JPH0310205U - - Google Patents

Info

Publication number
JPH0310205U
JPH0310205U JP7112489U JP7112489U JPH0310205U JP H0310205 U JPH0310205 U JP H0310205U JP 7112489 U JP7112489 U JP 7112489U JP 7112489 U JP7112489 U JP 7112489U JP H0310205 U JPH0310205 U JP H0310205U
Authority
JP
Japan
Prior art keywords
contact
displacement table
piezoelectric elements
substrate
contract
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7112489U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7112489U priority Critical patent/JPH0310205U/ja
Publication of JPH0310205U publication Critical patent/JPH0310205U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Description

【図面の簡単な説明】[Brief explanation of drawings]

図は本考案による探針アクチユエータの斜視図
である。 1…基板、2a,2b,2c,2d…積層圧電
素子、3a,3b,3c,3d…電極、4…変位
台、5…金属プローブ。
The figure is a perspective view of a probe actuator according to the present invention. DESCRIPTION OF SYMBOLS 1... Substrate, 2a, 2b, 2c, 2d... Laminated piezoelectric element, 3a, 3b, 3c, 3d... Electrode, 4... Displacement table, 5... Metal probe.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 基板上に並べて配置された上下方向に伸縮する
少なくとも2個の圧電素子と、該各素子の頂部に
接して設けられた変位台と、該変位台に接して取
り付けられた金属プローブと、から成り、上記各
圧電素子に個別に電圧を印加する手段を付加した
探針アクチユエータ。
It consists of at least two piezoelectric elements arranged side by side on a substrate that expand and contract in the vertical direction, a displacement table provided in contact with the top of each of the elements, and a metal probe attached in contact with the displacement table. , a probe actuator including means for individually applying a voltage to each of the piezoelectric elements.
JP7112489U 1989-06-16 1989-06-16 Pending JPH0310205U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7112489U JPH0310205U (en) 1989-06-16 1989-06-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7112489U JPH0310205U (en) 1989-06-16 1989-06-16

Publications (1)

Publication Number Publication Date
JPH0310205U true JPH0310205U (en) 1991-01-31

Family

ID=31607878

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7112489U Pending JPH0310205U (en) 1989-06-16 1989-06-16

Country Status (1)

Country Link
JP (1) JPH0310205U (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4871086U (en) * 1971-12-13 1973-09-07
JPS50120551U (en) * 1974-03-18 1975-10-02
KR100974466B1 (en) * 2002-05-09 2010-08-10 가부시키가이샤 시마노 Handle assembly for fishing reel

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4871086U (en) * 1971-12-13 1973-09-07
JPS50120551U (en) * 1974-03-18 1975-10-02
KR100974466B1 (en) * 2002-05-09 2010-08-10 가부시키가이샤 시마노 Handle assembly for fishing reel

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