JPH03134509A - Optical measuring apparatus - Google Patents
Optical measuring apparatusInfo
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- JPH03134509A JPH03134509A JP27148789A JP27148789A JPH03134509A JP H03134509 A JPH03134509 A JP H03134509A JP 27148789 A JP27148789 A JP 27148789A JP 27148789 A JP27148789 A JP 27148789A JP H03134509 A JPH03134509 A JP H03134509A
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- Prior art keywords
- light
- measured
- component
- light source
- splitter
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- 230000003287 optical effect Effects 0.000 title claims description 12
- 238000006243 chemical reaction Methods 0.000 claims description 15
- 238000005259 measurement Methods 0.000 claims description 11
- 230000010287 polarization Effects 0.000 abstract description 6
- 235000019557 luminance Nutrition 0.000 abstract 3
- 238000002310 reflectometry Methods 0.000 abstract 2
- 230000002463 transducing effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 8
- 230000006866 deterioration Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
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- Length Measuring Devices By Optical Means (AREA)
- Measurement Of Optical Distance (AREA)
Abstract
Description
【発明の詳細な説明】
「産業上の利用分野」
この発明は、被測定物の反射光を利用した測定装置で、
例えば、自動車の車高測定、スプリングの撓み量測定、
カメラの距離測定などに利用するところの光学的測定装
置に関する。[Detailed Description of the Invention] "Industrial Application Field" This invention is a measuring device that uses reflected light from an object to be measured.
For example, measuring the height of a car, measuring the amount of deflection of a spring,
This invention relates to an optical measurement device used for distance measurement of cameras, etc.
［従来の技術」
被測定物の反射光を利用した測定装置として様々な構成
のものがあるが、その−例を第７図に示す。[Prior Art] There are various configurations of measurement devices that utilize reflected light from an object to be measured, and an example thereof is shown in FIG.
この従来例は１点光ｇ１１と、広い光面積を有する面光
源１２とを備え、これら光源１１，１２より被測定物１
３を照射する。This conventional example includes a single point light g11 and a surface light source 12 having a wide light area, and these light sources 11 and 12 illuminate the object to be measured.
Irradiate 3.
被測定物１３の反射光は受光器１４によって受光される
。受光器１４は光源１１の投光による反射光と光１１２
の投光による反射光とに応じて、これら反射光害々の受
光量にしたがって光電変換信号ＳＸ、Ｓ２を出力する。The reflected light from the object to be measured 13 is received by the light receiver 14 . The light receiver 14 receives reflected light emitted from the light source 11 and light 112.
The photoelectric conversion signals SX and S2 are output in accordance with the amount of reflected light reflected by the projected light and the amount of received reflected light pollution.
この測定装置の場合、光ｇ１１．１２各々の投光による
被測定物１３の照度をＥｐ、Ｅｓ、被測定物１３の反射
率をＫとすると、被測定物１３の面輝度にット）がＫＥ
Ｐ、ＫＥｓに対応したものとなる。In the case of this measuring device, let Ep and Es be the illuminance of the object to be measured 13 projected by each of the lights g11 and 12, and K be the reflectance of the object to be measured 13, then the surface brightness of the object to be measured 13 is K.E.
This corresponds to P and KEs.
したがって、これら面輝度の比が。Therefore, the ratio of these surface brightness is.
Ｅ ｐ ／ Ｅ ｓ ｏ＝ Ｓ、／ Ｓ、−−・＝
（１）となるから、光電変換信号Ｓ、、Ｓ、を距離の
関数として演算することにより被測定物１３までの距離
ｄを求めることができる。E p / E so = S, / S, --・=
(1) Therefore, the distance d to the object to be measured 13 can be found by calculating the photoelectric conversion signals S, , S, as a function of distance.
上記した測定装置は本特許出願の発明者等によって開発
され、昭和６２年特許願第２３６２０９号（特開昭６４
−７９６８５）として既に出願されている。The above-mentioned measuring device was developed by the inventors of the present patent application, and was filed in Patent Application No. 236209 in 1988 (Japanese Patent Laid-Open No. 64
-79685) has already been filed.
「発明が解決しようとする課題」
上記した従来の測定装置は、上記（１）式より分かるよ
うに、被測定物１３の面輝度の比より距離測定するため
、被測定物１３の反射率Ｋに影響されない測定装置とし
て極めて有利である。"Problem to be Solved by the Invention" As can be seen from the above equation (1), the conventional measuring device described above measures the distance based on the ratio of the surface brightness of the object to be measured 13, so the reflectance K of the object to be measured 13 is This is extremely advantageous as a measuring device that is not affected by
ただ、この測定装置では、２つの光源１１．１２の投光
を利用するため、これら光源１１．１２が劣化等の原因
によって投光の強さが変化した場合に問題が生ずる。However, since this measuring device uses the light emitted from the two light sources 11 and 12, a problem occurs when the intensity of the light emitted changes due to deterioration or other causes of these light sources 11 and 12.
すなわち、光ｇ１１．１２の投光の強さが同率で変化し
た場合には問題がないが、異なった比率で変化したとき
に測定結果に誤差が生ずる。That is, there is no problem if the intensity of the projected light g11.12 changes at the same rate, but an error occurs in the measurement results when it changes at a different rate.
そこで、本発明では上記した測定装置の光源を一つの光
源によって投光するようにして上記した問題点を解決す
ることを目的とする。Therefore, an object of the present invention is to solve the above-mentioned problems by projecting light from a single light source for the above-mentioned measuring device.
「課題を解決するための手段」
上記した目的を達成するため、本発明では、１つの光源
からの光を性質の異なる２つの光に分割すると共に、２
つの分割光の光路長を変えて被測定物に投光する投光手
段と、被測定物の反射光を光電変換し、２つの分割光別
の光電変換信号を比較処理して測定情報を出力す信号処
理手段とより構成したことを特徴とする光学的測定装置
を提案する。"Means for Solving the Problem" In order to achieve the above-mentioned object, the present invention splits the light from one light source into two lights with different properties, and
A light projection means that changes the optical path length of two divided lights and projects them onto the object to be measured, photoelectrically converts the reflected light from the object, compares and processes the photoelectric conversion signals of the two divided beams, and outputs measurement information. We propose an optical measurement device characterized by comprising a signal processing means.
「作 用」
性質の異なる２つの光が一つの光源より被測定物に投光
される。"Operation" Two lights with different properties are projected onto the object to be measured from a single light source.
そして、分割された２つの光は光路長の差に応じて異な
る照度特性によって被測定物に照射される。Then, the two divided lights are irradiated onto the object to be measured with different illuminance characteristics depending on the difference in optical path length.
被測定物のこのような２通りの輝度は反射光として受光
され、分割光別の光電変換信号を比較する信号処理手段
より測定情報が出力される。These two types of brightness of the object to be measured are received as reflected light, and measurement information is output from a signal processing means that compares photoelectric conversion signals for each divided light.
「実施例」 次に、本発明の実施例について図面に沿って説明する。"Example" Next, embodiments of the present invention will be described with reference to the drawings.
第１図は本発明に係る投光手段の実施例を示し、２１は
発光ダイオードなどの光源、２２は偏光ビームスプリッ
タ、２３．２４．２５は全反射ミラ、２６は被測定物で
ある。FIG. 1 shows an embodiment of the light projection means according to the present invention, in which 21 is a light source such as a light emitting diode, 22 is a polarizing beam splitter, 23, 24, 25 is a total reflection mirror, and 26 is an object to be measured.
光源２１の光はその偏光成分Ｐ、Ｓが偏光ビームスプリ
ッタ２２によって分離される。The polarized light components P and S of the light from the light source 21 are separated by the polarizing beam splitter 22 .
すなわち、偏光成分Ｐの光がこのスプリッタ２２によっ
て反射されて被測定物２６に照射され。That is, the light with polarized component P is reflected by this splitter 22 and irradiated onto the object to be measured 26.
方、偏光成分Ｓの光はこのスプリッタ２２を透過した後
、全反射ミラー２３．２４．２５によって反射を繰返し
再び上記スプリッタ２２を透過して被測定物２６に照射
される。On the other hand, the light having the polarized component S passes through the splitter 22, is repeatedly reflected by the total reflection mirrors 23, 24, and 25, passes through the splitter 22 again, and is irradiated onto the object to be measured 26.
この結果、光源２１から被測定物２６までの距離は、偏
光成分Ｐの光に比べて偏光成分Ｓの光が２ｄ１＋２ｄ、
だけ長くなる。As a result, the distance from the light source 21 to the object to be measured 26 is 2d1+2d for the polarized component S light compared to the polarized component P light.
only becomes longer.
第２図は被測定物上の照度特性で、Ｐｏは偏光成分Ｐの
光の特性を、Ｓｏは偏光成分Ｓの光の特性を各々示す。FIG. 2 shows the illuminance characteristics on the object to be measured, where Po shows the characteristics of the light with the polarization component P, and So shows the characteristics of the light with the polarization component S.
被測定物２６が上記の照度特性にしたがって投光される
ことになる。ここで、被測定物２６の反射率をＫ、被測
定物２６における偏光成分Ｐの光の照度をＥｐ、偏光成
分Ｓの光の照度をＥｓとすると、被測定物２６の輝度に
ット）がＫＥｐ、ＫＥｓに対応したものとなる。The object to be measured 26 is illuminated with light according to the above illuminance characteristics. Here, if the reflectance of the object to be measured 26 is K, the illuminance of the light with the polarized component P on the object 26 is Ep, and the illuminance of the light with the polarized component S is Es, then the brightness of the object to be measured 26 is corresponds to KEp and KEs.
そこで、被測定物２６の輝度をＢｐ、Ｂｓとしてこれら
の輝度の比を求めれば、
Ｂ ｐ／Ｂ ｓ ｃｃ Ｅ ｐ／Ｅ ｓ −−（２）
となり、被測定物２６の反射率Ｋに関係なく、この輝度
Ｂｐ、Ｂｓを測定することによって被測定物２６までの
距＠Ｄを算出することができる。Therefore, if the brightness of the object to be measured 26 is set as Bp and Bs, and the ratio of these brightnesses is calculated, B p/B s cc E p/E s --(2)
Regardless of the reflectance K of the object to be measured 26, the distance @D to the object to be measured 26 can be calculated by measuring the brightness Bp and Bs.
第１図において、光源２１と偏光ビームスプリッタ２２
の間の距離は被測定物２６までの距離りに比べて極く短
くすることができるから、この間の距離を零と仮定する
と、被測定物２６における偏光成分Ｐの光の照度は、Ｅ
ｐ＝ｌ／Ｄ２、偏光成分Ｓの光の照度は、Ｅｓ＝１／
（Ｄ＋ｄ）２となる。ただし、光源２１の光の強さをｒ
ｌＪ、ｄ＝２ｄ、＋２ｄ、とする。In FIG. 1, a light source 21 and a polarizing beam splitter 22
Since the distance between them can be made extremely short compared to the distance to the object to be measured 26, assuming that this distance is zero, the illuminance of the polarized light component P on the object to be measured 26 is E
p=l/D2, the illuminance of the light with polarized component S is Es=1/
(D+d)2. However, the intensity of light from the light source 21 is r
Let lJ, d=2d, +2d.
ここで、Ｅｐ、Ｅｓの比は、
Ｅｐ／Ｅｓ＝ （Ｄ／ （Ｄ＋ｄ））”・−・（３）と
なり、この（３）式よりＤを算出し、被測定物２６まで
の距離を求めることができる。Here, the ratio of Ep and Es is Ep/Es= (D/ (D+d))" - (3), and D is calculated from this formula (3) to find the distance to the object to be measured 26. be able to.
第３図は上記実施例にもとすいて投光手段を構成した本
発明の他の実施例である。FIG. 3 shows another embodiment of the present invention in which a light projecting means is constructed based on the above embodiment.
図示する如く、光源２１の光は複屈折性を有する光学素
子２７を介して被測定物２６に投光する構成としである
。As shown in the figure, the light from the light source 21 is projected onto the object to be measured 26 via an optical element 27 having birefringence.
上記光学素子２７は、偏光方向によって屈折率が異なる
光学素子であり、偏光成分Ｐの光に対する屈折率をｎｐ
、偏光成分Ｓの光に対す屈折率をｎＳとすると、光学素
子２７の長さＱに対する光路長が各々ｎｐＱ、ｎｓＱと
なる。The optical element 27 is an optical element whose refractive index differs depending on the polarization direction, and has a refractive index of np for light of polarization component P.
, when the refractive index for the polarized light component S is nS, the optical path lengths with respect to the length Q of the optical element 27 are npQ and nsQ, respectively.
この結果、光源２１が偏光成分ＰとＳとの光では光学的
に異なった位置となる関係で、被測定物２６に対する照
度が偏光成分ＰとＳとの光によって変ったものとなり、
第２図に示した照度特性と同様の特性をもった投光手段
となる。As a result, the light source 21 is located at an optically different position for the polarized light components P and S, and the illuminance on the object to be measured 26 changes depending on the polarized light components P and S.
The light projecting means has illuminance characteristics similar to those shown in FIG.
したがって、既に説明したように、偏光成分ＰとＳとの
光による被測定物２６の輝度を別々に測定することによ
って、被測定物２６までの距離りを算出することができ
る。Therefore, as described above, by separately measuring the brightness of the object to be measured 26 due to the polarized light components P and S, the distance to the object to be measured 26 can be calculated.
第４図は被測定物２６の輝度を測定するための受光手段
を示す一実施例である。FIG. 4 shows an embodiment of a light receiving means for measuring the brightness of the object 26 to be measured.
図示する如く、偏光成分Ｐ、Ｓの光が混合した被測定物
２６の反射光が集光レンズ２８によって集光されて偏光
ビームスプリッタ２９に入射する。As shown in the figure, the reflected light from the object to be measured 26, which is a mixture of polarized light components P and S, is condensed by a condensing lens 28 and enters a polarizing beam splitter 29.
したがって、偏光成分Ｐの光がこのスプリッタ２９によ
って反射されて一方の受光素子３０に入射し、偏光成分
Ｓの光がこのスプリッタ２９を透過して他方の受光素子
３１に入射し、これら受光素子３０．３１によって偏光
成分Ｐ、Ｓの光が別個に光電変換される。Therefore, the light with polarized component P is reflected by this splitter 29 and enters one of the light receiving elements 30, and the light with polarized light component S passes through this splitter 29 and enters the other light receiving element 31, and these light receiving elements 30 .31, the polarized light components P and S are separately photoelectrically converted.
第５図は受光手段の他の実施例を示す。この実施例では
、偏光成分Ｐ、Ｓの光が混合された被測定物２６の反射
光が偏光フィルター３２Ｐ、３２Ｓに入射される。FIG. 5 shows another embodiment of the light receiving means. In this embodiment, reflected light from the object to be measured 26, in which light with polarized components P and S is mixed, is incident on polarizing filters 32P and 32S.
そして、偏光フィルター３２Ｐは偏光成分Ｐの光のみを
透過し、その透過光を集光レンズ３３Ｐを介して受光素
子３０に入射させる。The polarizing filter 32P transmits only the light of the polarized component P, and the transmitted light is incident on the light receiving element 30 via the condenser lens 33P.
同様に、偏光フィルター３２８は偏光成分Ｓのみの光を
透過し、その透過光を集光レンズ３３Ｓを介して受光素
子３１に入射させる。このように偏光成分Ｐ、Ｓの光が
選択され別々に光電変換される。Similarly, the polarizing filter 328 transmits only the polarized light component S, and makes the transmitted light enter the light receiving element 31 via the condenser lens 33S. In this way, the polarized light components P and S are selected and separately photoelectrically converted.
第６図は信号処理手段の一例を示した回路図であり、３
４．３５は対数変換回路、３６は差動増幅器である。FIG. 6 is a circuit diagram showing an example of a signal processing means, and 3
4.35 is a logarithmic conversion circuit, and 36 is a differential amplifier.
対数変換回路３４は受光素子３０の光電変換電流Ｉｐを
適当な手段によって電圧Ｖｐに変換すると共に、この電
圧Ｖｐを対数変換する。The logarithmic conversion circuit 34 converts the photoelectric conversion current Ip of the light receiving element 30 into a voltage Vp by an appropriate means, and also logarithmically converts this voltage Vp.
同様に対数変換回路３５は受光素子３１の光電変換電流
Ｉｓを電圧Ｖｓに変換すると共に、この電圧Ｖｓを対数
変換する。Similarly, the logarithmic conversion circuit 35 converts the photoelectric conversion current Is of the light receiving element 31 into a voltage Vs, and also logarithmically converts this voltage Vs.
差動増幅器３６は対数変換回路３４．３５より対数変換
電圧（Ｑｏ ｇＶｐ、Ｑ ｏ ｇＶｓ）を入力して、こ
れらの差電圧（Ｑ ｏ ｇＶｐ−１１ｏ ｇＶｓ＝Ｑｏ
ｇＲ）を測定距離情報として出力する。The differential amplifier 36 inputs the logarithmically converted voltages (Qo gVp, Qo gVs) from the logarithm conversion circuit 34.35, and calculates the difference voltage (Qo gVp-11o gVs=Qo gVs).
gR) is output as measured distance information.
上記した信号処理手段は、
Ｅｐ／Ｅｓ ｃｃ Ｖｐ／Ｖｓ
の関係があることから、
Ｖ ｐ ／ Ｖ ｓ ＝ Ｒ
とし、この両辺の対数をとり、
ＱｏｇＶｐ／Ｖｓ＝ＱｏｇＲ＋
Ｑ ｏ ｇ Ｖ ｐ −ｎ ｏ ｇ Ｖ ｓ ＝ Ｑ
ｏ ｇ Ｒを算出する構成となっている。Since the above signal processing means has the relationship Ep/Es cc Vp/Vs, we set V p / V s = R, take the logarithm of both sides, and obtain QogVp/Vs = QogR + Q o g V p -no gVs=Q
It is configured to calculate o g R.
なお、受光素子３０．３１の開放電圧を利用する場合は
、対数変換回路３４．３５を増幅器に置き換えればよい
。In addition, when utilizing the open circuit voltage of the light receiving element 30.31, the logarithmic conversion circuit 34.35 may be replaced with an amplifier.
以上、本発明の実施例について説明したが、信号処理手
段としては第６図に示す回路構成にかぎらず、光電変換
信号をＡ／Ｄ変換してデジタル処理する構成、除算回路
によって信号処理する構成などとしてもよい。Although the embodiments of the present invention have been described above, the signal processing means is not limited to the circuit configuration shown in FIG. 6, but is also applicable to a configuration in which a photoelectric conversion signal is A/D converted and digitally processed, and a configuration in which signal processing is performed by a division circuit. etc.
さらに、周囲光の影響を受けないようにするため、光源
２１の光をパルス光、または変調光などとしてもよい。Further, in order to avoid being affected by ambient light, the light from the light source 21 may be pulsed light, modulated light, or the like.
また、白熱電球のように発光波長が広い幅をもつ光源を
使用する場合には、光源の光を異なった波長に分割して
投光する構成としてもよい。ただ、このように実施する
場合は、上記実施例に示した偏光ビームスプリッタ２２
．２９に換えてダイクロイックミラーを用い、また、偏
光フィルター３２Ｐ、３２Ｓに換辷てバンドパスフィル
ターなどを用いる。Furthermore, when using a light source with a wide range of emission wavelengths, such as an incandescent light bulb, a configuration may be adopted in which the light from the light source is divided into different wavelengths and projected. However, when implementing it in this way, the polarizing beam splitter 22 shown in the above embodiment
．． A dichroic mirror is used in place of 29, and a bandpass filter or the like is used in place of polarizing filters 32P and 32S.
「発明の効果」
上記した通り１本発明に係る測定装置では、１つの光源
の光を性質の異なる２つの光に分割し、さらに１分割し
た各々の光の光路長を変えて被測定物に投光する投光手
段と、被測定物の反射光を光電変換し、２つの分割光別
の光電変換信号を比較処理して測定情報を出力する信号
処理手段とより構成したため、被測定物の反射率に影響
されない測定装置として極めて有利である。"Effects of the Invention" As described above, the measuring device according to the present invention splits the light from one light source into two lights with different properties, and further changes the optical path length of each of the split lights to direct the light to the object to be measured. It consists of a light projection means that emits light, and a signal processing means that photoelectrically converts the reflected light of the object to be measured, compares and processes the photoelectric conversion signals of the two divided beams, and outputs measurement information. This is extremely advantageous as a measuring device that is not affected by reflectance.
また、一つの光源によって投光するため、光源の劣化等
の原因によって投光の強さが変化した場合にも測定結果
に影響しなく測定誤差の極めて少ない測定装置となる。Furthermore, since light is emitted by a single light source, even if the intensity of light emitted changes due to factors such as deterioration of the light source, the measurement results are not affected and the measuring device has extremely few measurement errors.
第１図は本発明に係る投光手段の一実施例を示す簡略図
、第２図は被測定物上の照度特性を示した特性図、第３
図は本発明に係る投光手段の他の実施例を示す簡略図、
第４図は本発明に係る受光手段の一実施例を示す簡略図
、第５図は受光手段の他の実施例を示す簡略図、第６図
は信号処理手段の一例を示した回路図、第７図は従来例
として示した測定装置の簡略図である。
２１・・・光源
２２・・・偏光ビームスプリッタ
２３．２４．２５・・・全反射ミラー
２６・・・被測定物
２７・・・受光素子
２８・・・集光レンズ
２９・・・偏光ビームスプリッタ
３０．３１・・・受光素子
３２Ｐ、３２Ｓ・・・偏光フィルター
３３Ｐ、３３Ｓ・・・集光レンズ
３４．３５・・・対数変換回路
３６・・・差動増幅器FIG. 1 is a simplified diagram showing an embodiment of the light projecting means according to the present invention, FIG. 2 is a characteristic diagram showing the illuminance characteristics on the object to be measured, and FIG.
The figure is a simplified diagram showing another embodiment of the light projecting means according to the present invention,
FIG. 4 is a simplified diagram showing one embodiment of the light receiving means according to the present invention, FIG. 5 is a simplified diagram showing another embodiment of the light receiving means, and FIG. 6 is a circuit diagram showing an example of the signal processing means. FIG. 7 is a simplified diagram of a measuring device shown as a conventional example. 21... Light source 22... Polarizing beam splitter 23.24.25... Total reflection mirror 26... Measured object 27... Light receiving element 28... Condensing lens 29... Polarizing beam splitter 30.31... Light receiving element 32P, 32S... Polarizing filter 33P, 33S... Condensing lens 34.35... Logarithmic conversion circuit 36... Differential amplifier
Claims (1)
と共に、２つの分割光の光路長を変えて被測定物に投光
する投光手段と、被測定物の反射光を光電変換し、２つ
の分割光別の光電変換信号を比較処理して測定情報を出
力す信号処理手段とより構成したことを特徴とする光学
的測定装置。A light projection means that splits the light from one light source into two lights with different properties, changes the optical path length of the two split lights, and projects the light onto the object to be measured, and a light projector that photoelectrically converts the light reflected from the object to be measured. , a signal processing means for comparing and processing photoelectric conversion signals of two divided light beams and outputting measurement information.
Priority Applications (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27148789A JPH06103183B2 (en) | 1989-10-20 | 1989-10-20 | Optical measuring device |
| EP90309625A EP0419082B1 (en) | 1989-09-21 | 1990-09-03 | Optical distance gauging apparatus |
| US07/578,083 US5056913A (en) | 1989-09-21 | 1990-09-05 | Optical gauging apparatus |
| CA002025887A CA2025887C (en) | 1989-09-21 | 1990-09-20 | Optical gauging apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27148789A JPH06103183B2 (en) | 1989-10-20 | 1989-10-20 | Optical measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03134509A true JPH03134509A (en) | 1991-06-07 |
| JPH06103183B2 JPH06103183B2 (en) | 1994-12-14 |
Family
ID=17500734
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27148789A Expired - Lifetime JPH06103183B2 (en) | 1989-09-21 | 1989-10-20 | Optical measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06103183B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04104005A (en) * | 1990-08-24 | 1992-04-06 | Stanley Electric Co Ltd | Optical measuring apparatus |
-
1989
- 1989-10-20 JP JP27148789A patent/JPH06103183B2/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04104005A (en) * | 1990-08-24 | 1992-04-06 | Stanley Electric Co Ltd | Optical measuring apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06103183B2 (en) | 1994-12-14 |
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