JPH03108808A - Weighting surface acoustic wave converter - Google Patents
Weighting surface acoustic wave converterInfo
- Publication number
- JPH03108808A JPH03108808A JP10984589A JP10984589A JPH03108808A JP H03108808 A JPH03108808 A JP H03108808A JP 10984589 A JP10984589 A JP 10984589A JP 10984589 A JP10984589 A JP 10984589A JP H03108808 A JPH03108808 A JP H03108808A
- Authority
- JP
- Japan
- Prior art keywords
- interdigital
- surface acoustic
- width
- acoustic wave
- weighted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 41
- 239000000758 substrate Substances 0.000 claims abstract description 7
- 239000010409 thin film Substances 0.000 claims abstract description 3
- 230000002457 bidirectional effect Effects 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 2
- 230000005428 wave function Effects 0.000 abstract 1
Landscapes
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、重み付け電極インターディジタル変換器と一
様幅のインターディジタル変換器を用いた弾性表面波機
能素子において、重み付け電極の最も大きな交差幅の値
が一様幅のインターディジタル変換器の交差幅より狭い
構造の弾性表面波機能素子に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention provides a surface acoustic wave functional element using a weighted electrode interdigital transducer and a uniform width interdigital transducer, in which the largest crossing width value of the weighting electrodes is equal to the width of the uniform width. The present invention relates to a surface acoustic wave functional element having a structure narrower than the intersection width of an interdigital transducer.
弾性表面波フィルタでは、所望の位相特性と周波数特性
を得るために、インターディジタル電極の一方を重み付
けしたインターディジタル変換器が用いられている。し
かし、インピーダンスが一様幅の電極と重み付け電極で
異なる場合が多い。A surface acoustic wave filter uses an interdigital converter in which one of the interdigital electrodes is weighted in order to obtain desired phase characteristics and frequency characteristics. However, the impedance is often different between uniform width electrodes and weighted electrodes.
そこで、重み付け電極により、所望の特性を得た上で、
重み付け電極の最も大きな値の交差幅を一様幅のインタ
ーディジタル電極の交差幅より狭くすることによって、
インピーダンス合わせが可能となり、更に、一様幅のイ
ンターディジタル電極にわたって重み付け電極による弾
性表面波の振幅がほぼ一様になるように設計することに
より、フィルタの低損失化が可能となる。Therefore, after obtaining the desired characteristics using weighted electrodes,
By making the largest value intersection width of the weighting electrodes narrower than the intersection width of the uniform width interdigital electrodes,
It is possible to match the impedance, and furthermore, by designing the filter so that the amplitude of the surface acoustic wave generated by the weighting electrode is almost uniform across the interdigital electrodes having a uniform width, it is possible to reduce the loss of the filter.
更に、インターディジタル電極を用いた低損失フィルタ
では位相特性の制御が困難であったが、本発明のように
、重み付け電極により励振された弾性表面波が電極上を
伝搬しない様な構造とすることにより、低損失で位相特
性と周波数特性を制御llじたフィルタが可能となる。Furthermore, it is difficult to control the phase characteristics with a low-loss filter using interdigital electrodes, but as in the present invention, it is possible to create a structure in which the surface acoustic waves excited by the weighting electrodes do not propagate on the electrodes. This enables a filter with low loss and controlled phase characteristics and frequency characteristics.
。
第1図のように、圧電体弾性表面波基板或いは圧電性薄
膜を用いた弾性表面波基板上に一方が重み付けされたイ
ンターディジタル変換器11他方が一様な交差幅からな
るインターディジタル変換器2を用いた弾性表面波機能
素子において、重み付け電極インターディジタル変換器
の最も大きな交差指の幅の値をam、一様な交差指幅を
もつインターディジタル電極の交差指の幅をa0とした
時、afflの値が0.9aOから0.1aoの範囲の
間にあるようにした重み付けインターディジタル変換器
と一様交差指幅のインターディジタル変換器からなる弾
性表面波機能素子を得ることにより、インピーダンス整
合がとれた低損失フィルタが得られる。. As shown in FIG. 1, one is a weighted interdigital transducer 11 on a piezoelectric surface acoustic wave substrate or a surface acoustic wave substrate using a piezoelectric thin film, and the other is an interdigital transducer 2 having a uniform cross width. In a surface acoustic wave functional element using a weighted electrode interdigital transducer, when the value of the largest interdigital width of the weighted electrode interdigital transducer is am, and the interdigital width of the interdigital electrode with a uniform interdigital electrode is a0, Impedance matching is achieved by obtaining a surface acoustic wave functional element consisting of a weighted interdigital transducer with a value of affl between 0.9aO and 0.1ao and an interdigital transducer with a uniform interdigital width. A low-loss filter with low loss can be obtained.
特許請求の範囲第1項において、allの値が0.9a
0から0.1 aoの範囲にあり、かつ、第1図におい
て、重み付け電極の交差指幅の中心を結んだ曲線5の弾
性表面波の伝搬方向に直角な方向の幅の値acとした時
、一様なインターディジタル電極の幅a0による弾性表
面波をほとんど総て受信できるような幅に配置され、か
つ、acの値が、0.95 a、から0.1a6の値の
範囲にあるようにした重み付け弾性表面波インターディ
ジタル変換器を用いることのより、高性能弾性表面波機
能素子が得られる。In claim 1, the value of all is 0.9a.
When the value ac is in the range of 0 to 0.1 ao, and the width in the direction perpendicular to the propagation direction of the surface acoustic wave of the curve 5 connecting the centers of the interdigital widths of the weighting electrodes in FIG. , the width of the interdigital electrode is such that almost all the surface acoustic waves can be received due to the uniform width a0, and the value of ac is in the range of 0.95a to 0.1a6. By using the weighted surface acoustic wave interdigital transducer, a high performance surface acoustic wave functional element can be obtained.
特許請求の範囲第1項、第2項において、一様な交差指
幅の電極2)及び重み付け電極インターディジタル変換
器1のいずれか一方、或いは両方共に3相型、グループ
型、内部反射単相型などの一方向性インターディジタル
変換器からなる、上記の方法で一方が重み付けされた電
極とすることにより、高性能の弾性表面波フィルタが得
られる。。In claims 1 and 2, either one or both of the electrodes 2) having a uniform interdigital width and the weighted electrode interdigital converter 1 are of a three-phase type, a group type, or an internal reflection single-phase type. A high-performance surface acoustic wave filter can be obtained by using a unidirectional interdigital transducer such as a unidirectional interdigital transducer, with the electrodes weighted on one side in the above manner. .
特許請求の範囲第1項、第2項、第3項において、重み
付けインターディジタル変換器の交差指電極数を伝搬方
向に向かって数えた対数の総数をNとし、重み付けイン
ターディジタル変換器のacの範囲での伝搬方向に数え
た対数nの値が最も大きな値をnoとした時、n、)の
範囲が0.9Nから0.1Nの間にある弾性表面波機能
素子。また、n / n OO値が0.1から1.Oの
範囲にある重み付け電極インターディジタル変換器を得
ることにより、高性能の弾性表面波機能素子が得られる
。また、幅am上での弾性表面波の振幅がほぼ一様にな
る様に設計さすることにより高性能弾性表面波機能素子
が得られる。In claims 1, 2, and 3, the total number of logarithms of the number of interdigital electrodes of the weighted interdigital converter counted toward the propagation direction is N, and the ac of the weighted interdigital converter is A surface acoustic wave functional element in which the range of n, ) is between 0.9N and 0.1N, where no is the largest value of the logarithm n counted in the propagation direction in the range. Also, the n/n OO value is between 0.1 and 1. By obtaining a weighted electrode interdigital transducer in the range of O, a high performance surface acoustic wave functional element is obtained. Further, by designing the surface acoustic wave so that the amplitude of the surface acoustic wave is substantially uniform over the width am, a high performance surface acoustic wave functional element can be obtained.
特許請求の範囲第1項、第2項、第3項、第4項におい
て、中心に両方向性の重み付け電極を置き、両側に両方
向性、或いは中心方向に前進方向の方向性をもつ一方向
性変換器を配置した構造のインターディジタル変換器を
得ることにより、低損失の弾性表面波機能素子が得られ
る。以上の重み付け電極インターディジタル変換器を用
いるこにより、位相特性も制御したフィルタを得ること
ができる。In claims 1, 2, 3, and 4, a bidirectional weighting electrode is placed at the center, and bidirectional weighting electrodes are placed on both sides, or unidirectional with forward direction directionality toward the center. By obtaining an interdigital transducer having a structure in which transducers are arranged, a surface acoustic wave functional element with low loss can be obtained. By using the weighted electrode interdigital converter described above, a filter whose phase characteristics are also controlled can be obtained.
以上は弾性表面波機能素子1こついて述べたが、上記の
発明の方法を用いて作製された電子機能素子も本特許に
含まれるものとする。Although the surface acoustic wave functional device 1 has been described above, electronic functional devices manufactured using the method of the invention described above are also included in this patent.
第1図は、本発明の重み付け電極インターディジタル電
極と一様幅のインターディジタル変換器の平面図及びA
−A’の断面図である。
l・・・重み付け電極弾性表面波インターディジタル変
換器、2・・・−機幅のインターディジタル変換器、3
・・・正電極、4・・・負電極、5・・・重み付け電極
の交差幅の中心を結んだ曲線1.6・・・正電極1.7
・・・負電極、8・・・圧電体基板、9・・・弾性表面
波。FIG. 1 is a top view and A
-A' is a sectional view. l...Weighted electrode surface acoustic wave interdigital transducer, 2...-width interdigital transducer, 3
...Positive electrode, 4...Negative electrode, 5...Curve connecting the centers of the intersection widths of weighting electrodes 1.6...Positive electrode 1.7
... Negative electrode, 8... Piezoelectric substrate, 9... Surface acoustic wave.
Claims (5)
電性薄膜を用いた弾性表面波基板上に、一方が重み付け
されたインターディジタル変換器1、他方が一様な交差
幅からなるインターディジタル変換器2を用いた弾性表
面波機能素子において、重み付け電極インターディジタ
ル変換器の最も大きな交差指の幅の値をam、一様な交
差指幅をもつインターディジタル電極の交差指の幅をa
_0とした時、amの値が0.9a_0から0.1a_
0の範囲の間にあるようにした重み付けインターディジ
タル変換器と一様交差指幅のインターディジタル変換器
からなる弾性表面波機能素子。(1) As shown in Figure 1, on a piezoelectric surface acoustic wave substrate or a surface acoustic wave substrate using a piezoelectric thin film, one side is a weighted interdigital transducer 1, and the other side is composed of a uniform cross width. In the surface acoustic wave functional element using the interdigital transducer 2, the value of the largest interdigital width of the weighted electrode interdigital transducer is am, and the interdigital width of the interdigital electrode with a uniform interdigital width is a
When it is _0, the value of am is from 0.9a_0 to 0.1a_
A surface acoustic wave functional element comprising a weighted interdigital transducer between 0 and a uniform interdigital width interdigital transducer.
9a_0から0.1a_0の範囲にあり、かつ、第1図
において、重み付け電極の交差指幅の中心を結んだ曲線
5の弾性表面波の伝搬方向に直角な方向の幅の値をac
とした時、一様な電極幅a_0による弾性表面波をほと
んど総て受信するような幅に、重み付け電極インターデ
ィジタル電極が配置され、かつ、acの値が0.95a
_0から0.1a_0の値の範囲にあるようにした重み
付け弾性表面波インターディジタル変換器と一様幅のイ
ンターディジタル変換器からなる弾性表面波機能素子。(2) In claim 1, the value of am is 0.
9a_0 to 0.1a_0, and in FIG. 1, the value of the width in the direction perpendicular to the propagation direction of the surface acoustic wave of the curve 5 connecting the centers of the interdigital widths of the weighting electrodes is ac.
Then, the weighting electrode interdigital electrode is arranged at a width that receives almost all the surface acoustic waves due to the uniform electrode width a_0, and the value of ac is 0.95a.
A surface acoustic wave functional element consisting of a weighted surface acoustic wave interdigital transducer and a uniform width interdigital transducer, with the values ranging from _0 to 0.1a_0.
交差指幅の電極2、及び重み付け電極インターディジタ
ル変換器1のいずれか一方、或いは両方共に3相型、グ
ループ型、内部反射単相型などの一方向性インターディ
ジタル変換器からなる、上記の方法で一方が重み付けさ
れた電極からなる構造の弾性表面波機能素子。(3) In claims 1 and 2, either one or both of the electrodes 2 having a uniform interdigital width and the weighted electrode interdigital converter 1 are three-phase type, group type, internal A surface acoustic wave functional element consisting of a unidirectional interdigital transducer such as a reflective single-phase type, and having a structure consisting of an electrode weighted on one side by the above method.
、重み付けインターディジタル変換器の交差指電極数を
伝搬方向に向かって数えた対数の総数をNとし、重み付
けインターディジタル変換器のacの範囲での伝搬方向
に数えた対数nの値が最も大きな値をn_0とした時、
n_0の値の範囲が0.9Nから0.1Nの間にあるよ
うにした弾性表面波機能素子。また、n/n_0の値が
0.1から1.0の範囲にある重み付け電極インターデ
ィジタル変換器を用いた弾性表面波機能素子。または、
幅am或いはa_0上での重み付け電極による弾性表面
波の振幅がほぼ一様になる様に設計された弾性表面波機
能素子。(4) In claims 1, 2, and 3, the total number of logarithms of the number of interdigitated electrodes of the weighted interdigital converter counted toward the propagation direction is N, and the weighted interdigital converter When the largest value of the logarithm n counted in the propagation direction within the ac range of is n_0,
A surface acoustic wave functional element in which the value of n_0 is within a range of 0.9N to 0.1N. Further, a surface acoustic wave functional element using a weighted electrode interdigital converter in which the value of n/n_0 is in the range of 0.1 to 1.0. or
A surface acoustic wave functional element designed so that the amplitude of surface acoustic waves generated by weighting electrodes over a width am or a_0 is approximately uniform.
において、中心に両方向性の重み付け電極を置き、両側
に両方向性、或いは両側に中心方向に前進方向の方向性
をもつ一方向性変換器を配置した構造のインターディジ
タル変換器。(5) In claims 1, 2, 3, and 4, bidirectional weighting electrodes are placed at the center, and bidirectional weighting electrodes are placed on both sides, or directionality in the forward direction toward the center on both sides. An interdigital converter with a structure in which unidirectional converters are arranged.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10984589A JPH03108808A (en) | 1989-04-29 | 1989-04-29 | Weighting surface acoustic wave converter |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10984589A JPH03108808A (en) | 1989-04-29 | 1989-04-29 | Weighting surface acoustic wave converter |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03108808A true JPH03108808A (en) | 1991-05-09 |
Family
ID=14520656
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10984589A Pending JPH03108808A (en) | 1989-04-29 | 1989-04-29 | Weighting surface acoustic wave converter |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03108808A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10476474B2 (en) | 2016-01-13 | 2019-11-12 | Taiyo Yuden Co., Ltd. | Acoustic wave resonator, filter, and duplexer |
-
1989
- 1989-04-29 JP JP10984589A patent/JPH03108808A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10476474B2 (en) | 2016-01-13 | 2019-11-12 | Taiyo Yuden Co., Ltd. | Acoustic wave resonator, filter, and duplexer |
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