JPH031142U - - Google Patents

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案の第１の実施例を示す給送装置
の斜視図、第２図はその給送方向上手側より見た
正面図、第３図は本考案の第２の実施例を示す第
２図相当図、第４図は従来例の側面図である。 １……基板、２……基板載置台、３……位置規
制板、１０……基板搬送手段、２０……リフト移
載装置、２１……基板吸着用リフタ、２２……吸
盤、２５……傾動手段、３０……移動ブロツク、
３１……ブロツク移動手段（エアシリンダ）、Ａ
……吸着姿勢、Ｂ……傾斜姿勢、Ｑ……傾動支点
、Ｓ……基板載置面。 Fig. 1 is a perspective view of a feeding device showing a first embodiment of the present invention, Fig. 2 is a front view of the feeding device as seen from the upper side in the feeding direction, and Fig. 3 shows a second embodiment of the invention. A view corresponding to FIG. 2 and FIG. 4 are side views of the conventional example. DESCRIPTION OF SYMBOLS 1...Substrate, 2...Substrate mounting table, 3...Position regulating plate, 10...Substrate transfer means, 20...Lift transfer device, 21...Lifter for substrate adsorption, 22...Sucker, 25... Tilting means, 30... moving block,
31...Block moving means (air cylinder), A
...Adsorption posture, B...Tilt posture, Q...Tilt fulcrum, S...Substrate mounting surface.

Claims (1)

【実用新案登録請求の範囲】 基板載置台に近接して基板の位置規制板を配置
固定するとともに、基板載置台を昇降位置決め可
能に設け、基板載置台の前方へ基板搬送手段を設
け、基板載置台と基板搬送手段とにわたつてリフ
ト移載装置を介在させ、基板載置台上に積層載置
した最上位の基板をリフト移載装置で基板搬送手
段へ移載するように構成した基板の給紙装置であ
つて、 リフト移載装置は、基板載置台と基板搬送手段
とにわたつて移動可能、かつ移動方向と交差する
ように設けられ、その位置規制板側の一端を傾動
支点とし、少なくとも１個の吸盤を備える杆状の
基板吸着用リフタと、 基板吸着用リフタを基板載置面と略平行をなす
吸着姿勢から基板載置面に対し傾斜をなす傾斜姿
勢へ傾動させる傾動手段と、 傾動手段を搭載し、その傾動手段を介して基板
吸着用リフタを支持する移動ブロツクと、 移動ブロツクを基板給送方向へ進退可能に移動
させるブロツク移動手段とを具備して成る基板の
給送装置。[Scope of Claim for Utility Model Registration] A substrate position regulating plate is arranged and fixed in close proximity to the substrate mounting table, the substrate mounting table is provided so as to be able to be moved up and down, and a substrate transport means is provided in front of the substrate mounting table. A substrate supply system in which a lift transfer device is interposed between a mounting table and a substrate transfer means, and the uppermost substrate stacked on the substrate placement table is transferred to the substrate transfer means by the lift transfer device. The lift transfer device, which is a paper device, is movable between the substrate mounting table and the substrate transport means, and is provided so as to intersect with the movement direction, and has one end on the position regulating plate side as a tilting fulcrum, and at least a rod-shaped substrate suction lifter having one suction cup; a tilting means for tilting the substrate suction lifter from a suction posture substantially parallel to the substrate placement surface to an inclined posture inclined with respect to the substrate placement surface; A substrate feeding device comprising a moving block equipped with a tilting means and supporting a substrate adsorption lifter via the tilting means, and a block moving means for moving the moving block forward and backward in a substrate feeding direction. .