JPH03120410A - Automatic driving type comparative measuring instrument - Google Patents
Automatic driving type comparative measuring instrumentInfo
- Publication number
- JPH03120410A JPH03120410A JP25751089A JP25751089A JPH03120410A JP H03120410 A JPH03120410 A JP H03120410A JP 25751089 A JP25751089 A JP 25751089A JP 25751089 A JP25751089 A JP 25751089A JP H03120410 A JPH03120410 A JP H03120410A
- Authority
- JP
- Japan
- Prior art keywords
- axis
- measured
- probe
- slider
- axis slider
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000000052 comparative effect Effects 0.000 title 1
- 238000005259 measurement Methods 0.000 claims abstract description 34
- 239000000523 sample Substances 0.000 claims abstract description 31
- 230000001360 synchronised effect Effects 0.000 claims abstract description 9
- 238000006073 displacement reaction Methods 0.000 claims abstract description 4
- 230000006870 function Effects 0.000 claims description 6
- 239000002131 composite material Substances 0.000 abstract description 4
- 238000000691 measurement method Methods 0.000 description 6
- 238000001514 detection method Methods 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 5
- 238000004364 calculation method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000004575 stone Substances 0.000 description 2
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野とその目的〕
本発明は、直交座標系の案内をもつ三次元測定法に係り
、特に予めプログラミングされた所望の計測点に於ける
測定対象物の計測データを能動的に検出すると共に、こ
れを予め計測記憶したモデル測定物の計測値と比較して
、その偏差量を演算表示する自動駆動型比較測定機に関
し、多種少量生産品の能率的な計測を可能とする生産ラ
イン用の安価な計測機を提供するところにある。[Detailed description of the invention] [Industrial field of application and its purpose] The present invention relates to a three-dimensional measurement method with guidance in an orthogonal coordinate system, and in particular, to a three-dimensional measurement method with guidance in a Cartesian coordinate system, and in particular to a three-dimensional measurement method with guidance in a Cartesian coordinate system, and in particular, to The automatic drive comparison measuring machine actively detects the measured data of the model object, compares it with the measured value of the model measurement object stored in advance, and calculates and displays the amount of deviation. Our goal is to provide an inexpensive measuring machine for production lines that enables accurate measurements.
石定盤などの超精密加工された測定台上に載置する測定
対象物に対して、測定機本体に支持されたプロー４′を
、気体式スライドや永久磁石などを組合せた精密移動機
構によって三次元的に相対移動させ、前記測定対象物の
測定面とプローブ測定子との相対移動量を検出して、こ
の検出信号をデータ処理装置で処理することにより、測
定対象物の形状或いは寸法等を計測するようにした三次
元測定機が公知であり、測定対象物の所定の測定点毎に
プローブの測定子を接触などさせるため、前記移動機構
を測定作業者が手作＊ｉＡ動する手動型と、移動機構に
モータなどを利用して移動させる自動駆動型とがある。For measuring objects placed on ultra-precision machined measuring tables such as stone surface plates, the probe 4' supported by the measuring machine body is moved by a precision movement mechanism that combines a gas slide and permanent magnets. By moving the object three-dimensionally, detecting the amount of relative movement between the measurement surface of the object and the probe head, and processing this detection signal with a data processing device, the shape, dimensions, etc. of the object can be determined. A three-dimensional measuring machine is known which is designed to measure the movement of the measuring object. There are two types: a type and an automatic drive type that uses a motor or the like as a moving mechanism.
しかしこの両方式を問わず三次元測定機は、プローブの
測定子と測定対象物とを測定機の構造上、定められたＸ
−Ｙ−Ｚ三直交軸の合成方向へ相対移動させるため、夫
々の測定点毎に測定機原点からの座標値を求め、これら
のデータを所定処理するようにしている。However, regardless of the type of coordinate measuring machine, the measuring point of the probe and the object to be measured are
In order to relatively move in the composite direction of the three orthogonal axes -Y-Z, coordinate values from the origin of the measuring machine are determined for each measurement point, and these data are processed in a prescribed manner.
このため従来の三次元測定機では、精度が高く且つ円滑
な測定子の移動を可能とするためには。For this reason, in conventional three-dimensional measuring machines, it is necessary to achieve high precision and smooth movement of the measuring stylus.
夫々に剛性度が高く、且つ精密なスライダ機構を集積し
た構成でなければならないため、移動機構部の質量は大
きく、その慣性量も増大するので。Since each slider mechanism must have a high degree of rigidity and an integrated structure, the mass of the moving mechanism is large and its inertia also increases.
スピーデイな移動と、計測点への定圧追従性とには相反
するものがあった。There was a conflict between speedy movement and constant pressure follow-up to the measurement point.
〔問題を解決するための手段および作用〕このため本発
明に係る自動駆動型比較計測機は。[Means and effects for solving the problem] Therefore, the automatic drive type comparison measuring machine according to the present invention is.
充分な間隔を保ってベース上に条設した第一レール上に
、Ｘ軸方向の摺動を自在とした測定対象物の載架台を設
け、これと対応するベースの固定台上部に、Ｘ軸と直交
し且つ充分な間隔を保って第二レールを条設したＹ軸ス
ライダを摺動自在に架設し、このＹ軸スライダの前側に
垂直方向に移動する２軸スライダを係合して、その下端
にプローブを装着した三次元移動装置に於て、ｘ、ｙ、
ｚ軸方向に移動する載架台及びＹ、Ｚ軸各スライダの駆
動を、モータやねじ軸などによって構成し、且つ学修機
能を有する多軸コントローラと連結構成された夫々の同
期駆動装置により行なうことによって、ｘ−ｙ−ｚ三軸
合成方向へのプローブの能動的な移動を、安価な装置に
より可能とすると共に、モデル測定物の所定の計測点を
追従軌動する動作をプローブに与えることにより、ベー
スと載架台、固定台とＹ軸スライダ及び、Ｙ軸スライダ
上の保持体と２軸スライダとの間に設けた夫々の移動量
読み取り装置により、モデル測定物計測データとの相対
変位量を計測し、これをプローブ測定子からの信号と共
に比較演算して表示、または記録することができるよう
にしたものである。A mounting stand for the measurement target that can freely slide in the X-axis direction is installed on the first rail provided on the base at sufficient intervals. A Y-axis slider with a second rail provided perpendicularly to the line and at a sufficient interval is slidably installed, and a two-axis slider that moves vertically is engaged with the front side of this Y-axis slider. In a three-dimensional movement device with a probe attached to the bottom end, x, y,
By driving the mounting frame that moves in the Z-axis direction and the sliders on the Y and Z axes using motors, screw shafts, etc., and using respective synchronous drive devices connected to a multi-axis controller with a learning function. , by making it possible to actively move the probe in the x-y-z three-axis composite direction using an inexpensive device, and by giving the probe the motion of following a predetermined measurement point of the model measurement object. The displacement amount relative to the model measured object measurement data is measured by the respective movement amount reading devices installed between the base and the mounting frame, the fixed table and the Y-axis slider, and the holding body on the Y-axis slider and the two-axis slider. However, this can be compared with the signal from the probe measuring head and displayed or recorded.
本発明の実施例を図面について説明すると、図中１はベ
ース２上に充分な間隔を保って条設した第一レール３．
３′と直動ブロック４，４ｍにより係合し、充分な精度
を保持しつｈｚｚ軸方向摺動自在とした測定対象物５の
載架台で、これに対設する固定台６をベース２の中央部
後側に立設する。固定台６の上部には直動ブロック７．
７′と係合し、且つ充分な間隔を保って条設した第二レ
ール８，８′により前記Ｘ軸と直交するＹ軸方向に摺動
自在としたＹ軸スライダ９を架設し、その前側に支持台
１０などを介して垂直方向の昇降を自在とした２軸スラ
イダ１１の保持体１２を装着する。２軸スライダ１１の
延長下端にはプローブ１３を設けて、その測定子１４を
前記載架台１上の測定対象物５に対応させ、測定対象物
５の計測面に当接するプローブ測定子１４の三次元的な
移動を可能としている。An embodiment of the present invention will be described with reference to the drawings. In the drawings, 1 indicates a first rail 3.
3' and the linear motion blocks 4, 4m, and is a stand for the measuring object 5 that can freely slide in the hzz axis direction while maintaining sufficient accuracy. Installed at the rear of the center. A linear motion block 7 is mounted on the top of the fixed base 6.
A Y-axis slider 9 that is slidable in the Y-axis direction perpendicular to the X-axis is constructed by means of second rails 8, 8' that engage with the slider 7' and are provided at a sufficient interval. A holder 12 for a two-axis slider 11, which can freely move up and down in the vertical direction, is attached via a support stand 10 or the like. A probe 13 is provided at the lower end of the extension of the two-axis slider 11, and its measuring point 14 is made to correspond to the measuring object 5 on the pedestal 1, and the tertiary probe measuring point 14 is in contact with the measuring surface of the measuring object 5. It allows for original movement.
またベース２に対する載架台１のＸ軸方向への移動や、
ＶＡ定置台６対するスライダ９のＹ軸方向への移動及び
支持台１０に設けた保持体１２に対するスライダ１１の
２軸方向への移動は、モータやねじ軸などによって構成
され、且つ学修機能を有する多軸コントローラ１５と連
結構成された夫々の同期駆動装置１１６，１７．１８に
より行われる。Also, the movement of the mounting table 1 in the X-axis direction with respect to the base 2,
The movement of the slider 9 in the Y-axis direction with respect to the VA stationary table 6 and the movement of the slider 11 in the two-axis direction with respect to the holder 12 provided on the support table 10 are configured by a motor, a screw shaft, etc., and have a learning function. This is performed by respective synchronous drive devices 116, 17, and 18 connected to the multi-axis controller 15.
プローブ１３の測定対象物５に対するＸ軸方向への相対
移動量は、ベース２と載架台１との間に設けたＸ軸移動
量読み取り装置！１９により検出され、またプローブ１
３の測定対象物５に対するＹ軸方向及びｚ軸方向の各相
対移動量は、ベース２上の固定台６と、スライダ９との
間に設けたＹ軸移動量読み取り装ｆｆ２０．及び保持体
１２とスライダ１１との間に設けた２軸移動量読み取り
装置２１によって検出される。The amount of relative movement of the probe 13 to the object to be measured 5 in the X-axis direction is determined by an X-axis movement amount reading device provided between the base 2 and the mounting table 1! 19 and probe 1
The relative movement amounts in the Y-axis direction and the Z-axis direction with respect to the measurement target 5 in No. 3 are determined using a Y-axis movement amount reading device ff20.3 provided between the fixed table 6 on the base 2 and the slider 9. and is detected by a two-axis movement amount reading device 21 provided between the holder 12 and the slider 11.
ｘ、ｙ、ｚ軸の各移動量読み取り装置Ｉ！１９．２０．
２１からの信号は、各別の検出回路２２．２３゜２４及
びカウンタ２５．２６．２７を経てデータ処理袋れ２８
に取り込まれる一方、ｘ−ｙ−ｚ軸の各同期駆動装Ｍ１
６．１７．１８と接続された多軸コントローラ１５は、
所定の動作指令を出力する学修機能器（ティーチング・
ボックス）２９と接続されると共に前記データ処理装置
ｆ！２８と接続されており、更にプローブ１３からの三
軸方向の信号が各別のカウンタ２５．２６．２７に伝送
されるので、これ等の信号を受けたデータ処理装置！２
８は、所定の比較演算処理を行ない、必要データを表示
装置１３０或いは記録装置！３１に出力するようになっ
ている。Movement amount reading device I for x, y, and z axes! 19.20.
The signal from 21 passes through separate detection circuits 22, 23, 24 and counters 25, 26, 27 to data processing block 28.
On the other hand, each synchronous drive unit M1 of the x-y-z axes
The multi-axis controller 15 connected to 6.17.18 is
A learning function device (teaching/
box) 29 and the data processing device f! 28, and the three-axis signals from the probe 13 are transmitted to the respective counters 25, 26, and 27, so the data processing device that receives these signals! 2
8 performs predetermined comparison calculation processing and displays necessary data on a display device 130 or a recording device! 31.
本発明は上記の様に構成されているので、先ずモデル測
定物（マスター）を載架台１上に固定し、この計測面に
於ける所望の測定点に測定子１４が接触軌動する様な動
作をプローブ１３に付与させるため、各多軸駆動装ｗ１
５．１６．１７にＸ−Ｙ−Ｚ座標値量の相関的な信号を
多軸コントローラ１５から発信させる。Since the present invention is constructed as described above, first, the model measurement object (master) is fixed on the mounting table 1, and the measurement head 14 is moved in such a way that it comes into contact with a desired measurement point on the measurement surface. In order to impart motion to the probe 13, each multi-axis drive device w1
5.16.17, the multi-axis controller 15 transmits a signal correlating the amount of X-Y-Z coordinate values.
この初期のマスター測定点軌動制御に必要な指令は、学
修機能器２９がＬＣＤデイスプレィとの対話式オペレー
ションにより、ポイント自ツー・ポイント測定法や、そ
の他の測定法に準処した所望の測定点に対応する指令を
、多軸コントローラー５に付与することにより行なわれ
ると同時に、再度の同一軌跡制御を得るためのメモリー
・カー＼
ドへの記録も行なわれる。The commands necessary for this initial master measurement point trajectory control are provided by the learning function device 29 through interactive operation with the LCD display to determine the desired measurement point conforming to the point-to-point measurement method or other measurement methods. This is done by giving a corresponding command to the multi-axis controller 5, and at the same time, recording to the memory card is also done in order to obtain the same trajectory control again.
プローブ１３の前記モデル測定物への追跡軌動は、Ｘ−
Ｙ−Ｚ軸の相対移動量を検出する夫々の読み取り装ｆｉ
１９，２０．２１により読み取られ、各別の検出回路２
２．２３．２４及びカウンタ２５゜２６．２７に伝送さ
れると共に、プローブ先端の測定子１４からの信号は、
プローブ１３の追跡軌動と測定子１４０当接測定点との
誤差値を夫々のカウンタ２５．２６．２７に与え、プロ
ーブ１３の軌動測定点の誤差補正がなされたモデル測定
物の正確な測定値が、デー処理袋Ｗ２８に記憶される。The tracking trajectory of the probe 13 to the model measurement object is X-
Each reading device fi detects the amount of relative movement of the Y-Z axes.
19, 20, 21, each separate detection circuit 2
2.23.24 and the counter 25°26.27, and the signal from the probe tip 14 is
The error values between the tracking trajectory of the probe 13 and the contact measurement point of the probe 140 are given to the respective counters 25, 26, and 27, and the error of the trajectory measurement point of the probe 13 is corrected for accurate measurement of the model measurement object. The value is stored in the data processing bag W28.
上述の様な準備操作の後、載架台１上の所定位置に測定
対象物５を固定し、多軸コントローラ１５から所定の動
作信号を発信させれば、２軸スライダ１１の下端に装着
したプローブ１３は、前記マスターの所定測定点軌動に
応じたＸ−Ｙ−Ｚ軸法向の合成運動を行ない、その変位
置をＸ、Ｙ、Ｚ軸夫々の移動量読み取り装置ｉ！１９，
２０，２１が読み取り、各別の検出回路２２．２３，２
４を通して夫々のカウンタ２５．２６，２７に伝送する
と同時に、プローブ測定子１４が測定対象物５と当接す
る変位量も、カウンタ２５，２６．２７に伝送されるの
で、これ等の数値の演算結果がデータ処理袋！！２８に
付与される。この計測データを送り込まれたデータ処理
装置！２８は、Ｘ−Ｙ−Ｚ軸夫々の数値を、前記の記憶
済マスター計測データと比較演算して、その増減値を表
示装ｆｉ３０に送り、また必要に応じて記録装置！３１
によりその数値をプリントアウトすることができる。After the preparation operations described above, the object to be measured 5 is fixed at a predetermined position on the mounting table 1 and a predetermined operation signal is sent from the multi-axis controller 15, and the probe attached to the lower end of the two-axis slider 11 13 performs a composite movement in the direction of the X-Y-Z axes according to the trajectory of the predetermined measurement point of the master, and detects the position change using a device i! that reads the amount of movement of each of the X, Y, and Z axes. 19,
20, 21 read, each separate detection circuit 22, 23, 2
4 to the respective counters 25, 26, 27, and at the same time, the amount of displacement of the probe contact point 14 in contact with the object to be measured 5 is also transmitted to the counters 25, 26, 27, so the calculation results of these numerical values are is a data processing bag! ! Granted to 28. The data processing device into which this measurement data was sent! 28 compares and calculates the numerical values of each of the X-Y-Z axes with the stored master measurement data, and sends the increase/decrease value to the display device fi30, and if necessary, to the recording device! 31
You can print out the numbers.
本発明は以上説明した様に構成、動作するもので、測定
対象物の計測動作は、三次元的な絶対値を測定するもの
ではなく、量産工程中是認されたモデル測定物との比較
測定値を読み取り、これが製作品の希望公差値内にある
かを短時間に判別することができるものである。このた
めプローブの三次元的な動作は、製品のモデル測定物に
台わせて予め学修記憶されたデータに基づき行なわれ。The present invention is configured and operates as described above, and the measurement operation of the object to be measured does not measure the three-dimensional absolute value, but rather compares measured values with a model measurement object approved during the mass production process. It is possible to read this and determine in a short time whether it is within the desired tolerance value for the manufactured product. For this reason, the three-dimensional movement of the probe is performed based on data that has been learned and stored in advance by mounting it on a product model to be measured.
且つその誤差値をプローブ測定子の検出値と、データ処
理装置内の記憶数値と比較演算した後出力するものであ
り、製品公差との比較に於て、良品不良品の判別が正確
且つ容易に行なわれる。In addition, the error value is output after comparing and calculating the detected value of the probe measuring head and the numerical value stored in the data processing device, making it possible to accurately and easily distinguish between good and defective products when comparing product tolerances. It is done.
またこの様な比較演算処理計測方式を採るためＸ、Ｙ、
Ｚ軸方向の動きは、従来の気体スライドや石定盤軌条を
使用した精密な移動機構を有する測定機と比較して、数
段安価に製作することができるし、多品種生産品の計測
に際しても、予め夫々のモデル動作用メモリー・カード
を準備して置けば、測定物の変更にも容易に対処するこ
とができる。In addition, in order to adopt such a comparison calculation processing measurement method, X, Y,
The movement in the Z-axis direction can be produced much cheaper than measuring machines with precision movement mechanisms using conventional gas slides or stone surface plate rails, and it is useful when measuring a wide variety of manufactured products. However, if a memory card for operating each model is prepared in advance, changes in the object to be measured can be easily handled.
更にプローブのマスター測定点軌跡追従運動を行なわせ
るためのｘ、ｙ、ｚ軸夫々の駆動装置は。Furthermore, there are drive devices for each of the x, y, and z axes for causing the probe to move to follow the trajectory of the master measurement point.
プローブ測定子の軌跡偏位量検出機能の補正作用によっ
て、測定点への正確な追従動作を必要としないため、比
較的安価な駆動部材で構成することができるなど、この
種計測機の表示精度の向上及び製作コストの低減に効果
を奏するものである。Due to the correction effect of the trajectory deviation detection function of the probe measuring point, there is no need for accurate tracking of the measurement point, so it can be configured with relatively inexpensive drive members, and the display accuracy of this type of measuring instrument is improved. This is effective in improving performance and reducing manufacturing costs.
第１図は本発明に係る計測機の正面図、第２図は同側面
図、第３図は計測機の電気的構成を示すブロック図であ
る。
１・・・載架台。
２・・・ベース。
５・・・測定対象物。
６・・・固定台。
９・・・Ｙ軸スライダ。
１１・・・２軸スライダ。
１３・・・プローブ。
１６・・・Ｘ軸方向の同期駆動装置。
１７・・・Ｙ軸方向の同期駆動装置。
１８・・・Ｚ軸方向の同期駆動装置。
１９ ・
２０ ・
２１ ・
２８ ・
３０ ・
３１ ・
Ｘ軸の移動量読み取り装置。
Ｙ軸の移動量読み取り装置。
Ｚ軸の移動量読み取り装置。
データ処理装置。
表示装置。
記録装置。FIG. 1 is a front view of a measuring device according to the present invention, FIG. 2 is a side view of the same, and FIG. 3 is a block diagram showing the electrical configuration of the measuring device. 1... Mounting stand. 2...Base. 5...Measurement object. 6...Fixed stand. 9...Y-axis slider. 11...2-axis slider. 13... Probe. 16... Synchronous drive device in the X-axis direction. 17...Y-axis direction synchronous drive device. 18... Synchronous drive device in the Z-axis direction. 19 ・ 20 ・ 21 ・ 28 ・ 30 ・ 31 ・ X-axis movement amount reading device. Y-axis movement amount reading device. Z-axis movement reading device. Data processing equipment. Display device. Recording device.
Claims (1)
ル上に、Ｘ軸方向の摺動を自在とした測定対象物の載架
台を設け、これと対応する前記ベースの固定台上に、Ｘ
軸と直交し且つ充分な間隔を保って第二レールを条設し
たＹ軸スライダを摺動自在に架設し、このＹ軸スライダ
の前側に垂直方向に移動するＺ軸スライダを係合して、
その下端にプローブを装着した三次元移動装置に於て、
Ｘ、Ｙ、Ｚ軸方向に移動する載架台及びＹ、Ｚ軸各スラ
イダの駆動を、モータやねじ軸などによって構成し、且
つ学修機能を有する多軸コントローラと連結構成された
夫々の同期駆動装置により行ない、またベースと載架台
、前記固定台とＹ軸スライダ及び、Ｙ軸スライダに設け
た保持体とＺ軸スライダとの間に夫々の移動量読み取り
装置を設け、前記Ｚ軸スライダ下端のプローブ測定子が
測定対象物と当接する位置の相対変位置を、同期駆動装
置が軌跡制御するモデル測定物の計測値と比較演算表示
することを特徴とする自動駆動型比較計測機。(1) A mounting stand for the measurement target that can freely slide in the X-axis direction is provided on the first rail provided on the base at sufficient intervals, and a mounting stand for the object to be measured is provided on the corresponding fixed stand of the base. , X
A Y-axis slider on which a second rail is provided perpendicularly to the axis and at a sufficient interval is slidably installed, and a Z-axis slider that moves vertically is engaged with the front side of this Y-axis slider,
In a three-dimensional movement device with a probe attached to its lower end,
A synchronous drive device configured to drive a mounting frame that moves in the X, Y, and Z axis directions and each slider in the Y and Z axes using a motor, screw shaft, etc., and that is connected to a multi-axis controller that has a learning function. Furthermore, a movement amount reading device is provided between the base and the mounting table, the fixed table and the Y-axis slider, and a holder provided on the Y-axis slider and the Z-axis slider, and a probe at the lower end of the Z-axis slider is provided. An automatic drive type comparison measuring machine characterized by calculating and displaying the relative displacement of the position where the measuring head contacts the measuring object with the measured value of the model measuring object whose trajectory is controlled by the synchronous drive device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25751089A JPH03120410A (en) | 1989-10-02 | 1989-10-02 | Automatic driving type comparative measuring instrument |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP25751089A JPH03120410A (en) | 1989-10-02 | 1989-10-02 | Automatic driving type comparative measuring instrument |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03120410A true JPH03120410A (en) | 1991-05-22 |
Family
ID=17307302
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP25751089A Pending JPH03120410A (en) | 1989-10-02 | 1989-10-02 | Automatic driving type comparative measuring instrument |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03120410A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009536332A (en) * | 2006-05-08 | 2009-10-08 | テイラー・ホブソン・リミテッド | Measuring instrument for measuring surface properties |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60224005A (en) * | 1984-04-20 | 1985-11-08 | Mitsutoyo Mfg Co Ltd | Three-dimensional automatic measuring machine |
| JPS62276405A (en) * | 1986-03-04 | 1987-12-01 | ランク・テイラ−・ホブソン・リミテツド | Measuring device |
-
1989
- 1989-10-02 JP JP25751089A patent/JPH03120410A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60224005A (en) * | 1984-04-20 | 1985-11-08 | Mitsutoyo Mfg Co Ltd | Three-dimensional automatic measuring machine |
| JPS62276405A (en) * | 1986-03-04 | 1987-12-01 | ランク・テイラ−・ホブソン・リミテツド | Measuring device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009536332A (en) * | 2006-05-08 | 2009-10-08 | テイラー・ホブソン・リミテッド | Measuring instrument for measuring surface properties |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4504818B2 (en) | Workpiece inspection method | |
| US6568242B2 (en) | System for reducing effects of acceleration induced deflections on measurement made by a machine using a probe | |
| EP1792139B1 (en) | The use of surface measurement probes | |
| JP3634275B2 (en) | Position measuring device | |
| CA2082790A1 (en) | Automated maintenance system for computer numerically controlled machines | |
| JP3827549B2 (en) | Probe calibration method and calibration program | |
| EP2085739B1 (en) | Probe straightness measuring method | |
| JPS6232302A (en) | Three-dimensional measuring method and device | |
| CN110411347B (en) | Device and method for detecting instantaneous rotation center of numerical control machine tool workbench | |
| JP3531882B2 (en) | Measurement error correction device for CMM | |
| JP5297749B2 (en) | Automatic dimension measuring device | |
| US6351313B1 (en) | Device for detecting the position of two bodies | |
| CN209649917U (en) | A kind of low cost 3 D measuring instrument | |
| JPH03120410A (en) | Automatic driving type comparative measuring instrument | |
| JP2987607B2 (en) | 3D coordinate measuring machine | |
| JP3042157U (en) | Three-dimensional coordinate measuring machine | |
| CN115516389A (en) | Processing method | |
| KR100230942B1 (en) | Three dimensional comparative measuring apparatus | |
| JP3366052B2 (en) | Comparative length measuring device | |
| KR100235769B1 (en) | Apparatus for determining acceptability of an object by three dimensional comparision | |
| JP2572660B2 (en) | Automatically driven comparison measuring machine | |
| JP2790554B2 (en) | Three-dimensional comparative measurement device | |
| JP2982663B2 (en) | Three-dimensional measuring method and device | |
| JPH087059B2 (en) | Calibration measurement method of circle diameter in comparative measuring machine | |
| JP3064109B2 (en) | Articulated comparative measuring device |