JPH02967A - Manufacture of substrate having pattern of metal on glass - Google Patents
Manufacture of substrate having pattern of metal on glassInfo
- Publication number
- JPH02967A JPH02967A JP63119377A JP11937788A JPH02967A JP H02967 A JPH02967 A JP H02967A JP 63119377 A JP63119377 A JP 63119377A JP 11937788 A JP11937788 A JP 11937788A JP H02967 A JPH02967 A JP H02967A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- substrate
- smooth
- layer
- chromium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 30
- 239000011521 glass Substances 0.000 title claims abstract description 25
- 229910052751 metal Inorganic materials 0.000 title claims description 8
- 239000002184 metal Substances 0.000 title claims description 8
- 238000004519 manufacturing process Methods 0.000 title claims description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims abstract description 20
- 229910052804 chromium Inorganic materials 0.000 claims abstract description 16
- 239000011651 chromium Substances 0.000 claims abstract description 16
- 238000000034 method Methods 0.000 claims abstract description 10
- 238000004544 sputter deposition Methods 0.000 claims description 5
- 238000009499 grossing Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 abstract description 17
- 239000010410 layer Substances 0.000 abstract description 16
- 239000011248 coating agent Substances 0.000 abstract description 12
- 238000000576 coating method Methods 0.000 abstract description 12
- 238000004043 dyeing Methods 0.000 abstract description 4
- 238000001035 drying Methods 0.000 abstract description 3
- 238000005498 polishing Methods 0.000 abstract description 3
- 239000011247 coating layer Substances 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Preparing Plates And Mask In Photomechanical Process (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、ガラス上に金属のパターンを有する基板の製
法、更に詳しくは基板上に平滑化層を設けた基板の製法
に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for manufacturing a substrate having a metal pattern on glass, and more particularly to a method for manufacturing a substrate having a smoothing layer provided on the substrate.
元来、カラーフィルター用クロム基板は、クロム部が光
を遮光することを目的として設けられているので、通常
のフォトマスク用基板に比べて、光学的濃度が高く、金
属膜部の膜厚も厚い。このようなカラーフィルター用ク
ロム基板に感材を塗布する際には、クロム膜が設けられ
ている部分は膜厚骨だけガラスと段差が生じているため
、塗布むらが発生していた。この塗布むらを少なくする
ために、感材の粘度やスピン塗布法における回転数など
の塗布条件を調整して塗布していた。Originally, chromium substrates for color filters were provided with the purpose of blocking light through the chromium portion, so compared to ordinary photomask substrates, the optical density was higher and the thickness of the metal film portion was also smaller. thick. When applying a sensitive material to such a chromium substrate for a color filter, uneven coating occurs because the portion where the chromium film is provided has a level difference from the glass by the thickness of the film. In order to reduce this uneven coating, coating conditions such as the viscosity of the photosensitive material and the number of rotations in the spin coating method have been adjusted during coating.
〔発明が解決しようとしている課題］
上記の従来の技術においても、塗布むらを一定程度減少
させることはできるが、その後、感材に染色工程を施す
ため、塗布むらが強調されてしまうという問題点がある
。[Problems to be Solved by the Invention] Although the above-mentioned conventional techniques can reduce coating unevenness to a certain extent, the problem is that coating unevenness is emphasized because the photosensitive material is then subjected to a dyeing process. There is.
また、染色工程における感材層の膨潤、そしてその後の
乾燥工程では感材層の収縮がおこるので、ガラスとクロ
ム部との界面における剥がれが起こりやすいという問題
点がある。この剥がれは、界面部における光の回り込み
等によるレンズ効果現象を引き起こすことがある。Furthermore, since the photosensitive material layer swells in the dyeing process and shrinks in the subsequent drying process, there is a problem in that peeling is likely to occur at the interface between the glass and the chrome portion. This peeling may cause a lens effect phenomenon due to the wraparound of light at the interface.
［課題を解決するための手段］
本発明は上記の問題点を解決するため、クロム基板表面
をガラスなどの特定物質にて被覆し、表面を平滑化して
基板を製造するものである。[Means for Solving the Problems] In order to solve the above problems, the present invention manufactures a substrate by coating the surface of a chromium substrate with a specific substance such as glass to smooth the surface.
以下、本発明について図面に基づいて説明する。Hereinafter, the present invention will be explained based on the drawings.
第２図（ａ）に示すように、従来はカラーフィルター用
のクロム基板は、クロム部２とガラス部の段差があるた
め、その上に直接、感材４を塗布すると第２図（ｂ）に
示すように段差に追従した塗布むらを生じた。As shown in Fig. 2(a), conventional chrome substrates for color filters have a step between the chrome part 2 and the glass part, so if the sensitive material 4 is applied directly on the chrome part 2, as shown in Fig. 2(b). As shown in Figure 2, uneven coating occurred that followed the level difference.
本発明ではこのような感材の塗布むらを防ぐために、第
１図（ａ）のように、クロム膜２の上に平滑層３を設け
て、第１図Φ）に示すように塗布むらを改善する。この
平滑層を形成する材料としては、カラーフィルター用に
使用することを考慮し、とくに４００〜７００ｎｍにお
ける透過率がよいこと、基板ガラスおよび感材層の屈折
率との間に大きな差のないこと、染色工程や乾燥工程で
の伸縮が少なく剥がれにくいこと、表面が平滑で感材を
塗布する際の濡れ性に支障がないこと、という条件が必
要である。In the present invention, in order to prevent such uneven coating of the sensitive material, a smooth layer 3 is provided on the chromium film 2 as shown in FIG. 1(a) to prevent uneven coating as shown in FIG. 1(Φ). Improve. The material for forming this smooth layer should have good transmittance, especially in the range of 400 to 700 nm, and should not have a large difference in refractive index between the substrate glass and the sensitive material layer, considering its use in color filters. The following conditions are required: the material should not expand or contract easily during the dyeing or drying process, and should not peel off easily, and should have a smooth surface that does not interfere with wettability when applying the photosensitive material.
これらの諸条件を満たすため、平滑層としてガラスが望
ましい。スパッタにより、クロム膜２が形成されたガラ
ス基板１の表面をガラス膜にて被覆する。その後、必要
に応じて研磨して表面を平滑化することにより、第１（
ａ）図に示すような平滑層３を得る。この上に感材４を
塗布すればむらのない塗布層を有する基板が得られる。In order to satisfy these conditions, glass is desirable as the smooth layer. The surface of the glass substrate 1 on which the chromium film 2 has been formed is covered with a glass film by sputtering. After that, the first (
a) Obtain a smooth layer 3 as shown in the figure. By coating the photosensitive material 4 on top of this, a substrate having an even coating layer can be obtained.
（発明の効果〕
本発明によれば平滑層としてガラスを用いることにより
、透過率、屈折率、伸縮性、剥がれ、平滑性、濡れ性な
どの問題が解決され、カラーフィルター用クロム基板上
に塗布むらなく感材層を設けることができる。(Effects of the Invention) According to the present invention, by using glass as a smooth layer, problems such as transmittance, refractive index, elasticity, peeling, smoothness, and wettability are solved, and it is coated on a chromium substrate for color filters. The photosensitive material layer can be provided evenly.
カラーフィルター用クロム基板をスパッタリング装置を
用いてＳｉｎ、をスパッタリングする。計ガス中、トレ
イ送り速度１０ｃｍ／ｍｉｎ、１スパッタ電圧２ｋｗで
スパッタリングを２サイクル行い、２５００人の膜厚を
得る。その基板を、シート研磨装置で研摩圧１ ｋｇ
／ ｃｒＡ、研磨時間１分間で５ｉＯｚスパッタ面を研
磨し、平滑化した基板を得た。A chromium substrate for a color filter is sputtered with Sin using a sputtering device. Two cycles of sputtering were performed at a tray feed rate of 10 cm/min and a sputtering voltage of 2 kW in a measuring gas to obtain a film thickness of 2500 mm. The substrate was polished using a sheet polishing machine at a polishing pressure of 1 kg.
/crA, the 5iOz sputtered surface was polished for 1 minute to obtain a smooth substrate.
第１図は本発明のカラーフィルター用クロム基板の平滑
化方法を示す説明図、第２図は従来のカラーフィルター
用クロム基板への感材層の形成を示す説明図である。
１・・・ガラス基板、２・・・クロム膜、３・・・平滑
層。
４・・・感材層
（ａ）
（ｂ）FIG. 1 is an explanatory diagram showing a method for smoothing a chromium substrate for a color filter according to the present invention, and FIG. 2 is an explanatory diagram showing the formation of a sensitive material layer on a conventional chromium substrate for a color filter. 1...Glass substrate, 2...Chromium film, 3...Smooth layer. 4...Sensitive material layer (a) (b)
Claims (3)
スの平滑化層を設けることを特徴とするガラス上に金属
のパターンを有する基板の製造方法。(1) A method for manufacturing a substrate having a metal pattern on glass, which comprises providing a smoothing layer of glass on the substrate having a metal pattern on glass.
覆し、その後、研磨して形成することを特徴とする請求
項１記載のガラス上に金属のパターンを有する基板の製
造方法。(2) The method for manufacturing a substrate having a metal pattern on glass according to claim 1, characterized in that the glass smoothing layer is coated with glass by sputtering and then polished.
ラーフィルター用クロム基板であることを特徴とする請
求項１又は２記載のガラス上に金属のパターンを有する
基板の製造方法。(3) The method for manufacturing a substrate having a metal pattern on glass according to claim 1 or 2, wherein the substrate having a metal pattern on glass is a chromium substrate for a color filter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63119377A JPH02967A (en) | 1988-05-18 | 1988-05-18 | Manufacture of substrate having pattern of metal on glass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63119377A JPH02967A (en) | 1988-05-18 | 1988-05-18 | Manufacture of substrate having pattern of metal on glass |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02967A true JPH02967A (en) | 1990-01-05 |
Family
ID=14760004
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63119377A Pending JPH02967A (en) | 1988-05-18 | 1988-05-18 | Manufacture of substrate having pattern of metal on glass |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02967A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4952087A (en) * | 1987-12-15 | 1990-08-28 | Citizen Watch Co., Ltd. | Printer for use with continuous form |
| CN105739243A (en) * | 2016-04-22 | 2016-07-06 | 长葛市汇达感光材料有限公司 | Fabrication method of light sensitive material plate |
-
1988
- 1988-05-18 JP JP63119377A patent/JPH02967A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4952087A (en) * | 1987-12-15 | 1990-08-28 | Citizen Watch Co., Ltd. | Printer for use with continuous form |
| CN105739243A (en) * | 2016-04-22 | 2016-07-06 | 长葛市汇达感光材料有限公司 | Fabrication method of light sensitive material plate |
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