JPH03120031U - - Google Patents
Info
- Publication number
- JPH03120031U JPH03120031U JP3013490U JP3013490U JPH03120031U JP H03120031 U JPH03120031 U JP H03120031U JP 3013490 U JP3013490 U JP 3013490U JP 3013490 U JP3013490 U JP 3013490U JP H03120031 U JPH03120031 U JP H03120031U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- crystal melt
- epitaxial growth
- storing
- upper chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007791 liquid phase Substances 0.000 claims description 3
- 239000013078 crystal Substances 0.000 claims 5
- 238000001914 filtration Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Landscapes
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
第1図はこの考案の一実施例である液相エピタ
キシヤル成長装置の断面図、第2図は従来の液相
エピタキシヤル成長装置の断面図である。
図において、1……ボート本体、2……上段の
室、3……中段の室、4……下段の室、6……ス
ライド可能な蓋、7,8……スライド可能な板、
11……蓋6に設けられた開孔部、12,13…
…開孔部、15……開孔部を有する板を示す。な
お、図中、同一符号は同一、又は相当部分を示す
。
FIG. 1 is a sectional view of a liquid phase epitaxial growth apparatus which is an embodiment of this invention, and FIG. 2 is a sectional view of a conventional liquid phase epitaxial growth apparatus. In the figure, 1...boat body, 2...upper chamber, 3...middle chamber, 4...lower chamber, 6...slidable lid, 7, 8...slidable plate,
11...Aperture provided in the lid 6, 12, 13...
...Aperture, 15... Indicates a plate having an aperture. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.
Claims (1)
る上段の室、エピタキシヤル成長させるべき基板
を設置するための中段の室、上記エピタキシヤル
成長に用いた結晶融液を収納する下段の室、上記
上段の室を開放又は密閉する事が可能な開孔部を
有するスライド可能な板、上段の室と中段の室、
中段の室と下段の室を仕切り結晶融液が上から下
への移動が可能な2枚のスライド可能な板及び上
記下段の室がスライド可能な容器から成るボード
本体に於いて、上記中段の室に上段の室から流入
する結晶融液をろ過する為の同じ大きさ又は異な
る大きさの開孔部を有する複数の板を設けたこと
を特徴とする液相エピタキシヤル成長装置。 An upper chamber for storing the crystal melt used for epitaxial growth, a middle chamber for installing the substrate to be epitaxially grown, a lower chamber for storing the crystal melt used for the epitaxial growth, and an upper chamber for storing the crystal melt used for the epitaxial growth. A slideable plate with an opening that allows the chamber to be opened or closed, an upper chamber and a middle chamber,
In the main body of the board, the middle chamber and the lower chamber are separated and the crystal melt can move from the top to the bottom, and the lower chamber is made up of a slideable container. A liquid phase epitaxial growth apparatus characterized in that a chamber is provided with a plurality of plates having openings of the same size or different sizes for filtering a crystal melt flowing from an upper chamber.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3013490U JPH03120031U (en) | 1990-03-23 | 1990-03-23 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3013490U JPH03120031U (en) | 1990-03-23 | 1990-03-23 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03120031U true JPH03120031U (en) | 1991-12-10 |
Family
ID=31532866
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3013490U Pending JPH03120031U (en) | 1990-03-23 | 1990-03-23 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03120031U (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100970610B1 (en) * | 2009-11-24 | 2010-07-16 | 최승일 | Baby stroller with weight measurement and real-time development check computing and its operation method |
KR101006692B1 (en) * | 2010-07-07 | 2011-01-10 | 엑스투씨앤씨(주) | Stroller with internal temperature sensing and real-time development check computing and its operation method |
-
1990
- 1990-03-23 JP JP3013490U patent/JPH03120031U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100970610B1 (en) * | 2009-11-24 | 2010-07-16 | 최승일 | Baby stroller with weight measurement and real-time development check computing and its operation method |
KR101006692B1 (en) * | 2010-07-07 | 2011-01-10 | 엑스투씨앤씨(주) | Stroller with internal temperature sensing and real-time development check computing and its operation method |
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