JPH03115267U - - Google Patents
Info
- Publication number
- JPH03115267U JPH03115267U JP2383790U JP2383790U JPH03115267U JP H03115267 U JPH03115267 U JP H03115267U JP 2383790 U JP2383790 U JP 2383790U JP 2383790 U JP2383790 U JP 2383790U JP H03115267 U JPH03115267 U JP H03115267U
- Authority
- JP
- Japan
- Prior art keywords
- valve
- liquid
- chamber
- hole
- nozzle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007788 liquid Substances 0.000 claims description 6
- 230000007423 decrease Effects 0.000 claims 1
- 230000005489 elastic deformation Effects 0.000 claims 1
- 239000012530 fluid Substances 0.000 claims 1
- 238000005086 pumping Methods 0.000 claims 1
Landscapes
- Fluid-Driven Valves (AREA)
Description
添付図面は本考案の一実施例を示し、第１図は
全体の一部切欠側面図、第２図はその開閉弁の拡
大断面図である。
１……液体圧送源、２……圧送管（供給路）、
３……開閉弁、９……吐出管（供給路）、１０…
…ノズル、１２……流入孔、１３……流出孔、１
５……弁室、１６……弁口、１７……弁体、２８
……ダイアフラム、３０……吸戻室、３３……圧
力室。
The accompanying drawings show an embodiment of the present invention, with FIG. 1 being an overall partially cutaway side view, and FIG. 2 being an enlarged sectional view of the on-off valve. 1... Liquid pressure feeding source, 2... Pressure feeding pipe (supply path),
3...Opening/closing valve, 9...Discharge pipe (supply path), 10...
... Nozzle, 12 ... Inflow hole, 13 ... Outflow hole, 1
5... Valve chamber, 16... Valve port, 17... Valve body, 28
... diaphragm, 30 ... suction chamber, 33 ... pressure chamber.
Claims (1)
液体圧送用の供給路に、流入孔と連通する弁室側
からの弁体の接離により該弁室から流体孔への連
通口である弁口を開閉するようにした開閉弁を介
設して、該開閉弁の開閉によりノズルからの液体
の吐出とその停止とを行うようにした液体供給装
置において、 前記開閉弁の前記流出孔に、圧力室に作用する
パイロツト圧に変化にともなうダイアフラムの弾
性変形により容積が増減する吸戻室を、前記圧力
室が前記弁口と反対側に位置するように形成した
ことを特徴とする吸戻し機能付き液体供給装置。[Claims for Utility Model Registration] When a valve body is brought into contact with and separated from the valve chamber side that communicates with the inflow hole, fluid is supplied from the valve chamber to the supply path for pumping liquid between the liquid pressure source and the nozzle that opens downward. In the liquid supply device, an on-off valve that opens and closes a valve port that is a communication port to a hole is interposed, and liquid is discharged from a nozzle and stopped by opening and closing the on-off valve. A suction chamber whose volume increases and decreases due to elastic deformation of a diaphragm in response to changes in pilot pressure acting on the pressure chamber is formed in the outflow hole of the on-off valve, such that the pressure chamber is located on the opposite side of the valve port. A liquid supply device with a suction-back function, characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2383790U JPH03115267U (en) | 1990-03-09 | 1990-03-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2383790U JPH03115267U (en) | 1990-03-09 | 1990-03-09 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03115267U true JPH03115267U (en) | 1991-11-28 |
Family
ID=31526818
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2383790U Pending JPH03115267U (en) | 1990-03-09 | 1990-03-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03115267U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1182786A (en) * | 1997-09-11 | 1999-03-26 | Smc Corp | Suck back valve controlling method |
| KR20140109258A (en) * | 2013-03-01 | 2014-09-15 | 도쿄엘렉트론가부시키가이샤 | Liquid supplying apparatus |
| CN113217672A (en) * | 2021-05-06 | 2021-08-06 | 长江存储科技有限责任公司 | Valve body structure and wafer cleaning system with same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61266884A (en) * | 1985-05-17 | 1986-11-26 | Dainippon Screen Mfg Co Ltd | Liquid retraction valve |
-
1990
- 1990-03-09 JP JP2383790U patent/JPH03115267U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61266884A (en) * | 1985-05-17 | 1986-11-26 | Dainippon Screen Mfg Co Ltd | Liquid retraction valve |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1182786A (en) * | 1997-09-11 | 1999-03-26 | Smc Corp | Suck back valve controlling method |
| KR20140109258A (en) * | 2013-03-01 | 2014-09-15 | 도쿄엘렉트론가부시키가이샤 | Liquid supplying apparatus |
| JP2014168734A (en) * | 2013-03-01 | 2014-09-18 | Tokyo Electron Ltd | Liquid feeder |
| CN113217672A (en) * | 2021-05-06 | 2021-08-06 | 长江存储科技有限责任公司 | Valve body structure and wafer cleaning system with same |
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