing force that does not completely collapse the gap between the rod-shaped bodies or the gap formed in the rod-shaped body, and then baked to bond the rod-shaped bodies to each other at the crimped portion, and in the longitudinal direction Multiple pores with the same cross-sectional shape penetrating the
A method of manufacturing a regularly formed ceramic suction cup.
以下、本発明を更に詳細に説明する。The present invention will be explained in more detail below.
ここで、セラミックス原料としては、アルミナ。Here, the ceramic raw material is alumina.
窒化珪素、ジルコニア、炭化珪素、ムライト等、通常の
粉末冶金的方法で製造される種々のセラミックス原料が
使用できる。Various ceramic raw materials produced by ordinary powder metallurgy methods can be used, such as silicon nitride, zirconia, silicon carbide, and mullite.
本発明は、まず上記セラミックス原料を同一断面形状の
長尺な棒状体に押出成形等の手段により成形する。In the present invention, first, the above-mentioned ceramic raw material is molded into a long rod-shaped body having the same cross-sectional shape by means such as extrusion molding.
棒状体の断面形状は、第１図（ａ）に示した円形のみな
らず、第１図（ｂ）〜（６）に記載した角形としても良
い。The cross-sectional shape of the rod-shaped body is not limited to the circular shape shown in FIG. 1(a), but may also be the rectangular shape shown in FIGS. 1(b) to (6).
但し、第２図（ａ）〜（ｄ）に記載した如く、該棒状体
１を複数本規則正しく束ねた場合、該棒状体１同士の間
に間隙２が形成されない、例えば四角形、六角形等の断
面形状の棒状体ｌに対しては、その中心に貫通孔３を形
成してお（。However, as shown in FIGS. 2(a) to 2(d), when a plurality of rod-like bodies 1 are regularly bundled together, no gaps 2 are formed between the rod-like bodies 1, for example, square, hexagonal, etc. A through hole 3 is formed in the center of the rod-shaped body l having a cross-sectional shape.
つぎに、上述した断面形状の棒状体ｌを、第２図（ａ）
〜（ｄ）に示した如く、複数本規則正しく最密充填とな
るように束ね、該棒状体の集合体４を、ゴム袋（図示せ
ず）に入れた状態で、冷間静水圧成形（ＣＩＰ）等によ
り圧着させる。Next, the rod-shaped body l having the above-mentioned cross-sectional shape is shown in FIG. 2(a).
As shown in ~(d), a plurality of rods are regularly bundled in a close-packed manner, and the assembly 4 of the rods is placed in a rubber bag (not shown) and subjected to cold isostatic pressing (CIP). ) etc. to crimp.
この際、前記した棒状体１同士の間隙２、あるいは棒状
体１中に形成した貫通孔３を完全にはつぶさない程度に
制御した押圧力により、該棒状体１同士を圧着させる。At this time, the rod-like bodies 1 are pressed together using a pressing force that is controlled to the extent that the gap 2 between the rod-like bodies 1 or the through hole 3 formed in the rod-like body 1 is not completely crushed.
なお、棒状体１に適当な可塑性及び付着性が発現するよ
う、調合した成形助剤をセラミックス原料の配合時、あ
るいは棒状体の押出成形後に添加しておくことが好まし
い。In order to develop appropriate plasticity and adhesion in the rod-shaped body 1, it is preferable to add a prepared molding aid at the time of blending the ceramic raw materials or after extrusion molding of the rod-shaped body.
その後焼成することにより、前記棒状体ｌ同士をその圧
着部において結合すると共に、前記棒状体１同士の間隙
２、あるいは棒状体１中に形成した貫通孔３を利用して
、長手方向に貫通した同一断面形状の細孔を複数、規則
正しく形成する。After that, by firing, the rod-shaped bodies 1 are bonded together at their crimped portions, and the rod-shaped bodies 1 are penetrated in the longitudinal direction by using the gaps 2 between the rod-shaped bodies 1 or the through holes 3 formed in the rod-shaped bodies 1. A plurality of pores with the same cross-sectional shape are formed regularly.
なお、焼成温度、焼成時間等の条件は、通常のセラミッ
クス製品の焼成条件に準じて行なう。Note that the firing temperature, firing time, and other conditions are based on the firing conditions for ordinary ceramic products.
本発明にかかるセラミックス製吸着盤の製造方法は、上
述した如く、多数の棒状体１を束ね、その棒状体１同士
の間隙２、あるいは棒状体１中に形成した貫通孔３を利
用して吸引用の細孔を形成するものであるため、形成さ
れた細孔は、前述した機械的手段による小孔方式と同様
に、長手方向に延びる一次元的に貫通孔となり、多孔質
方式のように隔壁を設ける必要はなく、また種々の大き
さのワークに対処できる吸着盤となる。As described above, the method for manufacturing a ceramic suction cup according to the present invention involves bundling a large number of rod-like bodies 1 and using the gaps 2 between the rod-like bodies 1 or the through holes 3 formed in the rod-like bodies 1 to suck the suction cup. The pores formed are one-dimensional through holes extending in the longitudinal direction, similar to the small pore method using mechanical means described above, and unlike the porous method. There is no need to provide a partition wall, and the suction cup can handle workpieces of various sizes.
また、形成される細孔の径及びその形成密度は、束ねる
棒状体１の成形条件、あるいは成形された棒状体１の断
面形状９寸法または棒状体１同士の圧着条件等によって
容易に制御することができ、多孔質方式の如く、微細な
貫通孔を高密度で形成することができる。In addition, the diameter of the pores formed and their formation density can be easily controlled by the molding conditions of the rod-shaped bodies 1 to be bundled, the cross-sectional shape 9 dimensions of the molded rod-shaped bodies 1, or the conditions of pressure bonding between the rod-shaped bodies 1, etc. As in the porous method, fine through holes can be formed at high density.
さらに、本発明にかかる製造方法は、粗粒を用いた多孔
質方式のように粗粒を１個ずつ配列したり、小孔方式の
ように機械加工により小孔を１個ずつあけるものではな
く、形成した棒状体ｌを束ね、適当な押圧力を加えた後
焼成すればよく、その作業はきわめて簡単で量産性に富
む。Furthermore, the manufacturing method according to the present invention does not involve arranging coarse grains one by one as in the porous method using coarse grains, or drilling small holes one by one by machining as in the small hole method. , the formed rod-shaped bodies L may be bundled, an appropriate pressing force applied, and then fired, and this operation is extremely simple and highly suitable for mass production.
以下、本発明の実施例を記載する。Examples of the present invention will be described below.
但し、本発明は下記する実施例に限定されるものではな
く、本発明の技術的思想に基づいて、各種の変形及び変
更が可能であることは当然である。However, the present invention is not limited to the embodiments described below, and it goes without saying that various modifications and changes can be made based on the technical idea of the present invention.
ｄ、 実施例
〔実施例１〕
純度９９．５％の昌焼結アルミナに固形分換算で、原料
粉１００重量部に対し信越化学工業■製メトローズ６０
Ｓ１１−４０００を５重量部、和光純薬工業■製グリセ
リン特級２．５重量部、日本油脂■製セラミゾール２．
５重量部、及びイオン交換水２０重量部加えて混練し、
φ３■の丸棒を押出成形した。d. Example [Example 1] Metrose 60 manufactured by Shin-Etsu Chemical Co., Ltd. was added to 100 parts by weight of raw material powder in terms of solid content of 99.5% pure sintered alumina.
5 parts by weight of S11-4000, 2.5 parts by weight of special grade glycerin manufactured by Wako Pure Chemical Industries, Ltd., and 2.5 parts by weight of ceramisol manufactured by NOF ■.
5 parts by weight, and 20 parts by weight of ion-exchanged water were added and kneaded,
A round bar with a diameter of 3 mm was extruded.
この丸棒を１ａｉｉ条件下で乾燥し、可塑剤として働く
水分量を６．７％となるように調節した。This round bar was dried under 1aii conditions, and the amount of water acting as a plasticizer was adjusted to 6.7%.
その後、丸棒の長さが５０閣となるように切りそろえ、
第２１図（ａ）に示した如（最密充填となるようにゴム
輪で束ね、該丸棒の集合体をゴム袋に入れ１０００ｋｇ
／ｃｉｉの圧力でａｒｐにより成形し、丸棒間の隙間が
完全につぶれておらず、かつ丸棒同士が十分に圧着した
２次成形体を得た。After that, cut the round sticks so that the length is 50 pieces,
As shown in Fig. 21 (a) (bundle with rubber rings so as to achieve the closest packing, put the collection of round rods in a rubber bag and store 1000 kg
A secondary molded product was obtained by molding by ARP at a pressure of /cii, and the gaps between the round bars were not completely collapsed, and the round bars were sufficiently crimped together.
この２次成形体を８０°Ｃで一昼夜乾燥させ、その後１
６００’Ｃで３時間保持して焼成し、−次元的な貫通孔
を有した高純度アルミナ焼結体を得た。This secondary molded body was dried at 80°C for a day and night, and then
It was held and fired at 600'C for 3 hours to obtain a high purity alumina sintered body having -dimensional through holes.
〔実施例２）
純度９２％に配合したアルミナ原料粉に固形分換算で、
原料粉１００重量部に対し信越化学工業■製メトローズ
６０５）１−４０００を３重量部、和光純薬工業■製グ
リセリン特級３重量部、サンノプコ■製ディスパノール
ＴＯＣを２重量部、及びイオン交換水２８重量部を加え
て混練し、全ＩＩ ３ ｍの第１図（イ）に示した六角
形断面を持った角棒を押出成形した。[Example 2] In terms of solid content, the alumina raw material powder blended with a purity of 92% was
For 100 parts by weight of raw material powder, 3 parts by weight of Metrose 605) 1-4000 manufactured by Shin-Etsu Chemical, 3 parts by weight of special grade glycerin manufactured by Wako Pure Chemical Industries, 2 parts by weight of Dispanol TOC manufactured by Sannopco, and ion-exchanged water. 28 parts by weight were added and kneaded, and a rectangular bar having a total length of 3 m and a hexagonal cross section as shown in FIG. 1(a) was extruded.
この角棒を調湿条件下で室温から１０５℃まで加熱し、
含水率が０．５％以下となるまで乾燥させた。This square bar was heated from room temperature to 105°C under humidity controlled conditions,
It was dried until the moisture content became 0.5% or less.
その後、長さが５０閣となるように切りそろえ、第２図
（切に示した如く規則正しくゴム輪で束ね、該角棒の集
合体をゴム袋に入れた状態で３００ ｋｇ ／ ｃｌｉ
でＣＩＰ Ｌ、、角棒同士を圧着させると共に、長手方
向に貫通孔を有した２次成形体を得た。After that, they were cut to a length of 50 pieces, tied together with rubber rings in a regular manner as shown in Figure 2, and the assembly of square sticks was placed in a rubber bag, weighing 300 kg/cli.
With CIP L, the square bars were crimped together and a secondary molded body having through holes in the longitudinal direction was obtained.
この２次成形体を１６００℃で３時間保持して焼成し、
断面形状が四角形の一次元的な貫通孔を有する９２％ア
ルミナ焼結体を得た。This secondary molded body was held and fired at 1600°C for 3 hours,
A 92% alumina sintered body having a one-dimensional through hole with a square cross-sectional shape was obtained.
〔実施例３）
実施例２で調製した９２％アルミナ原料混練物を用いて
、全幅３閤で中心に０．５閣の丸孔を貫通させた第１図
（Ｃ）に示した六角形断面を持った角棒を押出成形した
。[Example 3] Using the 92% alumina raw material kneaded material prepared in Example 2, the hexagonal cross section shown in Figure 1 (C) was made by penetrating a round hole of 0.5 mm in the center with a total width of 3 mm. A square rod with a shape was extruded.
この角棒を長さ５０ｍに切りそろえ、実施例２と同様に
、最終的に１０５℃まで加熱することにより含水率０．
５％以下まで乾燥させた。This square rod was cut to a length of 50 m, and as in Example 2, the water content was reduced to 0 by finally heating it to 105°C.
It was dried to less than 5%.
その後、第２図（Ｃ）の如く最密充填となるように角棒
をゴム輪で束ね、該角棒の集合体をゴム袋に入れた状態
で３００ ｋｇ ／ ｄでＣＴＰ ｌ、、角棒同士を圧
着させた。Thereafter, the square rods were bundled with rubber rings so as to be packed in the closest density as shown in Fig. 2 (C), and the square rods were placed in a rubber bag and CTP l, square rods were packed at 300 kg/d. They were pressed together.
この成形体を１６００℃で３時間焼成し、断面形状が円
形である一次元貫通孔を有する９２％アルミナ焼結体を
得た。This molded body was fired at 1600° C. for 3 hours to obtain a 92% alumina sintered body having one-dimensional through holes with a circular cross-sectional shape.
ｅ、 発明の効果
本発明にかかるセラミックス製吸着盤の製造方法によれ
ば、きわめて簡易な作業によって、微細な一次元的な貫
通孔を高密度でしかも規則正しく有する吸着盤を製造で
きる。e. Effects of the Invention According to the method for manufacturing a ceramic suction cup according to the present invention, a suction cup having fine one-dimensional through-holes with high density and regularity can be manufactured by an extremely simple operation.
図面は本発明の実施例を示したものであって、第１図（
司〜（ロ）は、−次成形品である棒状体の断面形状を示
した図、第２図（ａ）〜（ロ）は、各々第１図に示した
棒状体を最密充填となるように束ねた状態を示した図で
ある。
１・・・棒状体、 ２・・・間隙、３・・・貫
通孔、 ４・・・集合体。
第１図The drawings show an embodiment of the present invention, and include FIG.
Tsukasa to (b) are diagrams showing the cross-sectional shape of the rod-shaped body that is the next molded product, and Figures 2 (a) to (b) are the figures in which the rod-shaped bodies shown in Figure 1 are packed close to each other. It is a figure showing a state where it is bundled like this. DESCRIPTION OF SYMBOLS 1... Rod-shaped body, 2... Gap, 3... Through hole, 4... Aggregate. Figure 1
Claims (1)
状体に成形し、該棒状体を複数本束ね、該棒状体同士の
間隙あるいは該棒状体中に形成した間隙を完全にはつぶ
さない程度の押圧力により互いに圧着させ、その後焼成
することにより前記圧着部において棒状体同士を結合し
、かつ長手方向に貫通した同一断面形状の細孔を複数、
規則正しく形成したことを特徴とするセラミックス製吸
着盤の製造方法。An unfired ceramic raw material is formed into a long rod-like body with the same cross-sectional shape, a plurality of the rod-like bodies are bundled, and the gaps between the rod-like bodies or the gaps formed in the rod-like bodies are heated to the extent that they are not completely crushed. A plurality of pores having the same cross-sectional shape passing through the longitudinal direction are formed by bonding the rod-like bodies together in the crimped portion by crimping them together using a pressing force and then firing them.
A method for manufacturing a ceramic suction cup characterized by regularly formed suction cups.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1273588A JPH03137067A (en) | 1989-10-20 | 1989-10-20 | Production of suction pad made of ceramics |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1273588A JPH03137067A (en) | 1989-10-20 | 1989-10-20 | Production of suction pad made of ceramics |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03137067A true JPH03137067A (en) | 1991-06-11 |
Family
ID=17529885
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1273588A Pending JPH03137067A (en) | 1989-10-20 | 1989-10-20 | Production of suction pad made of ceramics |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03137067A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019165195A (en) * | 2018-03-14 | 2019-09-26 | Toto株式会社 | Electrostatic chuck |
-
1989
- 1989-10-20 JP JP1273588A patent/JPH03137067A/en active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019165195A (en) * | 2018-03-14 | 2019-09-26 | Toto株式会社 | Electrostatic chuck |
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